ES2076631T3 - Emisor de electrones por efecto de campo, moldeado y revestido de diamante, y metodo para producirlo. - Google Patents

Emisor de electrones por efecto de campo, moldeado y revestido de diamante, y metodo para producirlo.

Info

Publication number
ES2076631T3
ES2076631T3 ES92113614T ES92113614T ES2076631T3 ES 2076631 T3 ES2076631 T3 ES 2076631T3 ES 92113614 T ES92113614 T ES 92113614T ES 92113614 T ES92113614 T ES 92113614T ES 2076631 T3 ES2076631 T3 ES 2076631T3
Authority
ES
Spain
Prior art keywords
diamond
coated
producing
field effect
effect emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92113614T
Other languages
English (en)
Inventor
Robert C Kane
James E Jaskie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of ES2076631T3 publication Critical patent/ES2076631T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • H01J1/3042Field-emissive cathodes microengineered, e.g. Spindt-type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00Methods or apparatus for measurement or analysis of nanostructures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30453Carbon types
    • H01J2201/30457Diamond

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

SE CONSTRUYE UN EMISOR DE ELECTRONES CON EMISION DE CAMPO EN EL QUE SE UTILIZA UN REVESTIMIENTO DE MATERIAL ADIAMANTADO (406) DISPUESTO EN UNA SUPERFICIE DE UNA CAPA DE MATERIAL CONDUCTOR/SEMICONDUCTOR (407) MEDIANTE UN METODO QUE INCLUYE LOS PASOS DE IMPLANTACION DE IONES DE CARBONO (404) EN UNA SUPERFICIE DE UN SUBSTRATO SELECTIVAMENTE MOLDEADO (401) PARA QUE FUNCIONE COMO PUNTOS DE NUCLEACION PARA LA FORMACION DEL MATERIAL ADIAMANTADO. SE DEPOSITA UNA CAPA CONDUCTORA (407) EN EL MATERIAL ADIAMANTADO (406) Y SE EXTRAE EL SUBSTRATO (401) PARA DEJAR UN EMISOR DE ELECTRONES CON UN REVESTIMIENTO ADIAMANTADO.
ES92113614T 1991-08-20 1992-08-10 Emisor de electrones por efecto de campo, moldeado y revestido de diamante, y metodo para producirlo. Expired - Lifetime ES2076631T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/747,562 US5129850A (en) 1991-08-20 1991-08-20 Method of making a molded field emission electron emitter employing a diamond coating

Publications (1)

Publication Number Publication Date
ES2076631T3 true ES2076631T3 (es) 1995-11-01

Family

ID=25005642

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92113614T Expired - Lifetime ES2076631T3 (es) 1991-08-20 1992-08-10 Emisor de electrones por efecto de campo, moldeado y revestido de diamante, y metodo para producirlo.

Country Status (9)

Country Link
US (1) US5129850A (es)
EP (1) EP0528322B1 (es)
JP (1) JP2742749B2 (es)
CN (1) CN1042470C (es)
AT (1) ATE128267T1 (es)
CA (1) CA2071064A1 (es)
DE (1) DE69204940T2 (es)
DK (1) DK0528322T3 (es)
ES (1) ES2076631T3 (es)

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Also Published As

Publication number Publication date
CN1042470C (zh) 1999-03-10
EP0528322A1 (en) 1993-02-24
JPH05205616A (ja) 1993-08-13
DE69204940D1 (de) 1995-10-26
CN1069827A (zh) 1993-03-10
ATE128267T1 (de) 1995-10-15
CA2071064A1 (en) 1993-02-21
DE69204940T2 (de) 1996-05-15
US5129850A (en) 1992-07-14
DK0528322T3 (da) 1995-11-06
JP2742749B2 (ja) 1998-04-22
EP0528322B1 (en) 1995-09-20

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