EP3670924A1 - Pompe à vide et procédé de fabrication d'une telle pompe à vide - Google Patents

Pompe à vide et procédé de fabrication d'une telle pompe à vide Download PDF

Info

Publication number
EP3670924A1
EP3670924A1 EP19210020.4A EP19210020A EP3670924A1 EP 3670924 A1 EP3670924 A1 EP 3670924A1 EP 19210020 A EP19210020 A EP 19210020A EP 3670924 A1 EP3670924 A1 EP 3670924A1
Authority
EP
European Patent Office
Prior art keywords
holweck
section
groove
vacuum pump
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19210020.4A
Other languages
German (de)
English (en)
Other versions
EP3670924B1 (fr
Inventor
Uwe Leib
Torsten Gogol
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19210020.4A priority Critical patent/EP3670924B1/fr
Publication of EP3670924A1 publication Critical patent/EP3670924A1/fr
Priority to JP2020159322A priority patent/JP7032500B2/ja
Application granted granted Critical
Publication of EP3670924B1 publication Critical patent/EP3670924B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/10—Manufacture by removing material

Definitions

  • the present invention relates to a vacuum pump, for example a turbomolecular pump, comprising a Holweck pump stage with a Holweck stator and a Holweck rotor which rotates about a rotor axis during operation of the vacuum pump and which cooperates with the Holweck stator to produce a pumping effect, the Holweck pump stage having at least one thread-like Holweck groove, which of at least one side wall is limited.
  • the invention also relates to a method for producing such a vacuum pump.
  • Holweck grooves are usually formed by butting. It may be desirable to produce a Holweck geometry with narrow but very deep grooves in relation to the width. In the inlet area of a Holweck step in particular, it can make sense to produce comparatively deep grooves. Such deep grooves in the inlet area have proven to be advantageous, for example, if the gas conveyed by a turbomolecular pump stage with a high pumping speed is to be transferred to the Holweck pump stage. Particularly with regard to the production of narrow but deep grooves in the inside diameter of a Holweck component, in particular a Holweck stator sleeve, the widespread method of butting has disadvantages. On the one hand, very filigree tools that are susceptible to wear and failure must be used. On the other hand, only a small infeed can be achieved with each work step of the tool, which causes long production times and high costs.
  • This geometry enables reliable and cost-effective production, in particular of Holweck grooves with great depth and relatively small width.
  • the invention is based on the idea that the side walls of the grooves do not have to be aligned straight or perpendicular to the rotor axis, as is customary in the prior art. Rather, the deviation from the vertical alignment results in considerable advantages in the manufacturing process.
  • the Holweck groove can thus be produced by a cutting process, in particular milled.
  • a cutting tool such as a milling cutter, can be aligned obliquely during machining.
  • the Holwecknut is therefore particularly easy to access.
  • section relates in particular to the rotor axis, that is to say to an axial section, and / or to the screw shape of the Holweck groove.
  • the Holweck groove can basically be designed differently in different sections.
  • the side wall is formed obliquely in at least one section. For example, it can be designed obliquely over its entire length, in particular with an angle that is the same over the length. But it can also have different angles in different sections and / or, for example, also be arranged in at least one section perpendicular to the rotor axis.
  • the relevant cross-section is one in which the rotor axis lies. With regard to the rotor, it is ultimately a longitudinal section, which, however, runs transversely to the side wall.
  • the Holweck groove forms an internal thread.
  • the Holweck stator can have the Holweck groove.
  • the Holweck rotor can have the Holweck groove.
  • respective Holweck grooves on the rotor and stator can also be designed according to the invention.
  • the Holweck groove generally has a groove base. This can in particular be flat in cross section.
  • the groove bottom defines an envelope, which can also be referred to as a basic envelope, in particular over several turns of the groove.
  • the basic envelope is conical at least in a first section of the Holweck groove.
  • the groove base can be formed obliquely in cross section with respect to the rotor axis, at least in a first section of the Holweck groove. In the first section, in particular, the bottom of the groove can be arranged at least substantially perpendicular to the associated region of the side wall.
  • the first section is an inlet section of the Holweck pump stage with respect to a pumping direction.
