JPS51128267A - Pattern forming system for metal oxide film - Google Patents
Pattern forming system for metal oxide filmInfo
- Publication number
- JPS51128267A JPS51128267A JP5240675A JP5240675A JPS51128267A JP S51128267 A JPS51128267 A JP S51128267A JP 5240675 A JP5240675 A JP 5240675A JP 5240675 A JP5240675 A JP 5240675A JP S51128267 A JPS51128267 A JP S51128267A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- metal oxide
- pattern forming
- forming system
- crystallization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thermal Transfer Or Thermal Recording In General (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Weting (AREA)
Abstract
PURPOSE: To obtain pattern mask by simple process: coating alcoholic solution of chromium nitrate containing water of crystallization on glass base, giving heating exposure by electron beam irradiation to be chromic oxide, and removing the remainder by alcohol.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5240675A JPS51128267A (en) | 1975-04-30 | 1975-04-30 | Pattern forming system for metal oxide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5240675A JPS51128267A (en) | 1975-04-30 | 1975-04-30 | Pattern forming system for metal oxide film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51128267A true JPS51128267A (en) | 1976-11-09 |
JPS5739956B2 JPS5739956B2 (en) | 1982-08-24 |
Family
ID=12913894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5240675A Granted JPS51128267A (en) | 1975-04-30 | 1975-04-30 | Pattern forming system for metal oxide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51128267A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6144695A (en) * | 1984-08-09 | 1986-03-04 | Res Dev Corp Of Japan | Optical data recording medium and preparation thereof |
US7900478B2 (en) * | 2004-12-13 | 2011-03-08 | Asml Holding N.V. | Method of manufacturing an ultrathin optical element |
-
1975
- 1975-04-30 JP JP5240675A patent/JPS51128267A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6144695A (en) * | 1984-08-09 | 1986-03-04 | Res Dev Corp Of Japan | Optical data recording medium and preparation thereof |
JPH0327034B2 (en) * | 1984-08-09 | 1991-04-12 | Shingijutsu Jigyodan | |
US7900478B2 (en) * | 2004-12-13 | 2011-03-08 | Asml Holding N.V. | Method of manufacturing an ultrathin optical element |
Also Published As
Publication number | Publication date |
---|---|
JPS5739956B2 (en) | 1982-08-24 |
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