CH529446A - Selbstausrichtendes Maskierverfahren, insbesondere für Halbleiteroberflächen - Google Patents
Selbstausrichtendes Maskierverfahren, insbesondere für HalbleiteroberflächenInfo
- Publication number
- CH529446A CH529446A CH1217971A CH1217971A CH529446A CH 529446 A CH529446 A CH 529446A CH 1217971 A CH1217971 A CH 1217971A CH 1217971 A CH1217971 A CH 1217971A CH 529446 A CH529446 A CH 529446A
- Authority
- CH
- Switzerland
- Prior art keywords
- self
- masking process
- semiconductor surfaces
- aligning
- aligning masking
- Prior art date
Links
- 230000000873 masking effect Effects 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1217971A CH529446A (de) | 1971-08-19 | 1971-08-19 | Selbstausrichtendes Maskierverfahren, insbesondere für Halbleiteroberflächen |
DE19722234189 DE2234189A1 (de) | 1971-08-19 | 1972-07-12 | Verfahren zur maskierung von halbleiteroberflaechen |
JP7136472A JPS4831878A (de) | 1971-08-19 | 1972-07-18 | |
FR7228653A FR2149384A1 (en) | 1971-08-19 | 1972-08-03 | Semiconductor component prodn - with automatic precision mask location esp for fets |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1217971A CH529446A (de) | 1971-08-19 | 1971-08-19 | Selbstausrichtendes Maskierverfahren, insbesondere für Halbleiteroberflächen |
Publications (1)
Publication Number | Publication Date |
---|---|
CH529446A true CH529446A (de) | 1972-10-15 |
Family
ID=4380613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1217971A CH529446A (de) | 1971-08-19 | 1971-08-19 | Selbstausrichtendes Maskierverfahren, insbesondere für Halbleiteroberflächen |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS4831878A (de) |
CH (1) | CH529446A (de) |
DE (1) | DE2234189A1 (de) |
FR (1) | FR2149384A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2424629A1 (fr) * | 1978-04-28 | 1979-11-23 | Ates Componenti Elettron | Processus de fabrication d'elements resistants pour circuits integres |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3426421A1 (de) * | 1984-07-18 | 1986-01-23 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum herstellen einer halbleiteranordnung |
-
1971
- 1971-08-19 CH CH1217971A patent/CH529446A/de not_active IP Right Cessation
-
1972
- 1972-07-12 DE DE19722234189 patent/DE2234189A1/de active Pending
- 1972-07-18 JP JP7136472A patent/JPS4831878A/ja active Pending
- 1972-08-03 FR FR7228653A patent/FR2149384A1/fr active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2424629A1 (fr) * | 1978-04-28 | 1979-11-23 | Ates Componenti Elettron | Processus de fabrication d'elements resistants pour circuits integres |
Also Published As
Publication number | Publication date |
---|---|
FR2149384A1 (en) | 1973-03-30 |
DE2234189A1 (de) | 1973-03-01 |
JPS4831878A (de) | 1973-04-26 |
FR2149384B1 (de) | 1974-07-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |