EP4146848B1 - Électrolyte à base d'argent pour le dépôt de couches de dispersion d'argent - Google Patents
Électrolyte à base d'argent pour le dépôt de couches de dispersion d'argent Download PDFInfo
- Publication number
- EP4146848B1 EP4146848B1 EP22755083.7A EP22755083A EP4146848B1 EP 4146848 B1 EP4146848 B1 EP 4146848B1 EP 22755083 A EP22755083 A EP 22755083A EP 4146848 B1 EP4146848 B1 EP 4146848B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrolyte
- silver
- amount
- graphite
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000003792 electrolyte Substances 0.000 title claims description 71
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims description 54
- 229910052709 silver Inorganic materials 0.000 title claims description 54
- 239000004332 silver Substances 0.000 title claims description 54
- 239000006185 dispersion Substances 0.000 title description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 25
- 239000010439 graphite Substances 0.000 claims description 20
- 229910002804 graphite Inorganic materials 0.000 claims description 20
- 239000007787 solid Substances 0.000 claims description 20
- 230000008021 deposition Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 13
- 239000011669 selenium Substances 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 11
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 10
- 229910052711 selenium Inorganic materials 0.000 claims description 10
- 150000008051 alkyl sulfates Chemical class 0.000 claims description 9
- 150000003839 salts Chemical class 0.000 claims description 8
- 239000000080 wetting agent Substances 0.000 claims description 8
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 6
- 239000013530 defoamer Substances 0.000 claims description 6
- 238000005868 electrolysis reaction Methods 0.000 claims description 6
- 229910052714 tellurium Inorganic materials 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 5
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 5
- 150000007513 acids Chemical class 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- QLOAVXSYZAJECW-UHFFFAOYSA-N methane;molecular fluorine Chemical compound C.FF QLOAVXSYZAJECW-UHFFFAOYSA-N 0.000 claims description 4
- 229920001515 polyalkylene glycol Polymers 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 230000000996 additive effect Effects 0.000 claims description 2
- 150000001450 anions Chemical class 0.000 claims description 2
- 229940100890 silver compound Drugs 0.000 claims description 2
- 150000003379 silver compounds Chemical class 0.000 claims description 2
- 239000002932 luster Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 description 16
- 238000000576 coating method Methods 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- -1 alkyl radicals Chemical class 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 8
- 239000010949 copper Substances 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000006260 foam Substances 0.000 description 6
- 238000010348 incorporation Methods 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 229920001223 polyethylene glycol Polymers 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 150000003498 tellurium compounds Chemical class 0.000 description 5
- 239000002202 Polyethylene glycol Substances 0.000 description 4
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 4
- 229940092714 benzenesulfonic acid Drugs 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- VDMJCVUEUHKGOY-JXMROGBWSA-N (1e)-4-fluoro-n-hydroxybenzenecarboximidoyl chloride Chemical compound O\N=C(\Cl)C1=CC=C(F)C=C1 VDMJCVUEUHKGOY-JXMROGBWSA-N 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 229920002266 Pluriol® Polymers 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 229910003455 mixed metal oxide Inorganic materials 0.000 description 3
- PSZYNBSKGUBXEH-UHFFFAOYSA-N naphthalene-1-sulfonic acid Chemical compound C1=CC=C2C(S(=O)(=O)O)=CC=CC2=C1 PSZYNBSKGUBXEH-UHFFFAOYSA-N 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- HKSGQTYSSZOJOA-UHFFFAOYSA-N potassium argentocyanide Chemical compound [K+].[Ag+].N#[C-].N#[C-] HKSGQTYSSZOJOA-UHFFFAOYSA-N 0.000 description 3
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229910016347 CuSn Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 229910005569 NiB Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 150000005840 aryl radicals Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004870 electrical engineering Methods 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- IIWMSIPKUVXHOO-UHFFFAOYSA-N ethyl hexyl sulfate Chemical compound CCCCCCOS(=O)(=O)OCC IIWMSIPKUVXHOO-UHFFFAOYSA-N 0.000 description 2
- 239000010946 fine silver Substances 0.000 description 2
- 239000003353 gold alloy Substances 0.000 description 2
- LELOWRISYMNNSU-UHFFFAOYSA-N hydrogen cyanide Chemical compound N#C LELOWRISYMNNSU-UHFFFAOYSA-N 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002825 nitriles Chemical class 0.000 description 2
- 229910000027 potassium carbonate Inorganic materials 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- MCAHWIHFGHIESP-UHFFFAOYSA-N selenous acid Chemical compound O[Se](O)=O MCAHWIHFGHIESP-UHFFFAOYSA-N 0.000 description 2
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 description 2
- 229940098221 silver cyanide Drugs 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- RPACBEVZENYWOL-XFULWGLBSA-M sodium;(2r)-2-[6-(4-chlorophenoxy)hexyl]oxirane-2-carboxylate Chemical compound [Na+].C=1C=C(Cl)C=CC=1OCCCCCC[C@]1(C(=O)[O-])CO1 RPACBEVZENYWOL-XFULWGLBSA-M 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- WHOZNOZYMBRCBL-OUKQBFOZSA-N (2E)-2-Tetradecenal Chemical compound CCCCCCCCCCC\C=C\C=O WHOZNOZYMBRCBL-OUKQBFOZSA-N 0.000 description 1
- ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 description 1
- FKKAGFLIPSSCHT-UHFFFAOYSA-N 1-dodecoxydodecane;sulfuric acid Chemical compound OS(O)(=O)=O.CCCCCCCCCCCCOCCCCCCCCCCCC FKKAGFLIPSSCHT-UHFFFAOYSA-N 0.000 description 1
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 description 1
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 1
- MHGOKSLTIUHUBF-UHFFFAOYSA-N 2-ethylhexyl sulfate Chemical compound CCCCC(CC)COS(O)(=O)=O MHGOKSLTIUHUBF-UHFFFAOYSA-N 0.000 description 1
- RYKLZUPYJFFNRR-UHFFFAOYSA-N 3-hydroxypiperidin-2-one Chemical compound OC1CCCNC1=O RYKLZUPYJFFNRR-UHFFFAOYSA-N 0.000 description 1
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 229910002535 CuZn Inorganic materials 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910003266 NiCo Inorganic materials 0.000 description 1
- 229910003294 NiMo Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- ZSILVJLXKHGNPL-UHFFFAOYSA-L S(=S)(=O)([O-])[O-].[Ag+2] Chemical compound S(=S)(=O)([O-])[O-].[Ag+2] ZSILVJLXKHGNPL-UHFFFAOYSA-L 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- 229910021612 Silver iodide Inorganic materials 0.000 description 1
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 1
- HJPBEXZMTWFZHY-UHFFFAOYSA-N [Ti].[Ru].[Ir] Chemical compound [Ti].[Ru].[Ir] HJPBEXZMTWFZHY-UHFFFAOYSA-N 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910001854 alkali hydroxide Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 150000001447 alkali salts Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- SFOSJWNBROHOFJ-UHFFFAOYSA-N cobalt gold Chemical compound [Co].[Au] SFOSJWNBROHOFJ-UHFFFAOYSA-N 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 1
- RNGFNLJMTFPHBS-UHFFFAOYSA-L dipotassium;selenite Chemical compound [K+].[K+].[O-][Se]([O-])=O RNGFNLJMTFPHBS-UHFFFAOYSA-L 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 229940021013 electrolyte solution Drugs 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- NPEWZDADCAZMNF-UHFFFAOYSA-N gold iron Chemical compound [Fe].[Au] NPEWZDADCAZMNF-UHFFFAOYSA-N 0.000 description 1
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910000457 iridium oxide Inorganic materials 0.000 description 1
- CJTCBBYSPFAVFL-UHFFFAOYSA-N iridium ruthenium Chemical compound [Ru].[Ir] CJTCBBYSPFAVFL-UHFFFAOYSA-N 0.000 description 1
- ULFQGKXWKFZMLH-UHFFFAOYSA-N iridium tantalum Chemical compound [Ta].[Ir] ULFQGKXWKFZMLH-UHFFFAOYSA-N 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- FXADMRZICBQPQY-UHFFFAOYSA-N orthotelluric acid Chemical compound O[Te](O)(O)(O)(O)O FXADMRZICBQPQY-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229940044654 phenolsulfonic acid Drugs 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- QYHFIVBSNOWOCQ-UHFFFAOYSA-N selenic acid Chemical compound O[Se](O)(=O)=O QYHFIVBSNOWOCQ-UHFFFAOYSA-N 0.000 description 1
- 229940065287 selenium compound Drugs 0.000 description 1
- 150000003343 selenium compounds Chemical class 0.000 description 1
- CRDYSYOERSZTHZ-UHFFFAOYSA-N selenocyanic acid Chemical class [SeH]C#N CRDYSYOERSZTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 1
- 229910001958 silver carbonate Inorganic materials 0.000 description 1
- LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 description 1
- 229940096017 silver fluoride Drugs 0.000 description 1
- 229940045105 silver iodide Drugs 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- REYHXKZHIMGNSE-UHFFFAOYSA-M silver monofluoride Chemical compound [F-].[Ag+] REYHXKZHIMGNSE-UHFFFAOYSA-M 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- FJOLTQXXWSRAIX-UHFFFAOYSA-K silver phosphate Chemical compound [Ag+].[Ag+].[Ag+].[O-]P([O-])([O-])=O FJOLTQXXWSRAIX-UHFFFAOYSA-K 0.000 description 1
- 229910000161 silver phosphate Inorganic materials 0.000 description 1
- 229940019931 silver phosphate Drugs 0.000 description 1
- YPNVIBVEFVRZPJ-UHFFFAOYSA-L silver sulfate Chemical compound [Ag+].[Ag+].[O-]S([O-])(=O)=O YPNVIBVEFVRZPJ-UHFFFAOYSA-L 0.000 description 1
- 229910000367 silver sulfate Inorganic materials 0.000 description 1
- RHUVFRWZKMEWNS-UHFFFAOYSA-M silver thiocyanate Chemical compound [Ag+].[S-]C#N RHUVFRWZKMEWNS-UHFFFAOYSA-M 0.000 description 1
- LMEWRZSPCQHBOB-UHFFFAOYSA-M silver;2-hydroxypropanoate Chemical compound [Ag+].CC(O)C([O-])=O LMEWRZSPCQHBOB-UHFFFAOYSA-M 0.000 description 1
- 229940067741 sodium octyl sulfate Drugs 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 229960000776 sodium tetradecyl sulfate Drugs 0.000 description 1
- DGSDBJMBHCQYGN-UHFFFAOYSA-M sodium;2-ethylhexyl sulfate Chemical compound [Na+].CCCCC(CC)COS([O-])(=O)=O DGSDBJMBHCQYGN-UHFFFAOYSA-M 0.000 description 1
- XZTJQQLJJCXOLP-UHFFFAOYSA-M sodium;decyl sulfate Chemical compound [Na+].CCCCCCCCCCOS([O-])(=O)=O XZTJQQLJJCXOLP-UHFFFAOYSA-M 0.000 description 1
- WFRKJMRGXGWHBM-UHFFFAOYSA-M sodium;octyl sulfate Chemical compound [Na+].CCCCCCCCOS([O-])(=O)=O WFRKJMRGXGWHBM-UHFFFAOYSA-M 0.000 description 1
- UPUIQOIQVMNQAP-UHFFFAOYSA-M sodium;tetradecyl sulfate Chemical compound [Na+].CCCCCCCCCCCCCCOS([O-])(=O)=O UPUIQOIQVMNQAP-UHFFFAOYSA-M 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 239000004334 sorbic acid Substances 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- XHGGEBRKUWZHEK-UHFFFAOYSA-L tellurate Chemical compound [O-][Te]([O-])(=O)=O XHGGEBRKUWZHEK-UHFFFAOYSA-L 0.000 description 1
- SITVSCPRJNYAGV-UHFFFAOYSA-N tellurous acid Chemical compound O[Te](O)=O SITVSCPRJNYAGV-UHFFFAOYSA-N 0.000 description 1
- VPKAOUKDMHJLAY-UHFFFAOYSA-J tetrasilver;phosphonato phosphate Chemical compound [Ag+].[Ag+].[Ag+].[Ag+].[O-]P([O-])(=O)OP([O-])([O-])=O VPKAOUKDMHJLAY-UHFFFAOYSA-J 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/46—Electroplating: Baths therefor from solutions of silver
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
Definitions
- the present invention is directed to a silver electrolyte and a corresponding method for the electrodeposition of silver onto conductive substrates.
- the silver electrolyte as described in claim 1 is characterized by certain additives which help to prevent foaming of the electrolyte without at the same time negatively affecting the electrolytic deposition.
- Electrical contacts are installed in practically all electrical devices today. Their applications range from simple plug connectors to safety-relevant, sophisticated switching contacts in the communications sector, for the automotive industry or aerospace technology.
- the contact surfaces are required to have good electrical conductivity, low and long-term stable contact resistance, as well as good corrosion and wear resistance with the lowest possible insertion force.
- plug contacts are often coated with a hard gold alloy layer consisting of gold-cobalt, gold-nickel or gold-iron. These layers have good wear resistance, good solderability, low and long-term stable contact contact resistance and good corrosion resistance. Due to the rising price of gold, cheaper alternatives are being sought.
- Silver coating has proven to be an advantageous replacement for hard gold coating.
- Silver and silver alloys are among the most important contact materials in electrical engineering due to their high electrical conductivity and good oxidation resistance. These silver coatings have similar coating properties to the hard gold coatings or coating combinations used to date, such as palladium-nickel with gold flash. In addition, the price of silver is relatively low compared to other precious metals, particularly hard gold alloys.
- Special silver electrolytes are used to coat substrates with silver and to produce contact surfaces. These are usually silver-containing or cyanide-free solutions that are used for electrochemical, particularly galvanic, silver plating of surfaces. Silver electrolyte solutions can contain a wide variety of other additives such as grain refiners, dispersants, brighteners or Contain solid components. For applications in the electrical and electronics sector, especially for plugs and plug and switch contacts, the conductivity, contact resistance and friction coefficient are particularly relevant.
- the electrolyte When depositing silver layers from the electrolyte according to the invention, the electrolyte must be kept constantly in motion in order to prevent sedimentation of the solid components and to ensure the highest possible current density. Foam formation is reliably prevented/largely eliminated with the defoamers. reduced. It is also surprising that the addition of appropriate defoamers does not have a significant negative effect on the layer composition (solid incorporation) and the desired properties of the silver layer, such as the contact resistance.
- the polyalkylene glycols used, in particular polyethylene glycol have a higher average molecular mass of greater than 200 g/mol, preferably at least 400 g/mol.
- the average molecular mass of the polyethylene glycols used is very preferably between 1000 and 9000 g/mol and very particularly preferably between 4000 and 8000 g/mol.
- the amount of defoamer is between 0.2 and 20 g/L, preferably 1 and 10 g/L and very preferably between 1 and 5 g/L.
- Brighteners in the context of the present invention are substances that shift the grain size of the silver deposit to smaller grain sizes.
- Arylsulfonic acids such as phenolsulfonic acid and benzenesulfonic acid, toluenesulfonic acid are used here.
- the brighteners are used in a concentration of 0.2 - 10 g/L, preferably 0.5 - 10 g/L and very preferably 1.0 - 5 g/L in the electrolyte according to the invention. It is particularly advantageous if no naphthalenesulfonic acid, naphthalenesulfonic acid derivatives (e.g.
- naphthalenesulfonic acid condensation products with aldehydes or mixtures thereof are present in the electrolyte according to the invention.
- the aryl radical can optionally be substituted.
- the latter lead to the fact that, despite high current densities and the resulting high electrolyte movement, only little foam occurs and the solid components can be well dispersed in the silver deposit (see examples).
- solid component means a component that is not present in solution, but is present in the electrolyte as a solid.
- solid components that are present in the DE102018005352A1 mentioned in this regard.
- the amount of solid component used is 2-200 g/L, preferably 20-150 g/L and very preferably 80-130 g/L.
- the average particle diameter (d50 of the Q3 distribution) is measured according to ISO 13320-1 (latest version on the date of filing) using a Tornado dry dispersion module from Beckmann.
- the mean particle size (d50) indicates that 50% of the particles of a solid component have a smaller diameter than the specified value.
- Alkyl sulfates are used as wetting agents (see also: Kanani, N: Galvanotechnik; Hanser Verlag, Kunststoff Vienna, 2000; page 84 ff ). Silver coatings deposited using baths equipped in this way are generally white and glossy to high-gloss. The wetting agents result in a pore-free layer.
- the alkyl sulfates can be linear or branched-chain alkyl sulfates with C 1 -C 25 alkyl radicals and preferably linear or branched-chain alkyl sulfates with C 2 -C 20 alkyl radicals, which can be unsubstituted or optionally substituted.
- the wetting agent contains a linear or branched-chain alkyl sulfate with C 3 -Cis alkyl radicals, which can be unsubstituted or optionally substituted, and more preferably a linear or branched-chain alkyl sulfate with C 3 -C 12 alkyl radicals, which unsubstituted or optionally substituted.
- the wetting agents can also be present in the form of their salts, e.g. sodium salt, potassium salt.
- Particularly preferred in this context are those selected from the group consisting of 2-ethylhexyl sulfate Na salt, lauryl ether sulfate Na salt, sodium monoalkyl sulfates, such as sodium tetradecyl sulfate, sodium dodecyl sulfate, sodium ethylhexyl sulfate, sodium decyl sulfate, sodium octyl sulfate, and mixtures thereof.
- the content of the at least one wetting agent is between 0.1 and 15 ml/L, preferably between 0.2 and 10 ml/L, more preferably between 0.5 and 7 ml/L and even more preferably between 1 and 6 ml/L.
- salts containing Se or Te can also be present in the electrolyte.
- the selenium or tellurium compound used in the electrolyte can be selected accordingly by the person skilled in the art. Suitable selenium and tellurium compounds are those in which selenium or tellurium is present in the oxidation states +4 or +6 in the form of an anion. Selenium and tellurium compounds in which selenium or tellurium is present in the oxidation state +4 are advantageously used in the electrolyte.
- the selenium and tellurium compounds are particularly preferably selected from tellurites, selenites, tellurous acid, selenous acid, telluric acid, selenic acid, selenocyanates, tellurocyanates and selenate as well as tellurate.
- the use of selenium compounds is generally preferred over tellurium compounds.
- the addition of selenium to the electrolyte in the form of a salt of selenous acid, e.g. in the form of potassium selenite, is particularly preferred. Addition as potassium selenocyanate is extremely preferred.
- the amount of these compounds in the electrolyte can be selected according to the expert's specifications. It will be in the range of 0.1 mg - 500 mg/L, preferably 0.5 mg - 100 mg and very preferably between 0.5 mg - 10 mg/L based on selenium or tellurium.
- the electrolyte also contains a certain amount of free cyanide.
- This is preferably added to the electrolyte in the form of a water-soluble salt of hydrocyanic acid.
- Alkali salts are advantageous, and potassium cyanide is particularly preferred.
- the amount of free cyanide in the electrolyte can be adjusted according to values known to those skilled in the art. As a rule, the free cyanides are present in the electrolyte in a concentration of 20 - 200 g/L, preferably 80 - 180 g/L and very preferably 100 - 150 g/L (each based on the CN ion).
- the cyanide salt used can also serve as a conducting salt.
- Another essential component of the electrolyte is the silver to be deposited in dissolved form.
- This can be deposited in the form of a water-soluble salts are introduced into the electrolyte.
- a water-soluble salts include those from the group consisting of silver methanesulfonate, silver carbonate, silver phosphate, silver pyrophosphate, silver nitrate, silver oxide, silver lactate, silver fluoride, silver bromide, silver chloride, silver iodide, silver thiocyanate, silver thiosulfate, silver hydantoins, silver sulfate, silver cyanide and alkali silver cyanide. Potassium silver cyanide is particularly advantageous in this context.
- the silver salts are used in an initial concentration in the electrolyte which is between 2 - 200 g/L, preferably 10 - 100 g/L and most preferably 20 - 50 g/L (each based on the Ag metal).
- ions can also be present in low concentrations dissolved in the electrolyte. These are in particular those that lead to a harder layer compared to the deposition of a pure silver layer (so-called hard silver). These are ions selected from the group consisting of Sb, Bi, In, Sn, W, Mo, Pb, As, Cu, Ni. These are generally present in a concentration of 0.001 - 30 g/L, preferably 0.01 - 20 g/L and very preferably 0.1 - 10 g/L (in each case based on the corresponding metal).
- the present invention also relates to a process for the galvanic deposition of silver layers on conductive substrates, in which an electrically conductive substrate is immersed in the electrolyte according to the invention and a current flow is established between an anode in contact with the electrolyte and the substrate as cathode, the electrolyte being constantly kept in motion and the pH value being constantly adjusted to a value >8 during the electrolysis.
- the temperature that prevails during the deposition of the dispersion layer can be chosen by the expert as desired, or the temperature is automatically set due to external influences (frictional heat from dispersion modules).
- the expert will be guided by a sufficient deposition rate and the applicable current density range on the one hand and by economic aspects or the stability of the electrolyte on the other. It is advantageous to set the electrolyte temperature at 10°C to 70°C, preferably 15°C to 40°C and particularly preferably 20°C to 30°C.
- the pH value of the electrolyte is >8 and can in principle be adjusted according to the expert's requirements. However, he will be guided by the idea of introducing as few additional substances as possible into the electrolyte that could negatively influence the deposition of the corresponding layer. In a particularly In the preferred embodiment, the pH is therefore adjusted solely by adding a base.
- the person skilled in the art can use any compound suitable for a corresponding application. Preferably, alkali hydroxides, oxides or carbonates are used. Optimum results can be achieved with pH values in the electrolyte of >8 - 13, more preferably 9 - 11. It is possible that fluctuations occur in the pH of the electrolyte during electrolysis. In a preferred embodiment of the present process, the person skilled in the art therefore proceeds by checking the pH during electrolysis and, if necessary, adjusting it to the target value. The person skilled in the art knows how to proceed here.
- the current density that is established between the cathode and the anode in the electrolyte according to the invention during the deposition process according to the invention can be selected by the person skilled in the art depending on the efficiency and quality of the deposition.
- the current density in the electrolyte is advantageously set to 0.2 to 100 A/dm 2 depending on the application and type of coating system. If necessary, the current densities can be increased or reduced by adjusting the system parameters such as the structure of the coating cell, flow rates, anode and cathode ratios, etc.
- a current density of 0.2 - 50 A/dm 2 is advantageous, preferably 1 - 10 A/dm 2 and very particularly preferably 1 - 5 A/dm 2 .
- pulsed direct current or reverse pulse plating can also be used.
- the current flow is interrupted for a certain period of time (pulse plating) or the current flow is reversed.
- pulse plating in the form of current interruptions and reverse pulse plating for silver graphite dispersion deposition is described in the literature ( Arnet, R. et al, Silver dispersion layers with self-lubricating properties, Galvanotechnik 2021, Vol. 1, p. 21 ff .).
- the electrolyte according to the invention and the method according to the invention can be used for the galvanic deposition of silver layers, preferably for technical applications, for example electrical connectors and circuit boards.
- coating in continuous systems can also be used.
- Layer thicknesses in the range of 0.1 to 100 ⁇ m are typically deposited in rack operation, especially for technical applications with current densities in the range of 0.5 to 50 A/dm 2.
- current densities are in the range given above.
- anodes When using the electrolyte, different anodes can be used. Soluble or insoluble anodes are just as suitable as the combination of soluble and insoluble anodes. If a soluble anode is used, it is particularly preferred if a silver anode is used ( DE1228887 , Practical electroplating, 5th edition, Eugen G. Leuze Verlag, p. 342f, 1997 ).
- Insoluble anodes are preferably those made of a material selected from the group consisting of platinized titanium, graphite, stainless steel, mixed metal oxides, glassy carbon anodes and special carbon material ("Diamond Like Carbon" DLC) or combinations of these anodes.
- Insoluble anodes made of platinized titanium or titanium coated with mixed metal oxides are advantageous, the mixed metal oxides preferably being selected from iridium oxide, ruthenium oxide, tantalum oxide and mixtures thereof.
- Iridium-transition metal oxide mixed oxide anodes particularly preferably mixed oxide anodes made of iridium-ruthenium mixed oxide, iridium-ruthenium-titanium mixed oxide or iridium-tantalum mixed oxide are also advantageously used to carry out the invention. Others can be found in Cobley, AJ et al. (The use of insoluble anodes in acid sulphate copper electrodeposition solutions, Trans IMF, 2001,79(3), pp. 113 and 114 ) being found.
- Suitable electrically conductive substrates are those that can be coated with the electrolyte according to the invention in the basic pH range. These are preferably substrates containing precious metals or less noble substrates, such as nickel or copper surfaces. According to the invention, the silver layer is preferably deposited on a nickel or nickel alloy layer or a copper or copper alloy layer.
- Suitable substrate materials that are advantageously used here are copper-based materials such as pure copper, brass, bronze (e.g. CuSn, CuSnZn) or special copper alloys for connectors such as alloys with silicon, beryllium, tellurium, phosphorus or iron-based materials such as iron or stainless steel or nickel or a nickel alloy such as NiP, NiW, NiB, gold or silver.
- the substrate materials can also be multi-layer systems that have been coated galvanically or using another coating technique. This also applies, for example, to iron materials that have been nickel- or copper-plated and then optionally gold-plated, pre-palladinized, pre-platinum-plated or coated with pre-silver.
- the Intermediate layers for nickel or copper plating can also be made from corresponding alloy electrolytes - e.g. NiP, NiW, NiMo, NiCo, NiB, Cu, CuSn, CuSnZn, CuZn, etc.
- Another substrate material can be a wax core that has been pre-coated with conductive silver varnish (electroforming).
- electrolyte refers to the aqueous solution which is placed in a corresponding vessel and used for electrolysis with an anode and a cathode under current flow.
- the solid component used is the solid component used.
- the electrolyte according to the invention is aqueous. With the exception of the added solid components and any insoluble heterogeneous defoamers, the compounds used in the electrolyte are soluble in the electrolyte.
- the term "soluble" refers to compounds that dissolve in the electrolyte at working temperature. The working temperature is the temperature at which the electrolytic deposition takes place. In the context of the present invention, a substance is considered soluble if at least 1 mg/l of this substance dissolves in the electrolyte at working temperature.
- the electrolyte according to the invention is stable over the long term.
- coatings suitable for the described application are obtained. These have sufficiently low contact resistances and, moreover, retain an astonishingly high level of surface integrity and thus low contact resistances even after many plugging and rubbing processes in contact circuits. This was not to be expected from the available state of the art.
- Electrolyte composition aqueous A
- the graphite incorporation is not negatively influenced by the addition of the defoaming component.
- Electrolyte composition aqueous B
- the graphite incorporation is not negatively influenced by the addition of the defoaming component.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Claims (5)
- Électrolyte aqueux d'argent destiné au dépôt de manière galvanique de couches d'argent sur des substrats conducteurs, présentant :a) au moins un composé soluble d'argent en une quantité comprise entre 2 et 200 g/l, par rapport à l'Ag métallique ;b) du cyanure libre en une quantité allant de 20 à 200 g/l ;c) au moins un brillanteur du groupe constitué d'acides arylsulfoniques en une quantité allant de 0,2 à 10 g/l ;d) au moins un agent mouillant choisi dans le groupe des sulfates d'alkyle en une quantité allant de 0,1 à 15 ml/l ;e) au moins un constituant solide choisi dans le groupe constitué de graphite, fluorure de graphite, oxyde de graphite, diamant, graphite enveloppé d'Al2O3 ou de leurs mélanges en une quantité allant de 2 à 200 g/l ;l'électrolyte présentant en outre :
f) au moins un antimousse en une quantité allant de 0,2 à 20 g/l,caractérisé en ce quel'antimousse est choisi dans le groupe des polyalkylèneglycols, qui présentent une masse molaire moyenne d'au moins 200 g/mol. - Électrolyte selon la revendication 1,
