ES2111418B1 - Dispositivo y procedimiento para formar un recubrimiento porpirolisis. - Google Patents
Dispositivo y procedimiento para formar un recubrimiento porpirolisis.Info
- Publication number
- ES2111418B1 ES2111418B1 ES09400095A ES9400095A ES2111418B1 ES 2111418 B1 ES2111418 B1 ES 2111418B1 ES 09400095 A ES09400095 A ES 09400095A ES 9400095 A ES9400095 A ES 9400095A ES 2111418 B1 ES2111418 B1 ES 2111418B1
- Authority
- ES
- Spain
- Prior art keywords
- coating
- nozzle
- substrate
- path
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45595—Atmospheric CVD gas inlets with no enclosed reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
Abstract
DISPOSITIVO Y PROCEDIMIENTO PARA FORMAR UN RECUBRIMIENTO POR PIROLISIS. EL DISPOSITIVO COMPRENDE MEDIOS DE SOPORTE (20) PARA TRANSPORTAR UN SUBSTRATO DE VIDRIO CALIENTE (16) A TRAVES DE UNA CAMARA DE RECUBRIMIENTO (14), UNA BOQUILLA EXPULSORA (10) PARA SUMINISTRAR GAS REACTIVO EN DICHA CAMARA Y MEDIOS PARA LA DESCARGA DE GAS DE ESCAPE; LA BOQUILLA (10) ESTA PROVISTA DE UNA RANURA (12) TRANSVERSAL A LA TRAYECTORIA DEL SUBSTRATO (16), QUE SE ABRE DIRECTAMENTE EN LA CAMARA (14), CUYAS PAREDES INTERIORES LONGITUDINALES (24) SON PARALELAS ENTRE SI CUYA LONGITUD ES POR LO MENOS IGUAL A LA ANCHURA DEL SUBSTRATO (16) A RECUBRIR PORQUE LAS PAREDES INTERIORES DE LA BOQUILLA (10) DEFINEN UNA TRAYECTORIA CONVERGENTE CONTINUA, NO SUPERANDO EL ANGULO DE CONVERGENCIA (AL) DE DICHA TRAYECTORIA CONVERGENTE LOS 14.º EN NINGUN PUNTO. EL PROCEDIMIENTO COMPRENDE FORMAR UN FLUJO DE GAS SUMINISTRANDO A LA BOQUILLA EXPULSORA UN MEDIO GASEOSO REACTIVO PARA FORMAR EL RECUBRIMIENTO SOBRE EL SUBSTRATO; EL ANGULO DE CONVERGENCIA DEL FLUJO DE GAS ES, EN CUALQUIER PUNTO DE SU TRAYECTORIA EN EL INTERIOR DE LA BOQUILLA EXPULSORA IGUAL O MENOR DE 14.º LA INVENCION MEJORA LA UNIFORMIDAD EN LA DEPOSICION DEL RECUBRIMIENTO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB939300400A GB9300400D0 (en) | 1993-01-11 | 1993-01-11 | A device and method for forming a coating by pyrolysis |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2111418A1 ES2111418A1 (es) | 1998-03-01 |
ES2111418B1 true ES2111418B1 (es) | 1998-10-16 |
Family
ID=10728522
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES09400096A Expired - Lifetime ES2112093B1 (es) | 1993-01-11 | 1994-01-11 | Dispositivo y procedimiento para formar un recubrimiento por pirolisis. |
ES09400095A Expired - Fee Related ES2111418B1 (es) | 1993-01-11 | 1994-01-11 | Dispositivo y procedimiento para formar un recubrimiento porpirolisis. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES09400096A Expired - Lifetime ES2112093B1 (es) | 1993-01-11 | 1994-01-11 | Dispositivo y procedimiento para formar un recubrimiento por pirolisis. |
Country Status (15)
Country | Link |
---|---|
US (3) | US5522911A (es) |
JP (2) | JP3423388B2 (es) |
AT (2) | AT405831B (es) |
BE (2) | BE1008559A3 (es) |
CA (2) | CA2113028A1 (es) |
CH (2) | CH687204A5 (es) |
CZ (2) | CZ287432B6 (es) |
DE (2) | DE4400209A1 (es) |
ES (2) | ES2112093B1 (es) |
FR (2) | FR2700325B1 (es) |
GB (3) | GB9300400D0 (es) |
IT (2) | IT1261393B (es) |
LU (2) | LU88451A1 (es) |
NL (2) | NL9400042A (es) |
SE (3) | SE504491C2 (es) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6022414A (en) * | 1994-07-18 | 2000-02-08 | Semiconductor Equipment Group, Llc | Single body injector and method for delivering gases to a surface |
US6200389B1 (en) | 1994-07-18 | 2001-03-13 | Silicon Valley Group Thermal Systems Llc | Single body injector and deposition chamber |
US6231971B1 (en) * | 1995-06-09 | 2001-05-15 | Glaverbel | Glazing panel having solar screening properties |
US5882368A (en) * | 1997-02-07 | 1999-03-16 | Vidrio Piiano De Mexico, S.A. De C.V. | Method for coating glass substrates by ultrasonic nebulization of solutions |
US6027766A (en) | 1997-03-14 | 2000-02-22 | Ppg Industries Ohio, Inc. | Photocatalytically-activated self-cleaning article and method of making same |
US7096692B2 (en) * | 1997-03-14 | 2006-08-29 | Ppg Industries Ohio, Inc. | Visible-light-responsive photoactive coating, coated article, and method of making same |
US6103015A (en) * | 1998-01-19 | 2000-08-15 | Libbey-Owens-Ford Co. | Symmetrical CVD coater with lower upstream exhaust toe |
DE19923591A1 (de) * | 1999-05-21 | 2000-11-23 | Fleissner Maschf Gmbh Co | Vorrichtung mit einem Düsenbalken zur Erzeugung von Flüssigkeitsstrahlen zur Strahlbeaufschlagung der Fasern einer Warenbahn |
US6413579B1 (en) | 2000-01-27 | 2002-07-02 | Libbey-Owens-Ford Co. | Temperature control of CVD method for reduced haze |
US6808741B1 (en) * | 2001-10-26 | 2004-10-26 | Seagate Technology Llc | In-line, pass-by method for vapor lubrication |
JP2006501793A (ja) * | 2002-07-31 | 2006-01-12 | シドクラフト、アクチボラグ | 電気機械 |
WO2004084222A1 (ja) | 2003-03-19 | 2004-09-30 | Matsushita Electric Industrial Co., Ltd. | 車載用記録再生装置、記録再生装置、記録再生システム、および記録再生方法 |
JP4124046B2 (ja) * | 2003-07-10 | 2008-07-23 | 株式会社大阪チタニウムテクノロジーズ | 金属酸化物被膜の成膜方法および蒸着装置 |
US9017480B2 (en) | 2006-04-06 | 2015-04-28 | First Solar, Inc. | System and method for transport |
TW201011114A (en) * | 2008-05-19 | 2010-03-16 | Du Pont | Apparatus and method of vapor coating in an electronic device |
EP2123793A1 (en) * | 2008-05-20 | 2009-11-25 | Helianthos B.V. | Vapour deposition process |
US8557328B2 (en) * | 2009-10-02 | 2013-10-15 | Ppg Industries Ohio, Inc. | Non-orthogonal coater geometry for improved coatings on a substrate |
FI9160U1 (fi) * | 2010-01-04 | 2011-04-14 | Beneq Oy | Pinnoituslaite |
FI20106088A0 (fi) * | 2010-10-21 | 2010-10-21 | Beneq Oy | Pinnankäsittelylaite ja -menetelmä |
KR101806916B1 (ko) * | 2011-03-17 | 2017-12-12 | 한화테크윈 주식회사 | 그래핀 필름 제조 장치 및 그래핀 필름 제조 방법 |
US20130130597A1 (en) * | 2011-11-21 | 2013-05-23 | James William Brown | Glass treatment apparatus and methods of treating glass |
JP5148743B1 (ja) * | 2011-12-20 | 2013-02-20 | シャープ株式会社 | 薄膜成膜装置、薄膜成膜方法および薄膜太陽電池の製造方法 |
MX2014013233A (es) * | 2014-10-30 | 2016-05-02 | Ct Investig Materiales Avanzados Sc | Tobera de inyeccion de aerosoles y su metodo de utilizacion para depositar diferentes recubrimientos mediante deposito quimico de vapor asistido por aerosol. |
US20160186320A1 (en) * | 2014-12-26 | 2016-06-30 | Metal Industries Research And Development Centre | Apparatus for continuously forming a film through chemical vapor deposition |
JP6426298B2 (ja) * | 2015-10-19 | 2018-11-21 | 東芝三菱電機産業システム株式会社 | 成膜装置 |
WO2019239192A1 (en) * | 2018-06-15 | 2019-12-19 | Arcelormittal | Vacuum deposition facility and method for coating a substrate |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3597178A (en) * | 1969-04-17 | 1971-08-03 | Ppg Industries Inc | Process and apparatus for removing atmospheric contaminants in a float glass operation |
US3837832A (en) * | 1971-04-29 | 1974-09-24 | Ppg Industries Inc | Apparatus for making float glass |
US3888649A (en) * | 1972-12-15 | 1975-06-10 | Ppg Industries Inc | Nozzle for chemical vapor deposition of coatings |
GB1507465A (en) * | 1974-06-14 | 1978-04-12 | Pilkington Brothers Ltd | Coating glass |
JPS51126209A (en) * | 1975-04-25 | 1976-11-04 | Central Glass Co Ltd | Method and apparatus for production of which reflects heat rays |
GB1507996A (en) * | 1975-06-11 | 1978-04-19 | Pilkington Brothers Ltd | Coating glass |
GB1524326A (en) * | 1976-04-13 | 1978-09-13 | Bfg Glassgroup | Coating of glass |
US4092953A (en) * | 1976-12-09 | 1978-06-06 | The D. L. Auld Company | Apparatus for coating glass containers |
EP0007147A1 (en) * | 1978-07-12 | 1980-01-23 | Imperial Chemical Industries Plc | Liquid dispenser and process for dispensing liquid reaction mixtures onto web or sheet material |
CA1138725A (en) * | 1978-07-20 | 1983-01-04 | Robert Terneu | Glass coating |
BE879189A (fr) * | 1978-10-19 | 1980-04-04 | Bfg Glassgroup | Procede de formation d'un revetement d'oxyde d'etain sur un support de verre chaud et produits ainsi obtenus |
CH628600A5 (fr) * | 1979-02-14 | 1982-03-15 | Siv Soc Italiana Vetro | Procede pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide et installation pour la mise en oeuvre de ce procede. |
CH643469A5 (fr) * | 1981-12-22 | 1984-06-15 | Siv Soc Italiana Vetro | Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide. |
US4595634A (en) * | 1983-08-01 | 1986-06-17 | Gordon Roy G | Coating process for making non-iridescent glass |
GB8408118D0 (en) * | 1984-03-29 | 1984-05-10 | Pilkington Brothers Plc | Coating glass |
US4900110A (en) * | 1984-07-30 | 1990-02-13 | Ppg Industries, Inc. | Chemical vapor deposition of a reflective film on the bottom surface of a float glass ribbon |
US5122394A (en) * | 1985-12-23 | 1992-06-16 | Atochem North America, Inc. | Apparatus for coating a substrate |
US4761171A (en) * | 1987-02-09 | 1988-08-02 | Libbey-Owens-Ford Co. | Apparatus for coating glass |
US4793282A (en) * | 1987-05-18 | 1988-12-27 | Libbey-Owens-Ford Co. | Distributor beam for chemical vapor deposition on glass |
GB2209176A (en) * | 1987-08-28 | 1989-05-04 | Pilkington Plc | Coating glass |
GB8824102D0 (en) * | 1988-10-14 | 1988-11-23 | Pilkington Plc | Apparatus for coating glass |
GB8914047D0 (en) * | 1989-06-19 | 1989-08-09 | Glaverbel | Method of and apparatus for pyrolytically forming an oxide coating on a hot glass substrate |
EP0516714B1 (en) * | 1990-02-22 | 1995-10-18 | GORDON, Roy Gerald | Titanium nitride or tin oxide bonding to a coater surface |
GB2247691B (en) * | 1990-08-31 | 1994-11-23 | Glaverbel | Method of coating glass |
