FR2149384A1 - Semiconductor component prodn - with automatic precision mask location esp for fets - Google Patents

Semiconductor component prodn - with automatic precision mask location esp for fets

Info

Publication number
FR2149384A1
FR2149384A1 FR7228653A FR7228653A FR2149384A1 FR 2149384 A1 FR2149384 A1 FR 2149384A1 FR 7228653 A FR7228653 A FR 7228653A FR 7228653 A FR7228653 A FR 7228653A FR 2149384 A1 FR2149384 A1 FR 2149384A1
Authority
FR
France
Prior art keywords
esp
fets
deposited
semiconductor component
windows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7228653A
Other languages
English (en)
French (fr)
Other versions
FR2149384B1 (ref
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2149384A1 publication Critical patent/FR2149384A1/fr
Application granted granted Critical
Publication of FR2149384B1 publication Critical patent/FR2149384B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H10P76/40—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H10W20/40—

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
FR7228653A 1971-08-19 1972-08-03 Semiconductor component prodn - with automatic precision mask location esp for fets Granted FR2149384A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1217971A CH529446A (de) 1971-08-19 1971-08-19 Selbstausrichtendes Maskierverfahren, insbesondere für Halbleiteroberflächen

Publications (2)

Publication Number Publication Date
FR2149384A1 true FR2149384A1 (en) 1973-03-30
FR2149384B1 FR2149384B1 (ref) 1974-07-12

Family

ID=4380613

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7228653A Granted FR2149384A1 (en) 1971-08-19 1972-08-03 Semiconductor component prodn - with automatic precision mask location esp for fets

Country Status (4)

Country Link
JP (1) JPS4831878A (ref)
CH (1) CH529446A (ref)
DE (1) DE2234189A1 (ref)
FR (1) FR2149384A1 (ref)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1094517B (it) * 1978-04-28 1985-08-02 Componenti Elettronici Sgs Ate Procedimento per la fabbricazione di un elemento resistivo filiforme per circuito integrato
DE3426421A1 (de) * 1984-07-18 1986-01-23 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum herstellen einer halbleiteranordnung

Also Published As

Publication number Publication date
DE2234189A1 (de) 1973-03-01
CH529446A (de) 1972-10-15
FR2149384B1 (ref) 1974-07-12
JPS4831878A (ref) 1973-04-26

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Legal Events

Date Code Title Description
ST Notification of lapse