EP3832141B1 - Procédé de fonctionnement d'une pompe à vide - Google Patents

Procédé de fonctionnement d'une pompe à vide Download PDF

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Publication number
EP3832141B1
EP3832141B1 EP20205911.9A EP20205911A EP3832141B1 EP 3832141 B1 EP3832141 B1 EP 3832141B1 EP 20205911 A EP20205911 A EP 20205911A EP 3832141 B1 EP3832141 B1 EP 3832141B1
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EP
European Patent Office
Prior art keywords
rotor
bearing
wear
vacuum pump
increment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP20205911.9A
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German (de)
English (en)
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EP3832141A1 (fr
Inventor
Herbert Stammler
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Pfeiffer Vacuum Technology AG
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Pfeiffer Vacuum Technology AG
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Priority to EP20205911.9A priority Critical patent/EP3832141B1/fr
Publication of EP3832141A1 publication Critical patent/EP3832141A1/fr
Priority to JP2021127232A priority patent/JP7209054B2/ja
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Publication of EP3832141B1 publication Critical patent/EP3832141B1/fr
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic

Definitions

  • the invention relates to a method for operating a vacuum pump and a vacuum pump with a control device that is designed to carry out such a method.
  • vacuum pumps for example turbomolecular pumps and/or vacuum pumps with Siegbahn pump stages, are equipped with a rotor that has an active magnetic bearing. Since the active magnetic bearing is non-contact and lubricant-free, the normal operation of such a vacuum pump with active magnetic bearing is almost wear-free and maintenance-free.
  • malfunctions can also limit the service life of the vacuum pump with active magnetic bearing.
  • Such malfunctions are, for example, failures of the supply voltage or impulse-like or continuous external mechanical influences that go beyond the permissible framework. These effects are caused, for example, by earthquakes, impacts, vibrations, resonance events or by electric, magnetic or other high-energy fields or radiation.
  • malfunctions can occur due to process influences that cause a sudden change of flow rates of the media to be pumped and/or auxiliary media, for example during flooding, evacuation or when starting or stopping a process. In many cases, such malfunctions can lead to overloading and/or failure of the active magnetic bearing of the vacuum pump.
  • a secondary mechanical bearing system In such a case of overloading or failure of the active magnetic bearing, a secondary mechanical bearing system is usually provided, which during normal operation only engages with the rotor or a corresponding stator of the vacuum pump and only has a secure mechanical contact when the active magnetic bearing is inactive or defective between the rotor and the stator, this contact still allowing rotation of the rotor with respect to the stator of the vacuum pump.
  • the secondary mechanical bearing system ensures emergency bearing and adequate centering of the rotor within the stator.
  • the secondary mechanical storage system is commonly known as an emergency camp, backup camp, protection camp, landing camp, support camp, run-up camp or catch camp. This last term will be used below.
  • the operating state of emergency storage using one or more safety camps is referred to below as safety camp operation.
  • a backup bearing is usually clamped firmly on the side of the stator or on it, and it is completely stationary during normal operation.
  • the safety bearing can also be firmly clamped on the side of the rotor or on it and rotate completely with the rotor during normal operation of the vacuum pump.
  • “Completely stationary” and “completely rotating” in this context mean that all components of the safety bearing perform almost no relative movements with one another during normal operation without the effect of bearing loads and therefore do not fulfill any rotational bearing task during normal operation.
  • Safety bearings for vacuum pumps are usually not designed for long-term operation. Rather, the service life of a safety bearing during operation of the safety bearing is usually only a few minutes up to a few hours. Therefore, the backup bearings for vacuum pumps are only referred to as "time-proof". Even if a safety bearing is designed as a solid ball bearing, it does not have a sufficient load capacity for continuous operation in the available installation space. Furthermore, for the operation of a vacuum pump with a safety bearing, there is the requirement to keep the safety bearing free of lubricant or at least free of organic and/or volatile lubricants. Safety bearings are therefore often operated without lubrication or are wetted, impregnated or infiltrated with minimal amounts of special inorganic dry lubricants such as graphite or molybdenum disulfide.
  • known methods for operating vacuum pumps provide for the rotor of the vacuum pump to be brought either back into normal operation or to a standstill as quickly as possible after entry into backup bearing operation or in the event of failure of the active magnetic bearing, for example by flooding the entire vacuum system with it an auxiliary medium for braking the rotor of the vacuum pump or by electrical braking with the help of regenerative power supply, direct short-circuiting of the vacuum pump motor or by dissipating the regenerative braking energy generated in the vacuum pump motor to a dedicated load resistor.
  • One object of the invention is to create a method for operating a vacuum pump with which the backup bearing operation, which includes a period of time from an uncontrollable start of a malfunction of the vacuum pump until normal operation of the vacuum pump is resumed or until standstill occurs, is so low-wear as possible for the catch camp.
  • the method is intended for operating a vacuum pump that has a rotor, a stator, an actively controlled magnetic bearing for mounting the rotor, and a backup bearing for the rotor.
  • a set of operating specifications for the vacuum pump is first provided, which has at least one operating state of the vacuum pump to be achieved in the event of a malfunction.
  • a fault event is detected in which the rotor leaves a spatial area provided for the rotor in relation to the stator in such a way that wear occurs on the backup bearing.
  • a wear increment for the back-up bearing is estimated from the detected disturbance event and the wear increment is added to a variable for the total wear of the back-up bearing. Finally, based on the set of operating specifications for the vacuum pump and based on the variables for the total wear of the back-up bearing, it is determined whether a measure is taken to stabilize the rotor.
  • the operating state of the vacuum pump which is to be achieved in the event of a malfunction and is covered by the set of operating specifications, can be, for example, a standstill of the rotor of the vacuum pump, which should be achieved as quickly as possible, or vice versa, maintaining the vacuum by replacing the rotor with a Stabilization is returned to normal operation with a rotation in the space provided.
  • the set of operating targets may include other operating states between these extremes, i.e. between the rotor being stationary and the vacuum being maintained with the rotor stabilized.
  • the disruption event can be detected, for example, by means of at least one sensor that is designed to monitor the spatial position of the rotor.
  • magnetic bearing position sensors may be used, with two pairs of such position sensors being arranged perpendicular to each other in the radial direction with respect to an axis of rotation of the rotor and a single or another pair of position sensors being arranged in the axial direction, i.e. along the axis of rotation of the rotor.
  • vibration and/or acceleration sensors can be used to detect a malfunction event of the vacuum pump.
  • the wear increment and the variable for the total wear of the back-up bearing can be specifically quantified as a percentage of an allowable wear of the back-up bearing, wherein the allowable total wear is based on empirical values and corresponds to a condition at which the back-up bearing is considered to be completely worn out and must be replaced during vacuum pump maintenance .
  • Measured values from the sensors described above can be used to determine the increment of wear, to which the increment of wear can be assigned using a calibrated table. For example, readings from magnetic bearing position sensors may describe the length of time and intensity of contact of the rotor with the back-up bearing, and the length of time as well as the intensity of contact between backup bearing and rotor can be assigned to a wear increment as a percentage of the total allowable wear.
  • the measure for stabilizing the rotor includes, in particular, bringing the rotor back into a predetermined spatial position or desired position using the active magnetic bearing, which is provided for normal operation of the vacuum pump and can be checked, for example, using magnetic bearing position sensors. Since the measure brings about renewed stabilization of the rotor, which was already stabilized before the disruption event, this renewed stabilization is also referred to as "restabilization" of the rotor.
  • a "mediation" takes place between the set of operating specifications for the vacuum pump and the variable for the total wear of the back-up bearing. For example, if the operation of the vacuum pump requires that the vacuum must be maintained at all times, a measure to stabilize the rotor in the event of a disturbance event can always be carried out as long as the variable for the total wear of the back-up bearing is below a predetermined threshold value. Conversely, if the variable for the total wear reaches this threshold value, it can be decided that no measure is taken to stabilize the rotor and the rotor is instead brought to a standstill in order not to endanger the operational reliability of the vacuum pump.
  • the wear of the backup bearing can thus be minimized by the "mediation" between the set of operating specifications and the variables for the total wear, since this mediation achieves a compromise between normal operation with stabilization of the rotor and full coasting of the rotor of the vacuum pump to a standstill can. Due to the minimized wear of the back-up bearing, the length of time until replacement of the back-up bearing is required during vacuum pump maintenance can be maximized.
  • the vacuum pump may be shut down. Safe operation of the vacuum pump may no longer be guaranteed without measures to stabilize the rotor. Therefore, the vacuum pump or the rotor is shut down until it comes to a standstill, although the total wear of the backup bearing increases due to the full run-out of the rotor. However, by shutting down the vacuum pump, possible damage to the vacuum pump outside of the backup bearing, for example in the area of the pump-active elements such as the stator and rotor disks, can be avoided.
  • the determination of whether the action to stabilize the rotor is carried out again can again be based on the set of operating parameters for the vacuum pump and using the variables for the total wear of the back-up bearing. If the measure for stabilizing the rotor fails, this measure is repeated iteratively in the present embodiment, it being possible for the waiting time between the stabilization attempts to increase with the number of iterations. Through the iterative attempts to stabilize the stator, the wear of the safety bearing can be further minimized, since overall the probability is increased that the rotor of the vacuum pump will return to normal operation without contact with the safety bearing as a result of the stabilization.
  • the action to stabilize the rotor may be successful with a significantly higher probability than during the disturbance event.
  • it can be checked whether the disruption event that was initially detected and is assigned to the wear increment continues, i.e. during and/or after the measure to stabilize the rotor.
  • an operating condition to be achieved within the set of operating targets for the vacuum pump can be selected if the set of operating targets for the vacuum pump comprises more than one operating state to be achieved.
  • a characteristic map can also be used that includes the probability of the rotor being stabilized again as a function of the current speed of the rotor and/or other operating parameters of the vacuum pump .
  • the map can in turn be based on empirical values.
  • the vacuum pump can be shut down and/or an error message can be issued if the variable for the total wear of the Safety camp exceeds a predetermined threshold.
  • the threshold value can depend on the expected service life of the backup bearing.
  • the size of the wear increment can be estimated from experimental data and/or from experience.
  • the size of the wear increment is estimated in particular on the basis of measured values from at least one sensor, which are determined during the disruption event.
  • the size of the wear increment can depend on the intensity of the disturbance event, which is reflected, for example, in the sensor's experimental data.
  • the size of the wear increment can also be estimated as a function of a speed of the rotor when the disruption event occurs and/or as a function of an installation position of the vacuum pump.
  • the size of the wear increment can in particular be proportional to the square of the speed of the rotor. Since the rotational energy of the rotor is also proportional to the square of the rotational speed of the rotor, the size of the wear increment can thus increase in proportion to the rotational energy of the rotor. Overall, there is a different evaluation of fault events in the documentation of wear depending on the speed of the rotor and the installation position of the vacuum pump.
  • the wear increment can comprise at least two parts.
  • a first portion may be based on an initial acceleration of the touchdown bearing when the disturbance event occurs, while a second portion may be based on expected wear of the touchdown bearing during stabilization of the rotor or during rotor coastdown can be based until it comes to a standstill.
  • the wear increment can also include a third component, which can be based on the backup bearing running out after the rotor has been stabilized. Each of the three components can in turn have different values depending on the course of the measure to stabilize the rotor. Based on the three parts of the wear increment, the disruption event and its effect on the wear of the back-up bearing can be evaluated in detail.
  • the set of operating targets for the vacuum pump may include at least two operating states of the vacuum pump to be achieved during a fault event, including maintaining the vacuum within the vacuum pump and shutting down the vacuum pump.
  • the operating states to be achieved in the event of a fault event can be prioritized by a user of the vacuum pump and/or by a learning algorithm.
  • these operating states can be dynamically evaluated either by the user of the vacuum pump and/or by the learning algorithm in order to adapt the operating state to be preferably achieved to the respective operating mode of the vacuum pump or a vacuum system in which it is located.
  • the wear increment for the back-up bearing estimated on the basis of the detected disturbance event can be updated during the measure for stabilizing the rotor or during the shutdown of the vacuum pump.
  • the updated wear increment may be added to the back-up bearing total wear variable in place of the previously estimated wear increment.
  • the initial estimate of the wear increment is thus adjusted to the course of actions taken either to stabilize the rotor or to shut it down of the vacuum pump. This allows the actual wear of the back-up bearing to be documented in a more accurate manner using the total wear variables.
  • the safety bearing can have a number of bearing points.
  • a respective wear increment can be determined for each bearing point and added to a respective variable for the total wear at the respective bearing point.
  • the vacuum pump can be shut down and/or an error message can be output if at least one of the variables for the total wear at one of the bearing points exceeds a predetermined threshold value.
  • Another object of the invention is a vacuum pump with a rotor, a stator, an actively controlled magnetic bearing for mounting the rotor and a safety bearing for the rotor.
  • the vacuum pump also includes at least one means for detecting a fault event in which the rotor leaves a spatial area provided for the rotor in relation to the stator in such a way that wear occurs on the safety bearing.
  • the vacuum pump includes a control device and a memory, which includes a variable for the total wear of the back-up bearing.
  • the control device is designed to carry out a method as described above.
  • the memory which includes the variable for the total wear of the safety bearing, is thus directly assigned to the safety bearing, i.e. the memory forms a unit with the safety bearing, which can be replaced together with the safety bearing when the vacuum pump is serviced.
  • the memory can be integrated into the safety bearing or represent a further device which nevertheless forms a spatial unit with the safety bearing, for example. In both cases, however, the memory is a separate unit in relation to the control device with which the operation of the vacuum pump and in particular the magnetic bearing of the rotor are regulated and which, in relation to the maintenance of the vacuum pump, is independent of the backup bearing and the memory for the variable of the total wear is to be treated.
  • the memory thus enables documentation of the wear of the backup bearing, for example over its entire service life and independently of the remaining control electronics of the vacuum pump.
  • the memory may be configured to allow only the touchdown bearing wear increments to be added to the total touchdown bearing wear variable and otherwise keep the total touchdown bearing wear variable unchanged throughout the life of the touchdown bearing.
  • the at least one means for detecting the disruption event can include a sensor that is designed to detect the spatial position of the rotor and/or a vibration and/or acceleration sensor that is attached to the stator. With the help of such a sensor, it is possible to obtain indications of the start of a disruption event in an early phase. This applies in particular when the sensor is attached to the stator of the vacuum pump as a vibration and/or acceleration sensor.
  • the vacuum pump can also be a turbomolecular pump or a vacuum pump with Siegbahn pump stages, in which the rotor is supported by means of the actively controlled magnetic bearing.
  • the 1 Turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, at which in a known manner Way a recipient, not shown, can be connected.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms when the vacuum pump is aligned according to FIG 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (cf. also 3 ). Several connections 127 for accessories are provided on the electronics housing 123 .
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a flushing gas connection through which flushing gas to protect the electric motor 125 (see e.g 3 ) before the pumped gas in the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, can be admitted.
  • Two coolant connections 139 are also arranged in the lower part 121, with one of the coolant connections as an inlet and the other coolant connection is provided as an outlet for coolant that can be directed into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate solely on air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141 .
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be operated when it is oriented in a different way than in FIG 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 cannot be arranged facing downwards but to the side or directed upwards. In principle, any angles are possible.
  • various screws 143 are also arranged, by means of which components of the vacuum pump that are not further specified here are fastened to one another.
  • a bearing cap 145 is attached to the underside 141 .
  • fastening bores 147 are arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface. This is not possible with other existing turbomolecular vacuum pumps (not shown), which in particular are larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant fed in and out via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about an axis of rotation 151 .
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pumping stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator discs 157 are held at a desired axial distance from one another by spacer rings 159 .
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes.
  • Other turbomolecular vacuum pumps (not shown) exist that do not have Holweck pumping stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 in the shape of a cylinder jacket, fastened to the rotor hub 161 and carried by it, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction. Furthermore, two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested in one another as seen in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and forming with it the first Holweck pump stage following the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and therewith forms a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and therewith forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can be provided at the lower end of the radially inner Holweck rotor sleeve 165 .
  • the above-mentioned pumping-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite Lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and drive the gas to operate the vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided for the rotatable mounting of the rotor shaft 153 .
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter that increases towards the roller bearing 181 .
  • the injection nut 185 is in sliding contact with at least one stripper of an operating fluid store.
  • an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the resource reservoir comprises a plurality of absorbent discs 187 stacked on top of one another, which are impregnated with a resource for the roller bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid reservoir via the scraper to the rotating spray nut 185 and, as a result of the centrifugal force, is conveyed along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it e.g. fulfills a lubricating function.
  • the roller bearing 181 and the operating fluid reservoir are surrounded by a trough-shaped insert 189 and the bearing cover 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, each of which has a ring stack made up of a plurality of permanent-magnetic rings 195, 197 include.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the ring magnets 195 on the rotor side being arranged radially on the outside and the ring magnets 197 on the stator side being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 produces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the ring magnets 195 on the rotor side are carried by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the ring magnets 197 on the stator side are carried by a support section 203 on the stator side, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119 .
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201 .
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the support section 203 and a fastening ring 211 connected to the support section 203 .
  • a disc spring 213 can also be provided between the fastening ring 211 and the ring magnet 197 .
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages in the event of an excessive radial deflection of the rotor 149 relative to the stator, in order to create a radial stop for the rotor 149 to form, so that a collision of the rotor-side structures is prevented with the stator-side structures.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough so that the backup bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures is prevented under all circumstances.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217 .
  • the motor stator 217 is fixed in the housing inside the motor room 137 provided for the electric motor 125 .
  • a sealing gas which is also referred to as flushing gas and which can be air or nitrogen, for example, can get into the engine compartment 137 via the sealing gas connection 135 .
  • the sealing gas can protect the electric motor 125 from process gas, e.g. from corrosive components of the process gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.
  • a labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor compartment 137, in particular in order to achieve better sealing of the motor compartment 217 in relation to the Holweck pump stages located radially outside.
  • the exemplary turbomolecular pump 111 shown has the passive permanent magnet bearing 183 and the backup bearing 215 . Since the method according to the invention, from which 8 an exemplary embodiment is shown, refers to a vacuum pump with an active magnetic bearing of a rotor or with an actively controlled magnetic bearing, which is connected to a safety bearing such as the safety bearing 215 (cf. 3 ) is in 6 additionally shown such a vacuum pump 10 with active magnetic bearing, which is described below. Apart from the components for mounting the rotor 149, this vacuum pump 10 can include all the features of the vacuum pump 111 described above.
  • the vacuum pump 10 includes a rotor 12 which carries a plurality of turbo rotor disks 14 and can be driven by a motor 16 to rotate about the rotor axis 18 so that the turbo rotor disks 14 rotating relative to the stator disks (not shown) produce a pumping effect.
  • the pumping action runs from top to bottom.
  • the rotor 12 is supported by a plurality of magnetic bearings.
  • a first radial bearing 20 for the rotor 12 is arranged at an outlet end of the rotor 12 .
  • An axial bearing 22 is arranged at the same end of the rotor.
  • a second radial bearing 24 is arranged on the inlet-side end of the rotor 12 .
  • the first radial bearing 20 and the axial bearing 22 are designed to be actively controlled. You can therefore actively counteract a radial or axial deflection of the rotor 12 from its ideal position, for example using electromagnets.
  • a radial sensor arrangement 26 is arranged in the radial bearing 20 , by means of which the radial deflection of the rotor 12 can be measured in a first axial region in two spatial directions perpendicular to the rotor axis 16 .
  • One Axial sensor arrangement is also provided, but not shown here for the sake of simplicity.
  • the second radial bearing 24 is passive, i.e. it does not include an actuator for influencing the rotor 12. Rather, the second radial bearing 24 has, for example, a plurality of permanent magnets on the rotor and stator side.
  • a second radial sensor arrangement 28 is provided, by means of which the deflection of the rotor 12 can be measured in a second axial area.
  • the second radial sensor arrangement 28 is arranged both between the first radial bearing 20 and the second radial bearing 24 and between the motor 16 and the second radial bearing 24 .
  • the second radial sensor arrangement 28 is attached to a component 30 which defines an engine compartment 32 of the engine 16 .
  • the first and the second radial sensor arrangement 26 and 28 are clearly spaced apart from one another in the axial direction. If they measure different deflections of the rotor 12 in the corresponding axial area, it can be concluded that the rotor 12 is inclined, i.e. that the rotor axis 18 of the rotor 12 is not parallel to an ideal rotor axis, which can also be referred to as the zero axis. As soon as an inclination is detected, the active, first radial bearing 20 can counteract this. For this purpose, the first radial bearing 20 can, for example, influence the rotor 12 in a pulsed manner in order to push the rotor 12 back into its upright position, as it were.
  • This type of control can be compared to that of an inverse pendulum.
  • an impulse is introduced into the rotor 12 below which counteracts the tilting and at best directly or gradually returns the rotor 12 to its upright position so that the rotor axis 18 is parallel to the zero axis.
  • the inclination is regulated, but the radial position of the rotor 12 is also adjusted regulated.
  • inclination and position control are superimposed on one another.
  • the radial bearings 20, 24 and the axial bearing 22 are each provided with a safety bearing (not shown), for example a safety bearing 215, as is shown in 3 is shown.
  • An exemplary radial sensor arrangement 34 is shown in 7 shown.
  • One or both of the first and second radial sensor arrays 26 and 28 can be designed accordingly.
  • the radial sensor arrangement 34 comprises an annular circuit board 36 on which a plurality of coils 38 are applied.
  • a rotor to be deflected would extend through the ring with a rotor axis perpendicular to the plane of the image.
  • the rotor is deflected, i.e. in 7 shifts along the image plane, this changes the voltage induced in the coils 38, which leads to a changed measurement signal. The deflection can therefore be inferred from this measurement signal.
  • Two coils are provided opposite each other for each direction of movement x and y.
  • a five-axis active magnetic bearing can take place, which, with the exception of the axis of rotation, supports the rotor 12, 149 in a completely actively controlled and non-contact manner.
  • one or two bearing axes and/or one axial or one of two radial, two-axis bearing planes can be used instead of an active one with a passive permanent magnet bearing, a contacting tip plain bearing or a roller bearing, which is, for example, a ball bearing acts, to be carried out.
  • Passively acting permanent magnet bearings typically also have backup bearings (cf. the backup bearing 215 from 3 ), contacting slide or roller bearings, however, usually not.
  • the term "safety bearing” always means the various possible configurations of safety bearings acting on one, three, four or five axes in their entirety.
  • the retainer bearings 215 of the vacuum pumps 10, 111 have spatially separate bearing points, which are designed as single-row full ball bearings or as paired, ie matched to one another or selected for minimum bearing play, in an O or X arrangement.
  • Single-row ball bearings are primarily used for purely radial bearings. If the durability requirements and/or the bearing load of a backup bearing 215 are low, it is also possible to use a single-row ball bearing for purely axial or combined radial and axial bearing points. Higher demands on an axial or combined radial and axial bearing can be met by using matched pairs of ball bearings.
