GB1454641A - Device for analysing a surface layer - Google Patents

Device for analysing a surface layer

Info

Publication number
GB1454641A
GB1454641A GB123174A GB123174A GB1454641A GB 1454641 A GB1454641 A GB 1454641A GB 123174 A GB123174 A GB 123174A GB 123174 A GB123174 A GB 123174A GB 1454641 A GB1454641 A GB 1454641A
Authority
GB
United Kingdom
Prior art keywords
analyser
analysing
surface layer
ion beam
coaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB123174A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1454641A publication Critical patent/GB1454641A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers

Abstract

1454641 Ion beam analysers PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 10 Jan 1974 [2 Feb 1973] 01231/74 Heading H1D A device for analysing a surface layer of an object 8 comprises means for providing a primary monoenergetic ion beam 1, deflection electrodes 3, 4 for directing the beam along the axis of a coaxial cylinder electrostatic analyser 6, 7 to strike the object 8, the resultant scattered ions being passed through an annular aperture 9 for energy measurement in the coaxial analyser. The end plates 24, 25 of the analyser can be subdivided into annular elements held at particular potentials to provide field correction or they may be made of resistive material to provide a radially varying potential.
GB123174A 1973-02-02 1974-01-10 Device for analysing a surface layer Expired GB1454641A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7301496A NL7301496A (en) 1973-02-02 1973-02-02

Publications (1)

Publication Number Publication Date
GB1454641A true GB1454641A (en) 1976-11-03

Family

ID=19818135

Family Applications (1)

Application Number Title Priority Date Filing Date
GB123174A Expired GB1454641A (en) 1973-02-02 1974-01-10 Device for analysing a surface layer

Country Status (5)

Country Link
CA (1) CA995825A (en)
DE (1) DE2402728C3 (en)
FR (1) FR2216578B1 (en)
GB (1) GB1454641A (en)
NL (1) NL7301496A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0013003A1 (en) * 1978-12-27 1980-07-09 Forschungszentrum Jülich Gmbh Electron beam investigation process and electron impact spectrometer therefor

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4107526A (en) * 1976-03-22 1978-08-15 Minnesota Mining And Manufacturing Company Ion scattering spectrometer with modified bias
DE2922128A1 (en) * 1979-05-31 1980-12-11 Strahlen Umweltforsch Gmbh ION SOURCE FOR A MASS ANALYZER
JPS6037644A (en) * 1983-08-10 1985-02-27 Anelva Corp Surface analyzer device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0013003A1 (en) * 1978-12-27 1980-07-09 Forschungszentrum Jülich Gmbh Electron beam investigation process and electron impact spectrometer therefor

Also Published As

Publication number Publication date
DE2402728A1 (en) 1974-08-08
CA995825A (en) 1976-08-24
FR2216578B1 (en) 1983-08-05
DE2402728C3 (en) 1981-01-15
DE2402728B2 (en) 1980-04-30
NL7301496A (en) 1974-08-06
FR2216578A1 (en) 1974-08-30

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee