FI110581B - Menetelmä ja laite alustakerroksen lakkaamista tai päällystystä varten - Google Patents

Menetelmä ja laite alustakerroksen lakkaamista tai päällystystä varten Download PDF

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Publication number
FI110581B
FI110581B FI972639A FI972639A FI110581B FI 110581 B FI110581 B FI 110581B FI 972639 A FI972639 A FI 972639A FI 972639 A FI972639 A FI 972639A FI 110581 B FI110581 B FI 110581B
Authority
FI
Finland
Prior art keywords
coating
container
substrate
liquid medium
capillary
Prior art date
Application number
FI972639A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI972639A (fi
FI972639A0 (fi
Inventor
Karl Appich
Manfred Stummer
Original Assignee
Steag Hamatech Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Hamatech Ag filed Critical Steag Hamatech Ag
Publication of FI972639A publication Critical patent/FI972639A/fi
Publication of FI972639A0 publication Critical patent/FI972639A0/fi
Application granted granted Critical
Publication of FI110581B publication Critical patent/FI110581B/fi

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
FI972639A 1994-12-22 1997-06-19 Menetelmä ja laite alustakerroksen lakkaamista tai päällystystä varten FI110581B (fi)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DE4445985 1994-12-22
DE4445985A DE4445985A1 (de) 1994-12-22 1994-12-22 Verfahren und Vorrichtung zur Belackung oder Beschichtung eines Substrats
PCT/EP1995/000905 WO1996019295A1 (fr) 1994-12-22 1995-03-11 Procede et dispositif de laquage ou d'enduction d'un substrat
EP9500905 1995-03-11
US08/547,779 US5654041A (en) 1994-12-22 1995-10-25 Method and device for lacquering or coating of a substrate by a capillary slot
US54777995 1995-10-25

Publications (3)

Publication Number Publication Date
FI972639A FI972639A (fi) 1997-06-19
FI972639A0 FI972639A0 (fi) 1997-06-19
FI110581B true FI110581B (fi) 2003-02-28

Family

ID=25943169

Family Applications (1)

Application Number Title Priority Date Filing Date
FI972639A FI110581B (fi) 1994-12-22 1997-06-19 Menetelmä ja laite alustakerroksen lakkaamista tai päällystystä varten

Country Status (7)

Country Link
US (1) US5654041A (fr)
JP (1) JP2878171B2 (fr)
CA (1) CA2148654C (fr)
DE (1) DE4445985A1 (fr)
FI (1) FI110581B (fr)
NO (1) NO972676L (fr)
WO (1) WO1996019295A1 (fr)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5737178A (en) * 1997-03-06 1998-04-07 Applied Materials, Inc. Monocrystalline ceramic coating having integral bonding interconnects for electrostatic chucks
US6529362B2 (en) 1997-03-06 2003-03-04 Applied Materials Inc. Monocrystalline ceramic electrostatic chuck
DE59913661D1 (de) * 1998-12-17 2006-08-24 Guardian Industries Vorrichtung und Verfahren zum Beschichten eines ebenen Substrates
JP2001113214A (ja) * 1999-10-19 2001-04-24 Casio Comput Co Ltd 薄膜の形成方法、及び形成装置
JP2003173015A (ja) * 2001-09-28 2003-06-20 Hoya Corp グレートーンマスクの製造方法
JP4481688B2 (ja) * 2003-04-10 2010-06-16 Ｈｏｙａ株式会社 基板処理装置，塗布装置、塗布方法、及び、フォトマスクの製造方法
JP2005051220A (ja) * 2003-07-17 2005-02-24 Hoya Corp レジスト膜付基板の製造方法
US20050204334A1 (en) * 2004-03-15 2005-09-15 Ramco Systems Limited Component based software system
JP4169719B2 (ja) * 2004-03-30 2008-10-22 Ｈｏｙａ株式会社 レジスト膜付基板の製造方法
US7905194B2 (en) * 2006-06-23 2011-03-15 The Procter & Gamble Company Apparatus for gluing the tail of a convolutely wound web material thereto
JP2008168254A (ja) * 2007-01-15 2008-07-24 Hoya Corp 塗布方法及び塗布装置、並びにフォトマスクブランクの製造方法
JP5073375B2 (ja) * 2007-06-13 2012-11-14 Ｈｏｙａ株式会社 マスクブランクの製造方法及びフォトマスクの製造方法
TWI471682B (zh) * 2007-06-29 2015-02-01 Hoya Corp 遮罩基底之製造方法及塗布裝置
JP5086708B2 (ja) * 2007-06-29 2012-11-28 Ｈｏｙａ株式会社 マスクブランクの製造方法及び塗布装置
JP2009010247A (ja) * 2007-06-29 2009-01-15 Hoya Corp マスクブランクの製造方法及び塗布装置
US8039052B2 (en) * 2007-09-06 2011-10-18 Intermolecular, Inc. Multi-region processing system and heads
KR101362555B1 (ko) * 2009-02-16 2014-02-13 오사카 유니버시티 입자막의 제조장치 및 입자막의 제조방법
DE102011081980B4 (de) * 2011-09-01 2023-07-06 Gebr. Schmid Gmbh & Co. Vorrichtung zum Benetzen von flachen Substraten und Anlage mit einer solchen Vorrichtung
KR20140069677A (ko) * 2012-11-29 2014-06-10 삼성디스플레이 주식회사 기판 프린팅 장치 및 기판 프린팅 방법
JP5401621B2 (ja) * 2013-03-15 2014-01-29 Ｈｏｙａ株式会社 塗布方法及び塗布装置、並びにフォトマスクブランクの製造方法
DE102014106404A1 (de) * 2014-05-07 2015-11-12 Khs Gmbh Füllvorrichtung
JP6272138B2 (ja) * 2014-05-22 2018-01-31 東京エレクトロン株式会社 塗布処理装置
US9827587B2 (en) * 2014-08-28 2017-11-28 The Boeing Company Apparatuses and methods for applying viscous material to a fastener
US10201823B2 (en) * 2016-12-19 2019-02-12 Stephen Gliksman Paint sprayer attachment
CN109746157B (zh) * 2019-03-15 2023-09-15 杭州柏医健康科技有限公司 垂直方向自动涂膜机
CN110899045A (zh) * 2019-11-05 2020-03-24 湛江德利车辆部件有限公司 一种零件自动涂胶装置
CN112934610B (zh) * 2021-01-29 2022-10-25 重庆市九龙橡胶制品制造有限公司 轮胎用钢丝上胶结构
CN113893997B (zh) * 2021-09-26 2023-02-10 浙江航威专用设备有限公司 一种狭缝涂布头
CN114713433A (zh) * 2022-04-14 2022-07-08 胡云龙 一种聚氨酯漆包线生产系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2046596A (en) * 1932-01-13 1936-07-07 Patent Button Co Apparatus for uniformly coating flat surfaces
DE2204625A1 (de) * 1972-02-01 1973-08-09 Schildkroet Spielwaren Benetzungsvorrichtung
US4840821A (en) * 1985-05-27 1989-06-20 Canon Kabushiki Kaisha Method of and apparatus for forming film
US5203922A (en) * 1988-08-15 1993-04-20 Fuji Photo Film Co., Ltd. Application device
IT1241807B (it) * 1990-10-17 1994-02-01 Perini Navi Spa Apparecchiatura per incollare il lembo finale di rotoli di materiale nastriforme
DE4121792A1 (de) * 1991-07-02 1993-01-07 Kolbus Gmbh & Co Kg Duesenauftragssystem
DE4130432C2 (de) * 1991-09-13 1995-04-06 Kuesters Eduard Maschf Auftragselement für flüssiges, schaumförmiges oder pastenförmiges Auftragsmedium
US5455062A (en) * 1992-05-28 1995-10-03 Steag Microtech Gmbh Sternenfels Capillary device for lacquering or coating plates or disks
JP3220265B2 (ja) * 1992-12-28 2001-10-22 株式会社康井精機 塗工装置
DE59309164D1 (de) * 1993-05-05 1999-01-07 Steag Micro Tech Gmbh Vorrichtung zur belackung oder beschichtung von platten oder scheiben
DE69427954T2 (de) * 1993-05-27 2002-04-04 Dai Nippon Printing Co., Ltd. Verfahren und vorrichtung zum flüssigkeitsauftrag

Also Published As

Publication number Publication date
US5654041A (en) 1997-08-05
FI972639A (fi) 1997-06-19
DE4445985A1 (de) 1996-06-27
JPH08224528A (ja) 1996-09-03
FI972639A0 (fi) 1997-06-19
CA2148654A1 (fr) 1996-06-23
JP2878171B2 (ja) 1999-04-05
NO972676D0 (no) 1997-06-11
WO1996019295A1 (fr) 1996-06-27
CA2148654C (fr) 2000-08-15
NO972676L (no) 1997-06-11

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