EP3096021B1 - Télé-diagnostic d'appareils sous vide - Google Patents

Télé-diagnostic d'appareils sous vide Download PDF

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Publication number
EP3096021B1
EP3096021B1 EP15168485.9A EP15168485A EP3096021B1 EP 3096021 B1 EP3096021 B1 EP 3096021B1 EP 15168485 A EP15168485 A EP 15168485A EP 3096021 B1 EP3096021 B1 EP 3096021B1
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EP
European Patent Office
Prior art keywords
diagnostic data
totality
vacuum pump
data
display
Prior art date
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Application number
EP15168485.9A
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German (de)
English (en)
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EP3096021A1 (fr
Inventor
Herbert Stammler
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Priority to EP15168485.9A priority Critical patent/EP3096021B1/fr
Priority to JP2016096837A priority patent/JP2017002898A/ja
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/80Diagnostics
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/90Remote control, e.g. wireless, via LAN, by radio, or by a wired connection from a central computer
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00Function
    • F05D2260/80Diagnostics

Definitions

  • the invention relates to a vacuum device and a remote diagnosis method for vacuum devices, the vacuum device being a vacuum pump.
  • Vacuum devices are used in different areas of technology to create the vacuum required for a particular process.
  • Vacuum devices typically have a relatively simple user interface and/or user interface provided for the user on site, which is only intended for limited data exchange with the user.
  • Such a user interface or user interface is usually only used to call up the data required for the current requirement or for normal operation on site, such as data for the on/off states, the speed, an error status or the like.
  • a vacuum device is from JP 2000 283056 A known.
  • the invention is based on the object of creating a vacuum pump and a remote diagnosis method with which the aforementioned problems are eliminated. It should be ensured in the simplest possible way that the diagnostic data required for a remote diagnosis can be provided completely and without falsification, even in environments in which a high level of data security is required.
  • the vacuum device according to the invention namely the vacuum pump (hereinafter also referred to as “vacuum device”) comprises a device for generating a set of diagnostic data of the vacuum device that is suitable for a remote analysis location, a retrieval device, by means of which the provision of all diagnostic data can be initiated, and a provisioning device configured to provide the entirety of diagnostic data for transmission as an entirety to the remote analysis site.
  • the vacuum device now has the ability to provide all the diagnostic data required for a remote analysis at once, it also being ensured that the diagnostic data are available in an unaltered form at the remote analysis location. There is no longer a need for a person on site to "obtain” the data and/or to "transmit” the data to the remote analyst. At most, the provision of the diagnostic data can still be arranged by a person on site. However, this does not require special knowledge, special equipment or excessive care. A reliable, comprehensive error analysis is thus possible at the remote analysis site using the invention.
  • the diagnostic data is different from the operating data of the vacuum device provided for normal operation on site.
  • the diagnostic data can have a content and/or amount of data that is meaningfully reduced or expanded with regard to the respective diagnostic purpose compared to the normal operating data. In principle, however, this is not mandatory.
  • the diagnostic data can also be identical to the normal operating data.
  • the provision of all of the diagnostic data can be initiated on request, in particular only once, or automatically. It can thus be provided, for example, that the retrieval device initiates the provision only when a corresponding command is issued, for example by a user by pressing a button or by another device using a control parameter. However, the provision can also be triggered automatically, for example each time the vacuum device is switched on. For example, provision can be made for the diagnostic data to be shown on a display after the vacuum device has been switched on until a specified period of time has elapsed, the user presses a specific or any button, or normal operation of the vacuum device is resumed in whatever defined manner vacuum device starts.
  • Automatic provision of the diagnostic data can also be triggered by an error occurring after switching on or off or during normal operation of the vacuum device or by a predetermined error condition, ie the retrieval device initiates the provision of the diagnostic data automatically in this variant if an error causes a diagnosis may be required.
  • embodiments are possible according to the invention in which the initiation of the provision of the diagnostic data, so to speak the initial act of starting the diagnosis, is based on the switching on or off of the vacuum device or its mains supply or, so to speak, on the timing of the right moment (e.g. when an error occurs ) is reduced. For example, triggering a command or setting a parameter is then no longer necessary.
  • such embodiments are possible in which no interaction with the vacuum device is necessary at all.
  • the invention can then also be used for such vacuum devices that have no buttons or other input means or that are not accessible due to their installation situation.
  • a vacuum device according to the invention can be arranged in a contaminated or hermetically protected area - and thus in an area that is not easily accessible - and transmission of the diagnostic data can still be possible without any problems, for example simply by photographing a display of the vacuum device showing the diagnostic data through a pane of glass .
  • the diagnostic data when the diagnostic data is provided by means of indications on a display, but also in other cases, provision can be made for the diagnostic data to be provided permanently or alternately, at least during a predefined or definable period of time.
  • the diagnostic data can thus be displayed permanently, for example, until a user ends the display by pressing a button or a control command.
  • the diagnostic data can be displayed alternately with the normal operating data, with such an alternating display then being able to be ended once the transmission of the diagnostic data has been completed.
  • the vacuum device “jumps” from a normal display mode to a diagnostic data display mode for a predetermined period of time when an error occurs, in order to inform the user to give the possibility to record the diagnostic data "at the right time” for transmission without further interaction with the vacuum device.
  • all of the diagnostic data can be made available on a display in optically encoded and compressed form. According to the invention, all of the diagnostic data can be provided in such a coded form that all of the diagnostic data can be transmitted to the remote analysis location independently of local functionalities provided for normal on-site operation, in particular independent of local character sets.
  • the vacuum device is already connected to another device owned by the user via an electronic user interface or user interface, so that the user has the option of using a defined manual readout command to obtain an extended data stream which, for example, not only gives a short answer or confirmation to a command, but delivers a data stream with multiple size (e.g. "Stream", "Dump") and contains the entirety of the diagnostic data.
  • a defined manual readout command to obtain an extended data stream which, for example, not only gives a short answer or confirmation to a command, but delivers a data stream with multiple size (e.g. "Stream", "Dump") and contains the entirety of the diagnostic data.
  • all of the diagnostic data can thus be output in the form of a data stream. If the user records the extended data stream obtained, for example, via a user interface or user interface connected to another device of the user and connected to the vacuum device, and if this is transmitted electronically, for example, to the remote analysis site via the communication link, the data stream can be transmitted at the remote analysis site optionally processed after appropriate decoding and/or decompression.
  • Base64 coding carrying along a CRC checksum and/or grouping data by means of headers or by means of bracketed head and end characters and/or features are conceivable for encoding the diagnostic data that can be output.
  • “Base64” describes a method for coding 8-bit binary data in a character string that consists only of readable code page-independent ASCII characters.
  • a checksum (CR-24) can also be appended, with this slightly modified procedure being called Radix-64.
  • Radix-64 In principle, however, other codings are also conceivable.
  • all of the diagnostic data can be provided in optically encoded form.
  • the provision device includes a display on which the diagnostic data can be displayed.
  • optically encoded diagnostic data can be photographed or filmed from the display for transmission to the remote analysis location.
  • the entire amount of diagnostic data can be recorded using devices typically present at the user's and transmitted to the remote analysis site via a communication link.
  • the display provided for displaying the diagnostic data can be integrated into the vacuum device or arranged separately from the vacuum device and connected to the vacuum device via a local data connection.
  • the display provided for displaying the diagnostic data can, for example, also be assigned to a number of vacuum devices.
  • switching means can be provided, for example, via which the display can be selectively connected to the various vacuum devices.
  • the respective connection can in particular be wired and/or established by radio.
  • all of the diagnostic data can be displayed consecutively in a number of images on the display. It is advantageous here if the parts of the totality of diagnostic data that correspond to the individual images each represent an inherently consistent subset of the totality of diagnostic data provided for transmission to the remote analysis location.
  • each part of the set of diagnostic data is encoded and/or encrypted and/or compressed.
  • the diagnostic data in question can thus be transmitted in several successive steps in the form of data parts, e.g. partial data streams or images, via the communication connection in question to the remote analysis location.
  • all of the diagnostic data can be divided into more or fewer images, for example, which can be photographed manually or filmed automatically one after the other from the display.
  • a display can be triggered, for example, by a corresponding control parameter within a user interface or user interface, whereupon the display changes accordingly for the period in which the diagnostic data or a data subset is displayed and, in deviation from the normal function, the corresponding diagnostic data can be read out and/or displayed and/or or spending represents.
  • the amount of data provided per display step or per individual unit of diagnostic data is limited, for example, by the number of information units that can be displayed, such as pixels, shades of gray, colors and/or the like.
  • a high-contrast dark/light bit pattern can be used in particular, which can be securely coded using known algorithms. Examples include the DataMatrix code and the PDF417 code, both of which are optoelectronically readable 2D codes consisting of bars or dots of different widths and gaps between them with the highest possible contrast.
  • the data is not only provided in one direction or one-dimensionally, but in the form of an area over two dimensions.
  • the data subsets to be transmitted via the communication connection to the remote analysis location each have an in represent a consistent subset of the entirety of diagnostic data to be transmitted. Partial handling, for example a partial view, of the data received at the remote analysis location is thus possible, particularly in the case of a piecemeal transmission of the entirety of diagnostic data, not according to the invention, for example in the form of partial data streams.
  • Partial handling for example a partial view, of the data received at the remote analysis location is thus possible, particularly in the case of a piecemeal transmission of the entirety of diagnostic data, not according to the invention, for example in the form of partial data streams.
  • an analysis unit with programming having a corresponding image recognition logic can be provided at the remote analysis location.
  • a suitable image recognition system can compensate for display errors and distortions caused by the user and encoded data can be extracted at least essentially automatically.
  • optical coding e.g. in the form of a two-dimensional bar or dot code, ensures maximum system security and data consistency, since no direct data connection to the vacuum device is required to transmit the data and there is also no return channel available, which would otherwise be used for a malicious attack could occur.
  • the integrity of a respective vacuum device is preserved to a much greater extent than in the previously known vacuum devices, for example, via a cable or radio-bound coupling with, for example, a Data carriers such as a USB stick, an analysis system such as a handheld device or any user device such as a tablet, mobile phone or PC must be connected, as these are already compromised and could therefore pose a threat to the vacuum device.
  • a Data carriers such as a USB stick
  • an analysis system such as a handheld device or any user device such as a tablet, mobile phone or PC must be connected, as these are already compromised and could therefore pose a threat to the vacuum device.
  • the invention can also be used by very data- and security-sensitive users who are forced to operate systems in a certified, secure manner and without external influences.
  • the invention also relates to a method for remote diagnosis of a vacuum device is, and a provision device, which is designed to provide the entirety of diagnostic data for transmission as a whole to the remote analysis site as a whole.
  • the method provides for the diagnostic data to be retrieved from the vacuum device by initiating the provision of the diagnostic data by means of the retrieval device, whereupon the diagnostic data are provided and transmitted to the remote analysis location as a whole, that the diagnostic data are analyzed at the remote analysis location, and that a diagnosis regarding the vacuum device is made.
  • the method provides for the diagnostic data to differ in terms of content and/or scope from operating data of the vacuum device provided for normal on-site operation.
  • the method can provide for the provision of all diagnostic data to be initiated upon request or automatically.
  • FIG. 1 shows a schematic representation of a conventional vacuum device 10 in the form of a vacuum pump according to the prior art, which is connected to a power supply 12 and includes an interface 14 to which a display 16 is connected and to which data can be analyzed on site or for a diagnosis of the vacuum device 10 on site via a service adapter 18 a service unit 20, here in the form of a portable computer, can be connected.
  • a conventional vacuum device 10 of this type as explained in the introductory part - the diagnostic data are displayed uncoded and must be queried individually and one after the other.
  • the diagnostic data is read by a user on site, e.g. visually with the eyes, photographed or filmed and then usually has to be noted on a piece of paper or the like so that it can then be discussed with the analyst who is sitting away or transmitted to the analyst based on the notes can become.
  • the problem here in practice is that the remote analyst does not have all the diagnostic data required for a reasonable error analysis, for example if the user on site only obtains the diagnostic data incompletely because he is overwhelmed with the situation, e.g. because he is not only familiar with the is not familiar with the data or functionalities of the vacuum device provided for normal operation on site or with obtaining the data required in the respective situation.
  • the 2 and 3 each show a schematic partial representation of exemplary embodiments of a vacuum device 22 according to the invention, which is a vacuum pump.
  • the vacuum device 22 comprises a device for generating a set of diagnostic data of the vacuum device 22, which are suitable for an analysis to be carried out at a remote analysis location and are different from operating data of the vacuum device 22 provided for normal operation on site. Furthermore, the vacuum device 22 comprises a retrieval device, by means of which provision of the entirety of diagnostic data can be initiated on a single request, and a provision device, which is designed to provide all of the diagnostic data for transmission to the remote analysis site.
  • the provision of the diagnostic data can be initiated, for example, by a user on site pressing a call-up button 34 provided on the vacuum device 22, here purely by way of example integrated into a row of a total of four control buttons, or applying a call-up signal to the vacuum device 22 via an interface, which e.g. can be done via a local system or machine control, in which the vacuum device 22 is integrated.
  • the button 34 or interface mentioned then represents the retrieval device or at least part of the retrieval device of the vacuum device 22 according to the invention.
  • a corresponding call symbol to be actuated by a user can also be provided on a display of the vacuum device 22, which is then designed as a touch screen.
  • the diagnostic data provided by a respective vacuum device 22 according to the invention can be transmitted via a communication link 24 to the remote analysis location, where they can be evaluated, for example, by means of an analysis unit 26 (cf. 3 ).
  • all of the diagnostic data is provided in optically encoded form, with the provision device in each case comprising a display 28 on which the diagnostic data are displayed in the form of a two-dimensional point code.
  • the display 28 can be integrated into the vacuum device 22 or arranged remotely and connected to the vacuum device 22 via a local data connection.
  • the display that is already provided in the vacuum pump can be used to display the diagnostic data.
  • the optically encoded diagnostic data shown on the display 28 can be transmitted by means of an optoelectronic unit 30 ( 3 ) are photographed or filmed from the display 28 and then transmitted via the communication link 24 to the remote analysis location or the analysis unit 26 provided there.
  • a conventional camera such as a digital camera integrated into a mobile phone can be used as the optoelectronic unit 30 .
  • the image or film recorded in this way can then be sent to the analysis location in a conventional manner, for example simply electronically via the Internet.
  • the remote analyst receives via email one or more images showing the display 28 of the vacuum tool 22 and the encoded diagnostic data displayed on the display 28, respectively. Encrypted transmission of the image or images is not necessary in this case, since each image already contains the diagnostic data in encoded form and thus in any form that can be securely encoded.
  • the entirety of the diagnostic data is stored consecutively in several images 32 1 - 32 n (cf. 3 ) can be displayed on the display 28. Is the totality of diagnostic data, as in 3 shown, can be displayed consecutively in a plurality of images 32 1 - 32 n on the display 28, the parts of the totality of diagnostic data corresponding to the individual images 32 1 - 32 n can each be a consistent subset of the totality of display diagnostic data.
  • the analysis unit 26 provided at the remote analysis location is provided with appropriate decoding and/or decompression means for decoding or decompression of the diagnostic data provided by the vacuum device 22 and transmitted via the communication link 24 .
  • switching means can be provided via which the display 28 can be selectively connected to the respectively desired vacuum device 22.
  • a corresponding sequential display of the individual images can be achieved, for example, by means of a corresponding control parameter of a user interface 32 1 - 32 n can be triggered and then the changeover to a normal playback function can be effected again.
  • the display 28 automatically reverts to the simple user or normal operating mode after a predefinable time, after the mains voltage has been switched off and on once or after any user input such as a keystroke or the like.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Apparatus For Radiation Diagnosis (AREA)

Claims (8)

  1. Pompe à vide, comportant
    un dispositif pour générer un ensemble de données de diagnostic de la pompe à vide (22), approprié pour une analyse à effectuer sur un site d'analyse distant,
    un dispositif d'appel permettant d'initier sur demande une mise à disposition de l'ensemble de données de diagnostic, et
    un dispositif de mise à disposition conçu pour mettre à disposition, sous forme d'ensemble, l'ensemble de données de diagnostic, afin de les transmettre sous forme d'ensemble au site d'analyse distant,
    le dispositif de mise à disposition comprenant un écran d'affichage (28) sur lequel les données de diagnostic peuvent être affichées, l'écran d'affichage (28) étant intégré dans la pompe à vide (22) ou étant disposé à distance de la pompe à vide (22) et connecté à la pompe à vide (22) via une connexion de données locale,
    caractérisée en ce que
    l'ensemble des données de diagnostic peut être mis à disposition sous forme optiquement codée et comprimée sur l'écran d'affichage (28), l'ensemble des données de diagnostic peut être mis à disposition sous une forme codée telle que l'ensemble des données de diagnostic peut être saisi indépendamment des fonctionnalités locales de la pompe à vide (22) prévues sur site pour le fonctionnement normal, et être transmis au site d'analyse distant via une connexion de communication (24), dépourvue de connexion de données directe à câble ou par radio vers la pompe à vide (22), et
    l'ensemble des données de diagnostic peut être affiché successivement en plusieurs images (321 - 32n) sur un écran d'affichage (28) de la pompe à vide (22), en particulier, les parties de l'ensemble des données de diagnostic correspondant aux images individuelles (321 - 32n) représentent chacune un sous-ensemble cohérent en soi de l'ensemble des données de diagnostic mis à disposition pour la transmission au site d'analyse distant.
  2. Pompe à vide (22) selon la revendication précédente,
    caractérisée en ce que
    les données de diagnostic sont différentes, en termes de contenu et/ou d'étendue, des données de fonctionnement de la pompe à vide (22) prévues sur site pour le fonctionnement normal.
  3. Pompe à vide (22) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la mise à disposition de l'ensemble des données de diagnostic peut être initiée sur demande ou automatiquement.
  4. Pompe à vide (22) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le dispositif de mise à disposition comprend des moyens de stockage pour stocker temporairement les données de diagnostic mises à disposition et devant être transmises au site d'analyse distant.
  5. Pompe à vide (22) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le dispositif d'appel comprend un dispositif d'actionnement (34) à actionner manuellement par un utilisateur sur la pompe à vide (22) et/ou au moins une partie d'une interface de la pompe à vide (22) susceptible d'être pilotée ou sollicitée au moyen d'un dispositif externe.
  6. Procédé de diagnostic à distance d'une pompe à vide (22), la pompe à vide (22) comprenant :
    - un dispositif pour générer un ensemble de données de diagnostic de la pompe à vide (22), approprié pour une analyse à effectuer sur un site d'analyse distant,
    - un dispositif d'appel permettant d'initier une mise à disposition de l'ensemble de données de diagnostic, et
    - un dispositif de mise à disposition conçu pour mettre à disposition, sous forme d'ensemble, l'ensemble de données de diagnostic, afin de les transmettre sous forme d'ensemble au site d'analyse distant, et comprenant un écran d'affichage (28) sur lequel les données de diagnostic sont affichées, l'écran d'affichage (28) étant intégré dans la pompe à vide (22) ou étant disposé à distance de la pompe à vide (22) et connecté à la pompe à vide (22) via une connexion de données locale,
    procédé dans lequel
    - les données de diagnostic sont appelées à partir de la pompe à vide (22) en initiant la mise à disposition des données de diagnostic au moyen du dispositif d'appel, suite à quoi
    - l'ensemble des données de diagnostic est mis à disposition sous forme optiquement codée et comprimée sur l'écran d'affichage (28),
    - l'ensemble des données de diagnostic est mis à disposition sous une forme codée telle que l'ensemble des données de diagnostic peut être saisi indépendamment des fonctionnalités locales de la pompe à vide (22) prévues sur site pour le fonctionnement normal, et être transmis au site d'analyse distant, l'ensemble des données de diagnostic étant affiché successivement en plusieurs images (321 - 32n) sur un écran d'affichage (28) de la pompe à vide (22), en particulier, les parties de l'ensemble des données de diagnostic correspondant aux images individuelles (321 - 32n) représentent chacune un sous-ensemble cohérent en soi de l'ensemble des données de diagnostic mis à disposition pour la transmission au site d'analyse distant,
    - l'ensemble des données de diagnostic est saisi en particulier au moyen d'une unité optoélectronique (30) et est transmis au site d'analyse distant via une connexion de communication (24), dépourvue de connexion de données directe à câble ou par radio vers la pompe à vide (22),
    - les données de diagnostic sont analysées au site d'analyse distant, et
    - un diagnostic concernant la pompe à vide (22) est établi.
  7. Procédé selon la revendication 6,
    caractérisé en ce que
    les données de diagnostic sont différentes, en termes de contenu et/ou d'étendue, des données de fonctionnement de la pompe à vide (22) prévues pour le fonctionnement normal sur site.
  8. Procédé selon la revendication 6 ou 7,
    caractérisé en ce que
    la mise à disposition de l'ensemble de données de diagnostic est initiée sur demande ou automatiquement.
EP15168485.9A 2015-05-20 2015-05-20 Télé-diagnostic d'appareils sous vide Active EP3096021B1 (fr)

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Application Number Priority Date Filing Date Title
EP15168485.9A EP3096021B1 (fr) 2015-05-20 2015-05-20 Télé-diagnostic d'appareils sous vide
JP2016096837A JP2017002898A (ja) 2015-05-20 2016-05-13 真空装置の遠隔診断

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Application Number Priority Date Filing Date Title
EP15168485.9A EP3096021B1 (fr) 2015-05-20 2015-05-20 Télé-diagnostic d'appareils sous vide

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EP3096021A1 EP3096021A1 (fr) 2016-11-23
EP3096021B1 true EP3096021B1 (fr) 2022-07-20

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DE102017115847A1 (de) * 2017-07-14 2019-01-17 Vorwerk & Co. Interholding Gmbh Verfahren zum Betrieb eines sich selbsttätig fortbewegenden Roboters
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WO2015037333A1 (fr) 2013-09-10 2015-03-19 日立アプライアンス株式会社 Système de diagnostic de climatiseur, climatiseur et terminal de communication mobile
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