  • the components of the ball bearings consist of different materials.
  • the inner and outer rings of the ball bearings are made of steel, stainless steel or specially hardened steel grades for use in roller bearings.
  • the rolling elements can also consist of a specially high-quality steel grade or of ceramic materials.
  • a bearing cage that may be present can also be made of specially highly tempered types of steel or of a wear-resistant plastic with self-lubricating properties, with or without fiber content to increase strength. In all cases, steel components can be hardened in sections or areas, completely or specifically on individual surfaces using various types of heat treatments.
  • Solid ball bearings do not have a guide element for the rolling elements such as a bearing cage or other form of rolling element spacers.
  • the ball bearing is filled with as many balls as possible.
  • a special filling cutout in the walls of the bearing ring can support the process of filling the balls.
  • the larger number of possible rolling elements compared to a design with a bearing cage enables a higher absolute load capacity of the bearing with the same size.
  • bearing cages are usually not sufficiently robust to withstand the high accelerations of the bearing in use without being damaged.
  • the safety bearing 215 is firmly clamped on the side of the stator or on this, and it is completely stationary during normal operation of the vacuum pump 10, 111.
  • the retainer bearing 215 can also be firmly clamped on the side of the rotor 149 or on it and rotate completely with the rotor 149 during normal operation of the vacuum pump 10, 111. "Completely stationary” and “completely rotating” each mean that all the components of the backup bearing 215 perform almost no relative movements among themselves without the effect of bearing loads during normal operation of the vacuum pump 10, 111.
  • the other, freely rotatable half of the backup bearing 215 is arranged with a free gap to the opposite side, so that only if the rotor 12, 149 is deflected beyond the limit during normal operation of the active magnetic bearing goes beyond the usual level, a touching contact between the safety bearing 215 and a contact surface in the stator and thus the emergency storage, which mechanically limits the deflection, is produced.
  • a rotation between the inner and outer ring of the backup bearing 215 which causes the backup bearing 215 to wear, only takes place when the backup bearing is in operation. The remaining play between the contact surfaces is referred to as back-up bearing play.
  • the backup bearing play is viewed as the absolute total play of the system in a movement axis or plane.
  • this is the absolute difference in the diameter of both contact surfaces and not the difference in the two radii, which is the size of the actual, would describe the absolute gap that prevails on average at the circumference of the contact surfaces during normal operation.
  • This applies analogously to an axial bearing, where there are corresponding linear dimensional distances between the contact surfaces.
  • parasitic drag effects can lead to the freely rotatable half of the backup bearing 215 independently beginning to rotate with the freely spaced opposite side of the backup bearing 215.
  • the parasitic drag effects are caused, for example, by electromagnetic interactions or by gas friction in a narrow gap at very high speed differences or speed differences between the halves of the backup bearing 215.
  • the parasitic drag effects cause the freely rotating half of the backup bearing 215 to appear to remain stationary on the stator side when observed in a global reference system.
  • the undesired co-rotation occurs permanently, unnecessary wear of the safety bearing 215 is associated with it.
  • the freely rotatable half of the backup bearing 215 is acted upon in such a way that the undesired rotation is suppressed or sufficiently inhibited.
  • the effect occurs, for example, by means of mechanically touching, electromagnetically acting braking elements or by means of special bearing configurations, such as by means of rolling elements used in a clamping manner or bearing elements that are deliberately designed to be out of round or imperfect.
  • the rotor 12, 149 is deflected out of its predetermined range of motion. This deflection is spatially limited by the contact of the freely rotatable half of the backup bearing 215 with the opposite side. Due to sliding and static friction effects, a very fast, almost complete Equalization of the rotational speeds of the freely rotatable half and the opposite side in the backup bearing 215 causes. The emergency storage that occurs as a result prevents further damage to the vacuum pump 10, 111 due to undesired contacts between the rotor and stator elements. The vacuum pump 10, 111 is in backup camp mode.