caractérisé en ce que
celui-ci présente en outre au moins 0,1 à 500 mg/l d'un sel d'un anion de Se ou de Te, par rapport au sélénium ou au tellure. - Procédé permettant le dépôt de manière galvanique de couches d'argent sur des substrats conducteurs,
caractérisé en ce que
on plonge un substrat électriquement conducteur dans l'électrolyte des revendications 1 à 2 et on établit un flux de courant entre une anode en contact avec l'électrolyte et le substrat en tant que cathode, l'électrolyte étant maintenu constamment en mouvement et le pH pendant l'électrolyse étant réglé constamment à une valeur > 8. - Procédé selon la revendication 3,
caractérisé en ce que
la température de l'électrolyte va de 20 à 90 °C. - Procédé selon la revendication 3 ou 4,
caractérisé en ce que
la densité de courant pendant l'électrolyse se situe entre 0,2 et 100 A/dm2.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102021118820.2A DE102021118820A1 (de) | 2021-07-21 | 2021-07-21 | Silber-Elektrolyt |
PCT/EP2022/070294 WO2023001868A1 (fr) | 2021-07-21 | 2022-07-20 | Électrolyte à base d'argent pour le dépôt de couches de dispersion d'argent |
Publications (2)
Publication Number | Publication Date |
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EP4146848A1 EP4146848A1 (fr) | 2023-03-15 |
EP4146848B1 true EP4146848B1 (fr) | 2024-04-10 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP22755083.7A Active EP4146848B1 (fr) | 2021-07-21 | 2022-07-20 | Électrolyte à base d'argent pour le dépôt de couches de dispersion d'argent |
Country Status (5)
Country | Link |
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EP (1) | EP4146848B1 (fr) |
KR (1) | KR20240031423A (fr) |
CN (1) | CN117677733A (fr) |
DE (1) | DE102021118820A1 (fr) |
WO (1) | WO2023001868A1 (fr) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1228887B (de) | 1961-10-26 | 1966-11-17 | Riedel & Co | Verfahren zum galvanischen Abscheiden von Silber-Antimon- oder Silber-Wismut-Legierungen hoher Haerte |
DE2543082C3 (de) | 1975-09-26 | 1979-06-28 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Cyanidischer Silberelektrolyt und Verfahren zur galvanischen Abscheidung von Silber-Graphit-Dispersionsüberzügen und seine Anwendung |
DE4010346A1 (de) | 1990-03-28 | 1991-10-02 | Siemens Ag | Verfahren zum aufbringen von silber-graphit-dispersionsueberzuegen |
CN1692182A (zh) * | 2002-11-28 | 2005-11-02 | 新光电气工业株式会社 | 银电镀液 |
DE10346206A1 (de) | 2003-10-06 | 2005-04-28 | Bosch Gmbh Robert | Kontaktoberflächen für elektrische Kontakte |
DE102008030988B4 (de) | 2008-06-27 | 2010-04-01 | Siemens Aktiengesellschaft | Bauteil mit einer Schicht, in die CNT (Carbon Nanotubes) eingebaut sind und Verfahren zu dessen Herstellung |
DE102015102453A1 (de) | 2015-02-20 | 2016-08-25 | Heraeus Deutschland GmbH & Co. KG | Bandförmiges Substrat zur Herstellung von Chipkartenmodulen, Chipkartenmodul, elektronische Einrichtung mit einem derartigen Chipkartenmodul und Verfahren zur Herstellung eines Substrates |
CN105297095A (zh) | 2015-12-14 | 2016-02-03 | 南昌航空大学 | 一种纯银层/银石墨复合层的功能性镀层及制备方法 |
DE102018005352A1 (de) | 2018-07-05 | 2020-01-09 | Dr.-Ing. Max Schlötter GmbH & Co KG | Silberelektrolyt zur Abscheidung von Dispersions-Silberschichten und Kontaktoberflächen mit Dispersions-Silberschichten |
-
2021
- 2021-07-21 DE DE102021118820.2A patent/DE102021118820A1/de active Pending
-
2022
- 2022-07-20 KR KR1020247005978A patent/KR20240031423A/ko unknown
- 2022-07-20 EP EP22755083.7A patent/EP4146848B1/fr active Active
- 2022-07-20 WO PCT/EP2022/070294 patent/WO2023001868A1/fr active Application Filing
- 2022-07-20 CN CN202280051010.0A patent/CN117677733A/zh active Pending
Also Published As
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CN117677733A (zh) | 2024-03-08 |
WO2023001868A1 (fr) | 2023-01-26 |
EP4146848A1 (fr) | 2023-03-15 |
KR20240031423A (ko) | 2024-03-07 |
DE102021118820A1 (de) | 2023-01-26 |
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