EP3808988B1 - Pompe à vide et procédé de surveillance d'une pompe à vide - Google Patents

Pompe à vide et procédé de surveillance d'une pompe à vide Download PDF

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Publication number
EP3808988B1
EP3808988B1 EP21161837.6A EP21161837A EP3808988B1 EP 3808988 B1 EP3808988 B1 EP 3808988B1 EP 21161837 A EP21161837 A EP 21161837A EP 3808988 B1 EP3808988 B1 EP 3808988B1
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EP
European Patent Office
Prior art keywords
vacuum pump
vacuum
rotor
pump
measurement data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP21161837.6A
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German (de)
English (en)
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EP3808988A2 (fr
EP3808988A3 (fr
Inventor
Jochen BÖTTCHER
Viktor Dorscht
Mirko Mekota
Michael Schweighöfer
Daniel Sieben
Herbert Stammler
Tobias Stoll
Pascal Wielsch
Adrian Wirth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP20166248.3A external-priority patent/EP3686432B1/fr
Priority claimed from EP20170014.3A external-priority patent/EP3736447A1/fr
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Publication of EP3808988A2 publication Critical patent/EP3808988A2/fr
Publication of EP3808988A3 publication Critical patent/EP3808988A3/fr
Application granted granted Critical
Publication of EP3808988B1 publication Critical patent/EP3808988B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/12—Vibration

Definitions

  • the invention relates to a vacuum pump, in particular a turbomolecular vacuum pump, with the features of the preamble of claim 1.
  • the invention also relates to a vacuum system with at least one such vacuum pump, in particular with a turbomolecular vacuum pump.
  • the invention further relates to a method for monitoring such a vacuum pump or a vacuum system comprising at least one such vacuum pump.
  • a vacuum pump with the features of the preamble of claim 1 is, for example, from DE 20 2015 003 927 U1 known. Furthermore, they reveal WO 2017/21 6514 A1 , WO 2007/022657 A1 and US 2019/0383296 A1 each a vacuum pump with an accelerometer.
  • a vacuum system is understood to mean, for example, an arrangement of one or more vacuum pumps and one or more vacuum chambers or recipients to be evacuated. Such an arrangement is sometimes referred to as a pumping station.
  • condition monitoring ie the acquisition and evaluation of condition information about the individual components of a vacuum system or an individual vacuum pump
  • the goals associated with condition monitoring are extremely diverse and range, for example, from increasing the service life of a vacuum pump to simplifying and improving maintenance and service from vacuum pumps and vacuum systems to improving the application options for the operator and increasing customer friendliness by providing information relating to vacuum pumps and vacuum systems.
  • the customer is usually the operator of the vacuum pump or a vacuum system comprising the vacuum pump, who purchases the vacuum pump from the pump manufacturer.
  • condition monitoring can also play an important role with regard to possible disputes between pump manufacturers and pump operators, for example due to warranty claims and complaints.
  • the object of the invention is therefore to create the simplest, most reliable and cost-effective option for monitoring the condition of a vacuum pump or a vacuum system comprising at least one vacuum pump.
  • an inertial measuring unit assigned to the vacuum pump is provided according to the invention, which comprises at least one inertial sensor which is designed to detect movements of the vacuum pump and / or the orientation of the vacuum pump and to provide relevant measurement data and/or information obtained by evaluating these measurement data.
  • An inertial sensor can be, for example, an acceleration sensor or a rotation rate sensor.
  • a rotation rate sensor is also called Gyroscope sensor or gyroscopic sensor.
  • Such inertial sensors are in widespread use today and are available on the market in a wide variety of designs and qualities.
  • An acceleration sensor typically provides linear acceleration values for a translational movement with respect to a translation axis.
  • a yaw rate sensor typically provides angular velocities related to an axis of rotation.
  • path information can be obtained, i.e. information about the path traveled in relation to a reference position or reference position.
  • rotation angle information can be obtained, i.e. information about a rotation angle traveled in relation to a reference position or reference orientation.
  • inertial sensors are typically used for navigation tasks, for example for drones. But inertial sensors are also used extensively for other applications, e.g. as sensors in cell phones or for measuring vibrations on buildings and machines.
  • Inertial sensors available on the market can be designed in such a way that they directly deliver acceleration or speed signals (ie raw measured values or raw data), which therefore do not require any further preparation or processing in order to receive information relating to the respective acceleration or speed directly from the inertial sensor itself receive.
  • the inertial measuring unit used according to the invention which can include one or more inertial sensors, can therefore directly provide one or more acceleration or speed signals.
  • the inertial measuring unit can also be designed and, in particular, equipped with appropriate electronics in such a way that basically any signal preparation and processing can be carried out as well as storage of either the “raw data” or information obtained from it.
  • the “position” of an object in particular a vacuum pump, is to be understood as meaning its position and orientation in a respective coordinate system.
  • a translation of the object changes its position, and a rotation of the object changes its orientation.
  • a movement of the object can exclusively include translations with respect to one, two or three translation axes or exclusively rotations with respect to one, two or three axes of rotation or both translations and rotations, in particular with respect to all six possible degrees of freedom.
  • movements of an object in particular a vacuum pump, also include vibrations or oscillations of the vacuum pump.
  • the movement of an object also leads to sound emission in the area surrounding the object.
  • vibrations or oscillations also lead to undesirably emitted sound levels.
  • a sound pressure sensor or a sound level frequency sensor in particular a microphone, the resulting sound pressure or sound level or the sound spectrum of the object can be recorded.
  • the general term “inertial sensor” also applies to sound pressure or sound level sensors, even if these are not mentioned separately again as a special version.
  • the measurement data which, according to the invention, are provided by the at least one inertial sensor of the inertial measuring unit assigned to the vacuum pump, in particular integrated into the vacuum pump, can be raw measurement data act, in particular acceleration or speed signals generated directly by the inertial sensor. These raw measurement data can, for example, be stored in the vacuum pump and thus be kept available for later evaluation. Immediate signal processing, especially in real time, is therefore not necessary.
  • the measurement data provided can also be processed measurement data which - for example by means of electronics belonging to the inertial measuring unit - are obtained from the signals supplied directly by the inertial sensor through preparation or processing.
  • the inertial measuring unit assigned to the vacuum pump preferably integrated into the vacuum pump, therefore comprises one or more inertial sensors, each of which directly supplies an acceleration signal or a speed signal.
  • these measurement data can be raw measurement data from the inertial sensor and/or processed measurement data.
  • the monitoring according to the invention includes, in particular, detecting or detecting or recognizing states or changes in state of the vacuum pump and/or the vacuum system as well as providing and/or storing related state information.
  • the invention it is possible, but not mandatory, to evaluate the measurement data during operation and to intervene in the ongoing operation of the vacuum pump and/or the vacuum system in response to this evaluation.
  • the inertial measuring unit is integrated into the vacuum pump, namely into a vacuum feedthrough of the vacuum pump.
  • the inertial measuring unit can be integrated into an external accessory that can be detachably attached to the pump.
  • the inertial measuring unit can be integrated into an electronics housing of the vacuum pump, which is arranged outside the actual pump housing of the vacuum pump and is connected, in particular releasably, to the vacuum pump.
  • the processing or evaluation of the measurement data can take place in the accessory mentioned, in the electronics housing or in drive electronics of the vacuum pump.
  • the drive electronics can be located in the electronics housing mentioned.
  • the inertial measuring unit can be connected to a display, output, evaluation, data forwarding or other data processing unit with plug connectors, wired or via radio connection.
  • the vacuum pump is assigned a control device connected to the inertial measuring unit, which is designed to evaluate the measurement data of the inertial measuring unit.
  • the vacuum pump is assigned an output device via which the measurement data of the inertial measuring unit and/or information obtained by evaluating these measurement data can be output or retrieved.
  • This output device can be, for example, a data interface of the vacuum pump or an accessory connection of the vacuum pump, also known as an accessory port. Alternatively or additionally, the output can also be wireless.
  • the vacuum pump is assigned a storage device which is designed to store the measurement data of the inertial measuring unit and/or information obtained by evaluating these measurement data.
  • control device and/or the storage device can be integrated into the vacuum pump, into an electronics housing of the vacuum pump, into an accessory of the vacuum pump or into a data storage and processing device connected via data forwarding to a possibly remote location be.
  • the invention can therefore make use of infrastructures such as edge, cloud and/or fog computing.
  • the control device can be integrated into the inertial measuring unit. Alternatively, it is possible for the inertial measuring unit to form part of the control device.
  • the storage device can be integrated into the control device or into the inertial measuring unit or provided separately.
  • control device and/or the storage device can be integrated into drive electronics of the vacuum pump.
  • the inertial measuring unit comprises a spatial arrangement of several inertial sensors, in particular the inertial measuring unit comprising two or three acceleration sensors, each of which is assigned one of three translation axes of the vacuum pump that run perpendicular to one another in pairs, and/or two or three rotation rate sensors, each of which has one of three perpendicular pairs is assigned to mutually extending axes of rotation of the vacuum pump.
  • MEMS micro-electro-mechanical system
  • inertial measuring units and also other specific configurations of inertial measuring units or IMUs are - as already mentioned above - familiar to those skilled in the art, so that this does not need to be discussed in more detail.
  • the inertial measuring unit is integrated into a vacuum feedthrough of the vacuum pump.
  • vacuum feedthroughs are generally known.
  • a vacuum feedthrough of a vacuum pump can, for example, be formed by a circuit board.
  • the inertial measuring unit can be arranged on such a circuit board forming a vacuum feedthrough.
  • existing vacuum pumps can be retrofitted with an inertial measuring unit with comparatively little effort and at relatively low cost.
  • Another advantage is that for such an arrangement of the inertial measuring unit, series production of vacuum pumps only needs to be changed relatively slightly.
  • the inertial measuring unit or any other one Sensor (e.g. temperature measurement sensor) must be installed on a separate circuit board attached inside the pump.
  • This board can then be connected to another board or a vacuum feedthrough or a board as a vacuum feedthrough, for example in a detachable manner using a cable (e.g. with a plug-in connection), with limited releasability (e.g. with a clamp-cutting connection), or permanently (e.g. soldered).
  • a cable e.g. with a plug-in connection
  • limited releasability e.g. with a clamp-cutting connection
  • permanently e.g. soldered
  • one or more status information of the vacuum pump and/or the vacuum system is determined based on the measurement data.
  • the or each status information can be output via an output device of the vacuum pump and/or stored in a storage device of the vacuum pump.
  • status information can simply be a “snapshot” of the vacuum pump or one or more predetermined components of the vacuum pump.
  • status information can reflect the temporal behavior or the temporal development of the vacuum pump or a respective component, in particular with regard to one or more parameters or signals of the vacuum pump or the component in question.
  • the inertial measuring unit repeatedly provides the measurement data with basically any predetermined or predeterminable temporal resolution.
  • the orientation of the vacuum pump in space and/or the orientation of the vacuum pump relative to one or more other components of the vacuum system is determined as status information of the vacuum pump and/or the vacuum system.
  • control device of the vacuum pump can be designed to either allow or prevent the vacuum pump from starting to operate depending on the determined orientation of the vacuum pump.
  • the vacuum pump can therefore determine itself whether it is oriented in such a way that operation would be impermissible and make it impossible for a user to accidentally initiate an impermissible start of operation.
  • the determined orientation of the vacuum pump can be taken into account when evaluating a frequency spectrum relating to vibrations of the vacuum pump and/or the vacuum system.
  • the fact that the vibration behavior of a vacuum pump depends on the orientation of the pump in space can be exploited here. Consequently, the vibration behavior can be specifically evaluated and evaluated depending on the determined orientation of the vacuum pump.
  • the orientation of the vacuum pump is only saved for special, predetermined events.
  • the determined orientation is not actively used here in the sense that the ongoing operation of the pump is actively intervened depending on the determined orientation, but the mere storage of the information serves a passive use of this information.
  • An event in the sense of this exemplary embodiment can, for example, be an energization of the vacuum pump, an operational start of the vacuum pump, an operational start of one or more predetermined components - with the exception of the vacuum pump itself - of a vacuum system comprising the vacuum pump or a change in the installation position of the vacuum pump.
  • the stored information can then be used for an evaluation at a later point in time, for example in the event of a service request or a complaint.
  • the vacuum pump monitored by means of the method according to the invention comprises a rotor which is rotated during operation by means of a drive motor, an imbalance of the rotor and/or a vibration state of the vacuum pump and/or the vacuum system being determined as status information of the vacuum pump and/or the vacuum system.
  • the rotor unbalance and/or the vibration state is repeatedly determined during operation of the vacuum pump.
  • the temporal behavior of the rotor unbalance or the vibration state in particular the temporal development of the vibration behavior of the vacuum pump, can, for example, be monitored and recorded, i.e. saved for later evaluation.
  • At least one measure of a change over time, in particular a rate of change, of the rotor unbalance and/or the vibration state is calculated. In particular, this takes place in relation to a respective basic state of the rotor unbalance and/or the vibration state, which is determined at a constant operating speed of the rotor.
  • the determination of the basic state can take place during one or more one-off events such as the final manufacturing test, the initial commissioning of a vacuum system or even during the acceptance or the first start of production of a vacuum system in such a way that this basic state is saved and used as a permanent reference basis for the can be used to record status information during further operation.
  • a reaction is triggered when a relative or absolute limit value is exceeded.
  • a warning is issued.
  • the limit value is, for example around a limit value for the rotor unbalance and/or for the vibration state or around a limit value for a temporal change in the rotor unbalance and/or the vibration state.
  • the oscillation amplitudes can be determined over time, and from these base points a compensation curve can be derived mathematically, the local slope of which represents a measure of the change in oscillation behavior over time, which can be subjected to an evaluation or, in turn, an observation over time.
  • the base points can be evaluated in detail using statistical methods such as trend or distribution analyses, stability or outlier considerations.
  • a measure of a usage reserve of the vacuum pump is calculated, for example based on an initial value of 100% set upon delivery of the vacuum pump, of which is counted down while the vacuum pump is operating.
  • a recommendation value for a time until the next maintenance of the vacuum pump is calculated and output.
  • the recommendation value can, for example, be via a Data interface is kept available or output directly via an output unit. This is done in particular taking into account the previous usage profile of the vacuum pump and therefore individually for each individual vacuum pump.
  • the evaluation of the measurement data from the inertial measuring unit can be limited to movements in the radial direction - based on the axis of rotation of the rotor.
  • Determining the rotor unbalance and/or the vibration state therefore represents a powerful diagnostic tool that offers both the operator and the manufacturer of the vacuum pump a wide range of options for checking and monitoring the functionality and operational safety of the vacuum pump.
  • KPI Key Performance Indicator
  • the parameter can form a so-called health KPI, which allows an assessment of the current functional status of the vacuum pump.
  • the rotor unbalance can be evaluated by the 1st harmonic, which corresponds to the frequency of the operating speed of the rotor.
  • the higher harmonics can also be used for this evaluation of the rotor unbalance. However, this is not absolutely necessary.
  • FFT Fast Fourier Transform
  • a Görtzel algorithm allows the calculation of individual discrete spectral components of the frequency spectrum. In this way, the so-called running peak, for example, can be viewed when evaluating the measurement data.
  • the invention enables a comparatively simple procedure, which in particular does not require the successive tuning of frequencies and without the use of so-called frequency filter circuits.
  • Oscillations of the vacuum pump can be caused, for example, by a rotor imbalance, but also by external sources, for example by other pumps or components of the respective vacuum system having moving parts, to which the vacuum pump provided with the inertial measuring unit belongs.
  • a vibration state of the vacuum pump and/or the vacuum system can be determined as status information of the vacuum pump and/or the vacuum system.
  • a frequency spectrum relating to vibrations of the vacuum pump and/or the vacuum system is determined.
  • Oscillations of the vacuum pump during operation arise in particular when the vacuum pump includes a rotor that is rotated during operation by means of a drive motor.
  • vibrations in the vacuum pump can also have other, e.g. external, but also other internal causes.
  • the invention is therefore not limited to vacuum pumps which comprise a rotor which is rotated during operation by means of a drive motor.
  • So-called scroll vacuum pumps for example, do not have a rotor that rotates during operation, but rather one or more other movable components that carry out a so-called orbiting movement.
  • the invention can also be used in conjunction with such vacuum pumps.
  • FFT Fast Fourier Transform
  • the acquisition of the frequency spectrum can be limited to individual frequencies or frequency bands.
  • Saving a determined frequency spectrum can be limited to storing certain points, areas or sections of the frequency spectrum, for example in such a way that only a certain number of the relatively highest peaks are saved.
  • a vibration state of the vacuum pump and/or the vacuum system is determined as status information, then provision can be made in particular for the vibration state to be determined and in particular stored during startup of the vacuum pump.
  • the oscillation state is therefore determined during an initial operating phase of the vacuum pump, during which the speed of the rotor increases.
  • the vibration state can also be determined after startup with the rotor running at operating speed.
  • resonance states of the vacuum pump and/or the vacuum system are determined here, i.e. while the vacuum pump is starting up.
  • the pump acts as a stimulator here.
  • How the pump and system responds to the excitation provides information about resonances present across a wide frequency spectrum, particularly from 0 Hz to operating speed.
  • Information relating to such resonance states can be provided, for example, for output to or for retrieval by an external device, for example a system controller of the vacuum system, and in this way can be made available, for example, to the operator of the vacuum system.
  • the aforementioned procedure for determining resonance states can be used not only when a vacuum pump is running up, but also vice versa at the end of the cycle or process of a vacuum system and thus when the vacuum pump is running down or stopping.
