AT299129B - Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod - Google Patents

Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod

Info

Publication number
AT299129B
AT299129B AT951569A AT951569A AT299129B AT 299129 B AT299129 B AT 299129B AT 951569 A AT951569 A AT 951569A AT 951569 A AT951569 A AT 951569A AT 299129 B AT299129 B AT 299129B
Authority
AT
Austria
Prior art keywords
rod
crucible
free zone
zone melting
crystalline
Prior art date
Application number
AT951569A
Other languages
German (de)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of AT299129B publication Critical patent/AT299129B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • General Induction Heating (AREA)
  • Furnace Details (AREA)
AT951569A 1968-10-11 1969-10-09 Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod AT299129B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681802524 DE1802524B1 (en) 1968-10-11 1968-10-11 Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod

Publications (1)

Publication Number Publication Date
AT299129B true AT299129B (en) 1972-06-12

Family

ID=5710285

Family Applications (1)

Application Number Title Priority Date Filing Date
AT951569A AT299129B (en) 1968-10-11 1969-10-09 Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod

Country Status (9)

Country Link
US (1) US3601569A (en)
JP (1) JPS4817561B1 (en)
AT (1) AT299129B (en)
CH (1) CH520524A (en)
DE (1) DE1802524B1 (en)
FR (1) FR2020390A1 (en)
GB (1) GB1240074A (en)
NL (1) NL6913795A (en)
SE (1) SE360277B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2331004C3 (en) * 1973-06-18 1982-02-04 Siemens AG, 1000 Berlin und 8000 München Induction heating coil for crucible-free zone melting
FR2599482B1 (en) * 1986-06-03 1988-07-29 Commissariat Energie Atomique HIGH FREQUENCY INDUCTION FUSION OVEN
DE3625669A1 (en) * 1986-07-29 1988-02-04 Siemens Ag INDUCTION HEATER FOR POT-FREE ZONE MELTING
DE3873173T2 (en) * 1987-05-25 1993-03-04 Shinetsu Handotai Kk DEVICE FOR HF INDUCTION HEATING.
DE3805118A1 (en) * 1988-02-18 1989-08-24 Wacker Chemitronic METHOD FOR PULL-FREE ZONE DRAWING OF SEMICONDUCTOR RODS AND INDUCTION HEATING COIL FOR ITS IMPLEMENTATION
EP1968355B1 (en) * 2007-03-08 2013-02-27 HÜTTINGER Elektronik GmbH + Co. KG Induction coil and device for inductive heating of workpieces
GB2478275A (en) * 2010-02-24 2011-09-07 Tubefuse Applic V O F Induction heating apparatus and method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2408229A (en) * 1943-04-30 1946-09-24 Rca Corp Electrical heating apparatus
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US2814707A (en) * 1954-11-12 1957-11-26 Rca Corp Induction heating device
DE1152269B (en) * 1959-04-28 1963-08-01 Siemens Ag Device for crucible-free zone melting of a semiconductor rod in a vacuum chamber
NL126241C (en) * 1963-01-08
DE1188043B (en) * 1962-12-24 1965-03-04 Siemens Ag Device for crucible-free zone melting of semiconductor material

Also Published As

Publication number Publication date
SE360277B (en) 1973-09-24
GB1240074A (en) 1971-07-21
CH520524A (en) 1972-03-31
JPS4817561B1 (en) 1973-05-30
US3601569A (en) 1971-08-24
FR2020390A1 (en) 1970-07-10
NL6913795A (en) 1970-04-14
DE1802524B1 (en) 1970-06-04

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee