JPS51128267A - Pattern forming system for metal oxide film - Google Patents

Pattern forming system for metal oxide film

Info

Publication number
JPS51128267A
JPS51128267A JP5240675A JP5240675A JPS51128267A JP S51128267 A JPS51128267 A JP S51128267A JP 5240675 A JP5240675 A JP 5240675A JP 5240675 A JP5240675 A JP 5240675A JP S51128267 A JPS51128267 A JP S51128267A
Authority
JP
Japan
Prior art keywords
oxide film
metal oxide
pattern forming
forming system
crystallization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5240675A
Other languages
Japanese (ja)
Other versions
JPS5739956B2 (en
Inventor
Takenori Okubo
Kenji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5240675A priority Critical patent/JPS51128267A/en
Publication of JPS51128267A publication Critical patent/JPS51128267A/en
Publication of JPS5739956B2 publication Critical patent/JPS5739956B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To obtain pattern mask by simple process: coating alcoholic solution of chromium nitrate containing water of crystallization on glass base, giving heating exposure by electron beam irradiation to be chromic oxide, and removing the remainder by alcohol.
COPYRIGHT: (C)1976,JPO&Japio
JP5240675A 1975-04-30 1975-04-30 Pattern forming system for metal oxide film Granted JPS51128267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5240675A JPS51128267A (en) 1975-04-30 1975-04-30 Pattern forming system for metal oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5240675A JPS51128267A (en) 1975-04-30 1975-04-30 Pattern forming system for metal oxide film

Publications (2)

Publication Number Publication Date
JPS51128267A true JPS51128267A (en) 1976-11-09
JPS5739956B2 JPS5739956B2 (en) 1982-08-24

Family

ID=12913894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5240675A Granted JPS51128267A (en) 1975-04-30 1975-04-30 Pattern forming system for metal oxide film

Country Status (1)

Country Link
JP (1) JPS51128267A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144695A (en) * 1984-08-09 1986-03-04 Res Dev Corp Of Japan Optical data recording medium and preparation thereof
US7900478B2 (en) * 2004-12-13 2011-03-08 Asml Holding N.V. Method of manufacturing an ultrathin optical element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144695A (en) * 1984-08-09 1986-03-04 Res Dev Corp Of Japan Optical data recording medium and preparation thereof
JPH0327034B2 (en) * 1984-08-09 1991-04-12 Shingijutsu Jigyodan
US7900478B2 (en) * 2004-12-13 2011-03-08 Asml Holding N.V. Method of manufacturing an ultrathin optical element

Also Published As

Publication number Publication date
JPS5739956B2 (en) 1982-08-24

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