EP3620660A1 - Appareil à vide - Google Patents

Appareil à vide Download PDF

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Publication number
EP3620660A1
EP3620660A1 EP19190282.4A EP19190282A EP3620660A1 EP 3620660 A1 EP3620660 A1 EP 3620660A1 EP 19190282 A EP19190282 A EP 19190282A EP 3620660 A1 EP3620660 A1 EP 3620660A1
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EP
European Patent Office
Prior art keywords
component
data record
device component
private key
electronic device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19190282.4A
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German (de)
English (en)
Other versions
EP3620660B1 (fr
Inventor
Herbert Stammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19190282.4A priority Critical patent/EP3620660B1/fr
Publication of EP3620660A1 publication Critical patent/EP3620660A1/fr
Priority to JP2020085578A priority patent/JP7177119B2/ja
Application granted granted Critical
Publication of EP3620660B1 publication Critical patent/EP3620660B1/fr
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

  • the invention relates to a vacuum device, in particular a vacuum pump, with a device component and an electronic device for controlling and / or regulating the device component. Furthermore, the invention relates to a method for identifying a device component of such a vacuum device by means of the electronic device and a method for individualizing a device component of the vacuum device.
  • the control and / or regulation of a vacuum pump or other vacuum devices is usually carried out by means of an electronic device which is connected to one or more device components of the vacuum pump or the vacuum device. Since such an electronic device controls the drive of the vacuum pump or the vacuum device, i.e. in most cases an electric motor, the electronic device is also referred to as a drive device.
  • the device components of a vacuum pump and the electronic device or the drive device usually form separable units, so that several different types of device components can be operated with the same type of electronic device or drive device.
  • the electronic device In order to avoid incorrect assignment of the device components to an electronic device, which could lead, for example, to malfunctions or even damage to a vacuum pump, it is necessary for the electronic device to correctly recognize the type of the respective device component as soon as it is connected to the device component .
  • the electronic device When the electronic device determines the type of a device component connected to it, the electronic device usually receives additional information regarding the operating parameters of the device component. For example, the electronic device can receive information relating to the speed at which a vacuum pump is to be operated, or it additionally reads out an internal parameter of the device component in order to use this parameter to uniquely select a characteristic curve that is specific to the device component.
  • characteristic resistors are used in known vacuum devices, which are attached to the device component.
  • a specific identifier of a device component can be stored mechanically thereon, and this identifier can cause a change in the state of the device when it is connected to the electronic device, which in turn changes the electrical properties of the electronic device and thereby makes the type of the device component recognizable.
  • a unique identifier for the device component is associated with additional effort, for example if resistor resistors are suitably soldered or otherwise integrated into the device component or if a mechanical identifier is installed on the device component.
  • characteristic resistors and mechanical identifiers are not secured against unintentional or intended changes.
  • internal parameters that are stored in a device component are usually not protected against manipulation.
  • the number of possible combinations is limited in the case of characteristic resistors and mechanical identifiers, for example due to space constraints.
  • the vacuum device is, for example, a vacuum pump and comprises a device component and an electronic device for controlling and / or regulating the device component.
  • the device component has a digital component-specific data record.
  • the electronic device is connected to the device component and set up to read out the component-specific data record of the device component.
  • a digital data record is therefore used in the vacuum device according to the invention which is specific for the device component.
  • the production of the vacuum device is simpler, faster and therefore more cost-effective, since the component-specific data set only needs to be stored in an existing storage element in or on the vacuum device, for example, and the soldering or incorporation of resistors or the production and There is no need to set up a mechanical identifier.
  • the digital component-specific data record is more secure with regard to manipulation than, for example, characteristic resistors, since the data record is not readily accessible from the outside after being stored in or on the device component and measures can be taken to secure the data record against undesired access in a storage element .
  • the connection between the electronic device and the device component can be established, for example, via a suitable interface, and the data record can be read out by the electronic device using suitable firmware.
  • the type and / or internal parameters of the device component can also be determined, for example, using such firmware on the basis of the component-specific data record.
  • the component-specific data record is encrypted by means of a private key
  • the electronic device has a public key which is assigned to the private key in order to decrypt the encrypted component-specific data record before it is read out.
  • the encryption protects the component-specific data record against an intended or unintentional change, which could take place, for example, by means of a device for reading out the component-specific data record.
  • the encryption thus improves the operational security of the vacuum device, since, for example, internal parameters of the device component, which, for example, cause the correct selection of a characteristic curve, can only be read with knowledge of the public key.
  • the private key can first be generated by a key holder, ie, for example, the manufacturer of the vacuum device, during the manufacture of the vacuum device or when it is started up for the first time. This means that the private key is only available to the manufacturer, for example, even while the vacuum device is in operation.
  • the public key can be contained in the firmware of the electronic device. So that's encryption of the component-specific data record asymmetrically, since the encrypted component-specific data record can be decrypted by the electronic device, but cannot be changed in the device component by this.
  • the component-specific data record preferably comprises a component-specific identifier that is signed by means of the private key. By signing the component-specific identifier, it is additionally secured against manipulation.
  • the identifier can be assigned, for example, an article number, a version number or even a serial number of the device component. On the basis of the article number, the version number, the serial number or any combination of such identifiers, the electronic device can uniquely identify the device component.
