GB1338209A - Field termination plate and charged particle analyzer using the same - Google Patents

Field termination plate and charged particle analyzer using the same

Info

Publication number
GB1338209A
GB1338209A GB3595172A GB3595172A GB1338209A GB 1338209 A GB1338209 A GB 1338209A GB 3595172 A GB3595172 A GB 3595172A GB 3595172 A GB3595172 A GB 3595172A GB 1338209 A GB1338209 A GB 1338209A
Authority
GB
United Kingdom
Prior art keywords
same
aug
charged particle
high resistance
spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3595172A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physical Electronics Inc
Original Assignee
Physical Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physical Electronics Inc filed Critical Physical Electronics Inc
Publication of GB1338209A publication Critical patent/GB1338209A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Abstract

1338209 Particle spectrometers PHYSICAL ELECTRONICS INDUSTRIES Inc 1 Aug 1972 [27 Aug 1971] 35951/72 Heading H1D A particle spectrometer of the type using an eloctric field between a pair of coaxial cylinders 33, 34 to analyse particles emitted from a specimen 20 which pass through a window 15 into the electric field and re-enter cylinder 33 through a similar window (16), Fig. 3 (not shown), is provided with end plates comprising a generally annular disc member 32 of e.g. alumina provided with a high resistance coating 31 in electrical contact with cylinders 33, 34 and a plurality of concentric annular conductors 26<SP>1</SP> to 30<SP>1</SP>. The end plate can be frusto-conical or flat, Fig. 2 (not shown). The high resistance material can be a cermet consisting of sputtered alumina and metal and the annular conductors can be gold-chromium. The spectrometer can be used in a scanning mode.
GB3595172A 1971-08-27 1972-08-01 Field termination plate and charged particle analyzer using the same Expired GB1338209A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17563371A 1971-08-27 1971-08-27

Publications (1)

Publication Number Publication Date
GB1338209A true GB1338209A (en) 1973-11-21

Family

ID=22641020

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3595172A Expired GB1338209A (en) 1971-08-27 1972-08-01 Field termination plate and charged particle analyzer using the same

Country Status (4)

Country Link
US (1) US3735128A (en)
JP (1) JPS5338947B2 (en)
FR (1) FR2150886B1 (en)
GB (1) GB1338209A (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7306378A (en) * 1973-05-08 1974-11-12
US3818228A (en) * 1973-08-17 1974-06-18 Physical Electronics Ind Inc Field termination plates for charged particle analyzers
US4107526A (en) * 1976-03-22 1978-08-15 Minnesota Mining And Manufacturing Company Ion scattering spectrometer with modified bias
US4048498A (en) * 1976-09-01 1977-09-13 Physical Electronics Industries, Inc. Scanning auger microprobe with variable axial aperture
JPS597736Y2 (en) * 1977-02-25 1984-03-09 日本電子株式会社 electron spectrometer
US4239966A (en) * 1979-08-29 1980-12-16 Wang Chia G Detection of atoms using monochromatic X-rays
JPS574168U (en) * 1980-06-06 1982-01-09
US4367406A (en) * 1981-01-13 1983-01-04 Trustees Of Boston University Cylindrical mirror electrostatic energy analyzer free of third-order angular aberrations
US5097125A (en) * 1986-06-04 1992-03-17 Arch Development Corporation Photo ion spectrometer
GB8617384D0 (en) * 1986-07-16 1986-08-20 Spectros Ltd Charged particle optical systems
GB9220097D0 (en) * 1992-09-23 1992-11-04 Univ York Electron spectrometers
US6184523B1 (en) * 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
WO2000077504A1 (en) * 1999-06-16 2000-12-21 Shimadzu Research Laboratory (Europe) Ltd. Electrically-charged particle energy analysers
DE10117025A1 (en) * 2001-04-05 2002-10-10 Zeiss Carl Particle optical device, lighting device and projection system and method using the same
WO2007053843A2 (en) * 2005-11-01 2007-05-10 The Regents Of The University Of Colorado Multichannel energy analyzer for charged particles

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2506659A (en) * 1941-04-11 1950-05-09 Csf Electron discharge tube
BE492027A (en) * 1949-03-16
US3407323A (en) * 1966-05-23 1968-10-22 High Voltage Engineering Corp Electrode structure for a charged particle accelerating apparatus, arrayed and biased to produce an electric field between and parallel to the electrodes
US3596091A (en) * 1969-05-19 1971-07-27 Varian Associates Induced electron emission spectrometer having a unipotential sample chamber

Also Published As

Publication number Publication date
FR2150886A1 (en) 1973-04-13
DE2241613A1 (en) 1973-03-08
DE2241613B2 (en) 1977-03-31
FR2150886B1 (en) 1978-02-10
JPS4832588A (en) 1973-04-28
JPS5338947B2 (en) 1978-10-18
US3735128A (en) 1973-05-22

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PE20 Patent expired after termination of 20 years