EP4206474A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP4206474A1
EP4206474A1 EP21218345.3A EP21218345A EP4206474A1 EP 4206474 A1 EP4206474 A1 EP 4206474A1 EP 21218345 A EP21218345 A EP 21218345A EP 4206474 A1 EP4206474 A1 EP 4206474A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
cooling
housing
rotor
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21218345.3A
Other languages
German (de)
English (en)
Inventor
Heiko BRÜCK
Martin Lohse
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP21218345.3A priority Critical patent/EP4206474A1/fr
Publication of EP4206474A1 publication Critical patent/EP4206474A1/fr
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5826—Cooling at least part of the working fluid in a heat exchanger
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/20—Heat transfer, e.g. cooling
    • F05D2260/221—Improvement of heat transfer
    • F05D2260/2214—Improvement of heat transfer by increasing the heat transfer surface
    • F05D2260/22141—Improvement of heat transfer by increasing the heat transfer surface using fins or ribs

Definitions

  • the invention relates to a vacuum pump, in particular a turbomolecular vacuum pump, with a housing in which a rotor rotatable about an axis of rotation and a drive motor for driving the rotor are arranged and which has an outside forming at least part of the pump exterior.
  • Such a vacuum pump is known in principle and is used, for example, in a vacuum system for evacuating a recipient.
  • heat can arise, for example due to eddy currents induced in the rotor, but also due to the drive motor, electrical components or friction in a bearing used to mount the rotor, such as a roller bearing.
  • the heat may adversely affect not only the operability of the vacuum pump, but also the vacuum system including the vacuum pump or a work process performed with the vacuum system.
  • a known possibility for dissipating the heat is to provide straight cooling ribs or cooling fins on the outside of the housing.
  • the heat can be removed from the cooling fins in a passive manner by convection or radiation cooling, or in an active manner using a fan that generates an air flow.
  • One object of the invention is therefore to provide a vacuum pump which overcomes the disadvantages mentioned and which, in particular, enables simpler and better heat dissipation.
  • a vacuum pump having the features of claim 1 and in particular in that at least one cooling arrangement is provided on the outside of the housing, which comprises a multiplicity of rod-shaped, outwardly protruding cooling elements and/or which has a multiplicity of curved, outside protruding cooling fins includes.
  • the invention is based on the idea of using a multiplicity of rod-shaped, outwardly protruding cooling elements and/or a multiplicity of curved, outwardly protruding cooling fins instead of the straight cooling fins or similar structures previously used to dissipate the heat generated during operation of the vacuum pump.
  • the cooling fins can be better adapted to the surface design of the vacuum pump housing.
  • the air flow can thus be guided better along the surface of the housing, which means that the heat can be better dissipated from the vacuum pump.
  • the rod-shaped cooling elements due to their rod shape, the rod-shaped cooling elements have a larger surface-to-volume ratio compared to the cooling ribs.
  • cooling rods Due to the rod-shaped design of the cooling elements, also known as cooling rods, open, interconnected intermediate spaces are formed between the individual cooling rods, which can serve as passages for an air flow. This allows the air to flow past the cooling rods almost unhindered and in all directions.
  • the cooling rods thus ensure that an air flow is divided and distributed essentially evenly over the cooling arrangement.
  • the cooling rods thus increase the total surface area of the cooling arrangement that can be flown against, as a result of which more heat can be dissipated.
  • the airflow can escape from the cooling arrangement in a direction-independent manner, i.e. in different directions.
  • the cooling arrangement provided with the cooling rods thus enables a practically isotropic heat dissipation.
  • the cooling arrangement can also have one or more guide elements, for example in the form of conventional cooling ribs, for targeted guidance of the air, in addition to the cooling rods. It is also possible for a plurality of cooling rods to be connected to one another in the area of their free ends and in this way to form a wall with openings, which also allows flow through the cooling arrangement in many directions.
  • An air flow can be generated, for example, by means of a fan, with the cooling arrangement being arranged on the suction or pressure side.
  • a supply air duct directed towards the cooling arrangement can be provided for the purposeful supply of the air flow.
  • an exhaust air duct leading away from the cooling arrangement can be provided for the purposeful removal of the air heated at the cooling arrangement.
  • the exhaust air duct can be used in particular to generate an air flow using a chimney effect.
  • the cooling effect can be optimized, the inlet and outlet positions of the air can be specified and the air quantities can be regulated, directed and distributed in a controlled manner.
  • the uniform distribution of air along the cooling arrangement also allows a largely free choice of the shape of the cooling arrangement.
  • the shape of the cooling arrangement can therefore be optimally adapted to the contour of the outside of the vacuum pump, so that free areas on the outside of the vacuum pump can be better used for cooling purposes.
  • the rod-shaped cooling elements can have a constant cross section.
  • the cross section of the rod-shaped cooling elements it is also possible for the cross section of the rod-shaped cooling elements to narrow or enlarge towards the outside.
  • configurations are also possible in which the cross section of the rod-shaped cooling elements changes continuously or discontinuously.
  • the rod-shaped cooling elements can have any base surface shape.
  • the rod-shaped cooling elements can have any desired polygonal base area shape. This can be e.g. oval, triangular or rectangular.
  • the rod-shaped cooling elements particularly preferably have a round, in particular an oval or circular, base area.
  • All of the cooling elements are preferably designed in the same way with regard to their cross section and their base area. However, it is also possible for the rod-shaped cooling elements to be configured differently, at least in part.
  • the rod-shaped cooling elements are preferably arranged regularly and form a regular grid pattern.
  • the rod-shaped cooling elements can be arranged in rows and columns. However, the rod-shaped cooling elements can also be arranged in rows offset from one another.
  • the rod-shaped cooling elements can also be arranged at least in sections along at least one circular line.
  • several rod-shaped cooling elements can be arranged along different circular lines, each with different radii.
  • the rod-shaped cooling elements may also be arranged in rows or generally in patterns which extend radially or spirally outwardly from a point or are generally centered towards a point.
  • the rod-shaped cooling elements can also be arranged irregularly, for example according to a random distribution.
  • the cooling arrangement can consist at least partially of materials whose thermal conductivity is at least 100 W/(m ⁇ K), preferably at least 200 W/(m ⁇ K) and particularly preferably at least 300 W/(m ⁇ K).
  • Thermally conductive plastics, metals or metal alloys can be used as preferred materials.
  • metals aluminum and copper in particular stand out due to their high thermal conductivity. Alloys made of aluminum and/or copper are therefore particularly suitable as exemplary metal alloys.
  • the cooling arrangement can also have, at least in sections, a surface that increases heat radiation, for example by the surface of the cooling arrangement having a suitable structure. Additionally or alternatively, the cooling arrangement can also have a surface coating that increases heat radiation. In particular, the cooling arrangement can have a surface or surface coating that is blackened and/or anodized at least in sections.
  • the cooling arrangement is preferably provided on a section of the housing which accommodates a heat-generating component of the vacuum pump.
  • the heat-generating component can be the rotor, the drive motor and/or a bearing, in particular a roller bearing or a magnetic bearing, for mounting the rotor.
  • the section accommodating the heat-generating component can form a lower part of the housing, which has a part facing away from an inlet of the pump End portion of the rotor receives. The lower part preferably has an outlet of the pump.
  • the cooling arrangement can also be provided on a section of the housing which is heated by an external heat source separate from the vacuum pump, for example by heat generation from the vacuum system or a heating element.
  • the cooling arrangement preferably has a base body from which the cooling elements protrude.
  • the cooling elements can be designed in one piece with the base body. However, it is also possible for the cooling elements to be provided as separate parts which are attached individually or in groups to the base body. As a result, the cooling elements can be specifically adapted to the specific characteristics of the vacuum pump. For example, materials with particularly high thermal conductivity can be used where a particularly high level of heat generation is to be expected.
  • the base body can be formed by a section of the housing.
  • the cooling arrangement is part of the housing, in particular the cooling arrangement can form a wall of the housing.
  • the base body can also be designed as a component that is separate from the housing.
  • the base body can be made from a different material than the housing.
  • the base body can be made of a material with higher thermal conductivity are manufactured so that the heat can be dissipated particularly efficiently.
  • the base body which is designed separately from the housing, is preferably attached to the housing by means of a fastening means.
  • the base body can be connected to the housing by means of a thermally conductive joining agent, such as a thermally conductive adhesive.
  • a thermally conductive paste or another intermediate material suitable for thermal coupling can also be provided.
  • the cooling arrangement preferably has a base area on a side facing away from the cooling elements, which is designed to complement a surface design of the outside of the housing, at least in sections. As a result, the cooling arrangement can to a certain extent cling to the outside of the housing over its base area.
  • a base area of the cooling arrangement has a recess which is at least partially complementary to an elevation or depression formed on the outside of the housing.
  • a border that laterally delimits the cooling arrangement can be designed to be complementary to the elevation or depression.
  • the border of the cooling arrangement can be designed to be complementary to a base area of the elevation or depression, at least in sections.
  • the cooling arrangement can be optimally adapted to the geometric conditions on the outside of the housing.
  • the base body can have at least one through-opening.
  • the through-opening can be designed to complement an elevation or depression on the outside of the housing, so that the base body of the cooling arrangement surrounds the elevation or depression.
  • a functional unit of the vacuum pump e.g. a blower, can be provided in the passage opening.
  • the through-opening can also serve to receive a fastening means for fastening the cooling arrangement to the housing of the vacuum pump.
  • FIGS. 1 to 5 show a known vacuum pump in the form of a turbomolecular vacuum pump 111, which according to the in connection with Figures 6 to 8 described vacuum pumps 111 according to the invention can be formed. Conversely, the following statements apply in connection with the Figures 1 to 5 also for the vacuum pumps according to the invention Figures 6 to 8 .
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms when the vacuum pump is aligned according to FIG 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally.
  • electrical and / or electronic components of the vacuum pump 111 are housed, for example, for operating a arranged in the vacuum pump drive motor 125, which here as Electric motor 125 is formed (see also 3 ).
  • Several connections 127 for accessories are provided on the electronics housing 123 .
