GB1240074A - Improvements in or relating to the crucible-free zone melting of a crystalline rod - Google Patents

Improvements in or relating to the crucible-free zone melting of a crystalline rod

Info

Publication number
GB1240074A
GB1240074A GB49860/69A GB4986069A GB1240074A GB 1240074 A GB1240074 A GB 1240074A GB 49860/69 A GB49860/69 A GB 49860/69A GB 4986069 A GB4986069 A GB 4986069A GB 1240074 A GB1240074 A GB 1240074A
Authority
GB
United Kingdom
Prior art keywords
coil
zone melting
crucible
oct
free zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB49860/69A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1240074A publication Critical patent/GB1240074A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • General Induction Heating (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Furnace Details (AREA)

Abstract

1,240,074. Induction heating coils. SIEMENS A.G. 10 Oct., 1969 [11 Oct., 1968], No. 49860/69. Heading H5H. A heating device for use in the crucible-free zone melting of a crystalline rod (not shown), in particular a semi-conductor rod, comprises a flat, annular induction heating coil 1, of one or more turns, surrounded by a longitudinallysplit, tubular body 3 of electrically conductive material, extending coaxially with and on either side of the coil 1, to smooth out the temperature gradients on both sides of the melt zone. Viewing slots 5, 6 are additionally provided in the body 3. Coil 1 and hollow body 3 are fixed together, with their internal spaces in communication, to provide a path for cooling medium through the device. Body 3 may comprise truncated cones widening out from the coil in both axial directions. Fig. 4 (not shown), or may be cylindrical, or may be part cylindrical, part truncated conical. The zone melting takes place in vacuo or in a protective gas atmosphere. Body 3 has a high reflectivity.
GB49860/69A 1968-10-11 1969-10-10 Improvements in or relating to the crucible-free zone melting of a crystalline rod Expired GB1240074A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681802524 DE1802524B1 (en) 1968-10-11 1968-10-11 Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod

Publications (1)

Publication Number Publication Date
GB1240074A true GB1240074A (en) 1971-07-21

Family

ID=5710285

Family Applications (1)

Application Number Title Priority Date Filing Date
GB49860/69A Expired GB1240074A (en) 1968-10-11 1969-10-10 Improvements in or relating to the crucible-free zone melting of a crystalline rod

Country Status (9)

Country Link
US (1) US3601569A (en)
JP (1) JPS4817561B1 (en)
AT (1) AT299129B (en)
CH (1) CH520524A (en)
DE (1) DE1802524B1 (en)
FR (1) FR2020390A1 (en)
GB (1) GB1240074A (en)
NL (1) NL6913795A (en)
SE (1) SE360277B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2478275A (en) * 2010-02-24 2011-09-07 Tubefuse Applic V O F Induction heating apparatus and method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2331004C3 (en) * 1973-06-18 1982-02-04 Siemens AG, 1000 Berlin und 8000 München Induction heating coil for crucible-free zone melting
FR2599482B1 (en) * 1986-06-03 1988-07-29 Commissariat Energie Atomique HIGH FREQUENCY INDUCTION FUSION OVEN
DE3625669A1 (en) * 1986-07-29 1988-02-04 Siemens Ag INDUCTION HEATER FOR POT-FREE ZONE MELTING
EP0292920B1 (en) * 1987-05-25 1992-07-29 Shin-Etsu Handotai Company Limited Rf induction heating apparatus
DE3805118A1 (en) * 1988-02-18 1989-08-24 Wacker Chemitronic METHOD FOR PULL-FREE ZONE DRAWING OF SEMICONDUCTOR RODS AND INDUCTION HEATING COIL FOR ITS IMPLEMENTATION
EP1968355B1 (en) * 2007-03-08 2013-02-27 HÜTTINGER Elektronik GmbH + Co. KG Induction coil and device for inductive heating of workpieces

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2408229A (en) * 1943-04-30 1946-09-24 Rca Corp Electrical heating apparatus
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US2814707A (en) * 1954-11-12 1957-11-26 Rca Corp Induction heating device
DE1152269B (en) * 1959-04-28 1963-08-01 Siemens Ag Device for crucible-free zone melting of a semiconductor rod in a vacuum chamber
NL302045A (en) * 1963-01-08
DE1188043B (en) * 1962-12-24 1965-03-04 Siemens Ag Device for crucible-free zone melting of semiconductor material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2478275A (en) * 2010-02-24 2011-09-07 Tubefuse Applic V O F Induction heating apparatus and method

Also Published As

Publication number Publication date
FR2020390A1 (en) 1970-07-10
NL6913795A (en) 1970-04-14
DE1802524B1 (en) 1970-06-04
US3601569A (en) 1971-08-24
AT299129B (en) 1972-06-12
SE360277B (en) 1973-09-24
CH520524A (en) 1972-03-31
JPS4817561B1 (en) 1973-05-30

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