FR2671386B1 - Palier de roulement a lubrifiants solides utilises notamment dans un appareil de fabrication de semiconducteurs - Google Patents

Palier de roulement a lubrifiants solides utilises notamment dans un appareil de fabrication de semiconducteurs

Info

Publication number
FR2671386B1
FR2671386B1 FR9114779A FR9114779A FR2671386B1 FR 2671386 B1 FR2671386 B1 FR 2671386B1 FR 9114779 A FR9114779 A FR 9114779A FR 9114779 A FR9114779 A FR 9114779A FR 2671386 B1 FR2671386 B1 FR 2671386B1
Authority
FR
France
Prior art keywords
bearing
manufacturing apparatus
semiconductor manufacturing
solid lubricant
lubricating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9114779A
Other languages
English (en)
Other versions
FR2671386A1 (fr
Inventor
Hiromitsu Kondo
Takahiro Mizutani
Norihide Sato
Tasuku Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Original Assignee
NTN Corp
NTN Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3136084A external-priority patent/JP2531867B2/ja
Priority claimed from JP3190150A external-priority patent/JP3006635B2/ja
Application filed by NTN Corp, NTN Toyo Bearing Co Ltd filed Critical NTN Corp
Publication of FR2671386A1 publication Critical patent/FR2671386A1/fr
Application granted granted Critical
Publication of FR2671386B1 publication Critical patent/FR2671386B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6696—Special parts or details in view of lubrication with solids as lubricant, e.g. dry coatings, powder
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/32—Balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S384/00—Bearings
    • Y10S384/90—Cooling or heating
    • Y10S384/908—Nylon or polytetrafluorethylene

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Rolling Contact Bearings (AREA)

Abstract

a) Palier de roulement à lubrifiants solides utilisés notamment dans un appareil de fabrication de semi-conducteurs, b) Palier de roulement, comporte un film de lubrification formé sur une surface (3) de cette partie de palier devant être soumise à un frottement de roulement ou à un frottement de glissement, ce film de lubrification étant constitué de polytétrafluoréthylène présentant un poids moléculaire moyen ne dépassant pas 5000 (PTFE (A)), en ce que chaque élément de roulement comporte le film de lubrification (1a - 2a- 3a), en ce qu'une bague intérieure (1) et une bague extérieure (2) comportent respectivement les films de lubrification.
FR9114779A 1990-11-30 1991-11-29 Palier de roulement a lubrifiants solides utilises notamment dans un appareil de fabrication de semiconducteurs Expired - Lifetime FR2671386B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP19631090 1990-11-30
JP3136084A JP2531867B2 (ja) 1991-06-07 1991-06-07 半導体製造設備用転がり軸受
JP3190150A JP3006635B2 (ja) 1991-07-30 1991-07-30 固体潤滑転がり軸受

Publications (2)

Publication Number Publication Date
FR2671386A1 FR2671386A1 (fr) 1992-07-10
FR2671386B1 true FR2671386B1 (fr) 1996-04-05

Family

ID=27317203

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9114779A Expired - Lifetime FR2671386B1 (fr) 1990-11-30 1991-11-29 Palier de roulement a lubrifiants solides utilises notamment dans un appareil de fabrication de semiconducteurs

Country Status (4)

