FR2339955A1 - Procede de fabrication d'un circuit integre - Google Patents
Procede de fabrication d'un circuit integreInfo
- Publication number
- FR2339955A1 FR2339955A1 FR7702465A FR7702465A FR2339955A1 FR 2339955 A1 FR2339955 A1 FR 2339955A1 FR 7702465 A FR7702465 A FR 7702465A FR 7702465 A FR7702465 A FR 7702465A FR 2339955 A1 FR2339955 A1 FR 2339955A1
- Authority
- FR
- France
- Prior art keywords
- integrated circuit
- manufacturing process
- manufacturing
- integrated
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823437—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823456—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different shapes, lengths or dimensions
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51009870A JPS598065B2 (ja) | 1976-01-30 | 1976-01-30 | Mos集積回路の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2339955A1 true FR2339955A1 (fr) | 1977-08-26 |
FR2339955B1 FR2339955B1 (fr) | 1982-05-07 |
Family
ID=11732165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7702465A Granted FR2339955A1 (fr) | 1976-01-30 | 1977-01-28 | Procede de fabrication d'un circuit integre |
Country Status (6)
Country | Link |
---|---|
US (1) | US4177096A (fr) |
JP (1) | JPS598065B2 (fr) |
CA (1) | CA1074457A (fr) |
DE (1) | DE2703618C2 (fr) |
FR (1) | FR2339955A1 (fr) |
GB (1) | GB1577017A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0076147A2 (fr) * | 1981-09-30 | 1983-04-06 | Fujitsu Limited | Procédé pour la fabrication d'un dispositif semiconducteur comportant une région d'isolation |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5538084A (en) * | 1978-09-11 | 1980-03-17 | Nec Corp | Semiconductor integrated circuit device |
DE2902665A1 (de) * | 1979-01-24 | 1980-08-07 | Siemens Ag | Verfahren zum herstellen von integrierten mos-schaltungen in silizium-gate- technologie |
US4285117A (en) * | 1979-09-06 | 1981-08-25 | Teletype Corporation | Method of manufacturing a device in a silicon wafer |
JPS5723243A (en) * | 1980-07-17 | 1982-02-06 | Seiko Epson Corp | Semiconductor integrated circuit |
JPS641285U (fr) * | 1987-06-19 | 1989-01-06 | ||
JPH04242968A (ja) * | 1991-01-08 | 1992-08-31 | Fujitsu Ltd | 半導体集積回路 |
US5426065A (en) * | 1993-11-30 | 1995-06-20 | Sgs-Thomson Microelectronics, Inc. | Method of making transistor devices in an SRAM cell |
JP4834568B2 (ja) * | 2007-02-22 | 2011-12-14 | 株式会社東芝 | 半導体装置及びその製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3533158A (en) * | 1967-10-30 | 1970-10-13 | Hughes Aircraft Co | Method of utilizing an ion beam to form custom circuits |
US3747200A (en) * | 1972-03-31 | 1973-07-24 | Motorola Inc | Integrated circuit fabrication method |
GB1364676A (en) * | 1970-07-10 | 1974-08-29 | Philips Electronic Associated | Semiconductor integrated device |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3921282A (en) * | 1971-02-16 | 1975-11-25 | Texas Instruments Inc | Insulated gate field effect transistor circuits and their method of fabrication |
US3921283A (en) * | 1971-06-08 | 1975-11-25 | Philips Corp | Semiconductor device and method of manufacturing the device |
GB1357515A (en) * | 1972-03-10 | 1974-06-26 | Matsushita Electronics Corp | Method for manufacturing an mos integrated circuit |
US3985591A (en) * | 1972-03-10 | 1976-10-12 | Matsushita Electronics Corporation | Method of manufacturing parallel gate matrix circuits |
US3893152A (en) * | 1973-07-25 | 1975-07-01 | Hung Chang Lin | Metal nitride oxide semiconductor integrated circuit structure |
GB1457139A (en) * | 1973-09-27 | 1976-12-01 | Hitachi Ltd | Method of manufacturing semiconductor device |
JPS5214594B2 (fr) * | 1973-10-17 | 1977-04-22 | ||
JPS5087787A (fr) * | 1973-12-07 | 1975-07-15 | ||
NL180466C (nl) * | 1974-03-15 | 1987-02-16 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting met een halfgeleiderlichaam voorzien van een in het halfgeleiderlichaam verzonken patroon van isolerend materiaal. |
JPS50148084A (fr) * | 1974-05-20 | 1975-11-27 | ||
US4021789A (en) * | 1975-09-29 | 1977-05-03 | International Business Machines Corporation | Self-aligned integrated circuits |
-
1976
- 1976-01-30 JP JP51009870A patent/JPS598065B2/ja not_active Expired
-
1977
- 1977-01-25 US US05/762,301 patent/US4177096A/en not_active Expired - Lifetime
- 1977-01-28 FR FR7702465A patent/FR2339955A1/fr active Granted
- 1977-01-28 DE DE2703618A patent/DE2703618C2/de not_active Expired
- 1977-01-28 GB GB3535/77A patent/GB1577017A/en not_active Expired
- 1977-01-28 CA CA270,612A patent/CA1074457A/fr not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3533158A (en) * | 1967-10-30 | 1970-10-13 | Hughes Aircraft Co | Method of utilizing an ion beam to form custom circuits |
GB1364676A (en) * | 1970-07-10 | 1974-08-29 | Philips Electronic Associated | Semiconductor integrated device |
US3747200A (en) * | 1972-03-31 | 1973-07-24 | Motorola Inc | Integrated circuit fabrication method |
Non-Patent Citations (1)
Title |
---|
CA1973 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0076147A2 (fr) * | 1981-09-30 | 1983-04-06 | Fujitsu Limited | Procédé pour la fabrication d'un dispositif semiconducteur comportant une région d'isolation |
EP0076147A3 (en) * | 1981-09-30 | 1985-09-25 | Fujitsu Limited | Method of producing a semiconductor device comprising an isolation region |
Also Published As
Publication number | Publication date |
---|---|
JPS5293282A (en) | 1977-08-05 |
DE2703618A1 (de) | 1977-08-04 |
DE2703618C2 (de) | 1982-09-02 |
JPS598065B2 (ja) | 1984-02-22 |
US4177096A (en) | 1979-12-04 |
FR2339955B1 (fr) | 1982-05-07 |
GB1577017A (en) | 1980-10-15 |
CA1074457A (fr) | 1980-03-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
D9 | Licence |
Free format text: CORRECTION |
|
ST | Notification of lapse |