KR950006397U - 스퍼터링 박막 형성장치 - Google Patents

스퍼터링 박막 형성장치

Info

Publication number
KR950006397U
KR950006397U KR2019930015202U KR930015202U KR950006397U KR 950006397 U KR950006397 U KR 950006397U KR 2019930015202 U KR2019930015202 U KR 2019930015202U KR 930015202 U KR930015202 U KR 930015202U KR 950006397 U KR950006397 U KR 950006397U
Authority
KR
South Korea
Prior art keywords
thin film
film forming
forming device
sputtering thin
sputtering
Prior art date
Application number
KR2019930015202U
Other languages
English (en)
Other versions
KR960000403Y1 (ko
Inventor
제정호
박승균
Original Assignee
포항종합제철 주식회사
재단법인산업과학기술연구소
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 포항종합제철 주식회사, 재단법인산업과학기술연구소 filed Critical 포항종합제철 주식회사
Priority to KR2019930015202U priority Critical patent/KR960000403Y1/ko
Publication of KR950006397U publication Critical patent/KR950006397U/ko
Application granted granted Critical
Publication of KR960000403Y1 publication Critical patent/KR960000403Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32651—Shields, e.g. dark space shields, Faraday shields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
KR2019930015202U 1993-08-09 1993-08-09 스퍼터링 박막 형성장치 KR960000403Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930015202U KR960000403Y1 (ko) 1993-08-09 1993-08-09 스퍼터링 박막 형성장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930015202U KR960000403Y1 (ko) 1993-08-09 1993-08-09 스퍼터링 박막 형성장치

Publications (2)

Publication Number Publication Date
KR950006397U true KR950006397U (ko) 1995-03-20
KR960000403Y1 KR960000403Y1 (ko) 1996-01-08

Family

ID=19360813

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930015202U KR960000403Y1 (ko) 1993-08-09 1993-08-09 스퍼터링 박막 형성장치

Country Status (1)

Country Link
KR (1) KR960000403Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170078132A (ko) * 2015-12-29 2017-07-07 엘지전자 주식회사 가루얼음 생성장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170078132A (ko) * 2015-12-29 2017-07-07 엘지전자 주식회사 가루얼음 생성장치
US10704819B2 (en) 2015-12-29 2020-07-07 Lg Electronics Inc. Powdered ice maker

Also Published As

Publication number Publication date
KR960000403Y1 (ko) 1996-01-08

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