  • the device component can contain or consist of storage elements which can include only readable storage elements that can be changed one or more times, that is to say writable storage elements.
  • the device components or memory elements can be permanently provided with component-specific identifiers, which are thereby protected against any subsequent changes.
  • the article number enables the device components to be clearly assigned to an indefinite number of identical device components that can be mass-produced by an indefinite number of manufacturers based on the same specification.
  • the version number designates a unique version of a device component that has at least slight functional differences compared to other device components with other version numbers, which have to be taken into account in the operation of the device component.
  • the serial number is preferably assigned once and enables unique identification of each individual device component from an indefinite number of device components.
  • the component-specific data record is additionally protected against manipulation, for example on the basis of a serial number of the device component, this data record can only be correctly decrypted with this device component and is available for device operation. If the data record is instead transferred to another device component of the same type, for example with the same article number, the data record cannot be decrypted by the deviating serial number of the device component and therefore cannot be read out for device operation.
  • the component-specific data record can include operating parameters and / or operating specifications of the device component.
  • the operating parameters and / or operating specifications are, for example, limit values and / or characteristic curves for the operation of the device component of the vacuum device.
  • the operating parameters and / or operating specifications of the device component are also protected against intentional or unintentional manipulation due to the encryption.
  • the electronic device is also set up to encrypt operating data for the device component by means of the public key and to transmit it to the device component.
  • the encrypted operating data for the device component can only be decrypted using the private key.
  • the operating data that are transmitted from the electronic device to the device component can be a subset of the operating parameters and / or operating specifications that are contained in the component-specific data record.
  • the transmitted operating data for the device component can only be decrypted using the private key, which in turn is only known to the key holder or manufacturer of the vacuum device, the operating data can only be decrypted and a part of the operating parameters and / or operating specifications of the device component can only be changed with the consent of the owner of the private key.
  • the possibility of transmitting operating data for the device component by means of the electronic device improves the flexibility for the operation of the vacuum device, however, the adaptation of the operating data is secured by the encryption.
  • the component-specific data record is preferably stored on a chip of the device component. If such a chip is present on or in the device component anyway, there is no additional effort to install a memory element on which the digital component-specific data record is stored.
  • the component-specific data record can be stored on an external storage element of the device component.
  • Such an external storage element is, for example, a circuit board as a vacuum feedthrough, with which the connection between the device component and the electronic device is established.
  • the invention further relates to a method for identifying a device component of a vacuum device by means of an electronic device for controlling and / or regulating the device component.
  • the device component has a digital component-specific data record. According to the method, when the electronic device is activated, the component-specific data record of the device component is read out by the electronic device. The device component is clearly identified on the basis of the component-specific data record.
  • the device component and the electronic device are, for example, via an interface connected with each other. Since the device component is uniquely identified by means of the digital component-specific data record, the effort to identify the device component is less than, for example, when identifying characteristic resistors and mechanical identifiers.
  • the component-specific data record is encrypted using a private key, and the encrypted component-specific data record can be decrypted with a public key that is assigned to the private key before being read out by the electronic device.
  • the encryption of the component-specific data record improves the security when identifying the device component, since the data relevant for the identification can only be changed by means of the private key, but not by means of the public key.
  • the component-specific data record can comprise a component-specific identifier, which is signed by means of the private key.
  • the device component can be clearly identified by reading out the component-specific identifier.
  • the component-specific identifier can, for example, be assigned to an article number, version number or serial number of the device component. Signing by means of the private key ensures that the component-specific identifier and thus the unique identification of the device component are particularly secure.
  • operating data for the device component can be encrypted by the electronic device using the public key and transmitted to the device component.
  • the encrypted operating data for the device component can only be decrypted using the private key.
  • the operation of the device component can be flexibly modified by transferring the operating data, but with consent or consent must be given by a holder of the private key.
  • Another object of the invention is a method for individualizing a device component of a vacuum device.
  • a private key and a public key that is assigned to the private key are generated.
  • a digital data record that is specific to the device component is also generated and encrypted using the private key.
  • the encrypted digital data record is then transmitted to the device component such that the encrypted digital data record is accessible to an electronic device for controlling and / or regulating the device component.
  • the public key is also transmitted to the electronic device.
  • the private and public key as well as the digital data record can only be generated by a holder of the private key. This takes place, for example, by means of an electronic generation device for the two bowls and the digital data record during the manufacture of the vacuum device, this electronic generation device representing a certification authority for the two keys.
  • the data record specific to the device component can contain, in addition to data that allow identification of the device component, one or more internal parameters that are relevant to the operation of the device component and, for example, enable a characteristic curve to be uniquely selected.
