JPS56165244A - Manufacture of multilayer thin film electrode - Google Patents

Manufacture of multilayer thin film electrode

Info

Publication number
JPS56165244A
JPS56165244A JP6847980A JP6847980A JPS56165244A JP S56165244 A JPS56165244 A JP S56165244A JP 6847980 A JP6847980 A JP 6847980A JP 6847980 A JP6847980 A JP 6847980A JP S56165244 A JPS56165244 A JP S56165244A
Authority
JP
Japan
Prior art keywords
photoresist film
base plate
predetermined pattern
light
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6847980A
Other languages
Japanese (ja)
Inventor
Yoshimi Sugimoto
Yoshinori Miyashita
Kazuo Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6847980A priority Critical patent/JPS56165244A/en
Publication of JPS56165244A publication Critical patent/JPS56165244A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:To form precisely an electrode pattern, by forming electrode films of a predetermined pattern on a light permeable insulating base plate, next, forming successively a light permeable insulator layer, an electrode coating and a photoresist film on them, and having them irradiated by light from the back surface side of the base plate. CONSTITUTION:Shift electrodes y11, y12 which are the first layer of a predetermined pattern are formed on a glass base plate. Then, thin films of a dielectric layer of Al2O3 and a metal layer 11 of Cr are formed on them so that light can be transmitted. Next, after spreading a positive type photoresist film 12, they are irradiated by ultraviolet rays from the back surface of the base plate. Then, after exposing the photoresist film 12 while applying electrodes y11, y12 as masks, and the photoresist film 12 is formed into a predetermined pattern, the metal layer 11 is formed into a predetermined pattern by means of the patterned photoresist film 12 utilized as a mask.
JP6847980A 1980-05-22 1980-05-22 Manufacture of multilayer thin film electrode Pending JPS56165244A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6847980A JPS56165244A (en) 1980-05-22 1980-05-22 Manufacture of multilayer thin film electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6847980A JPS56165244A (en) 1980-05-22 1980-05-22 Manufacture of multilayer thin film electrode

Publications (1)

Publication Number Publication Date
JPS56165244A true JPS56165244A (en) 1981-12-18

Family

ID=13374856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6847980A Pending JPS56165244A (en) 1980-05-22 1980-05-22 Manufacture of multilayer thin film electrode

Country Status (1)

Country Link
JP (1) JPS56165244A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2754633A1 (en) * 1996-10-14 1998-04-17 Corning Inc Manufacture of plasma screen displays using two electrode networks
US6238829B1 (en) * 1997-05-20 2001-05-29 Sony Corporation Method of manufacturing plasma addressed electro-optical display

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2754633A1 (en) * 1996-10-14 1998-04-17 Corning Inc Manufacture of plasma screen displays using two electrode networks
US6238829B1 (en) * 1997-05-20 2001-05-29 Sony Corporation Method of manufacturing plasma addressed electro-optical display

Similar Documents

Publication Publication Date Title
JPS5565365A (en) Pattern forming method
JPS5548935A (en) Forming of electrode pattern
JPS56165244A (en) Manufacture of multilayer thin film electrode
JPS56168654A (en) Photomask
JPS5446479A (en) Negative plate for photo mask
JPS5797626A (en) Manufacture of semiconductor device
JPS56153646A (en) Manufacture of electrode for display panel
JPS5680130A (en) Manufacture of semiconductor device
JPS53147531A (en) Forming method for thin film pattern
JPS5637629A (en) Formation of thin film pattern
JPS57118641A (en) Lifting-off method
JPS5732635A (en) Production of semiconductor device
JPS5689741A (en) Dryplate for photomasking
JPS5594491A (en) Forming method for thick minute metal pattern
JPS5640828A (en) Production of photomask
JPS5621328A (en) Method of making pattern
JPS57112025A (en) Formation of pattern
JPS57102015A (en) Pattern formation
JPS56130750A (en) Manufacture of mask
JPS5787046A (en) Forming method for index phospher of beam index type color picture tube
JPS5743425A (en) Forming method for fine pattern
JPS5452473A (en) Forming method for coating for fine pattern
JPS5778026A (en) Production of optical display panel
JPS56130751A (en) Manufacture of mask
JPS5719931A (en) Electrode forming method for face discharge type gas discharge panel