FI110311B - Förfarande och anordning för eliminering av substanser från gaser - Google Patents

Förfarande och anordning för eliminering av substanser från gaser Download PDF

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Publication number
FI110311B
FI110311B FI991628A FI991628A FI110311B FI 110311 B FI110311 B FI 110311B FI 991628 A FI991628 A FI 991628A FI 991628 A FI991628 A FI 991628A FI 110311 B FI110311 B FI 110311B
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FI
Finland
Prior art keywords
reaction
gas phase
large surface
gases
gas
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Application number
FI991628A
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English (en)
Finnish (fi)
Other versions
FI991628A (sv
Inventor
Sven Lindfors
Jaakko Hyvaerinen
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Asm Microchemistry Oy
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Publication date
Application filed by Asm Microchemistry Oy filed Critical Asm Microchemistry Oy
Priority to FI991628A priority Critical patent/FI110311B/sv
Priority to TW089114140A priority patent/TW555585B/zh
Priority to US09/619,820 priority patent/US6506352B1/en
Priority to JP2000220782A priority patent/JP2001062244A/ja
Publication of FI991628A publication Critical patent/FI991628A/sv
Priority to US10/205,296 priority patent/US20020187084A1/en
Application granted granted Critical
Publication of FI110311B publication Critical patent/FI110311B/sv
Priority to US12/138,358 priority patent/US7799300B2/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases

Claims (10)

1. Förfarande för avlägsnande av substanser ingäende i avgaser i en ALD-gasfasreaktionsprocess avsedda at avlägsnas, kännetecknad avatt man läter 5 gasema komma i kontakt med ett material med stor yta, vilket halls under väsentligt samma förhällanden som de förhällanden som räder under gasfasprocessen, och man utsätter materialet med stor yta för ytreaktioner med substanser i gaser för att bilda en reaktionsprodukt i fast tillständ pä ytan av materialet med stor yta och för att eliminera substansema frän gasema. 10
2. Förfarande enligt patentkrav 1,kännetecknad av att man läter överskottet av gasfaspulsema frän ALD-processens reaktionsämnen komma i kontakt med ett poröst substrat för att forma en reaktionsprodukt pä materialets yta. 15
3. Förfarande enligt patentkrav 1 eller 2, k ä n n e t e c k n a d av att det porösa materialet omfattar ett material, som är ett poröst grafitmaterial, ett poröst keramiskt material, aluminiumoxid, kiseldioxid eller glasull.
« · • * •' · * 4. Förfarande enligt nägot av de föregäende patentkraven, kännetecknad av att • · • · · ' · ’: 20 ätminstone en del av gasema är gaser, som innehäller klorid. • · • « ·
5. Förfarande enligt nägot av de föregäende patentkraven, kännetecknad av att t · · • · · .. gasfasreaktionsprocessen och reaktionen med materialet med stor yta realiseras i samma I · • · · reaktionsutrymme. 25
• » • · · • » · # ’ · · | 6. Förfarande enligt nägot av patentkraven 1-4, k ä n n e t e c k n a d av att materialet a a a med stor yta är placerat i ett skilt reaktionsutrymme, som är inkopplat med a a ',,, reaktionsutrymmet för gasfasreaktionen. a * a a a • * » * • a •... · 30
7. Anordning för avlägsnande av substanser ingäende i avgaser i en ALD- gasfasreaktionsprocess avsedda att avlägsnas, vilken anordning omfattar en >3 110311 reaktionszon, som är anordnad nedströms med avseende pä reaktionsprocessen, kännetecknad avatt reaktionszonen ä sin sida omfattar ett material med stor yta och som kan hällas under samma förhallanden som de somrader under gasfasprocessen sä, att den nämnda reaktionszonen vidare omfattar gasströmningskanaler för att mata in 5 utsläppsgaser frän gasfasprocessen i materialet med stor yta och gasutloppskanaler för att avlägsna gas ur materialet med stor yta.
8. Anordning enligt patentkrav 7, k ä n n e t e c k n a d av att reaktionszonen är anordnad i stommen till kroppen av den reaktor där gasfasreaktionen realiseras. 10
9. Anordning enligt patentkrav 7, kännetecknad avatt reaktionszonen är anordnad i ett skillt reaktionskärl, som är förbundet med gasfasreaktom och som halls under samma förhallanden.
10. Anordning enligt nägot av patentkraven 7-9, kännetecknad avatt materialet med stor yta är ett poröst grafitmaterial, ett poröst keramiskt material, aluminiumoxid, kiseldioxid eller glasull. • · • » • · * • · • ·
FI991628A 1999-07-20 1999-07-20 Förfarande och anordning för eliminering av substanser från gaser FI110311B (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI991628A FI110311B (sv) 1999-07-20 1999-07-20 Förfarande och anordning för eliminering av substanser från gaser
TW089114140A TW555585B (en) 1999-07-20 2000-07-14 Method and apparatus for removing substances from gases
US09/619,820 US6506352B1 (en) 1999-07-20 2000-07-20 Method for removing substances from gases
JP2000220782A JP2001062244A (ja) 1999-07-20 2000-07-21 気体から物質を除去するための方法と装置
US10/205,296 US20020187084A1 (en) 1999-07-20 2002-07-24 Method and apparatus for removing substances from gases
US12/138,358 US7799300B2 (en) 1999-07-20 2008-06-12 Method and apparatus for removing substances from gases

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI991628A FI110311B (sv) 1999-07-20 1999-07-20 Förfarande och anordning för eliminering av substanser från gaser
FI991628 1999-07-20

Publications (2)

Publication Number Publication Date
FI991628A FI991628A (sv) 2001-01-21
FI110311B true FI110311B (sv) 2002-12-31

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FI991628A FI110311B (sv) 1999-07-20 1999-07-20 Förfarande och anordning för eliminering av substanser från gaser

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US (3) US6506352B1 (sv)
JP (1) JP2001062244A (sv)
FI (1) FI110311B (sv)
TW (1) TW555585B (sv)

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US6506352B1 (en) 2003-01-14
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US20020187084A1 (en) 2002-12-12
US7799300B2 (en) 2010-09-21

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