FR2775387B1 - Dispositif a semiconducteur ayant une structure soi et procede de fabrication - Google Patents
Dispositif a semiconducteur ayant une structure soi et procede de fabricationInfo
- Publication number
- FR2775387B1 FR2775387B1 FR9811927A FR9811927A FR2775387B1 FR 2775387 B1 FR2775387 B1 FR 2775387B1 FR 9811927 A FR9811927 A FR 9811927A FR 9811927 A FR9811927 A FR 9811927A FR 2775387 B1 FR2775387 B1 FR 2775387B1
- Authority
- FR
- France
- Prior art keywords
- layer
- aluminum pad
- semiconductor device
- soi structure
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
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- H—ELECTRICITY
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
- H01L23/556—Protection against radiation, e.g. light or electromagnetic waves against alpha rays
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- H01L24/02—Bonding areas ; Manufacturing methods related thereto
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- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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- H01L2224/039—Methods of manufacturing bonding areas involving a specific sequence of method steps
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- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Thin Film Transistor (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10045459A JPH11243208A (ja) | 1998-02-26 | 1998-02-26 | 半導体装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2775387A1 FR2775387A1 (fr) | 1999-08-27 |
| FR2775387B1 true FR2775387B1 (fr) | 2002-09-06 |
Family
ID=12719953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR9811927A Expired - Fee Related FR2775387B1 (fr) | 1998-02-26 | 1998-09-24 | Dispositif a semiconducteur ayant une structure soi et procede de fabrication |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6459125B2 (enExample) |
| JP (1) | JPH11243208A (enExample) |
| KR (2) | KR19990071421A (enExample) |
| DE (1) | DE19842441B4 (enExample) |
| FR (1) | FR2775387B1 (enExample) |
| TW (1) | TW382817B (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11243208A (ja) * | 1998-02-26 | 1999-09-07 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
| JP3824845B2 (ja) * | 2000-06-21 | 2006-09-20 | セイコーエプソン株式会社 | Lcdドライバicチップ |
| JP2002270611A (ja) * | 2001-03-14 | 2002-09-20 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
| JP2003045958A (ja) * | 2001-07-27 | 2003-02-14 | Denso Corp | 半導体装置及びその製造方法 |
| US6762503B2 (en) * | 2002-08-29 | 2004-07-13 | Micron Technology, Inc. | Innovative solder ball pad structure to ease design rule, methods of fabricating same and substrates, electronic device assemblies and systems employing same |
| US6841874B1 (en) | 2002-11-01 | 2005-01-11 | Amkor Technology, Inc. | Wafer-level chip-scale package |
| DE10308275A1 (de) | 2003-02-26 | 2004-09-16 | Advanced Micro Devices, Inc., Sunnyvale | Strahlungsresistentes Halbleiterbauteil |
| JP2008543604A (ja) * | 2005-06-15 | 2008-12-04 | エヌエックスピー ビー ヴィ | 積層体ならびにその使用方法および製造方法 |
| US7736915B2 (en) * | 2006-02-21 | 2010-06-15 | International Business Machines Corporation | Method for neutralizing trapped charge in a charge accumulation layer of a semiconductor structure |
| WO2009027888A2 (en) * | 2007-08-24 | 2009-03-05 | Nxp B.V. | Solderable structure |
| JP2009064812A (ja) * | 2007-09-04 | 2009-03-26 | Panasonic Corp | 半導体装置の電極構造およびその関連技術 |
| US8809182B2 (en) | 2008-05-01 | 2014-08-19 | International Business Machines Corporation | Pad cushion structure and method of fabrication for Pb-free C4 integrated circuit chip joining |
| KR101936039B1 (ko) | 2012-10-30 | 2019-01-08 | 삼성전자 주식회사 | 반도체 장치 |
| US10163828B2 (en) * | 2013-11-18 | 2018-12-25 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device and fabricating method thereof |
