ES2111418A1 - Dispositivo y procedimiento para formar un recubrimiento porpirolisis. - Google Patents

Dispositivo y procedimiento para formar un recubrimiento porpirolisis.

Info

Publication number
ES2111418A1
ES2111418A1 ES09400095A ES9400095A ES2111418A1 ES 2111418 A1 ES2111418 A1 ES 2111418A1 ES 09400095 A ES09400095 A ES 09400095A ES 9400095 A ES9400095 A ES 9400095A ES 2111418 A1 ES2111418 A1 ES 2111418A1
Authority
ES
Spain
Prior art keywords
coating chamber
roof
glass substrate
hot glass
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES09400095A
Other languages
English (en)
Other versions
ES2111418B1 (es
Inventor
Robert Terneu
Secondo Franceschi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Glass Europe SA
Original Assignee
Glaverbel Belgium SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel Belgium SA filed Critical Glaverbel Belgium SA
Publication of ES2111418A1 publication Critical patent/ES2111418A1/es
Application granted granted Critical
Publication of ES2111418B1 publication Critical patent/ES2111418B1/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45595—Atmospheric CVD gas inlets with no enclosed reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD

Abstract

DISPOSITIVO Y PROCEDIMIENTO PARA FORMAR UN RECUBRIMIENTO POR PIROLISIS. EL DISPOSITIVO COMPRENDE MEDIOS DE SOPORTE (20) PARA TRANSPORTAR UN SUBSTRATO DE VIDRIO CALIENTE (16) A TRAVES DE UNA CAMARA DE RECUBRIMIENTO (14), UNA BOQUILLA EXPULSORA (10) PARA SUMINISTRAR GAS REACTIVO EN DICHA CAMARA Y MEDIOS PARA LA DESCARGA DE GAS DE ESCAPE; LA BOQUILLA (10) ESTA PROVISTA DE UNA RANURA (12) TRANSVERSAL A LA TRAYECTORIA DEL SUBSTRATO (16), QUE SE ABRE DIRECTAMENTE EN LA CAMARA (14), CUYAS PAREDES INTERIORES LONGITUDINALES (24) SON PARALELAS ENTRE SI CUYA LONGITUD ES POR LO MENOS IGUAL A LA ANCHURA DEL SUBSTRATO (16) A RECUBRIR PORQUE LAS PAREDES INTERIORES DE LA BOQUILLA (10) DEFINEN UNA TRAYECTORIA CONVERGENTE CONTINUA, NO SUPERANDO EL ANGULO DE CONVERGENCIA (AL) DE DICHA TRAYECTORIA CONVERGENTE LOS 14.º EN NINGUN PUNTO. EL PROCEDIMIENTO COMPRENDE FORMAR UN FLUJO DE GAS SUMINISTRANDO A LA BOQUILLA EXPULSORA UN MEDIO GASEOSO REACTIVO PARA FORMAR EL RECUBRIMIENTO SOBRE EL SUBSTRATO; EL ANGULO DE CONVERGENCIA DEL FLUJO DE GAS ES, EN CUALQUIER PUNTO DE SU TRAYECTORIA EN EL INTERIOR DE LA BOQUILLA EXPULSORA IGUAL O MENOR DE 14.º LA INVENCION MEJORA LA UNIFORMIDAD EN LA DEPOSICION DEL RECUBRIMIENTO.
ES09400095A 1993-01-11 1994-01-11 Dispositivo y procedimiento para formar un recubrimiento porpirolisis. Expired - Fee Related ES2111418B1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939300400A GB9300400D0 (en) 1993-01-11 1993-01-11 A device and method for forming a coating by pyrolysis

Publications (2)

Publication Number Publication Date
ES2111418A1 true ES2111418A1 (es) 1998-03-01
ES2111418B1 ES2111418B1 (es) 1998-10-16

Family

ID=10728522

Family Applications (2)

Application Number Title Priority Date Filing Date
ES09400096A Expired - Lifetime ES2112093B1 (es) 1993-01-11 1994-01-11 Dispositivo y procedimiento para formar un recubrimiento por pirolisis.
ES09400095A Expired - Fee Related ES2111418B1 (es) 1993-01-11 1994-01-11 Dispositivo y procedimiento para formar un recubrimiento porpirolisis.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
ES09400096A Expired - Lifetime ES2112093B1 (es) 1993-01-11 1994-01-11 Dispositivo y procedimiento para formar un recubrimiento por pirolisis.

Country Status (15)

Country Link
US (3) US5522911A (es)
JP (2) JP3423388B2 (es)
AT (2) AT405831B (es)
BE (2) BE1008559A3 (es)
CA (2) CA2113028A1 (es)
CH (2) CH687204A5 (es)
CZ (2) CZ287432B6 (es)
DE (2) DE4400209A1 (es)
ES (2) ES2112093B1 (es)
FR (2) FR2700325B1 (es)
GB (3) GB9300400D0 (es)
IT (2) IT1261393B (es)
LU (2) LU88451A1 (es)
NL (2) NL9400042A (es)
SE (3) SE504491C2 (es)

Families Citing this family (26)

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US6022414A (en) * 1994-07-18 2000-02-08 Semiconductor Equipment Group, Llc Single body injector and method for delivering gases to a surface
US6200389B1 (en) 1994-07-18 2001-03-13 Silicon Valley Group Thermal Systems Llc Single body injector and deposition chamber
US6231971B1 (en) * 1995-06-09 2001-05-15 Glaverbel Glazing panel having solar screening properties
US5882368A (en) * 1997-02-07 1999-03-16 Vidrio Piiano De Mexico, S.A. De C.V. Method for coating glass substrates by ultrasonic nebulization of solutions
US6027766A (en) 1997-03-14 2000-02-22 Ppg Industries Ohio, Inc. Photocatalytically-activated self-cleaning article and method of making same
US7096692B2 (en) * 1997-03-14 2006-08-29 Ppg Industries Ohio, Inc. Visible-light-responsive photoactive coating, coated article, and method of making same
US6103015A (en) * 1998-01-19 2000-08-15 Libbey-Owens-Ford Co. Symmetrical CVD coater with lower upstream exhaust toe
DE19923591A1 (de) * 1999-05-21 2000-11-23 Fleissner Maschf Gmbh Co Vorrichtung mit einem Düsenbalken zur Erzeugung von Flüssigkeitsstrahlen zur Strahlbeaufschlagung der Fasern einer Warenbahn
US6413579B1 (en) 2000-01-27 2002-07-02 Libbey-Owens-Ford Co. Temperature control of CVD method for reduced haze
US6808741B1 (en) * 2001-10-26 2004-10-26 Seagate Technology Llc In-line, pass-by method for vapor lubrication
JP2006501793A (ja) * 2002-07-31 2006-01-12 シドクラフト、アクチボラグ 電気機械
WO2004084222A1 (ja) 2003-03-19 2004-09-30 Matsushita Electric Industrial Co., Ltd. 車載用記録再生装置、記録再生装置、記録再生システム、および記録再生方法
JP4124046B2 (ja) * 2003-07-10 2008-07-23 株式会社大阪チタニウムテクノロジーズ 金属酸化物被膜の成膜方法および蒸着装置
US9017480B2 (en) 2006-04-06 2015-04-28 First Solar, Inc. System and method for transport
TW201011114A (en) * 2008-05-19 2010-03-16 Du Pont Apparatus and method of vapor coating in an electronic device
EP2123793A1 (en) * 2008-05-20 2009-11-25 Helianthos B.V. Vapour deposition process
US8557328B2 (en) * 2009-10-02 2013-10-15 Ppg Industries Ohio, Inc. Non-orthogonal coater geometry for improved coatings on a substrate
FI9160U1 (fi) * 2010-01-04 2011-04-14 Beneq Oy Pinnoituslaite
FI20106088A0 (fi) * 2010-10-21 2010-10-21 Beneq Oy Pinnankäsittelylaite ja -menetelmä
KR101806916B1 (ko) * 2011-03-17 2017-12-12 한화테크윈 주식회사 그래핀 필름 제조 장치 및 그래핀 필름 제조 방법
US20130130597A1 (en) * 2011-11-21 2013-05-23 James William Brown Glass treatment apparatus and methods of treating glass
JP5148743B1 (ja) * 2011-12-20 2013-02-20 シャープ株式会社 薄膜成膜装置、薄膜成膜方法および薄膜太陽電池の製造方法
MX2014013233A (es) * 2014-10-30 2016-05-02 Ct Investig Materiales Avanzados Sc Tobera de inyeccion de aerosoles y su metodo de utilizacion para depositar diferentes recubrimientos mediante deposito quimico de vapor asistido por aerosol.
US20160186320A1 (en) * 2014-12-26 2016-06-30 Metal Industries Research And Development Centre Apparatus for continuously forming a film through chemical vapor deposition
JP6426298B2 (ja) * 2015-10-19 2018-11-21 東芝三菱電機産業システム株式会社 成膜装置
WO2019239192A1 (en) * 2018-06-15 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4123244A (en) * 1976-04-13 1978-10-31 Bfg Glassgroup Process of forming a metal or metal compound coating on a face of a glass substrate and apparatus suitable for use in forming such coating
US4293326A (en) * 1978-07-20 1981-10-06 Bfg Glassgroup Glass coating
US4329379A (en) * 1978-10-19 1982-05-11 Bfg Glassgroup Process for forming tin oxide glass coating
EP0158468A1 (en) * 1984-03-29 1985-10-16 Pilkington Plc Apparatus for and method of coating glass
US5089039A (en) * 1989-06-19 1992-02-18 Glaverbel Method for pyrolxtically forming a silicon oxide coating on a hot glass substrate
EP0518755A1 (fr) * 1991-06-14 1992-12-16 Saint-Gobain Vitrage International Technique de formation par pyrolyse en voie gazeuse d'un revêtement essentiellement à base d'oxygène et de silicium

