JPS5216979A - Exposure method of photo etching - Google Patents

Exposure method of photo etching

Info

Publication number
JPS5216979A
JPS5216979A JP50091973A JP9197375A JPS5216979A JP S5216979 A JPS5216979 A JP S5216979A JP 50091973 A JP50091973 A JP 50091973A JP 9197375 A JP9197375 A JP 9197375A JP S5216979 A JPS5216979 A JP S5216979A
Authority
JP
Japan
Prior art keywords
photo etching
exposure method
exposure
photo
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50091973A
Other languages
Japanese (ja)
Other versions
JPS588575B2 (en
Inventor
Okimitsu Yasuda
Nobuo Kikuchi
Akio Iimura
Kiyoshi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50091973A priority Critical patent/JPS588575B2/en
Publication of JPS5216979A publication Critical patent/JPS5216979A/en
Publication of JPS588575B2 publication Critical patent/JPS588575B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To remove whisker-type pattern defects due to diffraction, reflection, etc. of light at the time of exposure in the photo etching process of aluminium etc.
COPYRIGHT: (C)1977,JPO&Japio
JP50091973A 1975-07-30 1975-07-30 Shashinyotsukokunorokohouhou Expired JPS588575B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50091973A JPS588575B2 (en) 1975-07-30 1975-07-30 Shashinyotsukokunorokohouhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50091973A JPS588575B2 (en) 1975-07-30 1975-07-30 Shashinyotsukokunorokohouhou

Publications (2)

Publication Number Publication Date
JPS5216979A true JPS5216979A (en) 1977-02-08
JPS588575B2 JPS588575B2 (en) 1983-02-16

Family

ID=14041460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50091973A Expired JPS588575B2 (en) 1975-07-30 1975-07-30 Shashinyotsukokunorokohouhou

Country Status (1)

Country Link
JP (1) JPS588575B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6158013A (en) * 1984-08-29 1986-03-25 Hitachi Ltd Positioning control system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6158013A (en) * 1984-08-29 1986-03-25 Hitachi Ltd Positioning control system

Also Published As

Publication number Publication date
JPS588575B2 (en) 1983-02-16

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