BE826966A - ELECTRONIC OPTICAL APPARATUS FOR ION DIFFUSION SPECTROMETRY AND SECONDARY ION MASS SPECTROMETRY - Google Patents

ELECTRONIC OPTICAL APPARATUS FOR ION DIFFUSION SPECTROMETRY AND SECONDARY ION MASS SPECTROMETRY

Info

Publication number
BE826966A
BE826966A BE154569A BE154569A BE826966A BE 826966 A BE826966 A BE 826966A BE 154569 A BE154569 A BE 154569A BE 154569 A BE154569 A BE 154569A BE 826966 A BE826966 A BE 826966A
Authority
BE
Belgium
Prior art keywords
spectrometry
optical apparatus
electronic optical
mass spectrometry
ion
Prior art date
Application number
BE154569A
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE826966A publication Critical patent/BE826966A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
BE154569A 1974-03-25 1975-03-21 ELECTRONIC OPTICAL APPARATUS FOR ION DIFFUSION SPECTROMETRY AND SECONDARY ION MASS SPECTROMETRY BE826966A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742414221 DE2414221C3 (en) 1974-03-25 1974-03-25 Ion-optical device for examining the surface of a sample by ion bombardment and analyzing the ions emanating from the bombarded surface area

Publications (1)

Publication Number Publication Date
BE826966A true BE826966A (en) 1975-07-16

Family

ID=5911045

Family Applications (1)

Application Number Title Priority Date Filing Date
BE154569A BE826966A (en) 1974-03-25 1975-03-21 ELECTRONIC OPTICAL APPARATUS FOR ION DIFFUSION SPECTROMETRY AND SECONDARY ION MASS SPECTROMETRY

Country Status (8)

Country Link
JP (1) JPS5199094A (en)
BE (1) BE826966A (en)
DE (1) DE2414221C3 (en)
DK (1) DK144898C (en)
FR (1) FR2266166B3 (en)
GB (1) GB1445963A (en)
IT (1) IT1034386B (en)
NL (1) NL7503567A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
DE2556291C3 (en) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Scanning ion microscope
GB2098797B (en) * 1980-05-12 1985-01-16 Univ Trobe Angular resolved spectrometer
JPH083988B2 (en) * 1986-10-08 1996-01-17 株式会社日立製作所 Secondary ion mass spectrometry
JPH0589817A (en) * 1991-03-16 1993-04-09 Eiko Eng:Kk Complex analysis device

Also Published As

Publication number Publication date
GB1445963A (en) 1976-08-11
DE2414221A1 (en) 1975-10-09
NL7503567A (en) 1975-09-29
FR2266166B3 (en) 1977-12-02
DK122675A (en) 1975-09-26
JPS5199094A (en) 1976-09-01
IT1034386B (en) 1979-09-10
DK144898B (en) 1982-06-28
DK144898C (en) 1982-11-22
FR2266166A1 (en) 1975-10-24
DE2414221B2 (en) 1978-04-20
DE2414221C3 (en) 1979-01-18

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