EP1936198A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP1936198A2
EP1936198A2 EP07022560A EP07022560A EP1936198A2 EP 1936198 A2 EP1936198 A2 EP 1936198A2 EP 07022560 A EP07022560 A EP 07022560A EP 07022560 A EP07022560 A EP 07022560A EP 1936198 A2 EP1936198 A2 EP 1936198A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
section
housing
pumping system
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07022560A
Other languages
German (de)
English (en)
Other versions
EP1936198A3 (fr
EP1936198B1 (fr
Inventor
Jürgen Metzger
Stefan Sänger
Jürgen Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1936198A2 publication Critical patent/EP1936198A2/fr
Publication of EP1936198A3 publication Critical patent/EP1936198A3/fr
Application granted granted Critical
Publication of EP1936198B1 publication Critical patent/EP1936198B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/803—Electric connectors or cables; Fittings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine

Definitions

  • the invention relates to a vacuum pump for generating coarse or fine vacuum with motor, with control electronics, with gas inlet and gas outlet, and pumping system.
  • a common in the prior art design for vacuum pumps for the production of coarse and fine vacuum shows the EP-A 1 591 663 the example of an oil-sealed rotary vane vacuum pump.
  • This vacuum pump has an asynchronous motor with fan and a control electronics housed in a box. These components together form the drive of the vacuum pump and are flanged to their housing.
  • the necessary for the generation of the vacuum components are provided within the housing of the vacuum pump.
  • the rotary vane vacuum pump this is in particular the often referred to as a pumping system component, which includes shaft, rotor, stator and slide and is surrounded by an oil bath located in the housing.
  • the housing of the vacuum pump generates a large part of the heat.
  • the cooling takes place exclusively by the fan, which sits on the motor shaft and is located at the pumping system opposite end of the vacuum pump. This results in a difficult heat balance as a disadvantage of this design.
  • a series includes several models, each of which differs in terms of pumping speed and / or final pressure. This results in different components in the drive, on the housing and in its interior for each model of the series. This ensures high production costs.
  • the vacuum pump according to the invention has a housing which has at least two sections. In a control section, the control electronics and in a pump section, the pumping system is arranged. As a result, the functional units, although placed in a housing, are separated from each other. As a result, at the same time a separation of the working at different temperatures components of the vacuum pump. As a result, the heat balance is significantly improved. At the same time, this measure has a cost-reducing effect because the sections within a series can be used multiple times and do not have to be adapted to every model in the series.
  • the heat balance is further improved by providing a seal between the control section and the adjacent section. This seal is used as a barrier to heat transfer from section to section.
  • This advantage can be further deepened by arranging a seal between the peripheral section and the intermediate section.
  • peripheral section, intermediate section and control section are arranged in this order in the housing of the vacuum pump. This results in a thermal separation of the cool control section from the peripheral section, whereby the electronic components are protected within the control section from aging too fast.
  • the pumping system includes a shaft which eccentrically passes through a cylindrical bore located in the housing of the pumping system, wherein the shaft has a pumping action-achieving slide, and that the pumping system is a lubricant for sealing and lubricating the slider contains.
  • the first figure shows a vacuum pump, which is constructed of four sections and surrounded by a hood 1.
  • This hood is shown in the figure part a) in the disassembled state, while it is mounted in the imaging part b) on the vacuum pump and surrounds a part of the housing of this vacuum pump.
  • the vacuum pump itself rests on a foot 10.
  • the sections of the vacuum pump contain different functional units.
  • the control section 2 contains the control electronics, which processes the mains voltage for the energization of the coils of the drive.
  • a fan 6 is arranged, which sucks in air and promotes in the space between the housing provided on the cooling ribs 8, whereby a cooling effect is achieved.
  • the suction and conveying effect of the fan is illustrated by the dashed arrows.
  • a peripheral section 4 has the gas connections, ie gas inlet 9 and outlet. At the periphery of the foot 10 is also arranged. This has means, such as elastomer body, with which the vibration transmission between the vacuum pump and the ground is reduced.
  • those components are arranged, with which the gas is compressed so far that it can be ejected against the atmosphere.
