EP4146848A1 - Électrolyte à base d'argent pour le dépôt de couches de dispersion d'argent - Google Patents
Électrolyte à base d'argent pour le dépôt de couches de dispersion d'argentInfo
- Publication number
- EP4146848A1 EP4146848A1 EP22755083.7A EP22755083A EP4146848A1 EP 4146848 A1 EP4146848 A1 EP 4146848A1 EP 22755083 A EP22755083 A EP 22755083A EP 4146848 A1 EP4146848 A1 EP 4146848A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrolyte
- silver
- amount
- graphite
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003792 electrolyte Substances 0.000 title claims abstract description 80
- 229910052709 silver Inorganic materials 0.000 title claims abstract description 54
- 239000004332 silver Substances 0.000 title claims abstract description 54
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims abstract description 53
- 239000006185 dispersion Substances 0.000 title description 7
- 230000008021 deposition Effects 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 15
- 239000000654 additive Substances 0.000 claims abstract description 9
- 239000007787 solid Substances 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 20
- 239000010439 graphite Substances 0.000 claims description 15
- 229910002804 graphite Inorganic materials 0.000 claims description 15
- 239000011669 selenium Substances 0.000 claims description 13
- 229910052711 selenium Inorganic materials 0.000 claims description 11
- -1 Gra phitfluorid Chemical compound 0.000 claims description 10
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 10
- 239000000080 wetting agent Substances 0.000 claims description 10
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 7
- 150000008051 alkyl sulfates Chemical class 0.000 claims description 7
- 150000003839 salts Chemical class 0.000 claims description 7
- 229910052714 tellurium Inorganic materials 0.000 claims description 7
- 239000013530 defoamer Substances 0.000 claims description 6
- 238000005868 electrolysis reaction Methods 0.000 claims description 6
- 150000007513 acids Chemical class 0.000 claims description 5
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 5
- 229920001515 polyalkylene glycol Polymers 0.000 claims description 3
- 230000000996 additive effect Effects 0.000 claims description 2
- 150000001450 anions Chemical class 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 229940100890 silver compound Drugs 0.000 claims description 2
- 150000003379 silver compounds Chemical class 0.000 claims description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- 238000000151 deposition Methods 0.000 abstract description 18
- 238000004070 electrodeposition Methods 0.000 abstract description 4
- 238000005187 foaming Methods 0.000 abstract description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- 238000000576 coating method Methods 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000006260 foam Substances 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 229920001223 polyethylene glycol Polymers 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 230000002411 adverse Effects 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 150000003498 tellurium compounds Chemical class 0.000 description 5
- 239000002202 Polyethylene glycol Substances 0.000 description 4
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 4
- 229940092714 benzenesulfonic acid Drugs 0.000 description 4
- 238000005282 brightening Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010348 incorporation Methods 0.000 description 4
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 4
- VDMJCVUEUHKGOY-JXMROGBWSA-N (1e)-4-fluoro-n-hydroxybenzenecarboximidoyl chloride Chemical compound O\N=C(\Cl)C1=CC=C(F)C=C1 VDMJCVUEUHKGOY-JXMROGBWSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 229910003455 mixed metal oxide Inorganic materials 0.000 description 3
- PSZYNBSKGUBXEH-UHFFFAOYSA-N naphthalene-1-sulfonic acid Chemical compound C1=CC=C2C(S(=O)(=O)O)=CC=CC2=C1 PSZYNBSKGUBXEH-UHFFFAOYSA-N 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229920000570 polyether Polymers 0.000 description 3
- HKSGQTYSSZOJOA-UHFFFAOYSA-N potassium argentocyanide Chemical compound [K+].[Ag+].N#[C-].N#[C-] HKSGQTYSSZOJOA-UHFFFAOYSA-N 0.000 description 3
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- PMNLUUOXGOOLSP-UHFFFAOYSA-N 2-mercaptopropanoic acid Chemical compound CC(S)C(O)=O PMNLUUOXGOOLSP-UHFFFAOYSA-N 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229910016347 CuSn Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 229910005569 NiB Inorganic materials 0.000 description 2
- 229920002266 Pluriol® Polymers 0.000 description 2
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000004870 electrical engineering Methods 0.000 description 2
- IIWMSIPKUVXHOO-UHFFFAOYSA-N ethyl hexyl sulfate Chemical compound CCCCCCOS(=O)(=O)OCC IIWMSIPKUVXHOO-UHFFFAOYSA-N 0.000 description 2
- 239000010946 fine silver Substances 0.000 description 2
- 239000003353 gold alloy Substances 0.000 description 2
- LELOWRISYMNNSU-UHFFFAOYSA-N hydrogen cyanide Chemical compound N#C LELOWRISYMNNSU-UHFFFAOYSA-N 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- QLOAVXSYZAJECW-UHFFFAOYSA-N methane;molecular fluorine Chemical compound C.FF QLOAVXSYZAJECW-UHFFFAOYSA-N 0.000 description 2
- 150000002825 nitriles Chemical class 0.000 description 2
- 229910000027 potassium carbonate Inorganic materials 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 229940000207 selenious acid Drugs 0.000 description 2
- MCAHWIHFGHIESP-UHFFFAOYSA-N selenous acid Chemical compound O[Se](O)=O MCAHWIHFGHIESP-UHFFFAOYSA-N 0.000 description 2
- 229940098221 silver cyanide Drugs 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 2
- DGSDBJMBHCQYGN-UHFFFAOYSA-M sodium;2-ethylhexyl sulfate Chemical compound [Na+].CCCCC(CC)COS([O-])(=O)=O DGSDBJMBHCQYGN-UHFFFAOYSA-M 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- WHOZNOZYMBRCBL-OUKQBFOZSA-N (2E)-2-Tetradecenal Chemical compound CCCCCCCCCCC\C=C\C=O WHOZNOZYMBRCBL-OUKQBFOZSA-N 0.000 description 1
- ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 description 1
- GGZHVNZHFYCSEV-UHFFFAOYSA-N 1-Phenyl-5-mercaptotetrazole Chemical compound SC1=NN=NN1C1=CC=CC=C1 GGZHVNZHFYCSEV-UHFFFAOYSA-N 0.000 description 1
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 description 1
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 1
- RVBUGGBMJDPOST-UHFFFAOYSA-N 2-thiobarbituric acid Chemical compound O=C1CC(=O)NC(=S)N1 RVBUGGBMJDPOST-UHFFFAOYSA-N 0.000 description 1
- RYKLZUPYJFFNRR-UHFFFAOYSA-N 3-hydroxypiperidin-2-one Chemical compound OC1CCCNC1=O RYKLZUPYJFFNRR-UHFFFAOYSA-N 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 229910002535 CuZn Inorganic materials 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910003266 NiCo Inorganic materials 0.000 description 1
- 229910003294 NiMo Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- ZSILVJLXKHGNPL-UHFFFAOYSA-L S(=S)(=O)([O-])[O-].[Ag+2] Chemical compound S(=S)(=O)([O-])[O-].[Ag+2] ZSILVJLXKHGNPL-UHFFFAOYSA-L 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- 229910021612 Silver iodide Inorganic materials 0.000 description 1
- HJPBEXZMTWFZHY-UHFFFAOYSA-N [Ti].[Ru].[Ir] Chemical compound [Ti].[Ru].[Ir] HJPBEXZMTWFZHY-UHFFFAOYSA-N 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 150000008055 alkyl aryl sulfonates Chemical class 0.000 description 1
- 229940045714 alkyl sulfonate alkylating agent Drugs 0.000 description 1
- 150000008052 alkyl sulfonates Chemical class 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 150000005840 aryl radicals Chemical class 0.000 description 1
- 125000005228 aryl sulfonate group Chemical group 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- SFOSJWNBROHOFJ-UHFFFAOYSA-N cobalt gold Chemical compound [Co].[Au] SFOSJWNBROHOFJ-UHFFFAOYSA-N 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 1
- RNGFNLJMTFPHBS-UHFFFAOYSA-L dipotassium;selenite Chemical compound [K+].[K+].[O-][Se]([O-])=O RNGFNLJMTFPHBS-UHFFFAOYSA-L 0.000 description 1
- SMVRDGHCVNAOIN-UHFFFAOYSA-L disodium;1-dodecoxydodecane;sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O.CCCCCCCCCCCCOCCCCCCCCCCCC SMVRDGHCVNAOIN-UHFFFAOYSA-L 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 229940021013 electrolyte solution Drugs 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 150000002191 fatty alcohols Chemical class 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- NPEWZDADCAZMNF-UHFFFAOYSA-N gold iron Chemical compound [Fe].[Au] NPEWZDADCAZMNF-UHFFFAOYSA-N 0.000 description 1