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US3597178A (en) * 1969-04-17 1971-08-03 Ppg Industries Inc Process and apparatus for removing atmospheric contaminants in a float glass operation
US3837832A (en) * 1971-04-29 1974-09-24 Ppg Industries Inc Apparatus for making float glass
US3888649A (en) * 1972-12-15 1975-06-10 Ppg Industries Inc Nozzle for chemical vapor deposition of coatings
GB1507465A (en) * 1974-06-14 1978-04-12 Pilkington Brothers Ltd Coating glass
JPS51126209A (en) * 1975-04-25 1976-11-04 Central Glass Co Ltd Method and apparatus for production of which reflects heat rays
GB1507996A (en) * 1975-06-11 1978-04-19 Pilkington Brothers Ltd Coating glass
US4092953A (en) * 1976-12-09 1978-06-06 The D. L. Auld Company Apparatus for coating glass containers
EP0007147A1 (en) * 1978-07-12 1980-01-23 Imperial Chemical Industries Plc Liquid dispenser and process for dispensing liquid reaction mixtures onto web or sheet material
CH628600A5 (fr) * 1979-02-14 1982-03-15 Siv Soc Italiana Vetro Procede pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide et installation pour la mise en oeuvre de ce procede.
CH643469A5 (fr) * 1981-12-22 1984-06-15 Siv Soc Italiana Vetro Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide.
US4595634A (en) * 1983-08-01 1986-06-17 Gordon Roy G Coating process for making non-iridescent glass
US4900110A (en) * 1984-07-30 1990-02-13 Ppg Industries, Inc. Chemical vapor deposition of a reflective film on the bottom surface of a float glass ribbon
US5122394A (en) * 1985-12-23 1992-06-16 Atochem North America, Inc. Apparatus for coating a substrate
US4761171A (en) * 1987-02-09 1988-08-02 Libbey-Owens-Ford Co. Apparatus for coating glass
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass
GB2209176A (en) * 1987-08-28 1989-05-04 Pilkington Plc Coating glass
GB8824102D0 (en) * 1988-10-14 1988-11-23 Pilkington Plc Apparatus for coating glass
EP0516714B1 (en) * 1990-02-22 1995-10-18 GORDON, Roy Gerald Titanium nitride or tin oxide bonding to a coater surface
GB2247691B (en) * 1990-08-31 1994-11-23 Glaverbel Method of coating glass
FR2672518B1 (fr) * 1991-02-13 1995-05-05 Saint Gobain Vitrage Int Buse a alimentation dissymetrique pour la formation d'une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux.

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4123244A (en) * 1976-04-13 1978-10-31 Bfg Glassgroup Process of forming a metal or metal compound coating on a face of a glass substrate and apparatus suitable for use in forming such coating
US4293326A (en) * 1978-07-20 1981-10-06 Bfg Glassgroup Glass coating
US4329379A (en) * 1978-10-19 1982-05-11 Bfg Glassgroup Process for forming tin oxide glass coating
EP0158468A1 (en) * 1984-03-29 1985-10-16 Pilkington Plc Apparatus for and method of coating glass
US5089039A (en) * 1989-06-19 1992-02-18 Glaverbel Method for pyrolxtically forming a silicon oxide coating on a hot glass substrate
EP0518755A1 (fr) * 1991-06-14 1992-12-16 Saint-Gobain Vitrage International Technique de formation par pyrolyse en voie gazeuse d'un revêtement essentiellement à base d'oxygène et de silicium

Also Published As

Publication number Publication date
GB9400045D0 (en) 1994-03-02
ITTO930986A0 (it) 1993-12-23
ES2111418B1 (es) 1998-10-16
NL9400041A (nl) 1994-08-01
FR2700325B1 (fr) 1996-11-29
JPH072548A (ja) 1995-01-06
GB2274115B (en) 1995-08-23
JP3423388B2 (ja) 2003-07-07
US6112554A (en) 2000-09-05
ITTO930986A1 (it) 1994-07-12
SE9400037D0 (sv) 1994-01-10
GB2274116B (en) 1995-08-23
ATA1494A (de) 1998-11-15
ES2112093A1 (es) 1998-03-16
IT1261393B (it) 1996-05-20
CZ1694A3 (en) 1995-06-14
CZ287432B6 (en) 2000-11-15
GB2274115A (en) 1994-07-13
BE1008560A3 (fr) 1996-06-04
FR2700326A1 (fr) 1994-07-13
BE1008559A3 (fr) 1996-06-04
CA2113029A1 (en) 1994-07-12
SE9400038D0 (sv) 1994-01-10
FR2700326B1 (fr) 1996-11-29
GB2274116A (en) 1994-07-13
CZ1794A3 (en) 1995-06-14
SE504491C2 (sv) 1997-02-24
CA2113028A1 (en) 1994-07-12
US5709726A (en) 1998-01-20
JPH073463A (ja) 1995-01-06
ES2112093B1 (es) 1998-11-16
CZ284096B6 (cs) 1998-08-12
LU88451A1 (fr) 1994-12-01
FR2700325A1 (fr) 1994-07-13
ITTO930987A0 (it) 1993-12-23
GB9400046D0 (en) 1994-03-02
US5522911A (en) 1996-06-04
CH687203A5 (fr) 1996-10-15
DE4400208A1 (de) 1994-07-14
SE9400038L (sv) 1994-07-12
CH687204A5 (fr) 1996-10-15
DE4400209A1 (de) 1994-07-14
AT405279B (de) 1999-06-25
NL9400042A (nl) 1994-08-01
GB9300400D0 (en) 1993-03-03
ATA1394A (de) 1999-04-15
SE508197C2 (sv) 1998-09-14
SE9400037L (sv) 1994-07-12
AT405831B (de) 1999-11-25
ITTO930987A1 (it) 1995-06-23
IT1261394B (it) 1996-05-20
LU88450A1 (fr) 1994-12-01

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Effective date: 19950201

EC2A Search report published

Date of ref document: 19980301

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FD1A Patent lapsed

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