  • These four sections are arranged axially one after the other with the intermediate section between the peripheral section and the control section. On the opposite side of the intermediate portion of the peripheral portion of the pump portion is provided. This results in a thermal separation of the cool control section from the peripheral section, whereby the electronic components are protected within the control section from aging too fast.
  • the sections of the vacuum pump are at least partially surrounded by the hood 1. It is designed in the example so that it covers the lower part of the vacuum pump. Below here refers to the direction in which the foot of the vacuum pump is mounted. While it is shaped so that the control and intermediate sections are completely concealed, it is less high in the area of the pump section so that it covers only the lower part.
  • cooling fins 8 are provided, which may also be present in the upper part.
  • the hood covers at least a portion of the cooling fins, so that channels are formed, which are limited by hood, housing and cooling fins. It also hides the fan. So that this air can suck in and then convey into the channels, the hood has an opening. In the example, this is designed as a plurality of ventilation slots 7. The number and shape of the air vents may vary depending on the vacuum pump and the gas flow requirements of the fan.
  • FIG. 2 shows in a vertical section through the vacuum pump the structure of control and intermediate section.
  • the control section 2 has a closed housing which has cooling fins 11. This is cooled by free convection.
  • electronic components are arranged, which form a control electronics 12 and for example, mounted on a circuit board. These electronic components transform a supply voltage such that voltages and currents can be applied in a suitable form to the coils of the drive in order to subsequently achieve a rotation of a drive shaft.
  • the supply voltage can be a standard mains voltage such as 220 V with 50 Hz or one of the common industrial voltages such as 48 V.
  • Such components of the control electronics which generate heat to a particular extent, may be arranged such that they touch the inner wall of the housing of the control section. This is preferably realized in the region of the cooling fins 11. It is also conceivable to embed the control electronics completely or partially in a potting compound. This also increases the heat dissipation. In addition, this achieves a higher mechanical stability.
  • the intermediate section 3 has several components in its housing.
  • a switch 15 is used to turn on and off the vacuum pump. Other switches can be arranged there, with which, for example, a standby circuit or a speed position can be realized.
  • a socket 16 to which the power supply is connected. This voltage is given on the one hand to the control electronics, on the other hand to a small power supply 17, which supplies via auxiliary electrical line connections an auxiliary electronics 18 with operating voltage. This is used to implement the switching state of the switch 15 in a control signal, which is also given via suitable electrical line connections to the control electronics.
  • the auxiliary electronics also has means by which the fan motor 6a is supplied with voltage and switched on / off.
  • auxiliary electronics which includes, for example, means for operating a fieldbus or serial interface and the like.
  • Condition information such as "pump in operation”, current speed or activated standby of the vacuum pump can be queried by external control means via this interface, so that the vacuum pump has capabilities for diagnosis and remote communication.
  • a seal 14 is provided between the housing of the intermediate portion 3 and the control portion 2. On the one hand, this ensures a seal of the interior against moisture and dust, on the other hand, it represents a thermal barrier, so that the heat input into the control section from the direction of the intermediate section is made more difficult. Such a seal is also provided between the intermediate portion and the peripheral portion 4, so that tightness and difficult heat transfer are also provided here.
  • the fan which has the fan motor and a fan blade 6b. Dashed arrows illustrate the gas flow generated by the fan: air is drawn in and conveyed between the cooling fins 8.
  • Cooling fins 11 can be seen in section. They are oriented with their longitudinal axis in the direction of gravity to optimize the free convection.
  • the cooling fins of the control section are not covered by the hood 1, so as not to hinder the air flow of the free convection.
  • electrical supply lines go through a cable channel provided in the intermediate section to the peripheral section 4. This cable channel is protected at both ends by channel seals 21 and 22 against moisture and heat transfer.
  • a cable feedthrough 27 is provided.
  • the coils 26 of the drive are arranged.
  • the energization of these coils is effected by the control electronics 12.
  • a rotationally symmetrical separating element 23 is provided inside the coils and separates them hermetically from the interior of the separating element.
  • dashed arrows illustrate the gas flow generated by the fan.
  • the suction takes place through the ventilation slots 7, the gas is then conveyed in the direction of the peripheral portion.
  • such ventilation slots are also arranged in the bottom of the vacuum pump. The foot of the vacuum pump then has the task of creating a distance through which air can be sucked.
  • Figure 3 illustrates that the invention is not limited to a fan alone.
  • a plurality of fans may be provided.
  • two fans are provided in the lower part of the intermediate section, each of them conveying cooling air into the channels mounted on either side of the vacuum pump, in particular the peripheral and pumping sections.
  • Other fans may be arranged to assist in cooling the cooling source to supply heat sources from the vacuum pump with cooling air.
  • a section through the peripheral and the pumping section 5 of the vacuum pump shows Figure 4 ,
  • the example shows a single-stage, lubricant-sealed rotary vane vacuum pump.
  • This has a pumping system 30 in the pump section. This is connected on one end face over a large area with the peripheral section, so that there is a good heat transfer there.
  • the housing of the pump section 5 is connected with good thermal conductivity with the peripheral portion, so that the heat is transferred from the peripheral portion to a high surface area body.
  • a provided in this pumping system cylindrical bore is penetrated by the shaft 24 eccentric.
  • the shaft can be made in one or more pieces. It is rotatably supported by a first sliding bearing 31 and a second sliding bearing 32.
  • lubricant derived from the lubricant reservoir 35 surrounding the pumping system.
  • the lubricant usually an oil, is used in addition to the bearing lubrication for lubrication and sealing of the slide.
  • Sliders 33 run around in the cylindrical bore, the scoop space 34 being formed between the sliders and the wall of the cylindrical bore. Gas passes through the gas inlet 9 in this pump chamber.
  • permanent magnets 25 are fixed, which cooperate with the coils 26 provided in the peripheral portion, whereby the shaft is rotated. Together, permanent magnets and coils form an electric motor.
  • This example is a brushless DC motor.
  • control section can be used simultaneously for a whole series. It is even conceivable to use it for series with pump sections that use different pumping principles. As a result, enormous costs can be saved in the production.
  • the invention is not limited to this type of drive.
  • the pump section is in Figure 5 shown in section along AA '. It is clarified in this illustration, the eccentric position of the shaft 24 and the position of the slide 33. Between these springs not shown are provided.
  • the housing of the pump section has cooling ribs 8.
  • the hood 1 covers the cooling fins, whereby flow channels 42 arise. Through these flow channels, which can be interconnected, the gas supplied by the fan flows, absorbs heat from the housing and transports them in the sequence away from the case. This heat is generated in the pumping system 30 and is discharged via the lubricant reservoir to the housing.
  • the hood is designed so that the channels are open at their end. This is easiest to accomplish, in that the hood does not cover the pump section side end face of the vacuum pump.
  • an intermediate member 40 is arranged, which has, for example, high elastomer components. This provides both a thermal barrier and a reduction in vibration transfer from the pump housing to the hood. Fasteners, such as screws 41, fix the hood.
  • the vacuum pump shown in this embodiment has a favorable heat balance.
  • a first strong heat source is due to the heat of compression in the pump section 5.
  • Another strong heat source is the peripheral portion, since there the coils of the drive are arranged, in which power loss is converted into heat.
  • heat is introduced into the peripheral section via the end face of the pumping system 30, since at this point the pumping system and the peripheral section are in contact with each other over a large area.
  • These heat sources are kept away from the control section by the intermediate section. Due to the order of the sections, the distance is maximized.
  • the thermal resistances of the seals which are provided between the intermediate section and its neighboring sections. These passive measures cause a very favorable heat balance. To these is added the active cooling by the fan (s).
  • This embodiment presents an oil-sealed rotary vane vacuum pump. It is conceivable, however, to adapt the invention to other vacuum pumps for generating coarse or fine vacuum by replacing the pump section. In this pump section then other pumping principles are used. Conceivable pumping principles are, for example, dry reciprocating compressors, dry rotary vane or barrier vane pumps.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP07022560.2A 2006-12-13 2007-11-21 Pompe à vide Not-in-force EP1936198B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006058843A DE102006058843A1 (de) 2006-12-13 2006-12-13 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP1936198A2 true EP1936198A2 (fr) 2008-06-25
EP1936198A3 EP1936198A3 (fr) 2014-01-08
EP1936198B1 EP1936198B1 (fr) 2018-01-24

Family

ID=39198215

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07022560.2A Not-in-force EP1936198B1 (fr) 2006-12-13 2007-11-21 Pompe à vide

Country Status (4)

Country Link
US (1) US8303269B2 (fr)
EP (1) EP1936198B1 (fr)
JP (1) JP2008151123A (fr)
DE (1) DE102006058843A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010142631A3 (fr) * 2009-06-09 2011-07-28 Oerlikon Leybold Vacuum Gmbh Pompe à vide
EP2853748A4 (fr) * 2012-05-22 2016-06-15 Taiho Kogyo Co Ltd Pompe à vide
EP3096021A1 (fr) * 2015-05-20 2016-11-23 Pfeiffer Vacuum Gmbh Télé-diagnostic d'appareils sous vide

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007059938A1 (de) * 2007-12-12 2009-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb
DE202013008468U1 (de) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpengehäuse
DE102016102954A1 (de) 2016-02-19 2017-08-24 Multivac Sepp Haggenmüller Se & Co. Kg Vakuumpumpe
IT202000004513A1 (it) * 2020-03-04 2021-09-04 Marziano Salvaro Pompa per il vuoto, particolarmente per apparecchiature per la conservazione di cibi.
EP4206474A1 (fr) * 2021-12-30 2023-07-05 Pfeiffer Vacuum Technology AG Pompe à vide
EP4043733B1 (fr) * 2022-06-17 2024-03-27 Pfeiffer Vacuum Technology AG Pompe à vide avec ventilateurs commandables séparément

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1591663A1 (fr) 2004-04-30 2005-11-02 VARIAN S.p.A. Pompe à vide à palettes rendue étanche par l'huile et son procédé de fabrication

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JP4343712B2 (ja) * 2004-01-14 2009-10-14 株式会社日立製作所 往復動型圧縮機
DE102004024554B4 (de) * 2004-05-18 2018-01-25 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe
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EP1591663A1 (fr) 2004-04-30 2005-11-02 VARIAN S.p.A. Pompe à vide à palettes rendue étanche par l'huile et son procédé de fabrication

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010142631A3 (fr) * 2009-06-09 2011-07-28 Oerlikon Leybold Vacuum Gmbh Pompe à vide
US9234519B2 (en) 2009-06-09 2016-01-12 Oerlikon Leybold Vacuum Gmbh Vacuum pump
EP2853748A4 (fr) * 2012-05-22 2016-06-15 Taiho Kogyo Co Ltd Pompe à vide
EP3096021A1 (fr) * 2015-05-20 2016-11-23 Pfeiffer Vacuum Gmbh Télé-diagnostic d'appareils sous vide
EP3096021B1 (fr) 2015-05-20 2022-07-20 Pfeiffer Vacuum Gmbh Télé-diagnostic d'appareils sous vide

Also Published As

Publication number Publication date
EP1936198A3 (fr) 2014-01-08
EP1936198B1 (fr) 2018-01-24
US20080145214A1 (en) 2008-06-19
JP2008151123A (ja) 2008-07-03
DE102006058843A1 (de) 2008-06-19
US8303269B2 (en) 2012-11-06

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