JPS56167249A - Ion analizer - Google Patents

Ion analizer

Info

Publication number
JPS56167249A
JPS56167249A JP7169280A JP7169280A JPS56167249A JP S56167249 A JPS56167249 A JP S56167249A JP 7169280 A JP7169280 A JP 7169280A JP 7169280 A JP7169280 A JP 7169280A JP S56167249 A JPS56167249 A JP S56167249A
Authority
JP
Japan
Prior art keywords
ion
ions
mass filter
projected
analyzed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7169280A
Other languages
Japanese (ja)
Other versions
JPS6329784B2 (en
Inventor
Masahiko Okunuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP7169280A priority Critical patent/JPS56167249A/en
Publication of JPS56167249A publication Critical patent/JPS56167249A/en
Publication of JPS6329784B2 publication Critical patent/JPS6329784B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To quickly analize ions in a very short time by assembling the captional ion analyzer with an energy analyzer which separates and expands the generated ions, a plural number of tetrode mass spectroscopes, and a detector which detects the ions passing through these analyzers separately. CONSTITUTION:Energy beam 2, such as ion beam, etc. is irradiated on a sample 1. An analyzed ion 3 generated from the irradiated point is projected on an analytical electric field E provided above the sample 1 and separated depending upon the energy possessed by the ion. This electric field E is created by electrodes 4 and 4'. Each analyzed ion is projected on a mass filter 5 through a slit plate 6. The ion passing through the mass filter 5 is projected on a secondary electron multiplier detector 8 through an output slit plate 7 and detected by every Q mass filter independently. The detection signals obtained by every Q mass filter are sent to a computer 9 and processed. Thus ions can be analyzed quickly in a short time.
JP7169280A 1980-05-29 1980-05-29 Ion analizer Granted JPS56167249A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7169280A JPS56167249A (en) 1980-05-29 1980-05-29 Ion analizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7169280A JPS56167249A (en) 1980-05-29 1980-05-29 Ion analizer

Publications (2)

Publication Number Publication Date
JPS56167249A true JPS56167249A (en) 1981-12-22
JPS6329784B2 JPS6329784B2 (en) 1988-06-15

Family

ID=13467845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7169280A Granted JPS56167249A (en) 1980-05-29 1980-05-29 Ion analizer

Country Status (1)

Country Link
JP (1) JPS56167249A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5511334A (en) * 1978-07-11 1980-01-26 Fujitsu Ltd Method of marking printed board

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5511334A (en) * 1978-07-11 1980-01-26 Fujitsu Ltd Method of marking printed board

Also Published As

Publication number Publication date
JPS6329784B2 (en) 1988-06-15

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