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000002563 ionic surfactant Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910000457 iridium oxide Inorganic materials 0.000 description 1
- CJTCBBYSPFAVFL-UHFFFAOYSA-N iridium ruthenium Chemical compound [Ru].[Ir] CJTCBBYSPFAVFL-UHFFFAOYSA-N 0.000 description 1
- ULFQGKXWKFZMLH-UHFFFAOYSA-N iridium tantalum Chemical compound [Ta].[Ir] ULFQGKXWKFZMLH-UHFFFAOYSA-N 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- FXADMRZICBQPQY-UHFFFAOYSA-N orthotelluric acid Chemical compound O[Te](O)(O)(O)(O)O FXADMRZICBQPQY-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229940044654 phenolsulfonic acid Drugs 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 150000003014 phosphoric acid esters Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920000151 polyglycol Polymers 0.000 description 1
- 239000010695 polyglycol Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- QYHFIVBSNOWOCQ-UHFFFAOYSA-N selenic acid Chemical compound O[Se](O)(=O)=O QYHFIVBSNOWOCQ-UHFFFAOYSA-N 0.000 description 1
- 229940065287 selenium compound Drugs 0.000 description 1
- 150000003343 selenium compounds Chemical class 0.000 description 1
- CRDYSYOERSZTHZ-UHFFFAOYSA-N selenocyanic acid Chemical class [SeH]C#N CRDYSYOERSZTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 1
- 229910001958 silver carbonate Inorganic materials 0.000 description 1
- LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 description 1
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 description 1
- 229940096017 silver fluoride Drugs 0.000 description 1
- 229940045105 silver iodide Drugs 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- REYHXKZHIMGNSE-UHFFFAOYSA-M silver monofluoride Chemical compound [F-].[Ag+] REYHXKZHIMGNSE-UHFFFAOYSA-M 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- FJOLTQXXWSRAIX-UHFFFAOYSA-K silver phosphate Chemical compound [Ag+].[Ag+].[Ag+].[O-]P([O-])([O-])=O FJOLTQXXWSRAIX-UHFFFAOYSA-K 0.000 description 1
- 229910000161 silver phosphate Inorganic materials 0.000 description 1
- 229940019931 silver phosphate Drugs 0.000 description 1
- YPNVIBVEFVRZPJ-UHFFFAOYSA-L silver sulfate Chemical compound [Ag+].[Ag+].[O-]S([O-])(=O)=O YPNVIBVEFVRZPJ-UHFFFAOYSA-L 0.000 description 1
- 229910000367 silver sulfate Inorganic materials 0.000 description 1
- RHUVFRWZKMEWNS-UHFFFAOYSA-M silver thiocyanate Chemical compound [Ag+].[S-]C#N RHUVFRWZKMEWNS-UHFFFAOYSA-M 0.000 description 1
- LMEWRZSPCQHBOB-UHFFFAOYSA-M silver;2-hydroxypropanoate Chemical compound [Ag+].CC(O)C([O-])=O LMEWRZSPCQHBOB-UHFFFAOYSA-M 0.000 description 1
- 229940067741 sodium octyl sulfate Drugs 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 229960000776 sodium tetradecyl sulfate Drugs 0.000 description 1
- XZTJQQLJJCXOLP-UHFFFAOYSA-M sodium;decyl sulfate Chemical compound [Na+].CCCCCCCCCCOS([O-])(=O)=O XZTJQQLJJCXOLP-UHFFFAOYSA-M 0.000 description 1
- WFRKJMRGXGWHBM-UHFFFAOYSA-M sodium;octyl sulfate Chemical compound [Na+].CCCCCCCCOS([O-])(=O)=O WFRKJMRGXGWHBM-UHFFFAOYSA-M 0.000 description 1
- UPUIQOIQVMNQAP-UHFFFAOYSA-M sodium;tetradecyl sulfate Chemical compound [Na+].CCCCCCCCCCCCCCOS([O-])(=O)=O UPUIQOIQVMNQAP-UHFFFAOYSA-M 0.000 description 1
- 239000004334 sorbic acid Substances 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- XHGGEBRKUWZHEK-UHFFFAOYSA-L tellurate Chemical compound [O-][Te]([O-])(=O)=O XHGGEBRKUWZHEK-UHFFFAOYSA-L 0.000 description 1
- VPKAOUKDMHJLAY-UHFFFAOYSA-J tetrasilver;phosphonato phosphate Chemical compound [Ag+].[Ag+].[Ag+].[Ag+].[O-]P([O-])(=O)OP([O-])([O-])=O VPKAOUKDMHJLAY-UHFFFAOYSA-J 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/46—Electroplating: Baths therefor from solutions of silver
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
Definitions
- the present invention is directed to a silver electrolyte and a corresponding method for the electrodeposition of silver onto conductive substrates.
- the silver electrolyte is characterized by certain additives that help to prevent foaming of the electrolyte without negatively affecting the electrodeposition.
- Electrical contacts are installed in practically all electrical devices today. Their application ranges from simple connectors to safety-relevant, demanding switching contacts in the communications sector, for the automotive industry or aerospace technology. Good electrical conductivity, low and long-term stable contact resistance, as well as good corrosion and wear resistance with the lowest possible insertion forces are required from the contact surfaces.
- plug contacts are often coated with a hard gold alloy layer consisting of gold-cobalt, gold-nickel or gold-iron. These layers have good wear resistance, good solderability, low and long-term stable contact resistance and good corrosion resistance. Due to the rising price of gold, cheaper alternatives are being sought.
- silver and silver alloys are among the most important contact materials in electrical engineering. These silver layers have similar layer properties to the hard gold layers or layer combinations used up until now, such as palladium-nickel with gold flash. In addition, the price of silver is relatively low compared to other precious metals, especially hard gold alloys.
- Silver electrolytes are used to coat substrates with silver and to produce contact surfaces. These are mostly cyanide-containing or cyanide-free silver-containing solutions that are used for electrochemical, in particular galvanic, silvering of surfaces. Silver electrolyte solutions can in this case a wide variety of other additives such as grain refiners, dispersants, brighteners or include solid components. The conductivity, the contact resistance and the coefficient of friction are particularly relevant for applications in the electrical and electronics sector, in particular for plugs and plug-in and switching contacts.
- DE102018005352A1 also describes cyanide-containing silver electrolytes for producing contact surfaces into which solid components are dispersed as a dry lubricant. These solids should be built into the silver layer as highly dispersed and well distributed as possible. The aim is to ensure the highest possible self-lubricating properties of the silver layer by uniformly dispersing solid components (Arnet, R. et al, Silberdispersions füre mitslubricating properties, Galvanotechnik 2021, Vol.
- the problem is that the known silver electrolytes tend to form foam (total volume increase of the electrolyte approx. 40%), especially when using high electrolyte movements, for example when using dispersing devices.
- high electrolyte movements are necessary for a high applicable current density and thus rapid deposition. In the coating process, this disrupts, among other things: a) the uniform incorporation of the solid into the silver layer; b) due to loss of electrolyte due to the foam escaping from the process vessel; and c) by marbling effects on the surface of the parts due to adhering foam when extending and lifting the parts; and thus leads to unfavorable products or process problems.
- the object of the present invention is therefore to indicate a possibility with which foam formation is maximally suppressed in such electrolytes during the deposition of silver and at the same time the homogeneous deposition of a silver dispersion layer is not adversely affected as far as possible.
- an aqueous silver electrolyte for the galvanic deposition of silver layers on conductive substrates, which has the following components: a) at least one soluble silver compound; b) free cyanide in an amount of 20 - 200 g/L; c) at least one gloss additive in an amount of 0.2 - 10 g/l; d) at least one wetting agent in an amount of 0.1 - 15 ml/L; e) at least one solid component in an amount of 2-200 g/L; where the electrolyte additionally has: f) at least one defoamer in an amount of 0.2-20 g/l, it is surprisingly easy to achieve the objectives set.
- the electrolyte During the deposition of silver layers from the electrolyte according to the invention, the electrolyte must be kept in constant motion in order to prevent sedimentation of the solid components and to ensure the highest possible current density. Foam formation is reliably prevented/reduced as far as possible with the defoamers. It is also surprising that the addition of appropriate defoamers does not have a significant negative effect on the layer composition (solids incorporation) and the desired properties of the silver layer, such as contact resistance.
- defoamers from the Group consisting of polyethers (BASF Pluriol® E series), fatty alcohol alkoxylates (BASF Degressal® SD20), phosphoric acid esters (BASF Degressal® SD40) and alkyl polyglycol ether carboxylic acid (CLARIANT COL® 100).
- defoamers based on polyethers is particularly advantageous.
- These are commercially available under various trade names, eg Pluriol® series E200 to E 9000, the numerical designation corresponding to the average molecular weight of the substance. It has also proven advantageous if the polyalkylene glycols used, in particular polyethylene glycol, have a higher average molecular weight greater than 200 g/mol, preferably at least 400 g/mol.
- the average molar mass of the polyethylene glycols used is very preferably between 1000 and 9000 g/mol and very particularly preferably between 4000 and 8000 g/mol.
- the amount of defoamer in the electrolyte can be determined by a person skilled in the art. It varies between 0.2 and 20 g/l, preferably 1 and 10 g/l and very preferably between 1 and 5 g/l.
- brightening additives are substances which shift the grain size of the silver deposit to smaller grain sizes.
- Brightening additives selected from the group consisting of substituted and unsubstituted mononuclear arylsulfonic acids and thioalkylcarboxylic acids and thiocarbamides have proven to be such.
- Particularly preferred in this context are arylsulfonic acids such as phenolsulfonic acid and benzenesulfonic acid, toluenesulfonic acid.
- thiolactic acid, thiobarbituric acid and 1-phenyl-1H-tetrazole-5-thione in particular have also proven advantageous.
- the brightening additives are used in the electrolyte according to the invention in a concentration of 0.2-10 g/l, preferably 0.5-10 g/l and very preferably 1.0-5 g/l.
- naphthalene sulfonic acid, naphthalene sulfonic acid derivatives (eg naphthalene sulfonic acid condensation products with aldehydes) or mixtures thereof are present in the electrolyte according to the invention.
- Na or K Salts of arylsulfonic acids in which the aryl moiety is a benzene ring such as benzenesulfonic acid.
- the aryl radical can optionally be substituted.
- the polyether-based defoamers mentioned above in particular polyethylene glycol ether, the latter mean that, despite high current densities and the resulting high electrolyte movement, only little foam occurs and the solid components can be dispersed so well in the silver deposit (see examples).
- solid component means a component that is not in solution but is present in the electrolyte as a solid.
- solid components can be used which are mentioned in this respect in DE102018005352A1.
- These are preferably those selected from the group consisting of graphite, graphite fluoride, graphite oxide, coated graphite, graphene, carbon black, fullerenes, diamond, Al2O3, cubic boron nitride, or mixtures thereof, preferably graphite, graphite fluoride, graphite oxide, Al2O3 coated graphite or mixtures thereof, more preferably graphite, graphite oxide or mixtures thereof and even more preferably graphite.
- the manner of a suitable preparation of the substances is adequately described in the literature and has only a minor influence, if any, on the invention described here.
- the solid component is dispersed in the electrolyte, in particular physically dispersed.
- the amount of solid component used can be determined by the person skilled in the art at his discretion. As a rule, the concentration here is 2-200 g/l, preferably 20-150 g/l and very preferably 80-130 g/l.
- the mean particle diameter (d50 of the Q3 distribution) is measured in accordance with ISO 13320-1 (latest version on the filing date) using a Tornado dry dispersion module from Beckmann.
- the mean particle size (d50) indicates that 50% of the particles of a solid component have a smaller diameter than the specified value.
- Wetting agents are also present in the electrolyte. Those skilled in the art know how to select these. Typically, ionic and non-ionic surfactants are used as wetting agents, such as, for example, polyethylene glycol adducts, fatty alcohol sulfates (e.g.
- the wetting agent contains a linear or branched chain alkyl sulfate having C3-Ci5 alkyl groups which may be unsubstituted or optionally substituted, and more preferably a linear or branched chain alkyl sulfate having C3-Ci2 alkyl groups which may be unsubstituted or optionally substituted.
- the wetting agents can also be present in the form of their salts, eg sodium salt, potassium salt.
- their salts eg sodium salt, potassium salt.
- Very particularly preferred in this context are those selected from the group consisting of 2-ethylhexyl sulfate sodium salt, lauryl ether sulfate sodium salt, sodium monoalkyl sulfates such as sodium tetradecyl sulfate, sodium dodecyl sulfate, sodium ethylhexyl sulfate, sodium decyl sulfate, sodium octyl sulfate, and mixtures thereof , used.
- the content of the at least one wetting agent is between 0.1 and 15 ml/L, preferably between 0.2 and 10 ml/L, more preferably between 0.5 and 7 ml/L and even more preferably between 1 and 6 ml/L.
- salts containing Se or Te can also be present in the electrolyte.
- the selenium or tellurium compound used in the electrolyte can be chosen accordingly by a specialist. Suitable selenium and tellurium compounds are those in which selenium or tellurium is present in the +4 or +6 oxidation state in the form of an anion. Selenium and tellurium compounds in which selenium or tellurium is present in the +4 oxidation state are advantageously used in the electrolyte.
- the selenium and tellurium compounds are particularly preferably selected from tellurites, selenites, parturic acid, selenious acid, telluric acid, selenic acid, selenocyanates, tellurocyanates and selenate, and also tellurate.
- the use of selenium compounds is generally preferred over tellurium compounds.
- the addition of selenium to the electrolyte in the form of a salt of selenious acid, for example in the form of potassium selenite, is very particularly preferred. Addition as potassium selenocyanate is extremely preferred.
- the amount of these compounds in the electrolyte can be selected according to the expert will. It will be in the range of 0.1 mg - 500 mg/l, preferably 0.5 mg - 100 mg and very preferably between 0.5 mg - 10 mg/l based on selenium or tellurium.
- the electrolyte also contains a certain amount of free cyanide.
- This is preferably supplied to the electrolyte in the form of a water-soluble salt of hydrocyanic acid.
- the alkali metal salts are advantageous, and potassium cyanide is very particularly preferably used.
- the amount of free cyanide in the electrolyte can be adjusted according to values known to those skilled in the art. As a rule, the free cyanides are present in the electrolyte in a concentration of 20-200 g/l, preferably 80-180 g/l and very preferably 100-150 g/l (in each case based on the CN ion).
- the cyanide salt used can also serve as a conducting salt.
- Another essential component of the electrolyte is the silver to be deposited in dissolved form. According to the expert, this can be introduced into the electrolyte in the form of a water-soluble salt. Suitable as such are those from the group consisting of silver methanesulfonate, silver carbonate, silver phosphate, silver pyrophosphate, silver nitrate, silver oxide, silver lactate, silver fluoride, silver bromide, silver chloride, silver iodide, silver thiocyanate, silver thiosulfate, silver hydantoins, silver sulfate, silver cyanide and alkali metal silver cyanide. Potassium silver cyanide is particularly advantageous in this context.
- the silver salts are used in an initial concentration in the electrolyte of between 2-200 g/l, preferably 10-100 g/l and very preferably 20-50 g/l (in each case based on the Ag metal).
- ions can also be present dissolved in the electrolyte in low concentrations.
- these are those that lead to a harder layer (so-called hard silver) compared to the deposition of a pure silver layer.
- These ions are selected from the group consisting of Sb, Bi, In, Sn, W, Mo, Pb, As, Cu, Ni. These will generally be present in a concentration of 0.001-30 g/l, preferably 0.01-20 g/l and very preferably 0.1-10 g/l (in each case based on the corresponding metal).
- the subject matter of the present invention is also a process for the galvanic deposition of silver layers on conductive substrates, in which an electrically conductive substrate is immersed in the electrolyte according to the invention and a current flow is established between an anode in contact with the electrolyte and the substrate as cathode.
- the temperature that prevails during the deposition of the dispersion layer can be selected by the person skilled in the art at will, or the temperature adjusts itself due to external influences (frictional heat from dispersing modules). It will depend on a sufficient deposition rate and the applicable current density range on the one hand and on the other hand based on economic aspects or the stability of the electrolyte. It is advantageous to set a temperature of the electrolyte of 10°C to 70°C, preferably 15°C to 40°C and particularly preferably 20°C to 30°C.
- the pH of the electrolyte can be adjusted as required by a person skilled in the art. However, he will be guided by the idea of introducing as few additional substances into the electrolyte as possible that could adversely affect the deposition of the corresponding layer. In a very particularly preferred embodiment, the pH is therefore adjusted solely by adding a base. All compounds that are suitable for a corresponding application can serve as such for the person skilled in the art. He preferably uses alkali metal hydroxides, oxides or carbonates.
- the electrolyte according to the invention is preferably adjusted to a basic pH range of >8 during the electrolysis. Optimum results can be achieved at pH values in the electrolyte of 8-13, more preferably 9-11.
- the pH can be adjusted as required by a person skilled in the art. However, he will be guided by the idea of introducing as few additional substances into the electrolyte as possible that could adversely affect the deposition of the corresponding layer. In a very particularly preferred embodiment, the pH is therefore adjusted solely by adding a base. All compounds that are suitable for a corresponding application can serve as such for the person skilled in the art. There may be fluctuations in the pH value of the electrolyte during electrolysis. In a preferred embodiment of the present method, the person skilled in the art therefore proceeds in such a way that he monitors the pH value during the electrolysis and, if necessary, adjusts it to the desired value. The expert knows how to proceed here.
- the current density which is established between the cathode and the anode in the electrolyte according to the invention during the deposition process according to the invention can be selected by a person skilled in the art in accordance with the efficiency and quality of the deposition.
- the current density in the electrolyte is set to 0.2 to 100 A/dm 2 depending on the application and the type of coating. If necessary, they can Current densities can be increased or reduced by adjusting the system parameters such as the structure of the coating cell, flow rates, anode and cathode conditions, etc.
- a current density of 0.2-50 A/dm 2 , preferably 1-10 A/dm 2 and very particularly preferably 1-5 A/dm 2 is advantageous.
- pulsed direct current or reverse pulse plating can also be used.
- the current flow is interrupted for a certain period of time (pulse plating) or the current flow is reversed.
- pulse plating in the form of current interruptions and reverse pulse plating for silver graphite dispersion deposition is described in the literature (Arnet, R. et al, silver dispersion layers with self-lubricating properties, Galvanotechnik 2021, vol. 1, p. 21 ff .).
- the electrolyte according to the invention and the method according to the invention can be used for the galvanic deposition of silver layers, preferably for technical applications, for example electrical plug connections and printed circuit boards. Coating in continuous systems can also be used for technical applications.
- Layer thicknesses in the range from 0.1 to 100 ⁇ m are typically deposited in rack operation, in particular for technical applications with current densities in the range from 0.5 to 50 A/dm 2 .
- layers up to 200 ⁇ m or even 500 ⁇ m thick are sometimes deposited in continuous systems.
- the current densities are in the range given above.
- anodes can be used when using the electrolyte. Soluble or insoluble anodes are just as suitable as the combination of soluble and insoluble anodes. If a soluble anode is used, it is particularly preferred if a silver anode is used (DE1228887, Practical Galvanotechnik, 5th edition, Eugen G. Leuze Verlag, p. 342f, 1997).
- the insoluble anodes used are preferably those made from a material selected from the group consisting of platinized titanium, graphite, stainless steel, mixed metal oxides, glassy carbon anodes and special carbon material (“diamond-like carbon” DLC) or combinations of these anodes.
- Insoluble anodes made of platinized titanium or titanium coated with mixed metal oxides are advantageous, the mixed metal oxides preferably being selected from iridium oxide, ruthenium oxide, tantalum oxide and mixtures thereof.
- Iridium transition metal oxide Mixed oxide anodes particularly preferably mixed oxide anodes of iridium-ruthenium mixed oxide, iridium-ruthenium-titanium mixed oxide or iridium-tantalum mixed oxide, are used for the implementation of the invention. More can be found at Cobley, AJ et al. (The use of insoluble anodes in Acid Sulphate Copper Electrodeposition Solutions, Trans IMF, 2001, 79(3), p. 113 and 114).
- Suitable electrically conductive substrates are those which can be coated with the electrolyte according to the invention in the basic pH range. These are preferably substrates containing precious metals or less precious substrates, such as nickel or copper surfaces. According to the invention, the silver layer is preferably deposited on a nickel or nickel alloy layer or on a copper or copper alloy layer.
- Suitable substrate materials that are used to advantage here are copper-based materials such as pure copper, brass, bronze (e.g. CuSn, CuSnZn) or special copper alloys for connectors such as alloys with silicon, beryllium, tellurium, phosphorus or iron-based materials such as iron or Stainless steel or nickel or a nickel alloy such as NiP, NiW, NiB, gold or silver.
- the substrate materials can also be multi-layer systems that have been coated galvanically or with another coating technique. This also applies, for example, to iron materials that have been nickel- or copper-plated and then optionally gold-plated, pre-palladium-plated, pre-platinized or coated with pre-silver.
- the intermediate layers for nickel plating or copper plating can also be made of appropriate alloy electrolytes - e.g. NiP, NiW, NiMo, NiCo, NiB, Cu, CuSn, CuSnZn, CuZn, etc.
- Another substrate material can be a wax core that is pre-coated with conductive silver lacquer (electroforming).
- electrolyte is understood to mean the aqueous solution which is placed in a corresponding vessel and used for the electrolysis with an anode and a cathode under current flow. The only exception here is the solid component used.
- the electrolyte according to the invention is aqueous. Except for the added solid components and possibly insoluble heterogeneous defoamers, the compounds used in the electrolyte are soluble in the electrolyte.
- the terms "soluble” refers to those compounds that dissolve in the electrolyte at the working temperature.
- the working temperature is the temperature at which the electrolytic deposition takes place.
- a substance is considered soluble if at least 1 mg/l of this substance dissolves in the electrolyte at the working temperature.
- the electrolyte according to the invention is stable over the long term. Coatings suitable for the application described are obtained by combining the brightening additives described for the deposition of silver and the use of a defoamer. These have sufficiently low contact resistances and also retain an astonishingly high level of surface integrity and therefore low contact resistances even after many plugging and rubbing processes in contact circuits. This was not to be expected from the available state of the art.
- Electrolyte composition aqueous A
- Electrolyte composition aqueous B aqueous B
- Anodes soluble fine silver anodes
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102021118820.2A DE102021118820A1 (de) | 2021-07-21 | 2021-07-21 | Silber-Elektrolyt |
PCT/EP2022/070294 WO2023001868A1 (fr) | 2021-07-21 | 2022-07-20 | Électrolyte à base d'argent pour le dépôt de couches de dispersion d'argent |
Publications (3)
Publication Number | Publication Date |
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EP4146848A1 true EP4146848A1 (fr) | 2023-03-15 |
EP4146848B1 EP4146848B1 (fr) | 2024-04-10 |
EP4146848B8 EP4146848B8 (fr) | 2024-07-24 |
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EP22755083.7A Active EP4146848B8 (fr) | 2021-07-21 | 2022-07-20 | Électrolyte à base d'argent pour le dépôt de couches de dispersion d'argent |
Country Status (7)
Country | Link |
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EP (1) | EP4146848B8 (fr) |
JP (1) | JP2024526925A (fr) |
KR (1) | KR20240031423A (fr) |
CN (1) | CN117677733A (fr) |
DE (1) | DE102021118820A1 (fr) |
PL (1) | PL4146848T3 (fr) |
WO (1) | WO2023001868A1 (fr) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1228887B (de) | 1961-10-26 | 1966-11-17 | Riedel & Co | Verfahren zum galvanischen Abscheiden von Silber-Antimon- oder Silber-Wismut-Legierungen hoher Haerte |
DE2543082C3 (de) | 1975-09-26 | 1979-06-28 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Cyanidischer Silberelektrolyt und Verfahren zur galvanischen Abscheidung von Silber-Graphit-Dispersionsüberzügen und seine Anwendung |
DE4010346A1 (de) | 1990-03-28 | 1991-10-02 | Siemens Ag | Verfahren zum aufbringen von silber-graphit-dispersionsueberzuegen |
KR101074744B1 (ko) * | 2002-11-28 | 2011-10-19 | 신꼬오덴기 고교 가부시키가이샤 | 전해 은도금액 |
DE10346206A1 (de) | 2003-10-06 | 2005-04-28 | Bosch Gmbh Robert | Kontaktoberflächen für elektrische Kontakte |
DE102008030988B4 (de) | 2008-06-27 | 2010-04-01 | Siemens Aktiengesellschaft | Bauteil mit einer Schicht, in die CNT (Carbon Nanotubes) eingebaut sind und Verfahren zu dessen Herstellung |
DE102015102453A1 (de) | 2015-02-20 | 2016-08-25 | Heraeus Deutschland GmbH & Co. KG | Bandförmiges Substrat zur Herstellung von Chipkartenmodulen, Chipkartenmodul, elektronische Einrichtung mit einem derartigen Chipkartenmodul und Verfahren zur Herstellung eines Substrates |
CN105297095A (zh) | 2015-12-14 | 2016-02-03 | 南昌航空大学 | 一种纯银层/银石墨复合层的功能性镀层及制备方法 |
DE102018005352A1 (de) | 2018-07-05 | 2020-01-09 | Dr.-Ing. Max Schlötter GmbH & Co KG | Silberelektrolyt zur Abscheidung von Dispersions-Silberschichten und Kontaktoberflächen mit Dispersions-Silberschichten |
-
2021
- 2021-07-21 DE DE102021118820.2A patent/DE102021118820A1/de active Pending
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2022
- 2022-07-20 KR KR1020247005978A patent/KR20240031423A/ko unknown
- 2022-07-20 EP EP22755083.7A patent/EP4146848B8/fr active Active
- 2022-07-20 WO PCT/EP2022/070294 patent/WO2023001868A1/fr active Application Filing
- 2022-07-20 PL PL22755083.7T patent/PL4146848T3/pl unknown
- 2022-07-20 CN CN202280051010.0A patent/CN117677733A/zh active Pending
- 2022-07-20 JP JP2024503744A patent/JP2024526925A/ja active Pending
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DE102021118820A1 (de) | 2023-01-26 |
KR20240031423A (ko) | 2024-03-07 |
EP4146848B8 (fr) | 2024-07-24 |
JP2024526925A (ja) | 2024-07-19 |
CN117677733A (zh) | 2024-03-08 |
EP4146848B1 (fr) | 2024-04-10 |
PL4146848T3 (pl) | 2024-07-01 |
WO2023001868A1 (fr) | 2023-01-26 |
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