JPS5616853A - Surface analysis unit - Google Patents

Surface analysis unit

Info

Publication number
JPS5616853A
JPS5616853A JP9300979A JP9300979A JPS5616853A JP S5616853 A JPS5616853 A JP S5616853A JP 9300979 A JP9300979 A JP 9300979A JP 9300979 A JP9300979 A JP 9300979A JP S5616853 A JPS5616853 A JP S5616853A
Authority
JP
Japan
Prior art keywords
sample
secondary ions
primary
generated
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9300979A
Other languages
Japanese (ja)
Inventor
Kenji Kusao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9300979A priority Critical patent/JPS5616853A/en
Publication of JPS5616853A publication Critical patent/JPS5616853A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To make it possible to analyze a thin film with a high sensitivity, by irradiating a primary ion beam to a sample and by energy-analyzing back secondary ions emitted from the reverse face of the irradiation point and by performing mass analysis. CONSTITUTION:Primary ions from PIG ion source 1 scan sample surface 5 due to leading-out electrode 2, Einzellens 3 and deflecting electrode 4, and the primary ion quantity passing through sample 5 is monitored by Faraday cage 6. Secondary ions generated from the back face of sample 5 are sent to mask filter 8 by spherical energy analyzer 7, and mass separation of generated secondary ions is performed.
JP9300979A 1979-07-20 1979-07-20 Surface analysis unit Pending JPS5616853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9300979A JPS5616853A (en) 1979-07-20 1979-07-20 Surface analysis unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9300979A JPS5616853A (en) 1979-07-20 1979-07-20 Surface analysis unit

Publications (1)

Publication Number Publication Date
JPS5616853A true JPS5616853A (en) 1981-02-18

Family

ID=14070398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9300979A Pending JPS5616853A (en) 1979-07-20 1979-07-20 Surface analysis unit

Country Status (1)

Country Link
JP (1) JPS5616853A (en)

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