  • particularly deep grooves in particular with a relatively small width, can be produced in a simple manner in the inlet section.
  • the pump performance in particular the pumping speed, can be improved in a simple manner.
  • the first section can be arranged, for example, at one end of the component which has the holck groove, one end with respect to the rotor axis.
  • the basic envelope can, in principle independently of a first section with a conical basic envelope or oblique groove base, preferably be cylindrical in one, in particular second, section of the Holweck groove.
  • the bottom of the groove can e.g. be formed in a, in particular second, section of the Holweck groove parallel to the rotor axis.
  • The, in particular second, section can be arranged, for example, following an inlet section and / or an outlet section of the Holweck pump stage.
  • the side wall in particular has a radially inner end, which defines an inner envelope, in particular over several turns of the Holweck groove.
  • the inner envelope can preferably be cylindrical in at least one section, in particular in several sections.
  • the inner envelope can preferably be cylindrical both in the first section and in the second section.
  • the side wall is arranged in a first section perpendicularly and / or in a second section obliquely to an adjacent and / or assigned groove base.
  • the side wall is designed obliquely with respect to the rotor axis, ie an angle between the side wall and the rotor axis is less than 90 ° and greater than 0 °. It when the side wall in is particularly advantageous an angle to the rotor axis is arranged which is at least 50 ° and / or at most 80 °. An angle of approximately 70 ° is particularly preferred.
  • the side wall can be formed by a web.
  • a web can in particular be formed between two adjacent Holweck grooves or between two revolutions of the same groove.
  • the web can in particular also form a second side wall of an adjacent one or the Holweck groove, in particular both side walls being formed parallel to one another and / or obliquely to the rotor axis.
  • the Holweck pump stage can have multiple gears, i.e. have several parallel, thread-like Holwecknuten.
  • one, in particular thread-like, web is provided for each aisle.
  • Two gears or Holwecknuten can e.g. be separated from each other by a web.
  • the web can have an inner end, which e.g. is flat and / or is arranged parallel to the rotor axis.
  • the web can generally e.g. have two, in particular parallel, side walls that delimit each groove or one.
  • the side walls can preferably both be arranged obliquely.
  • the object of the invention is also achieved by a method for producing a vacuum pump of the type described above, the Holweck groove being produced in at least a first section by milling.
  • a milling cutter is guided obliquely with respect to a threaded axis of the Holweck groove.
  • the thread axis corresponds in particular to a rotor axis in the assembly of the vacuum pump.
  • the first section can preferably be an inlet section of the Holweck pump stage.
  • the Holweck groove can generally preferably be produced by a different machining process and in particular by butting.
  • milling in the first section and shaping in the second section can thus be advantageously combined.
  • it can be advantageously used in the first section that relatively deep grooves can be introduced in a simple manner by means of milling and relatively filigree webs can be formed.
  • the groove can also be produced in a simple manner in a section downstream of the inlet section, in particular in the pumping direction, which section is difficult to access for a milling cutter.
  • the respective advantages of the machining processes can therefore be used in a targeted manner.
  • the side wall delimiting the Holweck groove in a cross section in which a threaded axis of the Holweck groove lies is formed obliquely to the threaded axis.
  • an end mill and / or a side milling cutter can be used for milling.
  • the vacuum pump can preferably be a turbomolecular pump with a Holweck pump stage.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms in accordance with the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged on the side. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump.
  • Several connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 (see, for example, FIG Fig. 3 ) can be brought before the gas conveyed by the pump into the engine compartment 137, in which the electric motor 125 is housed in the vacuum pump 111.
  • there are also two coolant connections 139 one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be fed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can thus be operated to a certain extent in a hanging manner.
  • the vacuum pump 111 may be designed to operate can be taken if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be realized, in which the underside 141 cannot be arranged facing downwards, but turned to the side or directed upwards.
  • various screws 143 are also arranged, by means of which components of the vacuum pump, which are not further specified here, are fastened to one another.
  • a bearing cover 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises a plurality of process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 rotatable about an axis of rotation 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages which are connected to one another in a pumping manner with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form one turbomolecular pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and have a pumping effect and are connected in series with one another.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 fastened to and supported by the rotor hub 161, which are oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction.
  • two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested one inside the other in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and of the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 and forms with it the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms a second Holweck pump stage with the latter.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175, and forms the third Holweck pump stage with the latter.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially extending channel can be provided, via which the central Holweck gap 173 is connected to the radially inner Holweck gap 175. This means that the nested Holweck pump stages are connected in series.
  • a connection channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive the vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter increasing toward the roller bearing 181.
  • the spray nut 185 is in sliding contact with at least one scraper of an operating fluid reservoir.
  • the operating medium storage comprises a plurality of absorbent disks 187 stacked one on top of the other, which are provided with an operating medium for the rolling bearing 181, e.g. are soaked with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium storage via the wiper to the rotating spray nut 185 and, as a result of the centrifugal force along the spray nut 185, is conveyed in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it is eg fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid storage are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, each of which comprises an annular stack of a plurality of permanent magnetic rings 195, 197 stacked on one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or catch bearing 215 is provided within the magnetic bearing, which runs empty without contact during normal operation of the vacuum pump 111 and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator in order to provide a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures prevented becomes.
  • the catch bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which causes the catch bearing 215 to be disengaged in normal pumping operation.
  • the radial deflection at which the catch bearing 215 engages is dimensioned large enough that the catch bearing 215 does not engage during normal operation of the vacuum pump, and at the same time is small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 which extends through the motor stator 217.
  • an intermediate space 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement for transmitting the drive torque can magnetically influence one another.
  • the motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a purge gas and which can be, for example, air or nitrogen, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, for example from corrosive portions of the process gas, by means of the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie in the engine compartment 137 there is at least approximately the vacuum pressure brought about by the forevacuum pump connected to the pump outlet 117.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor space 137, in particular in order to achieve a better seal of the motor space 217 with respect to the radially outside Holweck pump stages.
  • turbomolecular pump 111 which comprises a Holweck pump stage, serves to illustrate the technical background.
  • the pump 111 can be developed in particular according to the invention.
  • the vacuum pump according to the invention can be further developed particularly advantageously by means of individual or several features of the pump 111 described above.
  • a housing component 10 of a vacuum pump according to the invention is shown in cross section, the sectional plane running along a rotor axis 12 of a Holweck rotor, not shown here.
  • the vacuum pump comprises a Holweck pump stage 14, of which only the stator-side elements are visible, namely at least one thread-like Holweck groove 16 which is formed in the housing component 10.
