IT1079545B - Processo di fabbricazione di dispositivi integrati su larga scala aventi superficie planare - Google Patents

Processo di fabbricazione di dispositivi integrati su larga scala aventi superficie planare

Info

Publication number
IT1079545B
IT1079545B IT1972177A IT1972177A IT1079545B IT 1079545 B IT1079545 B IT 1079545B IT 1972177 A IT1972177 A IT 1972177A IT 1972177 A IT1972177 A IT 1972177A IT 1079545 B IT1079545 B IT 1079545B
Authority
IT
Italy
Prior art keywords
manufacturing process
large scale
planar surface
scale integrated
integrated devices
Prior art date
Application number
IT1972177A
Other languages
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1079545B publication Critical patent/IT1079545B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H01L21/7688—Filling of holes, grooves or trenches, e.g. vias, with conductive material by deposition over sacrificial masking layer, e.g. lift-off

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
IT1972177A 1976-02-06 1977-01-28 Processo di fabbricazione di dispositivi integrati su larga scala aventi superficie planare IT1079545B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65581476A 1976-02-06 1976-02-06

Publications (1)

Publication Number Publication Date
IT1079545B true IT1079545B (it) 1985-05-13

Family

ID=24630480

Family Applications (1)

Application Number Title Priority Date Filing Date
IT1972177A IT1079545B (it) 1976-02-06 1977-01-28 Processo di fabbricazione di dispositivi integrati su larga scala aventi superficie planare

Country Status (6)

Country Link
JP (1) JPS5827664B2 (it)
CA (1) CA1088382A (it)
DE (1) DE2703473A1 (it)
FR (1) FR2340620A1 (it)
GB (1) GB1521431A (it)
IT (1) IT1079545B (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4184909A (en) * 1978-08-21 1980-01-22 International Business Machines Corporation Method of forming thin film interconnection systems
JPS59170692A (ja) * 1983-03-16 1984-09-26 Ebara Corp 水封入熱交換器
CN108139240B (zh) 2015-10-27 2021-02-26 舍弗勒技术股份两合公司 具有用于提供多种工作电压的内置电气线路的轴承装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1267738B (de) * 1962-10-29 1968-05-09 Intellux Inc Verfahren zur Herstellung von elektrischen Verbindungen zwischen den Stromkreisen von mehrlagigen gedruckten elektrischen Schaltungen
US3464855A (en) * 1966-09-06 1969-09-02 North American Rockwell Process for forming interconnections in a multilayer circuit board
DE1765013A1 (de) * 1968-03-21 1971-07-01 Telefunken Patent Verfahren zur Herstellung von Mehrebenenschaltungen
DE2059425A1 (de) * 1970-12-02 1972-06-22 Siemens Ag Partieller Aufbau von gedruckten Mehrlagenschaltungen
JPS4960870A (it) * 1972-10-16 1974-06-13
US3873361A (en) * 1973-11-29 1975-03-25 Ibm Method of depositing thin film utilizing a lift-off mask
JPS5120681A (en) * 1974-07-27 1976-02-19 Oki Electric Ind Co Ltd Handotaisochino seizohoho
NL7415841A (nl) * 1974-12-05 1976-06-09 Philips Nv Werkwijze voor het vervaardigen van een half- geleiderinrichting en halfgeleiderinrichting, vervaardigd volgens de werkwijze.
JPS5272571A (en) * 1975-12-15 1977-06-17 Fujitsu Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPS5295987A (en) 1977-08-12
DE2703473A1 (de) 1977-08-11
FR2340620B1 (it) 1979-09-28
FR2340620A1 (fr) 1977-09-02
CA1088382A (en) 1980-10-28
DE2703473C2 (it) 1991-01-24
GB1521431A (en) 1978-08-16
JPS5827664B2 (ja) 1983-06-10

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