  • This method may require additional operating time, for example additional measurement time after or at the intended end of the process to determine the vibration state with the rotor still running at operating speed, possibly with at least a partially active process gas flow.
  • the ventilation of the vacuum system may need to be delayed, in particular actively controlled, so that the vacuum pump can decelerate optimally in order to achieve the best possible resonance measurement.
  • Potential advantages of measuring at run-out compared to a determination while the vacuum pump is starting up are, for example, a lower potential electromagnetic and mechanical interference spectrum for the inertial measuring unit, which is usually arranged spatially close due to the circumstances, due to the drive motor not being active at all or only with a low braking power instead of at maximum power and their signal lines.
  • Another advantage is that at the end of the cycle or process, the status information is determined while the vacuum pump and the vacuum system are in a stable, thermally steady state.
  • the preceding operating sequence typically takes place on a regular basis in the same way and thus creates a long-term, stable basis for comparison of the recorded operating states.
  • Unwanted influences or the variability of unspecific, rarely occurring states and their effects on the status information can be significantly reduced.
  • An example here is the "cold start" of a system, i.e. the first start-up of the vacuum pump and the vacuum system at the beginning of an operating day or the first operating cycle after a longer process break.
  • the operational reliability and/or the service life of the vacuum pump and/or the vacuum system can be increased using the determined resonance states by the vacuum pump and/or the vacuum system at a predetermined time, in particular when the speed of the rotor is that of a Resonance state approaches, a warning is issued or the speed of the rotor is automatically adjusted. In this way, operation of the vacuum pump in a resonance state can be avoided.
  • the determination of a vibration state of the vacuum pump and/or the vacuum system can alternatively or additionally be used to automatically change the speed of the rotor of the vacuum pump, if based on the determined vibration state of a Control device of the vacuum pump or one or more further vacuum pumps within the vacuum system are recognized by a system controller of the vacuum system, which are operated at at least approximately the same operating speed as the vacuum pump. In this way, undesirable floating conditions can be prevented.
  • the determination of a vibration state of the vacuum pump and/or the vacuum system can also be used to monitor one or more predetermined parameters of the vacuum pump and/or one or more signals from one or more sensors of the vacuum pump based on the determined vibration state. This monitoring can take place in particular with regard to the temporal behavior of the parameter(s) or the signal(s).
  • Such monitoring preferably takes place in relation to a target state of the vacuum pump and/or the vacuum system determined in a training phase, with a control device of the vacuum pump checking, following this training phase, whether the monitored parameter(s) and/or the signal(s) monitored correspond to the target state or not. If a deviation from the target state is detected during this check - taking predetermined tolerances into account - then this change in the relevant parameter or signal is subjected to an evaluation and / or evaluation, preferably taking predetermined criteria into account.
  • the mentioned learning to determine the target state preferably takes place automatically.
  • such learning can also take place quite generally, i.e. independently of the determination of a vibration state and also independently of monitoring based on it, as mentioned above, for example to provide a, in particular permanent, basis for comparison for any measurements carried out using the inertial measuring unit.
  • one or more special events are determined as status information of the vacuum pump and/or the vacuum system.
  • the determined event or events i.e. information or data relating to the event or events, can be output via an output device of the vacuum pump and/or stored in a storage device of the vacuum pump.
  • the permanently determined measurement data is only buffered and only saved when an event actually occurs. What is considered an “event” depends on the respective application and can be specified by certain criteria. Predefined limit values, e.g. for the vibration amplitude measured as a parameter, can be used, the exceeding of which is interpreted as the occurrence of an event. According to the invention, one or more limit values can be assigned to any parameters or signals.
  • the vacuum pump comprises a rotor which is rotated during operation by means of a drive motor, and that an axial displacement of the rotor between a first axial position and a second axial position is detected as a special event during operation of the vacuum pump becomes.
  • the first axial position is a so-called pre-vacuum position of the rotor and the second axial position is a so-called high vacuum position.
  • Hybrid bearing means that on the high vacuum side (HV side) of the pump there is a magnetic bearing, in particular a passive, repulsive radial bearing with permanent magnets, between the rotor and a stator of the pump.
  • HV side high vacuum side
  • VV side fore-vacuum side
  • the rotor is mounted by means of a roller bearing, in particular a ball bearing.
  • the bearing concept accordingly identifies the magnetic bearing as a floating bearing with a radial bearing effect and the rolling bearing as a fixed bearing with a radial and axial bearing effect in relation to the axis of rotation.
  • the cause of a "rotor jump" is an operational heating of the rotor and the resulting axial thermal expansion of the rotor along its axis of rotation, which leads to a change in the axial relative position on the floating bearing side between a rotor-side magnetic bearing package and a stator-side magnetic bearing package of the magnetic bearing between the rotor and stator .
  • This change leads to a change in the system-related, undesirable axial repulsion forces of the magnetic bearing, which results in the rotor executing a sudden movement in the direction of the high vacuum side at a certain point in time. This movement is made possible and limited by the technical axial reversal play on the fixed bearing side.
  • the backlash is composed in particular of the rolling bearing clearance, in particular the bearing clearance or the operating clearance, and the elasticities of the other adjacent components, in particular a vibration-isolating and/or damping elastomer bearing embedding.
  • the event of the rotor jump can be described in particular as a change in sign of the axial bearing load carried in the fixed bearing.
  • This bearing load is made up of the weight of the rotor, which varies depending on the spatial orientation or mounting orientation of the vacuum pump, and the axial repulsion force caused by the magnetic bearing.
  • the maximum axial repulsion force of the magnetic bearing in limit operating states such as the operation of the vacuum pump with a rotor at maximum temperature and a very well-cooled stator or the first, "cooled" start of the vacuum pump at minimum temperatures as another extreme is usually greater in magnitude than the absolute weight of the rotor.
  • Rotor jumps occur independently of the spatial orientation of the pump during certain operating phases, in particular after a short warm-up phase or after the vacuum pump has been stopped, and occur regularly once per phase.
  • the so-called “adjustment" of the hybrid bearing can be carried out in such a way that, at a standard temperature, the direction and magnitude of the axial repulsion forces are set to a value optimally selected for the subsequent operation of the vacuum pump with the help of mechanical control and adjustment means or devices is changed.
  • a movement of the vacuum pump as a whole can be detected as a special event.
  • This movement can, for example, be related to the direction and amount of translations and/or Rotations of the vacuum pump are analyzed.
  • An analysis of the movement of the vacuum pump can be carried out, for example, during operation of the vacuum pump in mobile or so-called semi-mobile vacuum systems.
  • the speed of rotation rate changes that do not occur coaxially with respect to the axis of rotation of the rotor of the vacuum pump plays a decisive role in the radial bearing load of a rotating system such as a vacuum pump.
  • the analysis of the rotation rate can therefore be used to provide information and/or warnings about the permissible speed of the rotation rate change during operation of the vacuum pump.
  • the permissible loads and thus rates of change can be defined at different levels depending on the direction of rotation.
  • Information can be output per spatial axis or as a calculated, resulting comparison value.
  • shocks are events that lead to a short-term exceeding of a predetermined acceleration limit value.
  • shocks can, for example, be caused by impacts in the vacuum system valves or slides used, by blows against the vacuum pump or by other mechanical effects on the vacuum system or on the vacuum pump, for example by falls of the vacuum pump or the vacuum system.
  • the measurement data and/or the information obtained therefrom can be used in a variety of ways.
  • the data/information can be stored exclusively in the vacuum pump in such a way that only the manufacturer of the vacuum pump has access to this data/information.
  • the data/information can be made available to the operator of the vacuum pump or a vacuum system comprising the vacuum pump. As already mentioned elsewhere, in practice this operator is often a customer of the vacuum pump manufacturer.
  • the measurement data and/or the information obtained by evaluating these measurement data can only be output or accessed if authorization is present. This can be done in particular via an interface of the vacuum pump or an accessory connection of the vacuum pump.
  • the required authorization can, for example, be provided by the manufacturer of the vacuum pump.
  • the data/information can be output to a system control of a vacuum system comprising the vacuum pump and/or retrieved from this system control.
  • Access to the data/information does not have to be done directly via the vacuum pump, but rather can be done via the system control, into which the vacuum pump is integrated, in particular via its control device.
  • Turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms the alignment of the vacuum pump according to Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (see also Fig. 3 ).
  • Several connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection via which flushing gas is supplied to protect the electric motor 125 (see e.g Fig. 3 ) can be admitted into the engine compartment 137, in which the electric motor 125 is accommodated in the vacuum pump 111, in front of the gas delivered by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be directed into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate exclusively with air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141.
  • vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can therefore be operated hanging, so to speak.
  • the vacuum pump 111 can be designed so that it can be put into operation even if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 can be arranged not facing downwards, but facing to the side or facing upwards. In principle, any angle is possible.
  • a bearing cover 145 is attached to the underside 141.
  • Fastening holes 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example. This is not possible with other existing turbomolecular vacuum pumps (not shown), which are in particular larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pumping stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about a rotation axis 151.
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another and having a plurality of radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also includes Holweck pump stages that are arranged one inside the other in the radial direction and are effectively connected in series. There are other turbomolecular vacuum pumps (not shown) that do not have Holweck pump stages.
  • the rotor of the Holweck pump stages includes a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 which are fastened to the rotor hub 161 and supported by it, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction. Furthermore, two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested within one another when viewed in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are through the lateral surfaces, i.e. through the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169 are formed.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and forms a second Holweck pump stage with this.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175 and with this forms the third Holweck pump stage.
  • a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. This means that the nested Holweck pump stages are connected in series with one another.
  • a connecting channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas is used to operate the Drive vacuum pump 111 into the Holweck grooves.
  • a rolling bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.
  • a conical injection nut 185 with an outer diameter increasing towards the rolling bearing 181 is provided on the rotor shaft 153.
  • the injection nut 185 is in sliding contact with at least one wiper of an operating medium storage.
  • an injection screw may be provided instead of an injection nut. Since different designs are possible, the term “spray tip” is also used in this context.
  • the operating medium storage comprises several absorbent disks 187 stacked on top of one another, which are soaked with an operating medium for the rolling bearing 181, for example with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid storage via the wiper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the rolling bearing 181, where it e.g. fulfills a lubricating function.
  • the rolling bearing 181 and the operating fluid storage are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack made up of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, with the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsion forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 on the radial outside.
  • the stator-side ring magnets 197 are supported by a stator-side support section 203, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119.
  • the rotor-side ring magnets 195 are fixed parallel to the rotation axis 151 by a cover element 207 coupled to the carrier section 201.
  • the stator-side ring magnets 197 are fixed parallel to the rotation axis 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnets 197.
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs empty without contact during normal operation of the vacuum pump 111 and only comes into engagement when there is an excessive radial deflection of the rotor 149 relative to the stator to form a radial stop for the rotor 149 to form so that a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated rolling bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 comes into engagement is large enough so that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures occurs under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217.
  • a gap 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement can magnetically influence each other for transmitting the drive torque.
  • the motor stator 217 is fixed in the housing within the engine compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purging gas and which can be, for example, air or nitrogen, can reach the engine compartment 137 via the sealing gas connection 135.
  • the barrier gas can be used to protect the electric motor 125 from process gas, for example from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing vacuum pump connected to the pump outlet 117.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve a better sealing of the engine compartment 217 compared to the Holweck pump stages located radially outside.
  • Fig. 6 based on the representation of the Fig. 3 and shows the turbomolecular vacuum pump according to the invention, which is also referred to below simply as a turbomolecular pump or as a turbopump, in a cross section through the turbopump according to the invention, which corresponds to the cross section of Fig. 3 corresponds.
  • the invention can therefore be used in conjunction with a turbomolecular pump, as previously described with reference to Fig. 1 to 5 was described.
  • the turbo pump 11 therefore has a rotor 49 with a shaft 53, which is rotated about an axis of rotation 51 during operation by means of an electric motor 25.
  • the rotor 49 is provided with a hybrid bearing.
  • a rolling bearing 81 is provided for the rotor 49.
  • the rotor 49 is supported by a permanent magnet bearing 83, which has a rotor-side bearing half 91 and a stator-side bearing half 93.
  • the vacuum pump 11 has an outer housing 19 which is connected to a lower part 21.
  • the housing 19 On the HV side, i.e. at the pump inlet, the housing 19 has a so-called star in the area of an inlet flange 13, which includes several radial struts 105 which converge in the center, i.e. on the axis of rotation 51.
  • An electronics housing 23 is detachably attached to the outside of the housing 19 and the lower part 21.
  • the electronics housing 23 contains, among other things, control and drive electronics (not shown) for the vacuum pump 11, in particular for the electric motor 25, but also for possible other components (not shown) of the vacuum pump 11 such as sensors etc.
  • the electronics housing 23 is connected via electrical plug contacts, the pump-side contacts being formed on a circuit board 22 serving as a vacuum feedthrough in the area of the lower part 21 of the vacuum pump 11.
  • the vacuum pump 11 is a component of a vacuum system 12, which is only indicated schematically here by a dashed line.
  • the vacuum system 12 can, for example, form a pumping station which includes a vacuum chamber to be evacuated by means of the vacuum pump 11 and a backing pump (not shown) assigned to the vacuum pump 11.
  • the vacuum system 12 can have any complex structure and, for example, include one or more vacuum chambers and, in addition to the vacuum pump according to the invention, one or more further vacuum pumps, which may or may not be designed in accordance with the invention.
  • the vacuum system 12 can be designed to be mobile or semi-mobile.
  • the vacuum system 12 has a system control 24, via which all parts and components of the vacuum system 12 can be controlled and which enables an exchange of control signals and data.
  • the vacuum pump 11 can be connected to the system controller 24, for example via a data interface 29 which is formed on the electronics housing 23 of the vacuum pump 11. How Fig. 6 shows, an accessory port 27 is also provided on this electronics housing 23.
  • the vacuum pump 11 according to the invention is designed to carry out one or more exemplary embodiments of the monitoring method according to the invention.
  • the vacuum system 12 according to the invention is designed to carry out one or more exemplary embodiments of the monitoring method according to the invention.
  • the vacuum pump 11 is provided with an inertial measuring unit 14, which is firmly attached to a component of the pump 11.
  • an inertial measuring unit 14 is arranged at different locations on the vacuum pump 11, in Fig. 6 Two different installation locations are shown purely as an example.
  • the inertial measuring unit 14 is arranged on the above-mentioned star at the pump inlet, which includes several radial struts 105, specifically centrally with respect to the axis of rotation 51.
  • an eccentric arrangement of the inertial measuring unit 14 on the star of the vacuum pump 11 can also be provided.
  • the inertial measuring unit 14 is attached to the mentioned circuit board 22, which forms a vacuum feedthrough on the lower part 21 of the pump 11.
  • the inertial measuring unit 14 comprises several - in this example six - inertial sensors 16.
  • the inertial measuring unit 14 comprises several - in this example six - inertial sensors 16.
  • three acceleration sensors and three rotation rate sensors are provided, in this way all six possible degrees of freedom of movements of the vacuum pump 11 to cover.
  • the invention thus creates a simple, reliable and cost-effective option for monitoring the condition of vacuum pumps and vacuum systems on the basis of measurement data from an inertial measuring unit assigned to the vacuum pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Claims (14)

  1. Pompe à vide (11), en particulier pompe à vide turbomoléculaire, ou système à vide (12) comprenant au moins une pompe à vide (11), en particulier une pompe à vide turbomoléculaire,
    comprenant une unité de mesure inertielle (14) associée à la pompe à vide (11) et munie d'au moins un capteur inertiel (16), en particulier d'un capteur d'accélération ou d'un capteur de vitesse de rotation conçu pour détecter des mouvements de la pompe à vide (11) et/ou l'orientation de la pompe à vide (11) et pour fournir des données de mesure correspondantes, en particulier sous forme de données de mesure brutes et/ou de données de mesure traitées, et/ou des informations obtenues par évaluation de ces données de mesure,
    caractérisée en ce que
    l'unité de mesure inertielle (14) est intégrée dans une traversée à vide (22) de la pompe à vide (11), en particulier, l'unité de mesure inertielle (14) est disposée sur une platine formant la traversée à vide (22).
  2. Pompe à vide (11) selon la revendication 1,
    dans laquelle un dispositif de commande (18) relié à l'unité de mesure inertielle (14) est associé à la pompe à vide (11), lequel est conçu pour évaluer les données de mesure de l'unité de mesure inertielle (14), et/ou
    un dispositif de sortie, en particulier une interface (29) ou un raccord d'accessoire (27), est associé à la pompe à vide (11), par lequel les données de mesure de l'unité de mesure inertielle (14) et/ou les informations obtenues par évaluation de ces données de mesure peuvent être émises ou appelées, et/ou
    un dispositif de mémoire (20) est associé à la pompe à vide (11), lequel est conçu pour mémoriser les données de mesure de l'unité de mesure inertielle (14) et/ou les informations obtenues par évaluation de ces données de mesure.
  3. Pompe à vide (11) selon la revendication 1 ou 2,
    dans laquelle l'unité de mesure inertielle (14) comprend un agencement spatial de plusieurs capteurs inertiels (16), en particulier l'unité de mesure inertielle (14) comprend deux ou trois capteurs d'accélération auxquels est associé respectivement l'un des trois axes de translation de la pompe à vide (11) s'étendant par paire perpendiculairement l'un à l'autre, et/ou deux ou trois capteurs de vitesse de rotation auxquels est associé respectivement l'un des trois axes de rotation de la pompe à vide (11) s'étendant par paire perpendiculairement l'un à l'autre.
  4. Pompe à vide (11) selon l'une des revendications précédentes,
    dans laquelle l'unité de mesure inertielle (14) est conçue comme un MEMS (système micro-électromécanique) ou est un composant d'un MEMS ou est conçue comme un système optique.
  5. Procédé de surveillance d'une pompe à vide (11) selon le préambule de la revendication 1 ou selon l'une des revendications précédentes, ou de surveillance d'un système à vide (12) comprenant au moins une pompe à vide (11) selon le préambule de la revendication 1 ou selon l'une des revendications précédentes,
    dans lequel, avant, pendant et/ou après un fonctionnement de la pompe à vide (11) ou du système à vide (12), des mouvements de la pompe à vide (11) et/ou son orientation et/ou des mouvements du système à vide (12) sont détectés au moyen de l'unité de mesure inertielle (14) de la pompe à vide (11), et des données de mesure correspondantes, en particulier sous forme de données de mesure brutes du capteur inertiel (16) et/ou sous forme de données de mesure traitées, et/ou des informations obtenues par évaluation de ces données de mesure sont fournies,
    caractérisé en ce que
    la pompe à vide (11) comprend un rotor (49) mis en rotation pendant le fonctionnement au moyen d'un moteur d'entraînement (25), et
    un déséquilibre du rotor (49) et/ou un état d'oscillation de la pompe à vide (11) et/ou du système à vide (12) est déterminé comme information d'état de la pompe à vide (11) et/ou du système à vide (12), et
    pendant le fonctionnement de la pompe à vide (11), le déséquilibre du rotor et/ou l'état d'oscillation sont déterminés de manière répétée, et
    - au moins une valeur pour une variation dans le temps, en particulier pour un taux de variation, du déséquilibre du rotor et/ou de l'état d'oscillation, est calculée, en particulier par rapport à un état de base respectif du déséquilibre du rotor et/ou de l'état d'oscillation déterminé à une vitesse de rotation de fonctionnement constante du rotor (49),
    - à l'approche d'une valeur limite relative ou absolue pour le déséquilibre du rotor et/ou pour l'état d'oscillation ou pour une modification dans le temps du déséquilibre du rotor et/ou de l'état d'oscillation, une valeur estimée pour la prochaine date de maintenance de la pompe à vide (11) est calculée ou un intervalle de maintenance actuellement prévu est adapté,
    - une valeur pour une réserve d'utilisation de la pompe à vide (11) est calculée, et/ou
    - une valeur de recommandation pour une période de temps jusqu'à la prochaine maintenance de la pompe à vide (11) est calculée et émise, en particulier en tenant compte de l'ancien profil d'utilisation de la pompe à vide (11).
  6. Procédé selon la revendication 5,
    dans lequel une ou plusieurs informations d'état de la pompe à vide (11) et/ou du système à vide (12) sont déterminées à l'aide des données de mesure,
    en particulier, la ou chaque information d'état est émise par un dispositif de sortie (27, 29) de la pompe à vide (11) et/ou est mémorisée dans un dispositif de mémoire (20) de la pompe à vide (11).
  7. Procédé selon la revendication 5 ou 6,
    dans lequel l'orientation de la pompe à vide (11) dans l'espace et/ou par rapport à un ou à plusieurs autres composants du système à vide (12) est déterminée comme information d'état de la pompe à vide (11) et/ou du système à vide (12).
  8. Procédé selon la revendication 7,
    dans lequel le dispositif de commande (18) de la pompe à vide (11) est conçu pour soit autoriser, soit interdire un démarrage du fonctionnement de la pompe à vide (11) en fonction de l'orientation déterminée de la pompe à vide (11), et/ou
    l'orientation déterminée de la pompe à vide (11) est prise en compte lors d'une évaluation d'un spectre de fréquences concernant des oscillations de la pompe à vide (11) et/ou du système à vide (12), et/ou l'orientation de la pompe à vide (11) n'est mémorisée que lors d'événements particuliers prédéfinis, en particulier
    lors d'une mise sous tension de la pompe à vide (11),
    lors d'un démarrage du fonctionnement de la pompe à vide (11),
    lors d'un démarrage du fonctionnement de composants prédéfinis - à l'exception de la pompe à vide (11) - d'un système à vide (12) comprenant la pompe à vide (11), et/ou
    lors d'une modification de la position de montage de la pompe à vide (11).
  9. Procédé selon l'une des revendications 5 à 8,
    dans lequel, en cas de dépassement d'une valeur limite relative ou absolue pour le déséquilibre du rotor et/ou pour l'état d'oscillation ou pour une modification dans le temps du déséquilibre du rotor et/ou de l'état d'oscillation, une réaction est déclenchée, en particulier un avertissement est émis.
  10. Procédé selon l'une des revendications 5 à 9,
    dans lequel un état d'oscillation de la pompe à vide (11) et/ou du système à vide (12) est déterminé comme information d'état de la pompe à vide (11) et/ou du système à vide (12), en particulier un spectre de fréquences concernant des oscillations de la pompe à vide (11) et/ou du système à vide (12) est déterminé, en particulier la pompe à vide (11) comprend un rotor (49) mis en rotation pendant le fonctionnement au moyen d'un moteur d'entraînement (25).
  11. Procédé selon la revendication 10,
    dans lequel l'état d'oscillation est déterminé, et en particulier mémorisé, pendant une montée en régime de la pompe à vide (11), c'est-à-dire lorsque la vitesse de rotation d'un rotor (49) de la pompe à vide (11) augmente, en particulier en outre après la montée en régime, lorsque le rotor tourne à la vitesse de fonctionnement, et/ou pendant un ralentissement ou une mise à l'arrêt de la pompe à vide (11), c'est-à-dire lorsque la vitesse de rotation d'un rotor (49) de la pompe à vide (11) diminue, en particulier des états de résonance de la pompe à vide (11) et/ou du système à vide (12) sont déterminés à cet effet, en particulier des informations concernant ces états de résonance sont fournies pour les émettre vers ou les consulter par un dispositif externe, en particulier par une commande de système (24) du système à vide (12), et/ou un avertissement est émis par la pompe à vide (11) et/ou par le système à vide (12) ou une adaptation de la vitesse de rotation du rotor (49) est effectuée automatiquement, afin d'éviter un fonctionnement de la pompe à vide (11) dans un état de résonance,
    et/ou la vitesse de rotation du rotor (49) est modifiée automatiquement si, à l'aide de l'état d'oscillation déterminé, un dispositif de commande (18) de la pompe à vide (11) ou une commande de système (24) du système à vide (12) détecte une ou plusieurs autres pompes à vide qui fonctionnent à la vitesse de rotation de fonctionnement au moins approximativement identique à celle de la pompe à vide (11), afin d'éviter des états de battement, et/ou un ou plusieurs paramètres prédéfinis de la pompe à vide (11) et/ou les signaux d'un ou plusieurs capteurs de la pompe à vide (11) sont surveillés à l'aide de l'état d'oscillation déterminé, en particulier en ce qui concerne leur comportement dans le temps, en particulier par rapport à un état de consigne de la pompe à vide (11) et/ou du système à vide (12) déterminé lors d'une phase d'apprentissage, en particulier automatique, et à la suite de la phase d'apprentissage, un dispositif de commande (18) de la pompe à vide (11) vérifie si le ou les paramètres surveillés et/ou le ou les signaux surveillés correspondent ou non à l'état de consigne et, en cas d'écart par rapport à l'état de consigne détecté lors de cette vérification, ladite modification du paramètre ou du signal concerné est soumise à une évaluation et/ou à une appréciation, en particulier quant à des critères pré-déterminés.
  12. Procédé selon l'une des revendications 5 à 11,
    dans lequel un ou plusieurs événements particuliers sont déterminés comme information d'état de la pompe à vide (11) et/ou du système à vide (12),
    en particulier, le ou les événements sont émis via un dispositif de sortie (27, 29) de la pompe à vide (11) et/ou sont mémorisés dans un dispositif de mémoire (20) de la pompe à vide (11).
  13. Procédé selon la revendication 12,
    dans lequel la pompe à vide (11) comprend un rotor (49) mis en rotation pendant le fonctionnement au moyen d'un moteur d'entraînement (25), et un déplacement axial du rotor (49) entre une première position axiale, en particulier une position de pré-vide, et une deuxième position axiale, en particulier une position de vide poussé, est détecté comme événement particulier pendant le fonctionnement de la pompe à vide (11), et/ou
    un mouvement de la pompe à vide (11) dans son ensemble est détecté comme événement particulier, en particulier, ce mouvement est analysé en termes de direction et d'amplitude de translations et/ou de rotations de la pompe à vide.
  14. Procédé selon l'une des revendications 5 à 13,
    dans lequel les données de mesure et/ou les informations obtenues par évaluation de ces données de mesure peuvent être émises ou consultées exclusivement en présence d'une autorisation, en particulier par l'intermédiaire d'une interface (29) ou d'un raccord d'accessoire (27) de la pompe à vide (11), et/ou
    les données de mesure et/ou les informations obtenues par évaluation de ces données de mesure sont émises vers une commande de système (24) d'un système à vide (12) comprenant la pompe à vide (11) et/ou sont consultées par cette commande de système (24), en particulier par l'intermédiaire d'une interface (29) ou d'un raccord d'accessoire (27) de la pompe à vide (11).
EP21161837.6A 2020-03-27 2021-03-10 Pompe à vide et procédé de surveillance d'une pompe à vide Active EP3808988B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20166248.3A EP3686432B1 (fr) 2020-03-27 2020-03-27 Pompe à vide
EP20170014.3A EP3736447A1 (fr) 2020-04-17 2020-04-17 Pompe à vide et procédé de surveillance d'une pompe à vide

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EP3808988A2 EP3808988A2 (fr) 2021-04-21
EP3808988A3 EP3808988A3 (fr) 2021-06-09
EP3808988B1 true EP3808988B1 (fr) 2024-01-10

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JP (1) JP7160978B2 (fr)
CN (1) CN113446243A (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007022657A1 (fr) * 2005-08-24 2007-03-01 Mecos Traxler Ag Dispositif de support magnetique pourvu d'un trou d'interconnexion sous vide ameliore

Family Cites Families (8)

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Publication number Priority date Publication date Assignee Title
DE102004048866A1 (de) 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe
JP4962851B2 (ja) * 2006-03-06 2012-06-27 株式会社島津製作所 真空ポンプ
DE102006034478A1 (de) * 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe
DE202015003927U1 (de) * 2015-05-29 2015-07-13 Oerlikon Leybold Vacuum Gmbh Steuerungselektronik für eine Vakuumpumpe sowie Vakuumpumpe
GB2551337A (en) * 2016-06-13 2017-12-20 Edwards Ltd Pump assembly, method and computer program
EP3536965B1 (fr) 2018-03-05 2021-09-22 Pfeiffer Vacuum Gmbh Pompe à vide dans laquelle le support d'un palier à roulement a une rigidité et/ou un amortissement réglable(s)
JP7006520B2 (ja) * 2018-06-14 2022-01-24 株式会社島津製作所 真空ポンプおよび診断システム
EP3686432B1 (fr) * 2020-03-27 2022-06-08 Pfeiffer Vacuum Technology AG Pompe à vide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007022657A1 (fr) * 2005-08-24 2007-03-01 Mecos Traxler Ag Dispositif de support magnetique pourvu d'un trou d'interconnexion sous vide ameliore

Also Published As

Publication number Publication date
EP3808988A2 (fr) 2021-04-21
EP3808988A3 (fr) 2021-06-09
CN113446243A (zh) 2021-09-28
JP7160978B2 (ja) 2022-10-25
JP2021156287A (ja) 2021-10-07

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