DE69423525D1 - Piezoelektrischer kristalliner Zinkoxidfilm - Google Patents

Piezoelektrischer kristalliner Zinkoxidfilm

Info

Publication number
DE69423525D1
DE69423525D1 DE69423525T DE69423525T DE69423525D1 DE 69423525 D1 DE69423525 D1 DE 69423525D1 DE 69423525 T DE69423525 T DE 69423525T DE 69423525 T DE69423525 T DE 69423525T DE 69423525 D1 DE69423525 D1 DE 69423525D1
Authority
DE
Germany
Prior art keywords
oxide film
zinc oxide
crystalline zinc
piezoelectric crystalline
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69423525T
Other languages
English (en)
Other versions
DE69423525T2 (de
Inventor
Jun Koike
Hideharu Ieki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69423525D1 publication Critical patent/DE69423525D1/de
Application granted granted Critical
Publication of DE69423525T2 publication Critical patent/DE69423525T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE1994623525 1993-01-14 1994-01-11 Piezoelektrischer kristalliner Zinkoxidfilm Expired - Lifetime DE69423525T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP536593A JP3198691B2 (ja) 1993-01-14 1993-01-14 酸化亜鉛圧電結晶膜

Publications (2)

Publication Number Publication Date
DE69423525D1 true DE69423525D1 (de) 2000-04-27
DE69423525T2 DE69423525T2 (de) 2000-07-20

Family

ID=11609146

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994623525 Expired - Lifetime DE69423525T2 (de) 1993-01-14 1994-01-11 Piezoelektrischer kristalliner Zinkoxidfilm

Country Status (5)

Country Link
US (1) US5432397A (de)
EP (1) EP0608059B1 (de)
JP (1) JP3198691B2 (de)
DE (1) DE69423525T2 (de)
FI (1) FI111573B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6127768A (en) * 1997-05-09 2000-10-03 Kobe Steel Usa, Inc. Surface acoustic wave and bulk acoustic wave devices using a Zn.sub.(1-X) Yx O piezoelectric layer device
US6303011B1 (en) * 1997-06-23 2001-10-16 Kabushiki Kaisha Riken Gas sensor
JP3878339B2 (ja) 1997-11-14 2007-02-07 株式会社リケン 窒素酸化物センサ
JP3399392B2 (ja) * 1999-02-19 2003-04-21 株式会社村田製作所 半導体発光素子、およびその製造方法
US6590336B1 (en) * 1999-08-31 2003-07-08 Murata Manufacturing Co., Ltd. Light emitting device having a polar plane piezoelectric film and manufacture thereof
US6936188B1 (en) 2000-03-27 2005-08-30 Tohoku Techno Arch Co., Ltd. Zinc oxide semiconductor material
GB2361480B (en) * 2000-04-19 2002-06-19 Murata Manufacturing Co Method for forming p-type semiconductor film and light emitting device using the same
JP2003063893A (ja) * 2001-06-15 2003-03-05 Murata Mfg Co Ltd ＺｎＯ／サファイア基板及びその製造方法
JP4817350B2 (ja) 2001-07-19 2011-11-16 株式会社 東北テクノアーチ 酸化亜鉛半導体部材の製造方法
JP2006094140A (ja) 2004-09-24 2006-04-06 Murata Mfg Co Ltd 圧電共振子及びその製造方法、圧電フィルタ並びにデュプレクサ
WO2007123496A1 (en) 2006-04-25 2007-11-01 National University Of Singapore Method of zinc oxide film grown on the epitaxial lateral overgrowth gallium nitride template
FR3125459B1 (fr) 2021-07-22 2023-11-17 Centre Nat Rech Scient Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno.

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3664867A (en) * 1969-11-24 1972-05-23 North American Rockwell Composite structure of zinc oxide deposited epitaxially on sapphire
JPS5133898A (de) * 1974-09-17 1976-03-23 Hitachi Ltd
JPS5830749B2 (ja) * 1977-07-28 1983-07-01 株式会社村田製作所 酸化亜鉛の圧電結晶膜
JPS5941602B2 (ja) * 1978-04-18 1984-10-08 松下電器産業株式会社 表面弾性波素子
JPS5797214A (en) * 1980-12-08 1982-06-16 Matsushita Electric Ind Co Ltd Transducer for surface wave
AU559363B2 (en) * 1982-06-22 1987-03-05 Hughes Aircraft Co. Low temperature process for depositing epitaxial layers
JPS60124109A (ja) * 1983-12-09 1985-07-03 Clarion Co Ltd 表面弾性波素子
JPH0340510A (ja) * 1989-07-06 1991-02-21 Murata Mfg Co Ltd 弾性表面波装置

Also Published As

Publication number Publication date
EP0608059A3 (de) 1995-11-02
EP0608059B1 (de) 2000-03-22
FI111573B (fi) 2003-08-15
JPH06216699A (ja) 1994-08-05
FI940099A (fi) 1994-07-15
DE69423525T2 (de) 2000-07-20
US5432397A (en) 1995-07-11
JP3198691B2 (ja) 2001-08-13
EP0608059A2 (de) 1994-07-27
FI940099A0 (fi) 1994-01-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition