EP3620660B1 - Appareil à vide - Google Patents

Appareil à vide Download PDF

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Publication number
EP3620660B1
EP3620660B1 EP19190282.4A EP19190282A EP3620660B1 EP 3620660 B1 EP3620660 B1 EP 3620660B1 EP 19190282 A EP19190282 A EP 19190282A EP 3620660 B1 EP3620660 B1 EP 3620660B1
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EP
European Patent Office
Prior art keywords
component
device component
private key
electronic device
data set
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19190282.4A
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German (de)
English (en)
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EP3620660A1 (fr
Inventor
Herbert Stammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19190282.4A priority Critical patent/EP3620660B1/fr
Publication of EP3620660A1 publication Critical patent/EP3620660A1/fr
Priority to JP2020085578A priority patent/JP7177119B2/ja
Application granted granted Critical
Publication of EP3620660B1 publication Critical patent/EP3620660B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

  • the invention relates to a vacuum device, in particular a vacuum pump, with a device component and an electronic device for controlling and / or regulating the device component.
  • the invention also relates to a method for identifying a device component of such a vacuum device by means of the electronic device and a method for individualizing a device component of the vacuum device.
  • the control and / or regulation of a vacuum pump or other vacuum devices is usually carried out by means of an electronic device which is connected to one or more device components of the vacuum pump or the vacuum device. Since such an electronic device controls or regulates the drive of the vacuum pump or the vacuum device, i.e. in most cases an electric motor, the electronic device is also referred to as a drive device.
  • the device components of a vacuum pump and the electronic device or the drive device usually form separable units, so that several different types of device components can be operated with the same type of electronic device or the drive device.
  • the electronic device In order to avoid an incorrect assignment of the device components to an electronic device, which could, for example, lead to malfunctions or even damage to a vacuum pump, it is necessary that the electronic device correctly recognizes the type of the respective device component as soon as it is connected to the device component .
  • the electronic device When the electronic device determines the type of a device component connected to it, the electronic device usually receives additional information relating to the operating parameters of the device component.
  • the electronic device can, for example, receive information regarding the speed at which a vacuum pump is to be operated, or it also reads out an internal parameter of the device component in order to use this parameter to uniquely select a characteristic that is specific to the device component.
  • characteristic resistors are used in known vacuum devices, which are attached to the device component.
  • a specific identifier of a device component can be stored mechanically on this, and this identifier can cause a change in status on the connection with the electronic device, which in turn changes the electrical properties of the electronic device and thereby makes the type of the device component recognizable.
  • creating a unique identifier for the device component involves additional effort, for example if characteristic resistors are suitably soldered or otherwise integrated into the device component or if a mechanical identifier is installed on the device component. Furthermore, characteristic resistances and mechanical identifiers are not protected against unintentional or intentional changes. In addition, internal parameters that are stored in a device component are usually not protected against manipulation. In addition, in the case of characteristic resistors and mechanical identifiers, the number of possible combinations is limited, for example due to the space available.
  • the EP 2 469 096 A1 describes a vacuum device and method according to a related technology.
  • the EP 1 767 790 A2 describes a vacuum device and a method according to a related technology, but which generally use a pump detection means, which are, for example, characteristic resistors, in order to be able to detect a certain type of a vacuum pump by means of a control device.
  • a pump detection means which are, for example, characteristic resistors
  • the vacuum device is, for example, a vacuum pump and comprises a device component and an electronic device for controlling and / or regulating the device component.
  • the device component has a digital component-specific data record.
  • the electronic device is with the Device component connected and set up to read out the component-specific data record of the device component.
  • the vacuum device uses a digital data record which is specific for the device component.
  • the use of the digital data record makes the production of the vacuum device easier, faster and thus more cost-effective, since the component-specific data record only needs to be stored in an already existing memory element in or on the vacuum device and the soldering or integration of resistors or the production and There is no need to set up a mechanical identifier.
  • the digital component-specific data record is more secure with regard to manipulation than, for example, characteristic resistors, since the data record is not easily accessible from the outside after it has been stored in or on the device component and measures can be taken to secure the data record against undesired access in a storage element .
  • the connection between the electronic device and the device component can be established, for example, via a suitable interface, and the data record can be read out by the electronic device using suitable firmware.
