JPS51140482A - Device for printing wafer index - Google Patents

Device for printing wafer index

Info

Publication number
JPS51140482A
JPS51140482A JP6420275A JP6420275A JPS51140482A JP S51140482 A JPS51140482 A JP S51140482A JP 6420275 A JP6420275 A JP 6420275A JP 6420275 A JP6420275 A JP 6420275A JP S51140482 A JPS51140482 A JP S51140482A
Authority
JP
Japan
Prior art keywords
wafer index
printing
printing wafer
index
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6420275A
Other languages
Japanese (ja)
Inventor
Susumu Komoriya
Jun Suzuki
Hiroto Nagatomo
Kiyoshi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6420275A priority Critical patent/JPS51140482A/en
Publication of JPS51140482A publication Critical patent/JPS51140482A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To provide a device for printing a wafer index which can automatically print in simple method to eliminate defects of the wafer.
COPYRIGHT: (C)1976,JPO&Japio
JP6420275A 1975-05-30 1975-05-30 Device for printing wafer index Pending JPS51140482A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6420275A JPS51140482A (en) 1975-05-30 1975-05-30 Device for printing wafer index

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6420275A JPS51140482A (en) 1975-05-30 1975-05-30 Device for printing wafer index

Publications (1)

Publication Number Publication Date
JPS51140482A true JPS51140482A (en) 1976-12-03

Family

ID=13251236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6420275A Pending JPS51140482A (en) 1975-05-30 1975-05-30 Device for printing wafer index

Country Status (1)

Country Link
JP (1) JPS51140482A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61263117A (en) * 1985-05-16 1986-11-21 Rohm Co Ltd Mask plate for manufacturing semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840655A (en) * 1971-09-28 1973-06-14
JPS4931655A (en) * 1972-07-27 1974-03-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840655A (en) * 1971-09-28 1973-06-14
JPS4931655A (en) * 1972-07-27 1974-03-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61263117A (en) * 1985-05-16 1986-11-21 Rohm Co Ltd Mask plate for manufacturing semiconductor device

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