EP3536966B1 - Appareil à vide - Google Patents

Appareil à vide Download PDF

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Publication number
EP3536966B1
EP3536966B1 EP18160546.0A EP18160546A EP3536966B1 EP 3536966 B1 EP3536966 B1 EP 3536966B1 EP 18160546 A EP18160546 A EP 18160546A EP 3536966 B1 EP3536966 B1 EP 3536966B1
Authority
EP
European Patent Office
Prior art keywords
state
electronic apparatus
change
interface
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18160546.0A
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German (de)
English (en)
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EP3536966A1 (fr
Inventor
Jochen BÖTTCHER
Christian Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP18160546.0A priority Critical patent/EP3536966B1/fr
Priority to JP2019037217A priority patent/JP6781784B2/ja
Publication of EP3536966A1 publication Critical patent/EP3536966A1/fr
Application granted granted Critical
Publication of EP3536966B1 publication Critical patent/EP3536966B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the present invention relates to a vacuum device, in particular a vacuum pump, a device component and an electronic device for a vacuum device, and a method for assembling and / or starting up a vacuum device.
  • the present invention also relates to an electrical device and a method for assembling and / or starting up an electrical device.
  • vacuum devices such as vacuum pumps
  • an electronic device which, for example, ensures pump control and / or regulation.
  • an electronic device can be equipped with characteristic resistors which are evaluated by a connected drive device. This enables the detection and application of pump operating parameters by such a drive device.
  • the publication US 2008/0054741 A1 relates to a magnetic bearing device, a rotation mechanism and a model identification method, a magnetic bearing main unit or a rotary machine main unit.
  • the US 2008/0054741 A1 a model identification method for a magnetic bearing main unit a magnetic bearing device or a rotary machine main unit.
  • the task was to specify a device component and an electronic device for a vacuum device and a method for assembling and / or starting up a vacuum device.
  • the task also consisted of specifying an electrical device and a method for assembling and / or starting up an electrical device.
  • a device component according to the invention is the subject of claim 10 and an electronic device according to the invention is the subject of claim 11.
  • a method according to the invention is specified in claim 12.
  • Advantageous embodiments are specified in the dependent claims and are discussed below.
  • a vacuum device can in particular be a vacuum pump, a vacuum measuring or vacuum analysis device, a leak detector or a vacuum chamber device.
  • a vacuum pump can advantageously be designed as a turbomolecular pump.
  • a vacuum pump can be a backing pump, in particular for a pump arrangement that also has a turbomolecular pump.
  • a vacuum device has at least one device component and an electronic device.
  • the electronic device can be designed in particular for device control and / or regulation.
  • the electronic device is connected to an interface of the device component. According to the invention, it is now provided that a change in the state of the electronic device for establishing a device operating configuration is generated by the connection.
  • the manufacturing costs can be reduced by a more universal applicability of the respective type of electronic device.
  • a more universal use of a certain type of electronic device can be ensured. Production and storage costs are reduced.
  • the device component is designed as a pump component, and by connecting the electronic device to the interface of the pump component, a change in state of the electronic device is generated to determine a pump operating configuration.
  • a pump operating configuration can define operating parameters of a pump, for example nominal speeds, maximum speeds, pump inlet pressures and / or pump outlet pressures or also operating characteristics. This ensures a high degree of functionality.
  • the change in state of the electronic device is generated irreversibly by the connection to the interface.
  • An irreversible change in state is to be understood here to mean that a subsequent change in the state is impossible or at least requires the use of tools and / or programming work and / or the exchange of electrical, electronic and / or mechanical components. All in all, a subsequent change in the state should be avoided in this way. This reduces the risk of the electronic device being erroneously mounted on the device component of another device after removal from the interface and thereby causing possible damage.
  • the interface is designed to generate a further change in the state of the electronic device by completely and / or partially removing it, in particular to define an invalid configuration.
  • the risk of incorrect use of the electronic device, in particular after removal from the interface of the device component, can thus be further reduced.
  • the electronic device can be designed to remove another by completely and / or partially removing the interface and / or by connecting to the interface of another device component
  • a further change in state of the electronic device is generated after removal from the interface, which triggers an invalid configuration.
  • a further change in state can only be generated by connecting to the interface of another device component, in particular another device. In this way, undesired and / or damage-causing reuse of the electronic device can be avoided.
  • the interface is designed to generate a device-specific change in the state of the electronic device.
  • the change in state generated on the electronic device can thus be specific for the respective vacuum device or for the respective device component.
  • the type of state change can thus be generated depending on the vacuum device or the device component.
  • a device-specific device operating configuration can be defined by a device-specific state change.