Country Link
US (1) US5207513A (fr)
DE (1) DE4139426A1 (fr)
FR (1) FR2671386B1 (fr)
GB (1) GB2250549B (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666319A (ja) * 1992-06-19 1994-03-08 Nippon Thompson Co Ltd 転がり案内ユニット及びその製造方法
DE4243450A1 (de) * 1992-12-22 1994-06-23 Schaeffler Waelzlager Kg Wälzlager
US5417496A (en) * 1994-03-01 1995-05-23 General Devices Co., Inc. Ball bearing retainer for telescoping slide assembly
JPH084873A (ja) * 1994-06-24 1996-01-12 Ntn Corp 真空機器用ボールねじ
NL9401234A (nl) * 1994-07-27 1996-03-01 Skf Ind Trading & Dev Rollager met een bekleding met lage wrijving.
RU2095653C1 (ru) * 1996-09-25 1997-11-10 Константин Дмитриевич Семкин Подшипник с постоянным смазочным слоем и способ его изготовления
JP3624998B2 (ja) * 1996-09-30 2005-03-02 光洋精工株式会社 転がり軸受
JP3699803B2 (ja) * 1997-05-09 2005-09-28 光洋精工株式会社 軸受の製造方法および軸受
JP3831507B2 (ja) * 1998-01-14 2006-10-11 株式会社ジェイテクト 軸受部材
CA2363103A1 (fr) * 1999-03-03 2000-09-08 Norton Performance Plastics Corporation Rouleau dote de coussinet autolubrifiant
US7008115B2 (en) * 2001-05-22 2006-03-07 Koyo Seiko Co., Ltd. Polymeric lubricant packed bearing and method of producing the same
DE10256086A1 (de) * 2002-11-29 2004-06-17 Leybold Vakuum Gmbh Kugellager und mit einem Lager dieser Art ausgerüstete Vakuumpumpe
DE10259003A1 (de) * 2002-12-16 2004-06-24 Myonic Gmbh Wälzlager mit integriertem Schmiermaterial
DE102004014888A1 (de) * 2004-03-26 2005-10-20 Bayerische Motoren Werke Ag Bedienelement
KR100960838B1 (ko) * 2004-04-27 2010-06-07 도오꾜오까고오교 가부시끼가이샤 액침 노광 프로세스용 레지스트 보호막 형성용 재료, 및 이보호막을 이용한 레지스트 패턴 형성 방법
JP4368267B2 (ja) * 2004-07-30 2009-11-18 東京応化工業株式会社 レジスト保護膜形成用材料、およびこれを用いたレジストパターン形成方法
DE102008029483A1 (de) * 2008-06-20 2009-12-24 Schaeffler Kg Wälzlager für Unterwasseranwendungen
JP5150387B2 (ja) * 2008-06-27 2013-02-20 昭和電工株式会社 インライン式成膜装置及び磁気記録媒体の製造方法
DE102009009309A1 (de) * 2009-02-17 2010-08-19 Oerlikon Leybold Vacuum Gmbh Wälzlager für den Einsatz im Vakuum sowie Verfahren zur Herstellung von zweiteiligen Wälzlagerkäfigen
DE102012006027A1 (de) 2012-03-27 2013-10-02 Technische Universität Kaiserslautern Feststoffgeschmiertes Wälzlager
CN109642615B (zh) 2016-08-26 2020-09-22 日本精工株式会社 滚动轴承及其制造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3001837A (en) * 1958-04-16 1961-09-26 Edward R Lamson Anti-friction bearings lubricated with bonded lubricant films
US3067262A (en) * 1961-05-10 1962-12-04 Du Pont Telomers of tetrafluoroethylene
GB1034094A (en) * 1962-04-13 1966-06-29 Polymer Corp Self-lubricating article and means for its manufacture
DE1594392C3 (de) * 1965-02-23 1979-03-01 Daikin Kogyo K.K., Osaka (Japan) Verfahren zur Herstellung von Fest-Schmiermitteln
US4674164A (en) * 1978-05-15 1987-06-23 Incom International Inc. Bearings with felted teflon liners and method for making same
JPS57200726A (en) * 1981-06-04 1982-12-09 Ishikawajima Harima Heavy Ind Co Ltd Treating method of rotary surface of thrust ball bearing for variable moving blade
JPS62132031A (ja) * 1985-12-03 1987-06-15 Ntn Toyo Bearing Co Ltd 転がり軸受
JPH068503B2 (ja) * 1987-03-31 1994-02-02 セントラル硝子株式会社 含フツ素樹脂被膜の形成方法
DE3825326A1 (de) * 1988-07-26 1990-02-01 Kugelfischer G Schaefer & Co Waelzlager fuer abgasturbolader
JP2850353B2 (ja) * 1989-03-17 1999-01-27 日本精工株式会社 ころがり軸受

Also Published As

Publication number Publication date
US5207513A (en) 1993-05-04
DE4139426A1 (de) 1992-06-17
GB2250549A (en) 1992-06-10
GB9125165D0 (en) 1992-01-29
FR2671386A1 (fr) 1992-07-10
GB2250549B (en) 1995-01-11

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