FR2304104A1 - Procede d'obtention des masques colores de photogravure - Google Patents
Procede d'obtention des masques colores de photogravureInfo
- Publication number
- FR2304104A1 FR2304104A1 FR7507566A FR7507566A FR2304104A1 FR 2304104 A1 FR2304104 A1 FR 2304104A1 FR 7507566 A FR7507566 A FR 7507566A FR 7507566 A FR7507566 A FR 7507566A FR 2304104 A1 FR2304104 A1 FR 2304104A1
- Authority
- FR
- France
- Prior art keywords
- colouring
- high resolution
- ions
- glass
- masters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/76—Patterning of masks by imaging
- G03F1/78—Patterning of masks by imaging by charged particle beam [CPB], e.g. electron beam patterning of masks
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7507566A FR2304104A1 (fr) | 1975-03-11 | 1975-03-11 | Procede d'obtention des masques colores de photogravure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7507566A FR2304104A1 (fr) | 1975-03-11 | 1975-03-11 | Procede d'obtention des masques colores de photogravure |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2304104A1 true FR2304104A1 (fr) | 1976-10-08 |
FR2304104B1 FR2304104B1 (fr) | 1977-11-18 |
Family
ID=9152408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7507566A Granted FR2304104A1 (fr) | 1975-03-11 | 1975-03-11 | Procede d'obtention des masques colores de photogravure |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2304104A1 (fr) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2012969A1 (fr) * | 1968-07-15 | 1970-03-27 | Pilkington Brothers Ltd |
-
1975
- 1975-03-11 FR FR7507566A patent/FR2304104A1/fr active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2012969A1 (fr) * | 1968-07-15 | 1970-03-27 | Pilkington Brothers Ltd |
Also Published As
Publication number | Publication date |
---|---|
FR2304104B1 (fr) | 1977-11-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |