GB1238679A - - Google Patents
Info
- Publication number
- GB1238679A GB1238679A GB1238679DA GB1238679A GB 1238679 A GB1238679 A GB 1238679A GB 1238679D A GB1238679D A GB 1238679DA GB 1238679 A GB1238679 A GB 1238679A
- Authority
- GB
- United Kingdom
- Prior art keywords
- photoresist
- silica
- deposited
- semi
- overlying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
- H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6326—Deposition processes
- H10P14/6342—Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/66—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials
- H10P14/668—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials
- H10P14/6681—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials the precursor containing a compound comprising Si
- H10P14/6684—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials the precursor containing a compound comprising Si the compound comprising silicon and oxygen
- H10P14/6686—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/68—Organic materials, e.g. photoresists
- H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/69—Inorganic materials
- H10P14/692—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
- H10P14/6921—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon
- H10P14/6922—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
- H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/40—Fillings or auxiliary members in containers, e.g. centering rings
- H10W76/42—Fillings
- H10W76/48—Fillings including materials for absorbing or reacting with moisture or other undesired substances
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31663—As siloxane, silicone or silane
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31786—Of polyester [e.g., alkyd, etc.]
Landscapes
- Formation Of Insulating Films (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES0103446 | 1966-04-27 | ||
| FR155971 | 1968-06-21 | ||
| GB5868468 | 1968-12-10 | ||
| FR180789 | 1968-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1238679A true GB1238679A (enExample) | 1971-07-07 |
Family
ID=27437588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1238679D Expired GB1238679A (enExample) | 1966-04-27 | 1968-12-10 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3547691A (enExample) |
| DE (1) | DE1564580A1 (enExample) |
| FR (2) | FR1571704A (enExample) |
| GB (1) | GB1238679A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2155849C3 (de) * | 1971-11-10 | 1979-07-26 | Semikron Gesellschaft Fuer Gleichrichterbau Und Elektronik Mbh, 8500 Nuernberg | Verfahren zur Herstellung eines stabilisierenden und/oder isolierenden Überzuges auf Halbleiteroberflächen |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2795680A (en) * | 1952-05-16 | 1957-06-11 | Sprague Electric Co | Printed resistors and inks |
| US2798064A (en) * | 1952-09-12 | 1957-07-02 | Ciba Ltd | Disazo-dyestuffs |
| US2798189A (en) * | 1953-04-16 | 1957-07-02 | Sylvania Electric Prod | Stabilized semiconductor devices |
| US3052540A (en) * | 1954-06-02 | 1962-09-04 | Rca Corp | Dye sensitization of electrophotographic materials |
| US2855378A (en) * | 1954-11-08 | 1958-10-07 | Dow Corning | A methylphenylsiloxane composition containing an oxide of more than divalent lead |
| NL259748A (enExample) * | 1960-04-30 | |||
| US3251786A (en) * | 1961-12-13 | 1966-05-17 | Dow Chemical Co | Corrosion resistant epoxy resin aggregate compositions and porous article made therefrom |
| NL291914A (enExample) * | 1962-04-25 | |||
| DE1221382B (de) * | 1962-12-05 | 1966-07-21 | Hoechst Ag | Verfahren zur Herstellung eines wasserunloeslichen Monoazofarbstoffes |
| US3318714A (en) * | 1965-10-23 | 1967-05-09 | Eastman Kodak Co | Pigment dispersions |
-
1966
- 1966-04-27 DE DE19661564580 patent/DE1564580A1/de not_active Ceased
-
1967
- 1967-07-11 US US3547691D patent/US3547691A/en not_active Expired - Lifetime
-
1968
- 1968-06-21 FR FR1571704D patent/FR1571704A/fr not_active Expired
- 1968-12-10 GB GB1238679D patent/GB1238679A/en not_active Expired
- 1968-12-26 FR FR1595499D patent/FR1595499A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR1595499A (enExample) | 1970-06-08 |
| FR1571704A (enExample) | 1969-06-20 |
| DE1564580A1 (de) | 1969-07-31 |
| US3547691A (en) | 1970-12-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5656636A (en) | Processing method of fine pattern | |
| GB967002A (en) | Improvements in or relating to semiconductor devices | |
| JPS6450425A (en) | Formation of fine pattern | |
| GB1238679A (enExample) | ||
| GB1238376A (enExample) | ||
| JPS5633827A (en) | Photo etching method including surface treatment of substrate | |
| GB1051451A (enExample) | ||
| GB1165016A (en) | Processing Semiconductor Bodies to Form Surface Protuberances Thereon. | |
| JPS556844A (en) | Method of formating wiring pattern | |
| GB1163463A (en) | A Process for the Production of Metal Coating Connections in a Semiconductor System | |
| JPS577972A (en) | Insulated gate type thin film transistor | |
| JPS57155539A (en) | Mask | |
| JPS6446932A (en) | Manufacture of semiconductor device | |
| JPS5666038A (en) | Formation of micro-pattern | |
| JPS5232671A (en) | Manufacturing process of semiconductor device | |
| JPS56146137A (en) | Formation of mask | |
| JPS5713740A (en) | Forming method for conductor pattern | |
| JPS57104224A (en) | Forming method of insulating thin film | |
| GB1129707A (en) | The deposition of tungsten on semi-conductor material | |
| JPS57124443A (en) | Forming method for electrode layer | |
| JPS57103317A (en) | Method for patterning | |
| JPS5679446A (en) | Production of semiconductor device | |
| JPS52100872A (en) | Fabrication of mask for x-ray exposure | |
| GB1154212A (en) | The Production of an Image on a Substrate | |
| SE340027B (enExample) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |