FI122011B - Menetelmä elektroniikkamoduulin tuottamiseksi, välituote elektroniikkamoduulin valmistamiseksi, muistielementti, painettu elektroniikkatuote, anturilaite sekä RFID-tunniste - Google Patents
Menetelmä elektroniikkamoduulin tuottamiseksi, välituote elektroniikkamoduulin valmistamiseksi, muistielementti, painettu elektroniikkatuote, anturilaite sekä RFID-tunniste Download PDFInfo
- Publication number
- FI122011B FI122011B FI20075429A FI20075429A FI122011B FI 122011 B FI122011 B FI 122011B FI 20075429 A FI20075429 A FI 20075429A FI 20075429 A FI20075429 A FI 20075429A FI 122011 B FI122011 B FI 122011B
- Authority
- FI
- Finland
- Prior art keywords
- layer
- memory
- intermediate product
- electrode
- layers
- Prior art date
Links
- 230000015654 memory Effects 0.000 title claims description 124
- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 239000000463 material Substances 0.000 claims description 67
- 238000005245 sintering Methods 0.000 claims description 51
- 238000000034 method Methods 0.000 claims description 46
- 239000013067 intermediate product Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 19
- 230000009466 transformation Effects 0.000 claims description 19
- 239000002105 nanoparticle Substances 0.000 claims description 16
- 230000008569 process Effects 0.000 claims description 12
- 230000003993 interaction Effects 0.000 claims description 9
- 238000007639 printing Methods 0.000 claims description 7
- 239000000047 product Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000000443 aerosol Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 239000000123 paper Substances 0.000 claims 2
- 239000000654 additive Substances 0.000 claims 1
- 230000000996 additive effect Effects 0.000 claims 1
- 230000001131 transforming effect Effects 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 15
- 230000008901 benefit Effects 0.000 description 9
- 239000011159 matrix material Substances 0.000 description 9
- 238000003825 pressing Methods 0.000 description 6
- 239000000976 ink Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000002082 metal nanoparticle Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000004870 electrical engineering Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000006194 liquid suspension Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 238000009768 microwave sintering Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000011234 nano-particulate material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/64—Manufacture or treatment of solid state devices other than semiconductor devices, or of parts thereof, not peculiar to a single device provided for in groups H01L31/00 - H10K99/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/16—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0009—RRAM elements whose operation depends upon chemical change
- G11C13/0014—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Read Only Memory (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20075429A FI122011B (fi) | 2007-06-08 | 2007-06-08 | Menetelmä elektroniikkamoduulin tuottamiseksi, välituote elektroniikkamoduulin valmistamiseksi, muistielementti, painettu elektroniikkatuote, anturilaite sekä RFID-tunniste |
EP08157721.5A EP2001053B1 (de) | 2007-06-08 | 2008-06-06 | Elektronikmodul, Herstellungsverfahren dafür und Anwendungen |
CN2008101099822A CN101325245B (zh) | 2007-06-08 | 2008-06-06 | 电子模块及其制造方法和应用 |
US12/155,671 US7915097B2 (en) | 2007-06-08 | 2008-06-06 | Electronic module with conductivity transformation region, method of manufacture and applications thereof |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20075429 | 2007-06-08 | ||
FI20075429A FI122011B (fi) | 2007-06-08 | 2007-06-08 | Menetelmä elektroniikkamoduulin tuottamiseksi, välituote elektroniikkamoduulin valmistamiseksi, muistielementti, painettu elektroniikkatuote, anturilaite sekä RFID-tunniste |
Publications (3)
Publication Number | Publication Date |
---|---|
FI20075429A0 FI20075429A0 (fi) | 2007-06-08 |
FI20075429A FI20075429A (fi) | 2008-12-09 |
FI122011B true FI122011B (fi) | 2011-07-15 |
Family
ID=38212400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20075429A FI122011B (fi) | 2007-06-08 | 2007-06-08 | Menetelmä elektroniikkamoduulin tuottamiseksi, välituote elektroniikkamoduulin valmistamiseksi, muistielementti, painettu elektroniikkatuote, anturilaite sekä RFID-tunniste |
Country Status (4)
Country | Link |
---|---|
US (1) | US7915097B2 (de) |
EP (1) | EP2001053B1 (de) |
CN (1) | CN101325245B (de) |
FI (1) | FI122011B (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI124372B (fi) | 2009-11-13 | 2014-07-31 | Teknologian Tutkimuskeskus Vtt | Kerrostettuihin partikkeleihin liittyvä menetelmä ja tuotteet |
CN104347589B (zh) * | 2013-08-02 | 2017-04-05 | 中芯国际集成电路制造(上海)有限公司 | 一种反熔丝结构 |
FI20155964A (fi) * | 2015-12-17 | 2017-06-18 | Teknologian Tutkimuskeskus Vtt Oy | Sähköinen komponentti, piiri, laite, komponentin valmistusmenetelmä ja toimintamenetelmä |
CN112054121B (zh) * | 2020-09-14 | 2023-04-07 | 清华大学 | 阻变存储器、阻变存储器芯片及其制备方法 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5714766A (en) * | 1995-09-29 | 1998-02-03 | International Business Machines Corporation | Nano-structure memory device |
US7294366B2 (en) * | 1998-09-30 | 2007-11-13 | Optomec Design Company | Laser processing for heat-sensitive mesoscale deposition |
US6541792B1 (en) * | 2001-09-14 | 2003-04-01 | Hewlett-Packard Development Company, Llp | Memory device having dual tunnel junction memory cells |
US6821848B2 (en) * | 2002-04-02 | 2004-11-23 | Hewlett-Packard Development Company, L.P. | Tunnel-junction structures and methods |
US7051945B2 (en) * | 2002-09-30 | 2006-05-30 | Nanosys, Inc | Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites |
US6807079B2 (en) * | 2002-11-01 | 2004-10-19 | Hewlett-Packard Development Company, L.P. | Device having a state dependent upon the state of particles dispersed in a carrier |
ATE486368T1 (de) * | 2002-12-18 | 2010-11-15 | Ibm | Verfahren zur selbstanordnung elektronischer schaltkreise und damit hergestellte schaltungen |
KR100973282B1 (ko) * | 2003-05-20 | 2010-07-30 | 삼성전자주식회사 | 나노 결정층을 구비하는 소노스 메모리 장치 |
DE102004003363A1 (de) * | 2004-01-22 | 2005-08-18 | Infineon Technologies Ag | Verfahren zum Herstellen von Nanospeicherelementen zur Ladungsspeicherung |
DE102004007633B4 (de) * | 2004-02-17 | 2010-10-14 | Qimonda Ag | Speicherzelle, Halbleiter-Speicherbauelement und Verfahren zur Herstellung einer Speicherzelle |
EP1723676A4 (de) * | 2004-03-10 | 2009-04-15 | Nanosys Inc | Speicherbausteine mit nano-fähigkeit und anisotrope ladungsträger-arrays |
DE102004020497B8 (de) | 2004-04-26 | 2006-06-14 | Infineon Technologies Ag | Verfahren zur Herstellung von Durchkontaktierungen und Halbleiterbauteil mit derartigen Durchkontaktierungen |
WO2005109516A1 (en) * | 2004-05-06 | 2005-11-17 | Sidense Corp. | Split-channel antifuse array architecture |
US20070057311A1 (en) | 2004-10-29 | 2007-03-15 | Agfa-Gevaert | Conventionally printable non-volatile passive memory element and method of making thereof |
US20060098485A1 (en) * | 2004-10-29 | 2006-05-11 | Agfa-Gevaert | Printable non-volatile passive memory element and method of making thereof |
US20060131555A1 (en) * | 2004-12-22 | 2006-06-22 | Micron Technology, Inc. | Resistance variable devices with controllable channels |
WO2006076606A2 (en) * | 2005-01-14 | 2006-07-20 | Cabot Corporation | Optimized multi-layer printing of electronics and displays |
US20060163744A1 (en) * | 2005-01-14 | 2006-07-27 | Cabot Corporation | Printable electrical conductors |
US7208372B2 (en) * | 2005-01-19 | 2007-04-24 | Sharp Laboratories Of America, Inc. | Non-volatile memory resistor cell with nanotip electrode |
DE102005005938B4 (de) * | 2005-02-09 | 2009-04-30 | Qimonda Ag | Resistives Speicherelement mit verkürzter Löschzeit, Verfahren zur Herstellung und Speicherzellen-Anordnung |
US7507618B2 (en) * | 2005-06-27 | 2009-03-24 | 3M Innovative Properties Company | Method for making electronic devices using metal oxide nanoparticles |
EP1899986B1 (de) | 2005-07-01 | 2014-05-07 | National University of Singapore | Elektrisch leitfähiger verbundstoff |
DE102005035445B4 (de) * | 2005-07-28 | 2007-09-27 | Qimonda Ag | Nichtflüchtige, resistive Speicherzelle auf der Basis von Metalloxid-Nanopartikeln sowie Verfahren zu deren Herstellung und entsprechende Speicherzellenanordnung |
US7297975B2 (en) * | 2005-07-28 | 2007-11-20 | Infineon Technologies Ag | Non-volatile, resistive memory cell based on metal oxide nanoparticles, process for manufacturing the same and memory cell arrangement of the same |
US7491962B2 (en) * | 2005-08-30 | 2009-02-17 | Micron Technology, Inc. | Resistance variable memory device with nanoparticle electrode and method of fabrication |
JP2007073969A (ja) * | 2005-09-07 | 2007-03-22 | Samsung Electronics Co Ltd | 電荷トラップ型メモリ素子及びその製造方法 |
KR100790861B1 (ko) * | 2005-10-21 | 2008-01-03 | 삼성전자주식회사 | 나노 도트를 포함하는 저항성 메모리 소자 및 그 제조 방법 |
FI121562B (fi) | 2006-07-21 | 2010-12-31 | Valtion Teknillinen | Menetelmä johteiden ja puolijohteiden valmistamiseksi |
EP2050319A4 (de) | 2006-07-21 | 2010-12-08 | Valtion Teknillinen | Verfahren zur herstellung von leitern und halbleitern |
-
2007
- 2007-06-08 FI FI20075429A patent/FI122011B/fi not_active IP Right Cessation
-
2008
- 2008-06-06 CN CN2008101099822A patent/CN101325245B/zh not_active Expired - Fee Related
- 2008-06-06 US US12/155,671 patent/US7915097B2/en not_active Expired - Fee Related
- 2008-06-06 EP EP08157721.5A patent/EP2001053B1/de not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
EP2001053A2 (de) | 2008-12-10 |
FI20075429A0 (fi) | 2007-06-08 |
FI20075429A (fi) | 2008-12-09 |
US20080303583A1 (en) | 2008-12-11 |
EP2001053B1 (de) | 2014-10-29 |
CN101325245A (zh) | 2008-12-17 |
EP2001053A3 (de) | 2012-03-28 |
US7915097B2 (en) | 2011-03-29 |
CN101325245B (zh) | 2011-06-22 |
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