US3601569A - Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod - Google Patents

Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod

Info

Publication number
US3601569A
US3601569A US864360A US3601569DA US3601569A US 3601569 A US3601569 A US 3601569A US 864360 A US864360 A US 864360A US 3601569D A US3601569D A US 3601569DA US 3601569 A US3601569 A US 3601569A
Authority
US
United States
Prior art keywords
flat
hollow member
coil
wound
wound coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US864360A
Inventor
Wolfgang Keller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of US3601569A publication Critical patent/US3601569A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Abstract

Device for floating-zone melting a crystalline rod includes a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to the flat-wound coil in close coupling therewith, the hollow member having an axial length many times greater than that of the flat-wound coil.

Claims (9)

1. In a device for floating-zone melting a crystalline rod, a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to said flat-wound coil, said flat-wound coil having an outer edge directly connected to said hollow member, said hollow member having an axial length considerably greater than that of said flat-wound coil.
2. Device according to claim 1 wherein said flat-wound coil is located substantially at the axial center of said hollow member.
3. Device according to claim 1 wherein said hollow member has a substantially cylindrical shape.
4. Device according to claim 1 wherein said hollow member is frustoconical and flares outwardly from said flat-wound coil in the axial direction thereof.
5. In a device for floating-zone melting a crystalline rod, a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to said flat-wound coil in close coupling therewith, said hollow member having an axial length considerably greater than that of said flat-wound coil and comprising a pair of frustoconical portions respectively flaring outwardly from opposite sides of said flat-wound coil.
6. Device according to claim 1 wherein said heating coil is formed with a single flat winding having a width in the radial direction of said coil that is greater than the thicknesses of said winding at the inner and outer peripheries thereof.
7. In a device for floating-zone melting a crystalline rod, a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to said flat-wound coil in close coupling therewith, said hollow member having an axial length considerably greater than that of said flat-wound coil, said heating coil being formed with a single flat winding having a width in the radial direction of said coil that is greater than the thicknesses of said winding at the inner and outer peripheries thereof, the thickness of said winding at said outer periphery thereof being greater than at said inner periphery thereof.
8. In a device for floating-zone melting a crystalline rod, a flat-wound induction heating coil adapted to encircle a crystalline rod so as to maintain a molten zone therein, and a slotted hollow member of electrically conductive material disposed coaxially to said flat-wound coil in close coupling therewith, said hollow member having an axial length considerably greater than that of said flat-wound coil, said flat-wound coil and said hollow member forming an integral double-walled structure having a hollow space between the respective double walls thereof, and including circulating means communicating with said hollow space for circulating cooling medium therethrough.
9. Device according to claim 1 wherein the flat-wound coil and the hollow member are formed of an electrically conductive metal selected from the group consisting of copper and silver.
US864360A 1968-10-11 1969-10-07 Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod Expired - Lifetime US3601569A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681802524 DE1802524B1 (en) 1968-10-11 1968-10-11 Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod

Publications (1)

Publication Number Publication Date
US3601569A true US3601569A (en) 1971-08-24

Family

ID=5710285

Family Applications (1)

Application Number Title Priority Date Filing Date
US864360A Expired - Lifetime US3601569A (en) 1968-10-11 1969-10-07 Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod

Country Status (9)

Country Link
US (1) US3601569A (en)
JP (1) JPS4817561B1 (en)
AT (1) AT299129B (en)
CH (1) CH520524A (en)
DE (1) DE1802524B1 (en)
FR (1) FR2020390A1 (en)
GB (1) GB1240074A (en)
NL (1) NL6913795A (en)
SE (1) SE360277B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898413A (en) * 1973-06-18 1975-08-05 Siemens Ag Induction heat coil arrangement
US4761528A (en) * 1986-06-03 1988-08-02 Commissariat A L'energie Atomique High frequency induction melting furnace
US4851628A (en) * 1988-02-18 1989-07-25 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Method for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil therefor
US4942279A (en) * 1987-05-25 1990-07-17 Shin-Etsu Handotai Co., Ltd. RF induction heating apparatus for floating-zone melting
EP1968355A1 (en) * 2007-03-08 2008-09-10 HÜTTINGER Elektronik GmbH + Co. KG Induction coil and device for inductive heating of workpieces

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3625669A1 (en) * 1986-07-29 1988-02-04 Siemens Ag INDUCTION HEATER FOR POT-FREE ZONE MELTING
GB2478275A (en) * 2010-02-24 2011-09-07 Tubefuse Applic V O F Induction heating apparatus and method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2408229A (en) * 1943-04-30 1946-09-24 Rca Corp Electrical heating apparatus
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US2814707A (en) * 1954-11-12 1957-11-26 Rca Corp Induction heating device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1152269B (en) * 1959-04-28 1963-08-01 Siemens Ag Device for crucible-free zone melting of a semiconductor rod in a vacuum chamber
NL302045A (en) * 1963-01-08
DE1188043B (en) * 1962-12-24 1965-03-04 Siemens Ag Device for crucible-free zone melting of semiconductor material

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2408229A (en) * 1943-04-30 1946-09-24 Rca Corp Electrical heating apparatus
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US2814707A (en) * 1954-11-12 1957-11-26 Rca Corp Induction heating device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898413A (en) * 1973-06-18 1975-08-05 Siemens Ag Induction heat coil arrangement
US4761528A (en) * 1986-06-03 1988-08-02 Commissariat A L'energie Atomique High frequency induction melting furnace
US4942279A (en) * 1987-05-25 1990-07-17 Shin-Etsu Handotai Co., Ltd. RF induction heating apparatus for floating-zone melting
US4851628A (en) * 1988-02-18 1989-07-25 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Method for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil therefor
EP1968355A1 (en) * 2007-03-08 2008-09-10 HÜTTINGER Elektronik GmbH + Co. KG Induction coil and device for inductive heating of workpieces

Also Published As

Publication number Publication date
FR2020390A1 (en) 1970-07-10
GB1240074A (en) 1971-07-21
AT299129B (en) 1972-06-12
DE1802524B1 (en) 1970-06-04
NL6913795A (en) 1970-04-14
SE360277B (en) 1973-09-24
JPS4817561B1 (en) 1973-05-30
CH520524A (en) 1972-03-31

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