FR2844099B1 - Dispositif semiconducteur de puissance quasi-vertical sur substrat composite - Google Patents

Dispositif semiconducteur de puissance quasi-vertical sur substrat composite

Info

Publication number
FR2844099B1
FR2844099B1 FR0210883A FR0210883A FR2844099B1 FR 2844099 B1 FR2844099 B1 FR 2844099B1 FR 0210883 A FR0210883 A FR 0210883A FR 0210883 A FR0210883 A FR 0210883A FR 2844099 B1 FR2844099 B1 FR 2844099B1
Authority
FR
France
Prior art keywords
quasi
semiconductor device
composite substrate
vertical power
vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0210883A
Other languages
English (en)
Other versions
FR2844099A1 (fr
Inventor
Francois Templier
Cioccio Lea Di
Thierry Billon
Fabrice Letertre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0210883A priority Critical patent/FR2844099B1/fr
Priority to PCT/FR2003/050045 priority patent/WO2004027878A2/fr
Priority to JP2004537241A priority patent/JP2005537679A/ja
Priority to EP03780259A priority patent/EP1535346A2/fr
Priority to US10/526,641 priority patent/US20050258483A1/en
Priority to TW092124197A priority patent/TW200410312A/zh
Publication of FR2844099A1 publication Critical patent/FR2844099A1/fr
Application granted granted Critical
Publication of FR2844099B1 publication Critical patent/FR2844099B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/861—Diodes
    • H01L29/872—Schottky diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/861—Diodes
    • H01L29/868—PIN diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • H01L29/1608—Silicon carbide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/2003—Nitride compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Electrodes Of Semiconductors (AREA)
FR0210883A 2002-09-03 2002-09-03 Dispositif semiconducteur de puissance quasi-vertical sur substrat composite Expired - Fee Related FR2844099B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0210883A FR2844099B1 (fr) 2002-09-03 2002-09-03 Dispositif semiconducteur de puissance quasi-vertical sur substrat composite
PCT/FR2003/050045 WO2004027878A2 (fr) 2002-09-03 2003-09-01 Dispositif semiconducteur de puissance quasi-vertical sur substrat composite
JP2004537241A JP2005537679A (ja) 2002-09-03 2003-09-01 複合基板上の準縦型パワー半導体デバイス
EP03780259A EP1535346A2 (fr) 2002-09-03 2003-09-01 Dispositif semiconducteur de puissance quasi-vertical sur substrat composite
US10/526,641 US20050258483A1 (en) 2002-09-03 2003-09-01 Quasi-vertical power semiconductor device on a composite substrate
TW092124197A TW200410312A (en) 2002-09-03 2003-09-02 Quasi-vertical power semiconducting device on composite substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0210883A FR2844099B1 (fr) 2002-09-03 2002-09-03 Dispositif semiconducteur de puissance quasi-vertical sur substrat composite

Publications (2)

Publication Number Publication Date
FR2844099A1 FR2844099A1 (fr) 2004-03-05
FR2844099B1 true FR2844099B1 (fr) 2005-09-02

Family

ID=31503070

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0210883A Expired - Fee Related FR2844099B1 (fr) 2002-09-03 2002-09-03 Dispositif semiconducteur de puissance quasi-vertical sur substrat composite

Country Status (6)

Country Link
US (1) US20050258483A1 (fr)
EP (1) EP1535346A2 (fr)
JP (1) JP2005537679A (fr)
FR (1) FR2844099B1 (fr)
TW (1) TW200410312A (fr)
WO (1) WO2004027878A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8916929B2 (en) 2004-06-10 2014-12-23 Power Integrations, Inc. MOSFET having a JFET embedded as a body diode
US8928037B2 (en) 2013-02-28 2015-01-06 Power Integrations, Inc. Heterostructure power transistor with AlSiN passivation layer
US8940620B2 (en) 2011-12-15 2015-01-27 Power Integrations, Inc. Composite wafer for fabrication of semiconductor devices

