FI111573B - Pietsosähköinen sinkkioksidikidekalvo ja menetelmä sen muodostamiseksi - Google Patents

Pietsosähköinen sinkkioksidikidekalvo ja menetelmä sen muodostamiseksi

Info

Publication number
FI111573B
FI111573B FI940099A FI940099A FI111573B FI 111573 B FI111573 B FI 111573B FI 940099 A FI940099 A FI 940099A FI 940099 A FI940099 A FI 940099A FI 111573 B FI111573 B FI 111573B
Authority
FI
Finland
Prior art keywords
formation
zinc oxide
crystal film
oxide crystal
piezoelectric zinc
Prior art date
Application number
FI940099A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI940099A0 (fi
FI940099A (fi
Inventor
Jun Koike
Hideharu Ieki
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of FI940099A0 publication Critical patent/FI940099A0/fi
Publication of FI940099A publication Critical patent/FI940099A/fi
Application granted granted Critical
Publication of FI111573B publication Critical patent/FI111573B/fi

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
FI940099A 1993-01-14 1994-01-10 Pietsosähköinen sinkkioksidikidekalvo ja menetelmä sen muodostamiseksi FI111573B (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP536593A JP3198691B2 (ja) 1993-01-14 1993-01-14 酸化亜鉛圧電結晶膜

Publications (3)

Publication Number Publication Date
FI940099A0 FI940099A0 (fi) 1994-01-10
FI940099A FI940099A (fi) 1994-07-15
FI111573B true FI111573B (fi) 2003-08-15

Family

ID=11609146

Family Applications (1)

Application Number Title Priority Date Filing Date
FI940099A FI111573B (fi) 1993-01-14 1994-01-10 Pietsosähköinen sinkkioksidikidekalvo ja menetelmä sen muodostamiseksi

Country Status (5)

Country Link
US (1) US5432397A (de)
EP (1) EP0608059B1 (de)
JP (1) JP3198691B2 (de)
DE (1) DE69423525T2 (de)
FI (1) FI111573B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6127768A (en) * 1997-05-09 2000-10-03 Kobe Steel Usa, Inc. Surface acoustic wave and bulk acoustic wave devices using a Zn.sub.(1-X) Yx O piezoelectric layer device
US6303011B1 (en) * 1997-06-23 2001-10-16 Kabushiki Kaisha Riken Gas sensor
JP3878339B2 (ja) 1997-11-14 2007-02-07 株式会社リケン 窒素酸化物センサ
JP3399392B2 (ja) * 1999-02-19 2003-04-21 株式会社村田製作所 半導体発光素子、およびその製造方法
US6590336B1 (en) * 1999-08-31 2003-07-08 Murata Manufacturing Co., Ltd. Light emitting device having a polar plane piezoelectric film and manufacture thereof
KR100610580B1 (ko) * 2000-03-27 2006-08-09 토호쿠 테크노 아르크 코포레이션 리미티드 산화아연 반도체 재료
GB2361480B (en) * 2000-04-19 2002-06-19 Murata Manufacturing Co Method for forming p-type semiconductor film and light emitting device using the same
JP2003063893A (ja) * 2001-06-15 2003-03-05 Murata Mfg Co Ltd ＺｎＯ／サファイア基板及びその製造方法
JP4817350B2 (ja) 2001-07-19 2011-11-16 株式会社 東北テクノアーチ 酸化亜鉛半導体部材の製造方法
JP2006094140A (ja) 2004-09-24 2006-04-06 Murata Mfg Co Ltd 圧電共振子及びその製造方法、圧電フィルタ並びにデュプレクサ
CN102694087B (zh) 2006-04-25 2015-02-25 新加坡国立大学 电子器件及其制造方法
FR3125459B1 (fr) 2021-07-22 2023-11-17 Centre Nat Rech Scient Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno.

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3664867A (en) * 1969-11-24 1972-05-23 North American Rockwell Composite structure of zinc oxide deposited epitaxially on sapphire
JPS5133898A (de) * 1974-09-17 1976-03-23 Hitachi Ltd
JPS5830749B2 (ja) * 1977-07-28 1983-07-01 株式会社村田製作所 酸化亜鉛の圧電結晶膜
JPS5941602B2 (ja) * 1978-04-18 1984-10-08 松下電器産業株式会社 表面弾性波素子
JPS5797214A (en) * 1980-12-08 1982-06-16 Matsushita Electric Ind Co Ltd Transducer for surface wave
DE3375590D1 (en) * 1982-06-22 1988-03-10 Hughes Aircraft Co Low temperature process for depositing epitaxial layers
JPS60124109A (ja) * 1983-12-09 1985-07-03 Clarion Co Ltd 表面弾性波素子
JPH0340510A (ja) * 1989-07-06 1991-02-21 Murata Mfg Co Ltd 弾性表面波装置

Also Published As

Publication number Publication date
EP0608059B1 (de) 2000-03-22
DE69423525T2 (de) 2000-07-20
EP0608059A2 (de) 1994-07-27
JP3198691B2 (ja) 2001-08-13
US5432397A (en) 1995-07-11
FI940099A0 (fi) 1994-01-10
JPH06216699A (ja) 1994-08-05
EP0608059A3 (de) 1995-11-02
FI940099A (fi) 1994-07-15
DE69423525D1 (de) 2000-04-27

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Legal Events

Date Code Title Description
MA Patent expired