| JP6416800B2 (ja) * | 2016-01-26 | 2018-10-31 | 株式会社東芝 | 半導体装置 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63110734A (ja) | 1986-10-29 | 1988-05-16 | Hitachi Ltd | 集積回路素子 |
| JPS63229726A (ja) | 1987-03-18 | 1988-09-26 | Nec Corp | 混成集積回路装置 |
| JPS63262867A (ja) | 1987-04-20 | 1988-10-31 | Nec Corp | 半導体記憶装置 |
| US5024965A (en) | 1990-02-16 | 1991-06-18 | Chang Chen Chi P | Manufacturing high speed low leakage radiation hardened CMOS/SOI devices |
| JPH03272176A (ja) | 1990-03-22 | 1991-12-03 | Fujitsu Ltd | 半導体装置と基板と基板製造方法 |
| KR100292330B1 (ko) * | 1992-05-01 | 2001-09-17 | 이데이 노부유끼 | 반도체장치와그제조방법및실리콘절연기판의제조방법 |
| JP2924506B2 (ja) * | 1992-10-27 | 1999-07-26 | 日本電気株式会社 | アクティブマトリックス型液晶表示装置の画素構造 |
| JP3321899B2 (ja) * | 1992-12-04 | 2002-09-09 | 株式会社デンソー | 半導体装置 |
| US5426072A (en) | 1993-01-21 | 1995-06-20 | Hughes Aircraft Company | Process of manufacturing a three dimensional integrated circuit from stacked SOI wafers using a temporary silicon substrate |
| JP3269536B2 (ja) | 1993-02-19 | 2002-03-25 | 株式会社デンソー | 半導体装置 |
| US5329423A (en) * | 1993-04-13 | 1994-07-12 | Scholz Kenneth D | Compressive bump-and-socket interconnection scheme for integrated circuits |
| US5492863A (en) * | 1994-10-19 | 1996-02-20 | Motorola, Inc. | Method for forming conductive bumps on a semiconductor device |
| JPH08139296A (ja) | 1994-11-08 | 1996-05-31 | Hitachi Ltd | 半導体基板およびそれを用いた半導体集積回路装置 |
| JP3272176B2 (ja) | 1994-12-20 | 2002-04-08 | 東芝テック株式会社 | 商品販売登録データ処理装置 |
| JP3296400B2 (ja) * | 1995-02-01 | 2002-06-24 | 東芝マイクロエレクトロニクス株式会社 | 半導体装置、その製造方法およびCu製リード |
| JPH0951083A (ja) | 1995-08-10 | 1997-02-18 | Mitsubishi Electric Corp | ゲートアレイ型半導体集積回路装置及びその製造方法 |
| US5670812A (en) * | 1995-09-29 | 1997-09-23 | International Business Machines Corporation | Field effect transistor having contact layer of transistor gate electrode material |
| JP2748955B2 (ja) | 1996-03-21 | 1998-05-13 | 株式会社日立製作所 | 半導体装置 |
| JP2861965B2 (ja) * | 1996-09-20 | 1999-02-24 | 日本電気株式会社 | 突起電極の形成方法 |
| US5956605A (en) * | 1996-09-20 | 1999-09-21 | Micron Technology, Inc. | Use of nitrides for flip-chip encapsulation |
| JPH10294318A (ja) * | 1997-04-18 | 1998-11-04 | Toshiba Corp | 電子部品 |
| JP3641111B2 (ja) * | 1997-08-28 | 2005-04-20 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
| TW434646B (en) * | 1997-11-21 | 2001-05-16 | Rohm Co Ltd | Semiconductor device and method for making the same |
| JPH11243208A (ja) * | 1998-02-26 | 1999-09-07 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
| JP3546783B2 (ja) * | 1999-06-09 | 2004-07-28 | セイコーエプソン株式会社 | 半導体記憶装置及びその製造方法 |
-
1998
- 1998-02-26 JP JP10045459A patent/JPH11243208A/ja active Pending
- 1998-07-23 TW TW087112003A patent/TW382817B/zh not_active IP Right Cessation
- 1998-07-27 US US09/122,863 patent/US6459125B2/en not_active Expired - Fee Related
- 1998-09-16 DE DE19842441A patent/DE19842441B4/de not_active Expired - Fee Related
- 1998-09-24 FR FR9811927A patent/FR2775387B1/fr not_active Expired - Fee Related
- 1998-10-27 KR KR1019980044987A patent/KR19990071421A/ko not_active Ceased
-
2001
- 2001-01-30 KR KR10-2001-0004231A patent/KR100377893B1/ko not_active Expired - Fee Related
-
2002
- 2002-04-16 US US10/122,322 patent/US20020110954A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| FR2775387A1 (fr) | 1999-08-27 |
| KR100377893B1 (ko) | 2003-03-29 |
| DE19842441A1 (de) | 1999-09-09 |
| US6459125B2 (en) | 2002-10-01 |
| US20020110954A1 (en) | 2002-08-15 |
| US20020003259A1 (en) | 2002-01-10 |
| KR19990071421A (ko) | 1999-09-27 |
| DE19842441B4 (de) | 2004-07-29 |
| KR20010072669A (ko) | 2001-07-31 |
| TW382817B (en) | 2000-02-21 |
| JPH11243208A (ja) | 1999-09-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |
Effective date: 20060531 |