  • the type and / or internal parameters of the device component can, for example, likewise be determined by means of such firmware using the component-specific data record.
  • the component-specific data record is encrypted by means of a private key
  • the electronic device has a public key which is assigned to the private key in order to decrypt the encrypted component-specific data record before it is read out.
  • the component-specific data record is protected against an intended or unintentional change which could be made, for example, by means of a device for reading out the component-specific data record.
  • the encryption thus improves the operational reliability of the vacuum device, since, for example, internal parameters of the device components, which for example cause the correct selection of a characteristic curve, can only be read with knowledge of the public key.
  • the private key can first be generated by a key holder, i.e. for example the manufacturer of the vacuum device, during the manufacture of the vacuum device or when it is first put into operation.
  • the private key is thus only available to the manufacturer of the vacuum device, for example, even while the vacuum device is in operation.
  • the public key can be contained in the firmware of the electronic device.
  • the encryption of the component-specific data record is thus asymmetrical, since the encrypted component-specific data record can be decrypted by the electronic device, but cannot be changed by the electronic device.
  • the component-specific data record preferably includes a component-specific identifier that is signed by means of the private key. By signing the component-specific identifier, it is also protected against manipulation.
  • the identifier can be assigned, for example, to an article number, a version number or also a serial number of the device component. Using the article number, version number, serial number or any combination of such identifiers the electronic device can uniquely identify the device component.
  • the device component can contain or consist of storage elements which can comprise read-only storage elements as well as storage elements which can be changed once or several times during subsequent use, that is to say writable.
  • storage elements can comprise read-only storage elements as well as storage elements which can be changed once or several times during subsequent use, that is to say writable.
  • the device components or storage elements can be permanently provided with component-specific identifiers, which are thereby protected against any subsequent changes.
  • the article number enables the device components to be clearly assigned to an indefinite number of identical device components that can be mass-produced by an indefinite number of manufacturers on the basis of the same specification.
  • the version number designates a unique version of a device component that has at least minor functional differences compared to other device components with other version numbers, which must be taken into account when operating the device component.
  • the serial number is preferably assigned once and enables an unambiguous identification of each individual device component from an indefinite number of device components.
  • the component-specific data record is additionally protected against manipulation, for example on the basis of a serial number of the device component, then this data record can only be correctly decrypted with this device component and is available for device operation. If the data record is instead transferred to another device component of the same design, for example with the same article number, the data record cannot be decrypted due to the different serial number of the device component and therefore cannot be read out for device operation.
  • the component-specific data record can include operating parameters and / or operating specifications of the device component.
  • the operating parameters and / or operating specifications are, for example, limit values and / or characteristics for the operation of the device component of the vacuum device. If the component-specific data record is encrypted by means of the private key, in this embodiment the operating parameters and / or operating specifications of the device component are also protected against intentional or unintentional manipulation due to the encryption.
  • the electronic device is also set up to encrypt operating data for the device component by means of the public key and to transmit it to the device component.
  • the encrypted operating data for the device components can only be decrypted using the private key.
  • the operating data that are transmitted from the electronic device to the device component can be a subset of the operating parameters and / or operating specifications that are contained in the component-specific data record.
  • the transmitted operating data for the device component can only be decrypted using the private key, which in turn is only known to the key holder or manufacturer of the vacuum device, decryption of the operating data and thus a change in part of the operating parameters and / or operating specifications of the device component can only be done with the consent of the owner of the private key.
  • the possibility of transmitting operating data for the device component by means of the electronic device improves the flexibility for the operation of the vacuum device, although the adaptation of the operating data is secured by the encryption.
  • the component-specific data record is preferably stored on a chip of the device component. If such a chip is already present on or in the device component, there is no additional effort to install one Storage element on which the digital component-specific data record is stored. Alternatively, however, the component-specific data record can be stored on an external storage element of the device component.
  • an external storage element is, for example, a circuit board as a vacuum feed-through with which the connection between the device component and the electronic device is established.
  • the invention also relates to a method for identifying a device component of a vacuum device by means of an electronic device for controlling and / or regulating the device component.
  • the device component has a digital component-specific data record. According to the method, when the electronic device is activated, the component-specific data record of the device component is read out by the electronic device. The device component is clearly identified on the basis of the component-specific data record.