  • a Holweck rotor sleeve When assembled, a Holweck rotor sleeve preferably rotates in the Holweck pump stage 14, for example as used in connection with the 1 to 5 is described.
  • the Holweck pump stage 14 comprises a plurality of Holweck grooves 16 running in parallel, that is to say it is of multi-start design.
  • side walls 18 are visible, which delimit and separate the respective grooves 16.
  • the side walls 18 are arranged obliquely with respect to the rotor axis 12.
  • an angle 20 between a side wall 18 and the rotor axis 12 or a groove base 22 is indicated. In the embodiment shown, this is approximately 70 ° and can be preferred be at least 50 ° and / or at most 80 °.
  • all side walls 18 are arranged parallel to one another and at an angle 20 at an angle to the rotor axis 12.
  • a respective Holweck groove 16 is delimited in the axial direction by the side walls 18 and in the radial direction by a groove base 22 which extends between the side walls 18.
  • the groove base 22 defines a base envelope along its axial extent and over several gears or turns. This is conical in a first section 24 and cylindrical in a second section 26.
  • the groove base 22 is generally flat, but there is an unevenness on the groove base 22 in a transition region between the first section 24 and the second section 26, which is particularly the result of the transition between the sections 24 and 26.
  • the side walls 18 are formed by webs 28 which separate the Holwecknuten 16 of the different gears.
  • the webs 28 and the side walls 18 have an inner end which defines an inner envelope.
  • the inner envelope is cylindrical in both the first section 24 and the second section 26. At the inner end, the webs 28 are flat and aligned parallel to the rotor axis 12.
  • the Holweck groove 16 is formed deeper in the first section 24 than in the second section 26, in particular the width of the Holweck groove 16 preferably being the same in both sections 24 and 26 or preferably constant over the entire axial length of the Holweck pumping stage.
  • the width is defined in particular by the axial distance between the inner ends of two side walls 18 or webs 28 via a groove 16.
  • the first section 24 preferably forms an inlet section of the Holweck pump stage 14.
  • the great depth or the relatively large volume in this section 24 the groove 16 provides a particularly good pumping speed for the Holweck pump stage 14.
  • a milling cutter 30 is indicated, as can be guided in the first section 24, for example for the production of the Holweck groove 16.
  • the milling cutter 30 is designed here, for example, as an end mill.
  • the milling cutter 30 is aligned with its axis of rotation 32 obliquely with respect to the rotor axis 12 or a threaded axis of the thread-like Holwecknut 16, which corresponds to the rotor axis 12 in the assembly of the vacuum pump.
  • the angle between the axis of rotation 32 and the rotor axis 12 corresponds to that angle 20 of the side walls 18.
  • the Holweck groove 16 in the first section 24 can be produced in a simple manner with the milling cutter 30 without an angular head being necessary for the milling cutter.
  • the Holweck groove 16 can thus be produced in a simple manner.
  • the Holweck groove 16 can preferably be produced by means of butting.
  • the one or more grooves 16 can generally be produced with a milling cutter, for example with an end mill or a disk milling cutter. Further internal machining, for example in the second section 26, may not be possible or difficult with an angular head on the milling machine due to the geometry (for example small diameter).
  • a milling cutter for example as in Fig. 7 shown, are milled from the outside, in particular with the basic envelope, conical first or inlet section 24. This manufacturing method leads to the fact that the webs 28, which here are in particular those of the stator, are inclined between the grooves 16 at the same angle as the milling cutter itself.
  • the grooves 16 can consequently continue to be produced by butting.
  • the butted grooves are also preferably inclined at the same angle as the milled grooves, in particular so that the shaping tool does not damage the webs 28 that are already present after milling.
  • the two manufacturing processes should be synchronized with respect to the angular position of the grooves 16 and the side walls 18.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP19210020.4A 2019-11-19 2019-11-19 Pompe à vide et procédé de fabrication d'une telle pompe à vide Active EP3670924B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19210020.4A EP3670924B1 (fr) 2019-11-19 2019-11-19 Pompe à vide et procédé de fabrication d'une telle pompe à vide
JP2020159322A JP7032500B2 (ja) 2019-11-19 2020-09-24 真空ポンプ及びそのような真空ポンプを製造する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19210020.4A EP3670924B1 (fr) 2019-11-19 2019-11-19 Pompe à vide et procédé de fabrication d'une telle pompe à vide

