FR3125459B1 - Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno. - Google Patents

Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno. Download PDF

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Publication number
FR3125459B1
FR3125459B1 FR2107939A FR2107939A FR3125459B1 FR 3125459 B1 FR3125459 B1 FR 3125459B1 FR 2107939 A FR2107939 A FR 2107939A FR 2107939 A FR2107939 A FR 2107939A FR 3125459 B1 FR3125459 B1 FR 3125459B1
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France
Prior art keywords
layer
self
zno
crystals
quartz
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Active
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FR2107939A
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English (en)
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FR3125459A1 (fr
Inventor
Adrien Carretero
Fuentes David Sanchez
Lorenzo Garcia
Ricardo Garcia
Samir Bouisri
Vico Javier Moral
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universitat Autonoma de Barcelona UAB
Centre National de la Recherche Scientifique CNRS
Universite de Montpellier I
Universite de Montpellier
Original Assignee
Universitat Autonoma de Barcelona UAB
Centre National de la Recherche Scientifique CNRS
Universite de Montpellier I
Universite de Montpellier
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR2107939A priority Critical patent/FR3125459B1/fr
Application filed by Universitat Autonoma de Barcelona UAB, Centre National de la Recherche Scientifique CNRS, Universite de Montpellier I, Universite de Montpellier filed Critical Universitat Autonoma de Barcelona UAB
Priority to PCT/FR2022/051467 priority patent/WO2023002140A1/fr
Priority to PCT/FR2022/051466 priority patent/WO2023002139A1/fr
Priority to EP22754134.9A priority patent/EP4374001A1/fr
Priority to JP2024503902A priority patent/JP2024527870A/ja
Priority to CN202280050735.8A priority patent/CN117677736A/zh
Priority to EP22754133.1A priority patent/EP4374000A1/fr
Publication of FR3125459A1 publication Critical patent/FR3125459A1/fr
Application granted granted Critical
Publication of FR3125459B1 publication Critical patent/FR3125459B1/fr
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B7/00—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions
    • C30B7/02—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions by evaporation of the solvent
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/20—Aluminium oxides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/02—Heat treatment
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B5/00—Single-crystal growth from gels

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Laminated Bodies (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

La présente invention concerne un matériau multicouches, comprenant un support solide revêtu au moins partiellement d’une couche tampon de quartz-α texturé (100), dont la direction cristallographique [100] du quartz α est parallèle à la direction cristallographique [100] du silicium (100) ; et sur ladite couche tampon de (100) quartz-α, une couche de micro-cristaux unidimensionnels de (110) ZnO épitaxié (ou microfils de ZnO épitaxié), lesdits micro-cristaux étant auto-assemblés. La présente invention concerne également un procédé de fabrication d’un tel matériau multicouches, ainsi que l’utilisation dans l’industrie dans différents domaines technologiques. Figure pour l’abrégé : 8
FR2107939A 2021-07-22 2021-07-22 Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno. Active FR3125459B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR2107939A FR3125459B1 (fr) 2021-07-22 2021-07-22 Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno.
PCT/FR2022/051466 WO2023002139A1 (fr) 2021-07-22 2022-07-21 Pseudo-substrat epitaxie piezoelectrique, utilisation et procede de preparation d'un tel pseudo-substrat
EP22754134.9A EP4374001A1 (fr) 2021-07-22 2022-07-21 Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno
JP2024503902A JP2024527870A (ja) 2021-07-22 2022-07-21 自己組織化された一次元ＺｎＯ微結晶の層を含む材料
PCT/FR2022/051467 WO2023002140A1 (fr) 2021-07-22 2022-07-21 Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno
CN202280050735.8A CN117677736A (zh) 2021-07-22 2022-07-21 包括自组装一维ZnO微晶层的材料
EP22754133.1A EP4374000A1 (fr) 2021-07-22 2022-07-21 Pseudo-substrat epitaxie piezoelectrique, utilisation et procede de preparation d'un tel pseudo-substrat

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2107939 2021-07-22
FR2107939A FR3125459B1 (fr) 2021-07-22 2021-07-22 Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno.

Publications (2)

Publication Number Publication Date
FR3125459A1 FR3125459A1 (fr) 2023-01-27
FR3125459B1 true FR3125459B1 (fr) 2023-11-17

Family

ID=79270012

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2107939A Active FR3125459B1 (fr) 2021-07-22 2021-07-22 Materiau comprenant une couche de micro-cristaux unidimensionnels auto-assembles de zno.

Country Status (5)

Country Link
EP (2) EP4374000A1 (fr)
JP (1) JP2024527870A (fr)
CN (1) CN117677736A (fr)
FR (1) FR3125459B1 (fr)
WO (2) WO2023002139A1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3198691B2 (ja) 1993-01-14 2001-08-13 株式会社村田製作所 酸化亜鉛圧電結晶膜
FI125154B (en) 2012-06-29 2015-06-15 Mia Kuusela Arrangements that can be converted into baby care items
FR2993580B1 (fr) 2012-07-23 2016-12-23 Univ Pierre Et Marie Curie (Paris 6) Procede de preparation d'une couche de quartz-alpha epitaxiee sur support solide, materiau obtenu et applications
WO2020140165A1 (fr) 2018-12-30 2020-07-09 瑞声声学科技(深圳)有限公司 Corps unique de haut-parleur

Also Published As

Publication number Publication date
WO2023002140A1 (fr) 2023-01-26
CN117677736A (zh) 2024-03-08
EP4374001A1 (fr) 2024-05-29
FR3125459A1 (fr) 2023-01-27
WO2023002139A1 (fr) 2023-01-26
JP2024527870A (ja) 2024-07-26
EP4374000A1 (fr) 2024-05-29

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