FR2340620A1 - Procede de fabrication d'un dispositif integre a grande echelle ayant une surface plane - Google Patents

Procede de fabrication d'un dispositif integre a grande echelle ayant une surface plane

Info

Publication number
FR2340620A1
FR2340620A1 FR7639828A FR7639828A FR2340620A1 FR 2340620 A1 FR2340620 A1 FR 2340620A1 FR 7639828 A FR7639828 A FR 7639828A FR 7639828 A FR7639828 A FR 7639828A FR 2340620 A1 FR2340620 A1 FR 2340620A1
Authority
FR
France
Prior art keywords
manufacturing process
flat surface
integrated device
scale integrated
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7639828A
Other languages
English (en)
French (fr)
Other versions
FR2340620B1 (cg-RX-API-DMAC10.html
Inventor
Ekkehard F Miersch
Hwa N Yu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2340620A1 publication Critical patent/FR2340620A1/fr
Application granted granted Critical
Publication of FR2340620B1 publication Critical patent/FR2340620B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H10W20/056—
    • H10W20/058—
FR7639828A 1976-02-06 1976-12-30 Procede de fabrication d'un dispositif integre a grande echelle ayant une surface plane Granted FR2340620A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65581476A 1976-02-06 1976-02-06

Publications (2)

Publication Number Publication Date
FR2340620A1 true FR2340620A1 (fr) 1977-09-02
FR2340620B1 FR2340620B1 (cg-RX-API-DMAC10.html) 1979-09-28

Family

ID=24630480

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7639828A Granted FR2340620A1 (fr) 1976-02-06 1976-12-30 Procede de fabrication d'un dispositif integre a grande echelle ayant une surface plane

Country Status (6)

Country Link
JP (1) JPS5827664B2 (cg-RX-API-DMAC10.html)
CA (1) CA1088382A (cg-RX-API-DMAC10.html)
DE (1) DE2703473A1 (cg-RX-API-DMAC10.html)
FR (1) FR2340620A1 (cg-RX-API-DMAC10.html)
GB (1) GB1521431A (cg-RX-API-DMAC10.html)
IT (1) IT1079545B (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0008359A3 (en) * 1978-08-21 1980-03-19 International Business Machines Corporation Process for making a thin-film structure

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59170692A (ja) * 1983-03-16 1984-09-26 Ebara Corp 水封入熱交換器
WO2017071702A1 (de) 2015-10-27 2017-05-04 Schaeffler Technologies AG & Co. KG Lageranordnung mit darin eingebauter elektrischer leitung zur bereitstellung von mehreren betriebsspannungen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1267738B (de) * 1962-10-29 1968-05-09 Intellux Inc Verfahren zur Herstellung von elektrischen Verbindungen zwischen den Stromkreisen von mehrlagigen gedruckten elektrischen Schaltungen
US3464855A (en) * 1966-09-06 1969-09-02 North American Rockwell Process for forming interconnections in a multilayer circuit board
DE1765013A1 (de) * 1968-03-21 1971-07-01 Telefunken Patent Verfahren zur Herstellung von Mehrebenenschaltungen
DE2059425A1 (de) * 1970-12-02 1972-06-22 Siemens Ag Partieller Aufbau von gedruckten Mehrlagenschaltungen
JPS4960870A (cg-RX-API-DMAC10.html) * 1972-10-16 1974-06-13
US3873361A (en) * 1973-11-29 1975-03-25 Ibm Method of depositing thin film utilizing a lift-off mask
JPS5120681A (en) * 1974-07-27 1976-02-19 Oki Electric Ind Co Ltd Handotaisochino seizohoho
NL7415841A (nl) * 1974-12-05 1976-06-09 Philips Nv Werkwijze voor het vervaardigen van een half- geleiderinrichting en halfgeleiderinrichting, vervaardigd volgens de werkwijze.
JPS5272571A (en) * 1975-12-15 1977-06-17 Fujitsu Ltd Production of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0008359A3 (en) * 1978-08-21 1980-03-19 International Business Machines Corporation Process for making a thin-film structure

Also Published As

Publication number Publication date
JPS5295987A (en) 1977-08-12
DE2703473A1 (de) 1977-08-11
DE2703473C2 (cg-RX-API-DMAC10.html) 1991-01-24
GB1521431A (en) 1978-08-16
JPS5827664B2 (ja) 1983-06-10
FR2340620B1 (cg-RX-API-DMAC10.html) 1979-09-28
CA1088382A (en) 1980-10-28
IT1079545B (it) 1985-05-13

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Legal Events

Date Code Title Description
ST Notification of lapse