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection through which flushing gas to protect the electric motor 125 (see e.g 3 ) before the pumped gas in the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, can be admitted.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be conducted into the vacuum pump for cooling purposes. Additionally or alternatively, air cooling can be provided, as in connection with FIG Figures 6 to 8 will be explained in more detail.
  • the lower side 141 of the vacuum pump 111 can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141 .
  • a cooling arrangement 225 can also be provided on the underside 141 of the vacuum pump 111 for cooling the vacuum pump 111 at least in sections.
  • the vacuum pump 111 is then preferably attached to a recipient via the inlet flange 113 and can thus be operated so to speak hanging.
  • the vacuum pump 111 can be designed so that it can also be put into operation if it is oriented in a different way than in 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 cannot be arranged facing downwards but to the side or directed upwards. In principle, any angles are possible.
  • various screws 143 are also arranged, by means of which components of the vacuum pump that are not further specified here are fastened to one another.
  • a bearing cap 145 is attached to the underside 141 .
  • Attachment bores 147 are also arranged on the underside 141, via which the pump 111 can be attached to a support surface, for example. This is not possible with other existing turbomolecular vacuum pumps (not shown), which in particular are larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant fed in and out via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about an axis of rotation 151 .
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pumping stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator discs 157 are held at a desired axial distance from one another by spacer rings 159 .
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes. There are other turbomolecular vacuum pumps (not shown) that do not have Holweck pumping stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 in the shape of a cylinder jacket, fastened to the rotor hub 161 and carried by it, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction. Also provided are two cylinder jacket-shaped Holweck stator sleeves 167, 169, which are also oriented coaxially with respect to the axis of rotation 151 and are nested in one another when viewed in the radial direction.
  • the active pumping surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radially inner surface of the outer Holweck stator sleeve 167 faces the radially outer surface of the outer Holweck rotor sleeve 163 to form a radial Holweck gap 171 and forms with it the subsequent one of the turbomolecular pumps first Holweck pump stage.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and therewith forms a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and therewith forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can be provided at the lower end of the radially inner Holweck rotor sleeve 165 .
  • the above-mentioned pumping-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running in a spiral shape around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Advance vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided for the rotatable mounting of the rotor shaft 153 .
  • injection nut 185 In the area of the roller bearing 181 there is a conical injection nut 185 on the rotor shaft 153 with an outer diameter which increases towards the roller bearing 181 intended.
  • the injection nut 185 is in sliding contact with at least one stripper of an operating fluid store.
  • an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the resource reservoir comprises a plurality of absorbent disks 187 stacked on top of one another, which are impregnated with a resource for the roller bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid reservoir via the scraper to the rotating spray nut 185 and, as a result of the centrifugal force, is conveyed along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it e.g. fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid reservoir are surrounded by a trough-shaped insert 189 and the bearing cover 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, which each comprise a ring stack of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the ring magnets 195 on the rotor side being arranged radially on the outside and the ring magnets 197 on the stator side being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 produces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the ring magnets 195 on the rotor side are carried by a carrier section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the ring magnets 197 on the stator side are carried by a support portion 203 on the stator side, which extends through extends through ring magnets 197 and is suspended from radial struts 205 of housing 119.
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201 .
  • the ring magnets 197 on the stator side are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the support section 203 and a fastening ring 211 connected to the support section 203 .
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnet 197 .
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages in the event of an excessive radial deflection of the rotor 149 relative to the stator, in order to create a radial stop for the rotor 149 to form, so that a collision of the rotor-side structures is prevented with the stator-side structures.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough so that the backup bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, whose rotor shaft 153 extends through the motor stator 217 therethrough.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217 .
  • an intermediate space 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement can affect one another magnetically in order to transmit the drive torque.
  • the motor stator 217 is fixed in the housing inside the motor room 137 provided for the electric motor 125 .
  • a sealing gas which is also referred to as flushing gas and which can be air or nitrogen, for example, can reach the engine compartment 137 via the sealing gas connection 135 .
  • the sealing gas can protect the electric motor 125 from process gas, e.g. from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.
  • a labyrinth seal 223, known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the motor compartment 137, in particular in order to achieve better sealing of the motor compartment 217 in relation to the Holweck pump stages located radially outside.
  • the vacuum pumps 111 shown have in common that they each have at least one cooling arrangement 225 for cooling the vacuum pump 111 on the outside of their housing 119 .
  • the cooling arrangements 225 each comprise a base body 227 and a multiplicity of rod-shaped cooling elements 229 protruding outwards from the base body 227, which are also referred to as cooling rods 229 and whose configuration will be explained in more detail elsewhere.
  • the cooling arrangements 225 are each provided on a portion of the housing 119 which accommodates a heat-generating component. More precisely, those in the Figures 6 to 8 The cooling arrangements 225 shown are each arranged on the lower part 121, which accommodates the roller bearing 181 and the drive motor 125 as heat-generating components (cf. also 3 ). In the lower part 121 is corresponding 3 an end section of the rotor 149 which faces away from the pump inlet 115 is also included, which can also represent a heat-generating component in the presence of a magnetic field due to the eddy currents induced in the rotating rotor 149 by the magnetic field.
  • the respective cooling arrangements 225 can also be attached to the housing 119 at a different point.
  • at least one cooling arrangement 225 can be provided on the electronics housing 123 .
  • the cooling arrangements 225 shown are each designed as a separately designed component and are fastened to the respective lower part 121 by fastening means, for example by screwing. In principle, however, the cooling arrangements 225 can also be fastened to the lower parts 121 in a different way, for example by means of a thermally conductive adhesive.
  • the cooling rods 229 each have a circular cross section and extend outwards from the base body 227 along their length with a constant cross section.
  • the cooling rods 229 are formed in one piece with the base body 227 .
  • the cooling sticks 229 can also be used as parts that are separate from the base body 227 and attached to the base body 227 individually or in groups.
  • the vacuum pump 111 shown has two cooling arrangements 225 on its lower part 121 .
  • a first cooling arrangement 225 is arranged on the underside 141 of the lower part 121 and a second cooling arrangement 225 is arranged on a side surface 231 of the lower part 121.
  • Heat is actively dissipated from the lower cooling arrangement 225 by means of an air flow (arrow K) generated by a fan (not shown), which hits the base body 227 and is deflected to all sides (indicated by the arrows W) via the spaces formed between the cooling rods 229 becomes.
  • a supply air duct 233 directed towards the lower cooling arrangement 225 and opening out laterally at the cooling arrangement 225 is provided below the electronics housing 123 .
  • An air flow can reach the lower cooling arrangement 225 in the direction of the arrow K via the air supply duct 233 .
  • the air flow is aligned transversely to the longitudinal extent of the individual cooling bars 229 of the lower cooling arrangement 225 .
  • an exhaust air duct 235 is provided, starting from one of the other sides of the lower cooling arrangement 225 and initially directed away from the cooling arrangement 225 to the side and then directed upwards. Air can therefore in one direction flow in and flow out in a direction perpendicular thereto, which would not be possible with elongate cooling elements in the form of ribs.
  • the vacuum pump 111 shown can be cooled both passively using the chimney effect and actively by using a fan.
  • the exhaust air duct 235 which is aligned parallel to the longitudinal extension of the vacuum pump 111, is also directed upwards.
  • the cooling arrangement 225 heats up and consequently also the air in the spaces between the cooling rods 229, which thus rises in the direction of the arrow W via the exhaust air duct 235, so that cooler air via the air supply duct 233 to the Cooling assembly 225 can flow.
  • the heat generated by the vacuum pump 111 is dissipated via the cooling arrangement 225 using the chimney effect. This effect can be intensified by a fan that supplies air to the cooling arrangement 225 via the air inlet duct 233 .
  • FIG. 8 shows another embodiment of a base 121 of a vacuum pump according to the invention.
  • the underside 141 of the lower part 121 is not flat, but has an elevation 237 in the area of the bearing cap 145 or is provided with a set-back area around the bearing cap 145 .
  • a crescent-shaped cooling arrangement 225 is provided around the bearing cap 145 , which in this way is adapted to the shape of the underside 141 of the lower part 121 .
  • An air flow (arrow K) supplied to the cooling arrangement 225 from the side can be deflected in all directions at the cooling rods 229 and thus partly, but not exclusively, guided on a circular path (arrow W) around the elevation 237 formed by the bearing cap 145 become. This would not be possible with a pure rib structure.
  • the cooling arrangement 225 can also assume complex shapes through the use of cooling rods 229 and at the same time enable efficient cooling. Due to the free choice of shape, the cooling arrangement 225 can be better adapted to the shape of the vacuum pump 111 than, for example, a rib structure, so that a comparatively large part of the free area on the outside of the vacuum pump 111 can be used for cooling.
  • a vacuum pump 111 may include conventional cooling elements in addition to the cooling rods 225 .
  • cooling elements in 8 are shown as conventional cooling elements, purely by way of example, cooling sections 239 with straight cooling ribs 241 machined in one piece from the lower part 121, namely two cooling sections 239 formed on the side surface 231 of the lower part 121 and one cooling section 239 formed on the underside 141 of the lower part 121.
  • the cooling arrangement 225 shown with cooling rods 229 can also be provided with a cooling arrangement 225 with curved cooling ribs 243, as is shown by way of example in 9 is shown.
  • the curved cooling fins 243 are curved in such a way that the cooling arrangement 225 surrounds the bearing cover 145 in the shape of a sickle.
  • an air flow (arrow K) fed to the cooling arrangement 225 from the side can be guided on a circular path around the bearing cover 145 and dissipate heat (arrow W).

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP21218345.3A 2021-12-30 2021-12-30 Pompe à vide Pending EP4206474A1 (fr)

Priority Applications (1)

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EP21218345.3A EP4206474A1 (fr) 2021-12-30 2021-12-30 Pompe à vide

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EP21218345.3A EP4206474A1 (fr) 2021-12-30 2021-12-30 Pompe à vide

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EP4206474A1 true EP4206474A1 (fr) 2023-07-05

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080145214A1 (en) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vacuum pump with a multi-sectional housing
JP2010053770A (ja) * 2008-08-28 2010-03-11 Vacuum Products Kk 並列吸気ポンプ及びそれを用いた真空装置
JP2014105695A (ja) * 2012-11-30 2014-06-09 Shimadzu Corp 真空ポンプ
EP3584442A1 (fr) * 2017-02-17 2019-12-25 Edwards Japan Limited Contrôleur et dispositif de pompe à vide

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080145214A1 (en) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vacuum pump with a multi-sectional housing
JP2010053770A (ja) * 2008-08-28 2010-03-11 Vacuum Products Kk 並列吸気ポンプ及びそれを用いた真空装置
JP2014105695A (ja) * 2012-11-30 2014-06-09 Shimadzu Corp 真空ポンプ
EP3584442A1 (fr) * 2017-02-17 2019-12-25 Edwards Japan Limited Contrôleur et dispositif de pompe à vide

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