FR2672518B1 (fr) * | 1991-02-13 | 1995-05-05 | Saint Gobain Vitrage Int | Buse a alimentation dissymetrique pour la formation d'une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux. |
FR2677639B1 (fr) * | 1991-06-14 | 1994-02-25 | Saint Gobain Vitrage Internal | Technique de formation par pyrolyse en voie gazeuse d'un revetement essentiellement a base d'oxygene et de silicium. |
-
1993
- 1993-01-11 GB GB939300400A patent/GB9300400D0/en active Pending
- 1993-12-21 BE BE9301427A patent/BE1008559A3/fr not_active IP Right Cessation
- 1993-12-21 BE BE9301428A patent/BE1008560A3/fr not_active IP Right Cessation
- 1993-12-22 FR FR9315624A patent/FR2700325B1/fr not_active Expired - Fee Related
- 1993-12-22 FR FR9315625A patent/FR2700326B1/fr not_active Expired - Lifetime
- 1993-12-23 IT ITTO930986A patent/IT1261393B/it active IP Right Grant
- 1993-12-23 CH CH03847/93A patent/CH687204A5/fr not_active IP Right Cessation
- 1993-12-23 CH CH03846/93A patent/CH687203A5/fr not_active IP Right Cessation
- 1993-12-23 IT ITTO930987A patent/IT1261394B/it active IP Right Grant
- 1993-12-28 JP JP35226693A patent/JP3423388B2/ja not_active Expired - Fee Related
- 1993-12-28 JP JP5352265A patent/JPH072548A/ja active Pending
-
1994
- 1994-01-04 CZ CZ199416A patent/CZ287432B6/cs not_active IP Right Cessation
- 1994-01-04 GB GB9400045A patent/GB2274115B/en not_active Expired - Fee Related
- 1994-01-04 CZ CZ9417A patent/CZ284096B6/cs unknown
- 1994-01-04 GB GB9400046A patent/GB2274116B/en not_active Expired - Lifetime
- 1994-01-05 AT AT0001394A patent/AT405831B/de not_active IP Right Cessation
- 1994-01-05 DE DE4400209A patent/DE4400209A1/de not_active Withdrawn
- 1994-01-05 AT AT0001494A patent/AT405279B/de not_active IP Right Cessation
- 1994-01-05 LU LU88451A patent/LU88451A1/fr unknown
- 1994-01-05 DE DE4400208A patent/DE4400208A1/de not_active Ceased
- 1994-01-06 US US08/178,844 patent/US5522911A/en not_active Expired - Fee Related
- 1994-01-07 CA CA002113028A patent/CA2113028A1/en not_active Abandoned
- 1994-01-07 CA CA002113029A patent/CA2113029A1/en not_active Abandoned
- 1994-01-10 SE SE9400038A patent/SE504491C2/sv not_active IP Right Cessation
- 1994-01-10 SE SE9400037D patent/SE9400037L/xx not_active Application Discontinuation
- 1994-01-10 SE SE9400037A patent/SE508197C2/sv not_active IP Right Cessation
- 1994-01-11 ES ES09400096A patent/ES2112093B1/es not_active Expired - Lifetime
- 1994-01-11 ES ES09400095A patent/ES2111418B1/es not_active Expired - Fee Related
- 1994-01-11 NL NL9400042A patent/NL9400042A/nl active Search and Examination
- 1994-01-11 NL NL9400041A patent/NL9400041A/nl active Search and Examination
- 1994-11-05 LU LU88450A patent/LU88450A1/fr unknown
-
1995
- 1995-11-02 US US08/552,048 patent/US5709726A/en not_active Expired - Fee Related
-
1997
- 1997-06-25 US US08/882,379 patent/US6112554A/en not_active Expired - Lifetime
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FA2A | Application withdrawn |
Effective date: 19950201 |
|
EC2A | Search report published |
Date of ref document: 19980301 Kind code of ref document: A1 Effective date: 19980301 |
|
FD1A | Patent lapsed |
Effective date: 20060112 |