Publications (2)

Publication Number Publication Date
EP3670924A1 true EP3670924A1 (fr) 2020-06-24
EP3670924B1 EP3670924B1 (fr) 2021-11-17

Family

ID=68618031

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19210020.4A Active EP3670924B1 (fr) 2019-11-19 2019-11-19 Pompe à vide et procédé de fabrication d'une telle pompe à vide

Country Status (2)

Country Link
EP (1) EP3670924B1 (fr)
JP (1) JP7032500B2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022112745A1 (fr) * 2020-11-25 2022-06-02 Edwards Limited Mécanisme de pompage de traînée pour pompe turbomoléculaire

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB242084A (en) * 1924-11-13 1925-11-05 Radions Ltd Improvements in vacuum pumps
US4746265A (en) * 1981-12-14 1988-05-24 Ultra-Centrifuge Nederland B.V. High-vacuum molecular pump
US6315517B1 (en) * 1998-10-28 2001-11-13 Seiko Instruments Inc. Vacuum pump
WO2011070856A1 (fr) * 2009-12-11 2011-06-16 エドワーズ株式会社 Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant
DE202013009462U1 (de) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Trägerelement für Rohrelemente einer Holweckstufe
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114796U (fr) * 1989-02-28 1990-09-13
JPH03275997A (ja) * 1990-03-26 1991-12-06 Nippon Soken Inc 可変容量型真空ポンプ
DE10048695A1 (de) 2000-09-30 2002-04-11 Leybold Vakuum Gmbh Pumpe als Seitenkanalpumpe
DE10210404A1 (de) 2002-03-08 2003-09-18 Leybold Vakuum Gmbh Verfahren zur Herstellung des Rotors einer Reibungsvakuumpumpe sowie nach diesem Verfahren hergestellter Rotor
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB242084A (en) * 1924-11-13 1925-11-05 Radions Ltd Improvements in vacuum pumps
US4746265A (en) * 1981-12-14 1988-05-24 Ultra-Centrifuge Nederland B.V. High-vacuum molecular pump
US6315517B1 (en) * 1998-10-28 2001-11-13 Seiko Instruments Inc. Vacuum pump
WO2011070856A1 (fr) * 2009-12-11 2011-06-16 エドワーズ株式会社 Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant
DE202013009462U1 (de) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Trägerelement für Rohrelemente einer Holweckstufe
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022112745A1 (fr) * 2020-11-25 2022-06-02 Edwards Limited Mécanisme de pompage de traînée pour pompe turbomoléculaire

Also Published As

Publication number Publication date
JP2021080917A (ja) 2021-05-27
EP3670924B1 (fr) 2021-11-17
JP7032500B2 (ja) 2022-03-08

Similar Documents

Publication Publication Date Title
EP2829734B1 (fr) Pompe à vide
EP2826999B1 (fr) Pompe à vide
EP3657021B1 (fr) Pompe à vide
EP3670924B1 (fr) Pompe à vide et procédé de fabrication d'une telle pompe à vide
EP3034880B1 (fr) Rotor pour une pompe à vide et son procédé de fabrication
EP3196471B1 (fr) Pompe a vide
EP3088745B1 (fr) Système de rotor pour une pompe à vide et pompe à vide
EP3051138B1 (fr) Carter de pompe à vide, pompe à vide et procédé de fabrication d'un carter de pompe à vide
EP3734078B1 (fr) Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe
DE102015104438A1 (de) Vakuumsystem
EP4108932A1 (fr) Reciate et pompe à vide élevé
EP3536966B1 (fr) Appareil à vide
EP3093496B1 (fr) Rotor pour pompe à vide
EP3462036B1 (fr) Pompe à vide turbomoléculaire
EP3135932B1 (fr) Pompe à vide et palier à aimant permanent
EP3628883B1 (fr) Pompe à vide
EP3327293B1 (fr) Pompe à vide avec une pluralté d'entrées
EP3564538B1 (fr) Système à vide et procédé de fabrication d'un tel système à vide
EP3845764B1 (fr) Pompe à vide et système de pompe à vide
EP4194700A1 (fr) Pompe à vide avec étage de pompe de holweck à géométrie de holweck variable
EP3916235B1 (fr) Procédé de fabrication d'une pompe à vide
EP4325061A1 (fr) Pompe à vide turbomoléculaire
EP3561307B1 (fr) Pompe à vide avec une bride de port d'aspiration et un support de palier dans le port d'aspiration
EP3597926B1 (fr) Pompe à vide
EP4151860A2 (fr) Pompe à vide

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20200915

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20201204

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20210702

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502019002770

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1448274

Country of ref document: AT

Kind code of ref document: T

Effective date: 20211215

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20211117

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220217

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220317

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220317

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220217

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220218

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20211119

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20211130

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20211130

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502019002770

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20220818

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20211119

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220117

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221130

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20191119

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221130

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20231123

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20231124

Year of fee payment: 5

Ref country code: CZ

Payment date: 20231110

Year of fee payment: 5

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211117

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240129

Year of fee payment: 5