FI20095602A - Mikromekaaninen säädettävä Fabry-Perot -interferometri, välituote sekä menetelmä niiden valmistamiseksi - Google Patents

Mikromekaaninen säädettävä Fabry-Perot -interferometri, välituote sekä menetelmä niiden valmistamiseksi Download PDF

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Publication number
FI20095602A
FI20095602A FI20095602A FI20095602A FI20095602A FI 20095602 A FI20095602 A FI 20095602A FI 20095602 A FI20095602 A FI 20095602A FI 20095602 A FI20095602 A FI 20095602A FI 20095602 A FI20095602 A FI 20095602A
Authority
FI
Finland
Prior art keywords
manufacture
perot
micromechanical fabry
adjustable interferometer
interferometer
Prior art date
Application number
FI20095602A
Other languages
English (en)
Swedish (sv)
Other versions
FI124072B (fi
FI20095602A0 (fi
Inventor
Martti Blomberg
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI20095602A priority Critical patent/FI124072B/fi
Publication of FI20095602A0 publication Critical patent/FI20095602A0/fi
Priority to JP2012512412A priority patent/JP5714570B2/ja
Priority to US13/319,337 priority patent/US9235043B2/en
Priority to EP10780112.8A priority patent/EP2438411B1/en
Priority to PCT/FI2010/050434 priority patent/WO2010136654A1/en
Priority to CN201080023427.3A priority patent/CN102449447B/zh
Publication of FI20095602A publication Critical patent/FI20095602A/fi
Application granted granted Critical
Publication of FI124072B publication Critical patent/FI124072B/fi

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0013—Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/115—Roughening a surface
FI20095602A 2009-05-29 2009-05-29 Mikromekaaninen säädettävä Fabry-Perot -interferometri, välituote ja menetelmä niiden valmistamiseksi FI124072B (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20095602A FI124072B (fi) 2009-05-29 2009-05-29 Mikromekaaninen säädettävä Fabry-Perot -interferometri, välituote ja menetelmä niiden valmistamiseksi
JP2012512412A JP5714570B2 (ja) 2009-05-29 2010-05-28 調節可能な微小機械ファブリ・ペロー干渉計、中間産物、およびその製造方法
US13/319,337 US9235043B2 (en) 2009-05-29 2010-05-28 Micromechanical tunable Fabry-Perot interferometer, an intermediate product, and a method for producing the same
EP10780112.8A EP2438411B1 (en) 2009-05-29 2010-05-28 Micromechanical tunable fabry-perot interferometer, an intermediate product, and a method for producing the same
PCT/FI2010/050434 WO2010136654A1 (en) 2009-05-29 2010-05-28 Micromechanical tunable fabry-perot interferometer, an intermediate product, and a method for producing the same
CN201080023427.3A CN102449447B (zh) 2009-05-29 2010-05-28 微机械可调法布里珀罗干涉仪、中间产品及其制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20095602 2009-05-29
FI20095602A FI124072B (fi) 2009-05-29 2009-05-29 Mikromekaaninen säädettävä Fabry-Perot -interferometri, välituote ja menetelmä niiden valmistamiseksi

Publications (3)

Publication Number Publication Date
FI20095602A0 FI20095602A0 (fi) 2009-05-29
FI20095602A true FI20095602A (fi) 2010-11-30
FI124072B FI124072B (fi) 2014-03-14

Family

ID=40680778

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20095602A FI124072B (fi) 2009-05-29 2009-05-29 Mikromekaaninen säädettävä Fabry-Perot -interferometri, välituote ja menetelmä niiden valmistamiseksi

Country Status (6)

Country Link
US (1) US9235043B2 (fi)
EP (1) EP2438411B1 (fi)
JP (1) JP5714570B2 (fi)
CN (1) CN102449447B (fi)
FI (1) FI124072B (fi)
WO (1) WO2010136654A1 (fi)

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JP6517309B1 (ja) * 2017-11-24 2019-05-22 浜松ホトニクス株式会社 異物除去方法、及び光検出装置の製造方法
DE102018205778A1 (de) 2018-04-17 2019-10-17 Robert Bosch Gmbh Interferometer und Verfahren zum Herstellen eines Interferometers
DE102018211325A1 (de) * 2018-07-10 2020-01-16 Robert Bosch Gmbh Fabry-Perot-Interferometer-Einheit und Verfahren zur Herstellung einer Fabry-Perot-Interferometer-Einheit
DE102018217054A1 (de) 2018-10-05 2020-04-09 Robert Bosch Gmbh Spiegeleinrichtung für eine Interferometereinrichtung, Interferometereinrichtung, Verfahren zur Herstellung einer Spiegeleinrichtung für eine Interferometereinrichtung, und Verfahren zur Herstellung einer Interferometereinrichtung
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Also Published As

Publication number Publication date
WO2010136654A1 (en) 2010-12-02
EP2438411A4 (en) 2015-05-06
US20120050751A1 (en) 2012-03-01
US9235043B2 (en) 2016-01-12
FI124072B (fi) 2014-03-14
EP2438411A1 (en) 2012-04-11
JP5714570B2 (ja) 2015-05-07
CN102449447B (zh) 2014-06-18
CN102449447A (zh) 2012-05-09
FI20095602A0 (fi) 2009-05-29
EP2438411B1 (en) 2023-05-10
JP2012528345A (ja) 2012-11-12

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