  • a device-specific state change By connecting an electronic component that can be used for a plurality of vacuum devices, its device-specific configuration can be generated, as a result of which a device-specific device operating configuration is defined.
  • the electronic device Before the electronic device is connected for the first time, it may be suitable for use in different vacuum devices. Accordingly, the electronic device can be designed to experience different state changes depending on the vacuum device or the device component before the first connection. Different state changes can also trigger different operating configurations, so that there is a more universal application for a single type of electronic device.
  • the change in state can be generated in stages, in particular by transferring the electronic device between two discrete states.
  • This can be a "binary" change in state, ie a change between two defined states.
  • the desired change in state can thereby be achieved with a high degree of certainty and accuracy.
  • the change in state is generated in a stepless manner, in particular by stepless transfer between two states.
  • a continuous change in state may have taken place, in which several intermediate states occur in particular until the desired final state is reached.
  • Electronic devices that allow a continuous change of state can ensure a particularly high degree of flexibility.
  • a stepless state change in particular enables the generation of a large number of final states, as a result of which numerous different device operating configurations can be defined.
  • the interface can be designed to generate a mechanical, electrical, magnetic and / or optical change in the state of the electronic device. Accordingly, the electronic device can be designed to experience a mechanical, electrical, magnetic and / or optical change in state by connecting to the interface. Such a change in state can be accomplished with little effort and, at the same time, high security.
  • the interface has a mechanical shape for changing the state of the electronic device.
  • a mechanical shape can be produced inexpensively and at the same time ensure a high degree of functional reliability.
  • a mechanical shaping can be at least one projection, in particular a spike or web-like projection, and / or at least one recess.
  • a plurality of projections and / or recesses can preferably be provided. Such projections or recesses can be used to provide mechanical coding in a particularly simple manner, which generates a desired change in state of the electronic device.
  • the change in state of the electronic device is formed by at least one material breakout and / or by at least one material interruption, in particular by interrupting a conductor track on a circuit board of the electronic device.
  • a material breakout or material interruption can be perceived particularly clearly during assembly, so that when connecting the electronic device, the reaching of the respective end position at the interface can be easily determined by an operator or fitter.
  • the change in state of the electronic device is also possible for the change in state of the electronic device to be formed by at least one change in electrical conductivity and / or by at least one change in color. Electrical conductivity changes or color changes can be made continuously, so that numerous possible final states can be generated.
  • the change in state is formed by a program selection.
  • a plurality of programs in particular computer program products, can be stored or installed on the electronic device.
  • a program selection can be made by signal transmission, in particular by automated signal transmission, from the device component via the interface to the electronic device.
  • Such a program selection is irreversible.
  • the interface can be a physical or also a logical interface, which in particular enables wireless signal and / or data transmission.
  • the change in state of the electronic device can be detectable electronically, optically, magnetically and / or mechanically, which is associated with a high degree of detection reliability and at the same time can be accomplished with little effort.
  • An electronic device for a vacuum device in particular for a vacuum device described above. Accordingly, it can be an electronic device for a vacuum pump, a vacuum measuring or vacuum analysis device, a leak detector or a vacuum chamber device.
  • An electronic device according to the invention has at least one connection section for connection to an interface of a device component and at least one configuration device for determining a device operating configuration, the configuration device being designed to connect the connection section to the interface of the device component to change the state of an irreversible state to determine a device operating configuration to experience.
  • a still further aspect of the present invention relates to a method for assembling and / or starting up a vacuum device, in particular a vacuum device described above, in which at least one device component is provided, in which at least one electronic device, in particular for device control and / or regulation is provided, in which the electronic device is connected to an interface of the device component and an irreversible change in the state of the electronic device for establishing a device operating configuration is generated by the connection.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms in accordance with the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged on the side. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump.
  • Several connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 from the gas conveyed by the pump into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is housed, can be brought.
  • the lower part 121 there are also two coolant connections 139, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be fed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can thus be operated to a certain extent in a hanging manner.
  • the vacuum pump 111 may be designed to operate can be taken if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be realized, in which the underside 141 cannot be arranged facing downwards, but turned to the side or directed upwards.
  • various screws 143 are also arranged, by means of which components of the vacuum pump, which are not further specified here, are fastened to one another.
  • a bearing cover 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises a plurality of process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 rotatable about an axis of rotation 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form one turbomolecular pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and have a pumping effect and are connected in series with one another.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 fastened to and supported by the rotor hub 161, which are oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction.
  • two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested one inside the other in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and of the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 and forms with it the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms a second Holweck pump stage with the latter.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175, and forms the third Holweck pump stage with the latter.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially extending channel can be provided, via which the central Holweck gap 173 is connected to the radially inner Holweck gap 175. This means that the nested Holweck pump stages are connected in series.
  • a connection channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive the vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter increasing toward the roller bearing 181.
  • the spray nut 185 is in sliding contact with at least one scraper of an operating fluid reservoir.
  • the operating medium storage comprises a plurality of absorbent disks 187 stacked one on top of the other, which are provided with an operating medium for the rolling bearing 181, e.g. are soaked with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium storage via the wiper to the rotating spray nut 185 and, as a result of the centrifugal force along the spray nut 185, is conveyed in the direction of the increasing outer diameter of the spray nut 92 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the Rolling bearings 181 and the operating medium storage are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, each of which comprises an annular stack of a plurality of permanent magnetic rings 195, 197 stacked on one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side carrier section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or catch bearing 215 is provided within the magnetic bearing, which runs empty without contact during normal operation of the vacuum pump 111 and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator in order to provide a radial stop for the rotor 149 form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the catch bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which causes the catch bearing 215 to be disengaged in normal pumping operation.
  • the radial deflection at which the catch bearing 215 engages is dimensioned large enough that the catch bearing 215 does not engage during normal operation of the vacuum pump, and at the same time is small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 which extends through the motor stator 217.
  • an intermediate space 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement for transmitting the drive torque can magnetically influence one another.
  • the motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a purge gas and which can be, for example, air or nitrogen, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, for example from corrosive portions of the process gas, by means of the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie in the engine compartment 137 there is at least approximately the vacuum pressure brought about by the forevacuum pump connected to the pump outlet 117.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor space 137, in particular in order to achieve a better seal of the motor space 217 with respect to the radially outside Holweck pump stages.
  • the turbomolecular pump of the 1 to 5 forms a vacuum device according to the invention or an electrical device according to the invention.
  • the 6 to 11 show details, which also with a turbomolecular pump according to the 1 to 5 can be provided, even if they are not expressly shown there.
  • the Fig. 6 and 7 show schematic representations of a vacuum device according to a first embodiment of the invention.
  • the vacuum device Fig. 6 and 7 can in particular be a turbomolecular pump 111.
  • the turbomolecular pump 111 shown has at least one device component 225 and an electronic device 227.
  • the device component 225 can be, for example, the housing 119 and / or the lower part 119 of the turbomolecular pump 111.
  • the electronic device 227 can be, for example, the electronics housing 123.
  • the electronic device can be an electronic component arranged in the electronics housing 123.
  • the electronic device 227 can be designed for device control and / or regulation, in particular for operating the electric motor 125 arranged in the turbomolecular pump 111.
  • the Fig. 6 shows the turbomolecular pump 111 in a position before the electronic device 227 is connected to the device components 225 and Fig. 7 shows the turbomolecular pump 111 in a position after the connection of the electronic device 227 to the device component 225.
  • the device component points to the connection of the electronic component 227 to the device component 225 an interface 229. By connecting the electronic device 227 to the device component 225, a change in state of the electronic device 227 is generated to determine a device operating configuration.
  • the electronic device 227 is provided with a plurality of predetermined breaking points 231, through which targeted material breakouts 233, as in FIG Fig. 7 shown, can be generated.
  • the interface 229 of the device component 225 can be formed by a plurality of web-like projections 235.
  • the projections 235 come into contact with material sections of the electronic device 227 to be broken out and produce targeted material breakouts 233 along the respective predetermined breaking points 231, as in FIG Fig. 7 shown.
  • the area surrounding the predetermined breaking points 231 can thus form a connection section for the connection to the interface 229 of the device component 225.
  • Material breaks 233 can interrupt conductor tracks 237 of the electronic device 227, which can be detected by an evaluation unit 239 of the electronic device 227.
  • conductor tracks 237a to 237f are provided. Depending on which and how many conductor tracks 237 are interrupted, different changes in state can occur. These can correspond to various device operating configurations that can be determined by the evaluation unit 239.
  • the predetermined breaking points 231 or the break-out material sections can form a configuration section, which is designed to experience a change in state to determine a device operating configuration by connecting the connection section to the interface 229 of the device component 225.
  • the interface 229 is formed by a total of four projections 235 in a specific arrangement, by means of which a total of four specific material breakouts 233 are generated after the electronic device 227 has been connected.
  • the conductor tracks 237c and 237e remain uninterrupted. This can be detected by the evaluation unit 239 and finally make it possible to determine a corresponding device operating configuration.
  • a specific change in status can be generated.
  • a further change in state can be generated, which can correspond to an invalid configuration.
  • a change in state by removal can be achieved, for example, by a barb at the interface 229 and correspondingly break-out material sections on the electronic device 227, which is not shown in the figures.
  • the reuse of the electronic device 227 in another vacuum device can be avoided by such a configuration, so that the risk of incorrect installation is reduced.
  • a plurality of material breakouts 233 can be generated in parallel on the electronic device 227.
  • the Fig. 8 and 9 show schematic representations of a vacuum device according to a second embodiment of the invention.
  • the vacuum device Fig. 8 and 9 can also be a turbomolecular pump 111 act as in the 1 to 5 shown.
  • the embodiment according to Fig. 8 and 9 differs from the embodiment according to Fig. 6 and 7 only in that a plurality of material breakouts can be generated in series.
  • the electronic device 227 can have a plurality of predetermined breaking points 231, which are arranged for the serial production of material breakouts 233, as in FIG Fig. 9 shown.
  • the interface 229 of the device component 225 is in accordance with the exemplary embodiment in FIG Fig. 8 and 9 formed by a web-like projection 235.
  • the protrusion 235 comes into contact with material sections of the electronic device 227 to be broken out and generates targeted material breakouts 233 along the respective predetermined breaking points 231, as in FIG Fig. 9 shown.
  • Fig. 8 and 9 can be interrupted by material breakouts 233 conductor tracks 237 of the electronic device 227, which can be detected by an evaluation unit 239.
  • conductor tracks 237a to 237c are provided, the number or the extent of the material breakouts and thus the conductor track interruptions depending on the dimensions of the projection 235.
  • different changes in state can occur. These can correspond to different device operating configurations.
  • the protrusion 235 is dimensioned to produce material breakouts 233 which lead to the interruption of the conductor tracks 237a and 237b, but not to an interruption of the conductor track 237c.
  • the changes in state are generated in stages, that is, a transfer between two discrete states, namely a state without material breakout 233 and a state with material breakout 233.
  • the Fig. 10 and 11 show schematic representations of a vacuum device according to a third embodiment of the invention.
  • the vacuum device Fig. 10 and 11 can be a turbomolecular pump 111, as in FIGS 1 to 5 shown.
  • the embodiment according to Fig. 10 and 11 differs from the embodiments according to 6 to 9 in that a change in conductivity can be generated instead of material breakouts.
  • the electronic device 227 in accordance with Fig. 10 and 11 a removal device 241, which is connected to a conductor track 237.
  • the removal device 241 consists in particular of conductive and removable material, wherein an electrical conductivity change can be generated by the removal of the material.
  • the material of the removal device 241 can be rubbed off.
  • the interface 229 of the device component 225 is formed by a web-like projection 235.
  • the projection 235 comes into contact with the removal device 241.
  • conductive material of the removal device 241 is rubbed off or otherwise mechanically removed, which can be detected by an evaluation unit 239.
  • the material can be removed continuously, so that the change in conductivity of the removal device 241 can be gradually adjusted.
  • the extent of the material removal and thus the change in conductivity depends on the dimensions of the projection 235.
  • changes in state can differ Adjust circumference. These can correspond to different device operating configurations.
  • the electronic device 227 can in particular be a pump circuit board which is mounted, for example, on a device component 225 of a pump 111 and thereby becomes part of this pump 111 as intended.
  • the configuration of the pump 111 is determined by the act of assembly, which can then preferably be evaluated accordingly by a drive device.
  • the drive device can be exchangeable, in which case another drive device, which is used as a replacement, can also evaluate the previously defined configuration.
  • the mechanical interface 229 of the respective pump 111 directly on a replaceable drive device causes a change in the state of the drive device by connecting it.
  • the drive device can hereby be fixed to the respective pump 111 or to the respective vacuum device in general and, depending on the type of change in state, could no longer be used for other types of devices.

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Claims (12)

  1. Appareil à vide (111), en particulier pompe à vide, appareil de mesure de vide, appareil de détection de fuites et/ou appareil à chambre à vide, comprenant au moins un composant d'appareil (225) et un dispositif électronique (227), en particulier pour la commande et/ou la régulation de l'appareil, le dispositif électronique (227) étant raccordé à une interface (229) du composant d'appareil (225) et un changement d'état du dispositif électronique (227) étant engendré par le raccordement en vue de définir une configuration de fonctionnement de l'appareil,
    caractérisé en ce que
    le changement d'état du dispositif électronique (227) est engendré de manière irréversible par le raccordement à l'interface (229).
  2. Appareil à vide (111) selon la revendication 1,
    caractérisé en ce que
    l'interface (229) est réalisée pour engendrer un autre changement d'état au niveau du dispositif électronique (227) par enlèvement complet et/ou partiel dudit dispositif électronique, en particulier en vue de définir une configuration d'invalidité, et/ou en ce que
    le dispositif électronique (227) est réalisé pour subir un autre changement d'état par enlèvement complet et/ou partiel depuis l'interface (229) et/ou par raccordement à l'interface d'un autre composant de l'appareil, en particulier en vue de définir une configuration d'invalidité.
  3. Appareil à vide (111) selon la revendication 1 ou 2,
    caractérisé en ce que
    l'interface (229) est réalisée pour engendrer un changement d'état, spécifique à l'appareil, du dispositif électronique (227), et
    de préférence une configuration de fonctionnement de l'appareil spécifique à l'appareil est définie par le changement d'état spécifique à l'appareil.
  4. Appareil à vide (111) selon l'une au moins des revendications précédentes, caractérisé en ce que
    le changement d'état est engendré de façon étagée, en particulier par transfert du dispositif électronique (227) entre deux états discrets, ou en ce que le changement d'état est engendré en continu, en particulier par transfert continu entre deux états.
  5. Appareil à vide (111) selon l'une au moins des revendications précédentes,
    caractérisé en ce que
    une pluralité de changements d'état est engendrée par le raccordement à l'interface (229), en particulier une pluralité de changements d'état engendrés en parallèle ou en série.
  6. Appareil à vide (111) selon l'une au moins des revendications précédentes,
    caractérisé en ce que
    l'interface (229) est réalisée pour engendrer un changement d'état mécanique, électrique, magnétique et/ou optique du dispositif électronique (227), et/ou en ce que
    le dispositif électronique (227) est réalisé pour subir un changement d'état mécanique, électrique, magnétique et/ou optique par le raccordement à l'interface (229).
  7. Appareil à vide (111) selon l'une au moins des revendications précédentes,
    caractérisé en ce que
    l'interface (229) présente une conformation mécanique pour le changement d'état du dispositif électronique, de préférence la conformation mécanique étant réalisée par au moins une saillie (235), en particulier une saillie en forme de mandrin ou de barrette (235), et/ou par au moins un évidement.
  8. Appareil à vide (111) selon l'une au moins des revendications précédentes,
    caractérisé en ce que
    le changement d'état du dispositif électronique (227) est formé par au moins une rupture de matériau (233) et/ou par au moins une interruption du matériau, en particulier par l'interruption d'une piste conductrice (237) sur une carte à circuit du dispositif électronique (227), et/ou en ce que le changement d'état du dispositif électronique (227) est formé par au moins un changement de conductivité électrique et/ou par au moins un changement de couleur.
  9. Appareil à vide (111) selon l'une au moins des revendications précédentes,
    caractérisé en ce que
    le changement d'état du dispositif électronique (227) peut être détecté par voie électronique, optique, magnétique et/ou mécanique, en particulier par une unité d'évaluation (239).
  10. Composant d'appareil (225) pour un appareil à vide (111), en particulier selon l'une des revendications précédentes,
    comprenant une interface (229) pour le raccordement d'un dispositif électronique (227), en particulier pour la commande et/ou la régulation de l'appareil, l'interface (229) étant réalisée pour engendrer un changement d'état irréversible au niveau du dispositif électronique (227) par le raccordement du dispositif électronique, en vue de définir une configuration de fonctionnement de l'appareil.
  11. Dispositif électronique pour un appareil à vide (111), en particulier selon l'une des revendications 1 à 9, comportant au moins une portion de raccordement pour le raccordement à une interface (229) d'un composant d'appareil (225), et comportant au moins un dispositif de configuration pour définir une configuration de fonctionnement de l'appareil, le dispositif de configuration étant réalisé pour subir un changement d'état irréversible par le raccordement de la portion de raccordement à l'interface (229) du composant d'appareil (225), en vue de définir une configuration de fonctionnement de l'appareil.
  12. Procédé de montage et/ou de mise en service d'un appareil à vide (111), en particulier selon l'une des revendications 1 à 9,
    dans lequel
    - on fournit au moins un composant d'appareil (225),
    - on fournit au moins un dispositif électronique (227), en particulier pour la commande et/ou la régulation de l'appareil,
    - on raccorde le dispositif électronique (227) à une interface (229) du composant d'appareil (225), et
    - on engendre un changement d'état irréversible du dispositif électronique (227) par le raccordement, en vue de définir une configuration de fonctionnement de l'appareil.
EP18160546.0A 2018-03-07 2018-03-07 Appareil à vide Active EP3536966B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP18160546.0A EP3536966B1 (fr) 2018-03-07 2018-03-07 Appareil à vide
JP2019037217A JP6781784B2 (ja) 2018-03-07 2019-03-01 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18160546.0A EP3536966B1 (fr) 2018-03-07 2018-03-07 Appareil à vide

Publications (2)

Publication Number Publication Date
EP3536966A1 EP3536966A1 (fr) 2019-09-11
EP3536966B1 true EP3536966B1 (fr) 2020-06-17

Family

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Application Number Title Priority Date Filing Date
EP18160546.0A Active EP3536966B1 (fr) 2018-03-07 2018-03-07 Appareil à vide

Country Status (2)

Country Link
EP (1) EP3536966B1 (fr)
JP (1) JP6781784B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3848588B1 (fr) 2020-12-17 2022-11-30 Pfeiffer Vacuum Gmbh Appareil sous vide

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0223917A2 (fr) * 1985-11-29 1987-06-03 The Perkin-Elmer Corporation Fiche programmable pour lampes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005045283B4 (de) * 2005-09-22 2014-05-15 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
EP1895180A2 (fr) * 2006-08-30 2008-03-05 Ebara Corporation Dispositif de palier magnétique, système de rotation avec un tel dispositif et procédé de determination de type unité principale dans un sytème de rotation
JP5065703B2 (ja) * 2007-02-15 2012-11-07 株式会社荏原製作所 回転機械装置における回転機械本体の機種識別方法、回転機械装置
CN101761501B (zh) * 2009-12-25 2012-02-29 北京中科科仪技术发展有限责任公司 一种分子泵型号的识别方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0223917A2 (fr) * 1985-11-29 1987-06-03 The Perkin-Elmer Corporation Fiche programmable pour lampes

Also Published As

Publication number Publication date
JP6781784B2 (ja) 2020-11-04
EP3536966A1 (fr) 2019-09-11
JP2019167951A (ja) 2019-10-03

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