  • the device component is "individualized" not only by an encrypted type identifier, but also by defining one or more internal parameters, so that the device component differs in operation from device types of the same type.
  • the digital data record comprises an identifier which is specific to the device component and which is signed by means of the private key in order to individualize the device component.
  • the one for the device component A specific identifier can be assigned an article number, version number or serial number of the device component. Such individualization enables a specific device component to be clearly identified during operation of the vacuum device.
  • the digital data record can be encrypted using the private key during commissioning of the vacuum device.
  • the private key is applied to the existing data record in the device component during an initialization procedure of the vacuum device in order to thereby generate an encrypted component-specific data record in the device component.
  • encrypted operating data for the device component which are encrypted by the electronic device using the public key and transmitted to the device component, are decrypted using the private key.
  • the operating data for the device component can therefore only be decrypted with knowledge of the private key and the device component can be made available for its operation.
  • a firmware for the transmission of encrypted operating data can be provided in a firmware of the electronic device, which prompts for the input of the private key.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms in accordance with the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged on the side. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump.
  • Several connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 (see for example Fig. 3 ) can be brought in front of the gas conveyed by the pump into the engine compartment 137, in which the electric motor 125 is accommodated in the vacuum pump 111.
  • two coolant connections 139 are arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be guided into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can thus be operated in a manner of hanging.
  • the vacuum pump 111 can be designed so that it can also be operated if it is aligned in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be realized, in which the underside 141 cannot be arranged facing downwards, but turned to the side or directed upwards.
  • various screws 143 are also arranged, by means of which components of the vacuum pump which are not further specified here are fastened to one another.
  • a bearing cover 145 is attached to the underside 141.
  • Fastening holes 147 are also arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface.
  • a coolant line 148 is shown in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises a plurality of process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 rotatable about an axis of rotation 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and have a pumping effect and are connected in series with one another.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 fastened to and supported by the rotor hub 161, which are oriented coaxially to the axis of rotation 151 and are nested one inside the other in the radial direction.
  • two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested one inside the other in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and of the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 and forms with it the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms a second Holweck pump stage with the latter.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175, and forms the third Holweck pumping stage therewith.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the central Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connection channel 179 to the outlet 117 can also be provided.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite ones Shell surfaces of the Holweck rotor sleeves 163, 165 are smooth and drive the gas to operate the vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical spray nut 185 with an outer diameter to be added to the roller bearing 181 is provided on the rotor shaft 153.
  • the injection nut 185 is in sliding contact with at least one scraper of an operating fluid reservoir.
  • the resource storage comprises a plurality of absorbent disks 187 stacked one on top of the other, which are provided with a resource for the rolling bearing 181, e.g. are soaked with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium storage via the wiper to the rotating spray nut 185 and, as a result of the centrifugal force along the spray nut 185, is conveyed in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it e.g. fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid reservoir are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, each of which comprises an annular stack of a plurality of permanent magnetic rings 195, 197 stacked on one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which are radial Mount the rotor shaft 153.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119. Parallel to the axis of rotation 151, the ring magnets 195 on the rotor side are fixed by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or catch bearing 215 is provided within the magnetic bearing, which runs empty without contact during normal operation of the vacuum pump 111 and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator in order to provide a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the catch bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which causes the catch bearing 215 to be disengaged in normal pumping operation.
  • the radial deflection at which the catch bearing 215 engages is dimensioned large enough that the catch bearing 215 does not engage during normal operation of the vacuum pump, and at the same time is small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, whose rotor shaft 153 extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 which extends through the motor stator 217.
  • an intermediate space 219 is arranged which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement for transmitting the drive torque can magnetically influence one another.
  • the motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a purge gas and which can be, for example, air or nitrogen, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be used before the process gas, e.g. protected against corrosive parts of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing pump connected to the pump outlet 117.
  • a so-called labyrinth seal 223, which is known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the motor space 137, in particular in order to achieve a better seal of the motor space 217 with respect to the radially outside Holweck pump stages.
  • Fig. 6 shows a schematic representation of the turbomolecular pump 111 as a first embodiment of a vacuum device according to the invention.
  • the turbomolecular pump 111 comprises a device component 301, which has all components of the turbomolecular pump 111, which are accommodated in the housing 119 and in the lower part 121 and described above (cf. 1 to 3 ). Purely is schematic in Fig. 6 the rotor 149 of the turbomolecular pump 111 is indicated.
  • the device component 301 further comprises a pump chip 303.
  • the turbomolecular pump 111 also has an electronic device 305 for controlling and / or regulating the device component 301.
  • the electronic device 305 is in the electronics housing 123 (cf. also 1 to 3 ) housed.
  • a digital component-specific data record 307 is stored on the pump chip 303 and includes a component-specific identifier 309 and operating data 311 for the device component 301.
  • the operating data 311 are a subset of parameters and / or operating specifications of the device component 301, which are contained in the component-specific data record 307.
  • the electronic device 305 likewise comprises stored data 313 which are stored on a storage medium (not shown).
  • the stored data 313 comprise, on the one hand, a firmware 315 which is executed to control and / or regulate the device component 301.
  • the stored data 313 comprise characteristic curves 317 which are provided for the device component 301.
  • the component-specific data record 307 is not stored on the pump chip 303 in a generally readable format, but in an encrypted form.
  • the component-specific data record 307 is encrypted using a private key 321, which is generated by a generating device 323.
  • the generating device 323 also generates a public key 325 which is assigned to the private key 321. Data that is encrypted using the private key 321 can be decrypted using the public key 325 and thus read out, but not on the Storage medium are modified on which the encrypted data are stored.
  • the component-specific data record 307 stored on the pump chip 303 can therefore not be modified without knowledge of the private key 321.
  • the public key 325 generated by the generation device 123 is transmitted to the electronic device 305 and is subsequently part of the stored data 313.
  • Fig. 7 shows a further turbomolecular pump 111 as a second embodiment of a vacuum device according to the invention.
  • the turbomolecular pump 111 from Fig. 7 differs from that in Fig. 6 is shown only in that instead of the pump chip 303, a circuit board 333 is provided as a vacuum feedthrough on which the digital component-specific data record 307 is stored.
  • the pump chip 303 from Fig. 6 can be referred to as the internal storage medium of the device component 301, while the board 333 from Fig. 7 can be regarded as an external storage medium of the device component 301.
  • the above description of the further components of the turbomolecular pump 111 and the following description of the mode of operation of the vacuum device according to the invention thus apply not only to the in FIG Fig. 6 illustrated first embodiment, but also for the second embodiment of Fig. 7 .
  • the turbomolecular pump 111 is in Fig. 1 shown such that the housing 119, the lower part 121 and the electronics housing 123 are connected to one another as a unit. Nevertheless, the device component 301 and the electronic device 305 are separate units which can be delivered independently of one another in the respective housing 119 and lower part 121 or in the electronics housing 123.
  • an electronic device 305 can be used as a spare part of an existing electronic device, while the corresponding device component 301 that is in the housing 119 and is accommodated in the lower part 121, is further connected to a recipient of a vacuum system on the inlet flange 113 and is not exchanged.
  • turbomolecular pump 111 When the turbomolecular pump 111 is started up for the first time and when the device component 301 or the electronic device 305 is replaced, it is necessary for the specific device component 301 to be correctly recognized or uniquely identified when the electronic device 305 is activated by it. Only then can correct operation of the turbomolecular pump 111 be ensured, in which, among other things, specific characteristic curves 317 must be selected and used for the device component 301.
  • the component-specific data record 307 is therefore read out by the electronic device 305.
  • the electronic device 305 uses the public key 325, which is assigned to the private key 321, for this purpose.
  • the electronic device 305 reads out the component-specific identifier 309, which is signed with the private key 321, using the public key 325.
  • the component-specific identifier 309 usually comprises an article number of the device component 301, so that the electronic device 305 uniquely identifies the specific device component 301 by reading out the component-specific identifier 309.
  • the electronic device 305 reads out one or more internal parameters of the device component 301, which are also contained in the component-specific data record 307.
  • the internal parameters determine which of several characteristic curves 317 are to be used for the operation of the specific device component 301.
  • the internal Parameter-specific limit values for the device component 301 for example a maximum speed of the rotor 149 or a maximum operating temperature of the device component 301.
  • the use of the private and the public key 321, 325 precludes the device component 301 from being operated with such an electronic device 305 which can be connected to the device component 301 but does not match the latter. Only with the correct public key 325 can the electronic device 305 read out the component-specific data record 307 and carry out the control and / or regulation of the device component 301.
  • manipulation of the component-specific data record 307 by the electronic device 305 or a similar device is excluded, which can be connected to the device component 301 as long as these devices only know the public key 325. This precludes, for example, an unintentional change in the component-specific identifier 309, which would lead to incorrect control and / or regulation of the device component 301.
  • the electronic device 305 may transmit to the device component 301 data which are encrypted using the public key 325 and which, for example, represent part of the operating data 311.
  • the execution of firmware 315 may include a request to store and use data that electronic device 305 encrypts with public key 325 and transmits to device component 301 has to enter the private key 321. This also ensures correct assignment of the data encrypted with the public key 325 to the correct device component 301 to which the private key 321 is assigned.
  • the generating device 323, with which the private key 321 and the associated public key 325 are generated, is, for example, a module of a final test system for the turbomolecular pump 111, with which the turbomolecular pump 111 is checked before it is delivered.
  • the generating device 323 can also be a hardware module that is provided exclusively for encryption for the device component 301 and the electronic device 305.
  • the encryption of the component-specific data record 307 with the private key 321 can already take place during the manufacture of the board 333 if a board 333 is used as a vacuum bushing.
  • the device component 301 can only be individualized by means of the encryption when the device component 301 is started up for the first time, in that the existing component-specific data record 307 is provided with the private key 321 and "enriched", so to speak.
  • information regarding the private key 321 that is required to enrich the key and thus to individualize the device component 301 must be available on the pump chip 303 or on the circuit board 333 at a suitable location.
  • a chip serial number can be used as a key enrichment, ie as a private key 321.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP19190282.4A 2019-08-06 2019-08-06 Appareil à vide Active EP3620660B1 (fr)

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EP19190282.4A EP3620660B1 (fr) 2019-08-06 2019-08-06 Appareil à vide
JP2020085578A JP7177119B2 (ja) 2019-08-06 2020-05-15 真空装置

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Cited By (2)

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EP3848588A1 (fr) * 2020-12-17 2021-07-14 Pfeiffer Vacuum Gmbh Appareil sous vide
WO2023194735A1 (fr) * 2022-04-07 2023-10-12 Edwards Limited Procédé et appareil de commande de pompe

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DE10123169A1 (de) * 2001-05-12 2002-11-14 Bosch Gmbh Robert Verfahren zum Schutz eines Mikrorechner-Systems gegen Manipulation von in einer Speicheranordnung des Mikrorechner-Systems gespeicherten Daten
EP1767790A2 (fr) * 2005-09-22 2007-03-28 Pfeiffer Vacuum Gmbh Système de pompe à vide
JP2008196463A (ja) * 2007-02-15 2008-08-28 Ebara Corp 回転機械装置における回転機械本体の機種識別方法、回転機械装置
DE102008019451A1 (de) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP2469096A1 (fr) * 2009-08-21 2012-06-27 Edwards Japan Limited Pompe à vide
US20170171178A1 (en) * 2015-12-14 2017-06-15 Afero, Inc. System and method for an internet of things (iot) gas pump or charging station implementation

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JP5381832B2 (ja) 2010-03-16 2014-01-08 日立工機株式会社 遠心分離機の運転情報収集システム及び遠心分離機用データ管理装置
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DE10123169A1 (de) * 2001-05-12 2002-11-14 Bosch Gmbh Robert Verfahren zum Schutz eines Mikrorechner-Systems gegen Manipulation von in einer Speicheranordnung des Mikrorechner-Systems gespeicherten Daten
EP1767790A2 (fr) * 2005-09-22 2007-03-28 Pfeiffer Vacuum Gmbh Système de pompe à vide
JP2008196463A (ja) * 2007-02-15 2008-08-28 Ebara Corp 回転機械装置における回転機械本体の機種識別方法、回転機械装置
DE102008019451A1 (de) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP2469096A1 (fr) * 2009-08-21 2012-06-27 Edwards Japan Limited Pompe à vide
US20170171178A1 (en) * 2015-12-14 2017-06-15 Afero, Inc. System and method for an internet of things (iot) gas pump or charging station implementation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3848588A1 (fr) * 2020-12-17 2021-07-14 Pfeiffer Vacuum Gmbh Appareil sous vide
WO2023194735A1 (fr) * 2022-04-07 2023-10-12 Edwards Limited Procédé et appareil de commande de pompe

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JP2021027575A (ja) 2021-02-22
EP3620660B1 (fr) 2021-07-28

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