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7436039B2 (en) 2005-01-06 2008-10-14 Velox Semiconductor Corporation Gallium nitride semiconductor device
US8026568B2 (en) 2005-11-15 2011-09-27 Velox Semiconductor Corporation Second Schottky contact metal layer to improve GaN Schottky diode performance
EP1852895A1 (fr) * 2006-05-05 2007-11-07 Kinik Company Substrat à diamant et procédé de sa fabrication
US8138583B2 (en) * 2007-02-16 2012-03-20 Cree, Inc. Diode having reduced on-resistance and associated method of manufacture
US7939853B2 (en) 2007-03-20 2011-05-10 Power Integrations, Inc. Termination and contact structures for a high voltage GaN-based heterojunction transistor
JP2011077351A (ja) 2009-09-30 2011-04-14 Sumitomo Electric Ind Ltd 発光素子
FR2977069B1 (fr) 2011-06-23 2014-02-07 Soitec Silicon On Insulator Procede de fabrication d'une structure semi-conductrice mettant en oeuvre un collage temporaire
US8633094B2 (en) 2011-12-01 2014-01-21 Power Integrations, Inc. GaN high voltage HFET with passivation plus gate dielectric multilayer structure
FR3017242B1 (fr) * 2014-02-05 2017-09-01 St Microelectronics Tours Sas Diode schottky verticale au nitrure de gallium
JP6257459B2 (ja) * 2014-06-23 2018-01-10 株式会社東芝 半導体装置及びその製造方法
US10600635B2 (en) * 2017-04-20 2020-03-24 Elyakim Kassel Method and apparatus for a semiconductor-on-higher thermal conductive multi-layer composite wafer
US10332876B2 (en) * 2017-09-14 2019-06-25 Infineon Technologies Austria Ag Method of forming compound semiconductor body
EP3762968A1 (fr) * 2018-03-06 2021-01-13 ABB Power Grids Switzerland AG Dispositif à semi-conducteur de forte puissance à plaque de champ et structure de terminaison mésa auto-alignées et son procédé de fabrication
US11469333B1 (en) 2020-02-19 2022-10-11 Semiq Incorporated Counter-doped silicon carbide Schottky barrier diode

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2681472B1 (fr) * 1991-09-18 1993-10-29 Commissariat Energie Atomique Procede de fabrication de films minces de materiau semiconducteur.
US5449925A (en) * 1994-05-04 1995-09-12 North Carolina State University Voltage breakdown resistant monocrystalline silicon carbide semiconductor devices
US6831331B2 (en) * 1995-11-15 2004-12-14 Denso Corporation Power MOS transistor for absorbing surge current
AU1531797A (en) * 1996-01-24 1997-08-20 Cree Research, Inc. Mesa schottky diode with guard ring
US6121661A (en) * 1996-12-11 2000-09-19 International Business Machines Corporation Silicon-on-insulator structure for electrostatic discharge protection and improved heat dissipation
JP3618517B2 (ja) * 1997-06-18 2005-02-09 三菱電機株式会社 半導体装置およびその製造方法
GB9903607D0 (en) * 1999-02-17 1999-04-07 Koninkl Philips Electronics Nv Insulated-gate field-effect semiconductor device
KR100348269B1 (ko) * 2000-03-22 2002-08-09 엘지전자 주식회사 루데니움 산화물을 이용한 쇼트키 콘택 방법

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8916929B2 (en) 2004-06-10 2014-12-23 Power Integrations, Inc. MOSFET having a JFET embedded as a body diode
US8940620B2 (en) 2011-12-15 2015-01-27 Power Integrations, Inc. Composite wafer for fabrication of semiconductor devices
US8928037B2 (en) 2013-02-28 2015-01-06 Power Integrations, Inc. Heterostructure power transistor with AlSiN passivation layer

Also Published As

Publication number Publication date
US20050258483A1 (en) 2005-11-24
EP1535346A2 (fr) 2005-06-01
WO2004027878A3 (fr) 2004-05-06
JP2005537679A (ja) 2005-12-08
WO2004027878A2 (fr) 2004-04-01
TW200410312A (en) 2004-06-16
FR2844099A1 (fr) 2004-03-05

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Legal Events

Date Code Title Description
TQ Partial transmission of property
ST Notification of lapse

Effective date: 20100531