  • the device component and the electronic device are connected to one another, for example via an interface. Since the device components are uniquely identified by means of the digital component-specific data record, the effort involved in identifying the device components is less than, for example, when identifying characteristic resistors and mechanical identifiers.
  • the component-specific data record is encrypted by means of a private key, and the encrypted component-specific data record is decrypted with a public key which is assigned to the private key before being read out by the electronic device.
  • the encryption of the component-specific data record improves the security when identifying the device components, since those relevant for the identification Data can only be changed using the private key, but not using the public key.
  • the component-specific data record can include a component-specific identifier that is signed by means of the private key.
  • the device component can be clearly identified by reading out the component-specific identifier.
  • the component-specific identifier can be assigned, for example, to an article number, version number or serial number of the device component. By signing with the private key, the component-specific identifier and thus the unique identification of the device component are particularly secured.
  • operating data for the device component can be encrypted by the electronic device using the public key and transmitted to the device component.
  • the encrypted operating data for the device components can only be decrypted using the private key.
  • transmitting the operating data the operation of the device component can be modified flexibly, with consent, however or consent must be given by an owner of the private key.
  • the invention also relates to a method for individualizing a device component of a vacuum device.
  • a private key and a public key that is assigned to the private key are generated.
  • a digital data set that is specific to the device component is also generated and encrypted using the private key.
  • the encrypted digital data record is then transmitted to the device component in such a way that the encrypted digital data record can be accessed by an electronic device for controlling and / or regulating the device component.
  • the public key is also transmitted to the electronic device.
  • the private and public keys as well as the digital data set can only be generated by a holder of the private key. This takes place, for example, by means of an electronic generation device for the two keys and the digital data record during the manufacture of the vacuum device, this electronic generation device representing a certification authority for the two keys.
  • the data record specific to the device component can contain, in addition to data that allow identification of the device component, one or more internal parameters that are relevant for the operation of the device component and, for example, enable a unique selection of a characteristic curve.
  • the device component is "individualized" not only by an encrypted type identifier, but also by defining one or more internal parameters, so that the device component differs from device components of the same type during operation.
  • the digital data record includes an identifier specific to the device component, which is signed by means of the private key in order to individualize the device component.
  • the one for the device component specific identifier can be assigned an article number, version number or serial number of the device component. Such an individualization enables a specific device component to be clearly identified during the operation of the vacuum device.
  • the digital data record can be encrypted using the private key during commissioning of the vacuum device.
  • the private key is applied to the existing data record in the device component during an initialization procedure of the vacuum device, in order thereby to generate an encrypted component-specific data record in the device component.
  • encrypted operating data for the device component which is encrypted by the electronic device using the public key and transmitted to the device component, is decrypted using the private key.
  • the operating data for the device component can therefore only be decrypted with knowledge of the private key and made available to the device component for its operation.
  • a functionality for the transmission of encrypted operating data can be provided in a firmware of the electronic device, which functionality prompts the input of the private key.
  • the turbo molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123. Also are a data interface 129, for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purging gas connection via which purging gas is used to protect the electric motor 125 (see e.g. Fig. 3 ) can be brought into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be passed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be put into operation when it is oriented in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards.
  • various screws 143 are also arranged by means of which components of the vacuum pump not specified here are attached to one another.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 rotatable about an axis of rotation 151.
  • the turbo-molecular pump 111 comprises several turbo-molecular pump stages connected in series with one another with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-jacket-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested in one another.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposite ones
  • the outer surfaces of the Holweck rotor sleeves 163, 165 are smooth and propel the gas for operating the vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.
  • a conical injection molded nut 185 is provided on the rotor shaft 153 with an outside diameter that is to be added to the roller bearing 181.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium reservoir.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, e.g. with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the existing in the bearing gap 199 magnetic field causes magnetic repulsive forces between the ring magnets 195, 197, which have a radial Cause storage of the rotor shaft 153.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or retainer bearing 215 is provided within the magnetic bearing, which runs empty during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, whose rotor shaft 153 extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, e.g. from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular to achieve better sealing of the motor compartment 217 from the Holweck pump stages located radially outside.
  • Fig. 6 shows a schematic representation of the turbo molecular pump 111 as a first embodiment of a vacuum device according to the invention.
  • the turbo molecular pump 111 comprises a device component 301 which has all the components of the turbo molecular pump 111 which are accommodated in the housing 119 and in the lower part 121 and are described above (cf. Figs. 1 to 3 ). Pure schematic is in Fig. 6 the rotor 149 of the turbo molecular pump 111 is indicated.
  • the device component 301 further comprises a pump chip 303.
  • the turbo molecular pump 111 also has an electronic device 305 for controlling and / or regulating the device component 301.
  • the electronic device 305 is in the electronics housing 123 (cf. also Figs. 1 to 3 ) housed.
  • a digital component-specific data record 307 is stored on the pump chip 303 and comprises a component-specific identifier 309 and operating data 311 for the device component 301.
  • the operating data 311 are a subset of parameters and / or operating specifications of the device component 301, which are contained in the component-specific data record 307.
  • the electronic device 305 also includes stored data 313 which are stored on a storage medium (not shown).
  • the stored data 313 include, on the one hand, firmware 315 that is executed to control and / or regulate the device component 301.
  • the stored data 313 include characteristic curves 317 which are provided for the device component 301.
  • the component-specific data record 307 is not stored in a generally readable format on the pump chip 303, but in an encrypted form.
  • the component-specific data record 307 is encrypted by using a private key 321 that is generated by a generating device 323.
  • the generating device 323 likewise generates a public key 325 which is assigned to the private key 321. Data that is encrypted using the private key 321 can be decrypted using the public key 325 and thus read out, but not on the Modified storage medium on which the encrypted data is stored.
  • the component-specific data record 307 stored on the pump chip 303 cannot therefore be modified without knowledge of the private key 321.
  • the public key 325 generated by the generating device 123 is transmitted to the electronic device 305 and is then part of the stored data 313.
  • Fig. 7 shows a further turbo-molecular pump 111 as a second embodiment of a vacuum device according to the invention.
  • the turbo molecular pump 111 of Fig. 7 differs from the one in Fig. 6 is shown, merely in that instead of the pump chip 303, a circuit board 333 is provided as a vacuum feed-through, on which the digital component-specific data record 307 is stored.
  • the pump chip 303 from Fig. 6 can be referred to as the internal storage medium of the device component 301, while the circuit board 333 of Fig. 7 can be viewed as an external storage medium of the device component 301.
  • the above description of the further components of the turbo molecular pump 111 and the description below of the mode of operation of the vacuum device according to the invention therefore apply not only to the in Fig. 6 illustrated first embodiment, but also for the second embodiment of Fig. 7 .
  • the turbo molecular pump 111 is in Fig. 1 shown in such a way that the housing 119, the lower part 121 and the electronics housing 123 are connected to one another as a unit. Nevertheless, the device component 301 and the electronic device 305 are separate units that can be delivered in the respective housing 119 and lower part 121 or in the electronics housing 123 independently of one another.
  • an electronic device 305 can be used as a replacement part of an existing electronic device, while the corresponding device component 301 that is in the housing 119 and is accommodated in the lower part 121, is still connected to the inlet flange 113 with a recipient of a vacuum system and is not exchanged.
  • turbo-molecular pump 111 Both when the turbo-molecular pump 111 is started up for the first time and when the device component 301 or the electronic device 305 is replaced, it is necessary that the specific device component 301 is correctly recognized or uniquely identified by the electronic device 305 when it is activated. Only then can correct operation of the turbo molecular pump 111 be ensured, in which, among other things, specific characteristic curves 317 have to be selected and used for the device component 301.
  • the component-specific data record 307 is therefore read out by the electronic device 305.
  • the electronic device 305 uses the public key 325, which is assigned to the private key 321, for this purpose.
  • the electronic device 305 reads out the component-specific identifier 309, which is signed with the private key 321, using the public key 325.
  • the component-specific identifier 309 usually includes an article number of the device component 301, so that the electronic device 305 uniquely identifies the specific device component 301 by reading out the component-specific identifier 309.
  • the electronic device 305 reads out one or more internal parameters of the device component 301, which are also contained in the component-specific data record 307.
  • the internal parameters determine which of several characteristic curves 317 is or are to be used for the operation of the specific device component 301.
  • the internal Parameter-specific limit values for the device component 301 for example a maximum speed of the rotor 149 or a maximum operating temperature of the device component 301.
  • the use of the private key 321 and the public key 325 ensures that the specific device component 301 is correctly and securely assigned to the electronic device 305 provided for it.
  • the use of the private and public keys 321, 325 prevents the device component 301 from being operated with such an electronic device 305 that can be connected to the device component 301 but does not match it.
  • the electronic device 305 can only read out the component-specific data record 307 and carry out the control and / or regulation of the device component 301 with the correct public key 325.
  • manipulation of the component-specific data record 307 by the electronic device 305 or a similar device that can be connected to the device component 301 is excluded as long as these devices only know the public key 325. As a result, for example, an unintentional change in the component-specific identifier 309, which would lead to incorrect control and / or regulation of the device component 301, is excluded.
  • the electronic device 305 can transmit data to the device component 301 that are encrypted using the public key 325 and represent, for example, part of the operating data 311.
  • knowledge of the private key 321 is required.
  • the execution of the firmware 315 can include a request to save and use data that the electronic device 305 encrypts with the public key 325 and transmits to the device component 301 has to enter the private key 321.
  • correct assignment of the data encrypted with the public key 325 to the correct device component 301 to which the private key 321 is assigned is also ensured in this case.
  • the generating device 323, with which the private key 321 and the assigned public key 325 are generated, is, for example, a module of a final test system for the turbo-molecular pump 111, with which the turbo-molecular pump 111 is checked before its delivery.
  • the generating device 323 can also be a hardware module that is provided exclusively for encryption for the device component 301 and the electronic device 305.
  • the component-specific data record 307 can be encrypted with the private key 321 when a circuit board 333 is used as a vacuum feed-through, as soon as the circuit board 333 is manufactured.
  • the device component 301 can only be individualized by means of the encryption when the device component 301 is first put into operation, in that the existing component-specific data record 307 is provided with the private key 321 and, so to speak, "enriched".
  • Information relating to the private key 321, which is required for enriching the key and thus for individualizing the device component 301, must, however, be present at a suitable location on the pump chip 303 or on the circuit board 333.
  • a chip serial number can be used as a key enrichment, ie as a private key 321.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (13)

  1. Appareil à vide (111), en particulier pompe à vide, comportant
    un composant d'appareil (301) et
    un dispositif électronique (305) destiné à commander et/ou réguler le composant d'appareil (301),
    le composant d'appareil (301) comprenant un ensemble de données numérique (307) spécifique au composant, et
    le dispositif électronique (305) étant connecté au composant d'appareil (301) et étant conçu pour lire l'ensemble de données (307), spécifique au composant, du composant d'appareil (301),
    caractérisé en ce que
    l'ensemble de données (307) spécifique au composant est crypté à l'aide d'une clé privée (321), et
    le dispositif électronique (305) comprend une clé publique (325) associée à la clé privée (321), pour décrypter l'ensemble de données crypté (308), spécifique au composant, avant la lecture.
  2. Appareil à vide (111) selon la revendication 1,
    dans lequel l'ensemble de données (307) spécifique au composant comprend un identifiant (309) spécifique au composant, qui est signé à l'aide de la clé privée (321), en particulier l'identifiant (309) spécifique au composant étant associé à un numéro d'article, à un numéro de version ou à un numéro de série.
  3. Appareil à vide (111) selon la revendication 1 ou 2,
    dans lequel l'ensemble de données (307) spécifique au composant comprend des paramètres de fonctionnement et/ou des spécifications de fonctionnement du composant d'appareil (301).
  4. Appareil à vide (111) selon l'une des revendications précédentes,
    dans lequel le dispositif électronique (305) est en outre conçu pour crypter des données de fonctionnement (311) pour le composant d'appareil (301) à l'aide de la clé publique (325) et pour les transmettre au composant d'appareil (301), et
    les données de fonctionnement cryptées (311) pour le composant d'appareil (301) ne peuvent être décryptées qu'à l'aide de la clé privée (321).
  5. Appareil à vide (111) selon l'une des revendications précédentes,
    dans lequel l'ensemble de données (307) spécifique au composant est stocké sur une puce (303) du composant d'appareil (301).
  6. Appareil à vide (111) selon l'une des revendications 1 à 4,
    dans lequel l'ensemble de données (307) spécifique au composant est stocké sur un élément de stockage externe (333) du composant d'appareil (301).
  7. Procédé pour identifier un composant d'appareil (301) d'un appareil à vide (111) à l'aide d'un dispositif électronique (305) destiné à commander et/ou réguler le composant d'appareil (301),
    dans lequel le composant d'appareil (301) comprend un ensemble de données (307) numérique spécifique au composant,
    le procédé consistant à
    lire l'ensemble de données (307), spécifique au composant, du composant d'appareil (301) par le dispositif électronique (305), lors de l'activation du dispositif électronique (305), et
    identifier de manière univoque le composant d'appareil (301) sur la base de l'ensemble de données (307) spécifique au composant,
    caractérisé en ce que
    l'ensemble de données (307) spécifique au composant est crypté à l'aide d'une clé privée (321), et
    le procédé consiste en outre à décrypter, avant la lecture par le dispositif électronique (305), l'ensemble de données crypté (307), spécifique au composant, à l'aide d'une clé publique (325) associée à la clé privée (321).
  8. Procédé selon la revendication 7,
    dans lequel l'ensemble de données (307) spécifique aux composant comprend un identifiant (309) spécifique au composant, qui est signé à l'aide de la clé privée (321), en particulier l'identifiant (309) spécifique aux composant étant associé à un numéro d'article, à un numéro de version ou à un numéro de série, et
    le procédé consiste en outre à identifier de façon univoque le composant d'appareil (301) en lisant l'identifiant (309) spécifique au composant.
  9. Procédé selon la revendication 7 ou 8, consistant en outre à
    crypter des données de fonctionnement (311) pour le composant d'appareil (301) par le dispositif électronique (305) à l'aide de la clé publique (325) et à les transmettre au composant d'appareil (301),
    les données de fonctionnement cryptées (311) pour le composant d'appareil (301) ne pouvant être décryptées qu'à l'aide de la clé privée (321).
  10. Procédé d'individualisation d'un composant d'appareil (301) d'un appareil à vide (111), en particulier d'une pompe à vide, consistant à :
    générer une clé privée (321) et une clé publique (325) associée à la clé privée (321),
    générer un ensemble de données numérique (307) spécifique au composant d'appareil (301) et le crypter à l'aide de la clé privée (321),
    transmettre l'ensemble de données numérique crypté (307) au composant d'appareil (301) de telle sorte que l'ensemble de données numérique crypté (307) est accessible à un dispositif électronique (305) destiné à commander et/ou réguler le composant d'appareil (301), et
    transmettre la clé publique (325) au dispositif électronique (305).
  11. Procédé selon la revendication 10, comprenant en outre que l'ensemble de données numérique (307) comprend un identifiant (309) spécifique au composant d'appareil (301), qui est signé à l'aide de la clé privée (321) afin d'individualiser le composant d'appareil (301), en particulier l'identifiant (309) spécifique au composant étant associé à un numéro d'article, à un numéro de version ou à un numéro de série.
  12. Procédé selon la revendication 10 ou 11, consistant en outre à crypter l'ensemble de données numérique (307) à l'aide de la clé privée (321) pendant une mise en service de l'appareil à vide (111).
  13. Procédé selon l'une des revendications 10 à 12, consistant en outre à décrypter, à l'aide de la clé privée (321), des données de fonctionnement cryptées (311) pour le composant d'appareil (301), qui sont cryptées par le dispositif électronique (305) à l'aide de la clé publique (325) et qui sont transmises au composant d'appareil (301).
EP19190282.4A 2019-08-06 2019-08-06 Appareil à vide Active EP3620660B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19190282.4A EP3620660B1 (fr) 2019-08-06 2019-08-06 Appareil à vide
JP2020085578A JP7177119B2 (ja) 2019-08-06 2020-05-15 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19190282.4A EP3620660B1 (fr) 2019-08-06 2019-08-06 Appareil à vide

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Publication Number Publication Date
EP3620660A1 EP3620660A1 (fr) 2020-03-11
EP3620660B1 true EP3620660B1 (fr) 2021-07-28

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GB2617383A (en) * 2022-04-07 2023-10-11 Edwards Ltd Pump control method and apparatus

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