  • either the safety bearing operation is ended by resuming the active magnetic bearing, or the pump remains in the safety bearing operation until the rotor 12, 149 comes to a standstill.
  • Resuming active magnetic storage is also referred to as restarting, resuming, or restabilization.
  • the process of the rotor 12, 149 coasting down, slowing down or running down to a standstill during backup bearing operation, in particular from an operating speed of the vacuum pump 10, 111 to a standstill, is generally referred to as full coasting down. If restabilization takes place during backup bearing operation before the rotor 12, 149 has come to a standstill, this is referred to as a partial coasting with a specific initial and final speed.
  • the partial deceleration takes place, for example, from the operating speed of the vacuum pump 10, 111 to a restabilization speed, which is lower than the operating speed but approximately the same. All of these processes include a period of time of different lengths between a start and end point in the operation of the safety camp, which is also referred to as the running time in the operation of the safety camp.
  • the type of fault can be determined in detail by considering additional sensors on, in or near the vacuum pump 10, 111, for example using one or more vibration and/or acceleration sensors that detect one or more effective directions. If disturbance events are detected by means of such sensors on the stator of the vacuum pump 10, 111, the onset of disturbances can be identified earlier than solely by monitoring the position signals of the radial sensor arrangements 26, 28 for the rotor 12, 149 within the active magnetic bearing. Mechanical disturbances usually come from the system or stator side and lead to a displacement of the stator in space. When the deflection begins, the rotor 12, 149, as a stabilized gyroscope, follows the position of the stator with a delay due to the active magnetic bearing.
  • a possible cause of a fault in the magnetic bearing is a failure of the supply voltage.
  • the safety camp operation can be avoided or delayed in various ways.
  • an element or a controller of the vacuum pump 10, 111 or the active magnetic bearing can have an energy store, for example single-use battery or primary cells and/or accumulators and/or high-capacity capacitors, which ensure an emergency supply of the active magnetic bearing.
  • the drive contained in the vacuum pump 10, 111 can be designed in such a way that it can not only drive but also act as a generator. This converts rotational energy back into electrical energy, which then enables the active magnetic bearing to be supplied with an emergency supply.
  • the wear of the backup bearing 215 that occurs during backup bearing operation depends on a number of factors, of which the running time and the speed of the rotor 12, 149 in backup bearing operation are the primary influencing factors.
  • Another influencing factor is the relative speed between the freely rotatable half of the safety bearing and its opposite side at the beginning of a safety bearing operation, i.e. at the moment of contact of the halves of the safety bearing, since at the moment of contact an immediate, abrupt acceleration of the safety bearing takes place.
  • the freely rotatable half of the backup bearing 215 and its opposite side with the rotor 12, 149 are in a chaotic, unstable operating phase.
  • this operating phase is divided into several steps.
  • the opposing side that comes into contact pulls the freely rotating ring of the backup bearing 215 with it, and this ring then pulls the rolling elements of the backup bearing 215 with it.
  • a respective relative movement with sliding friction takes place between all elements, i.e. the opposite side, the freely rotating ring of the backup bearing, the rolling elements of the backup bearing 215 and the stationary ring of the backup bearing 215. All elements then reach a stable operating state in which a predominantly non-chaotic Rolling off and thus an intended function of the elements take place.
  • a chaotic operating condition both between the safety bearing and the opposite side and between elements inside the safety bearing, various states of friction, breakaway forces and load peaks of the load arise, which are all the higher, the higher the acceleration that occurs.
  • the backup bearing play also means that, depending on the configuration and/or installation orientation of the vacuum pump 10, 111, the freely rotating half of the backup bearing 215 and its opposite side temporarily or permanently execute a rolling movement towards one another during the backup bearing operation.
  • this phenomenon is known in the case of incorrectly designed bearing points.
  • this constellation is referred to as a rotating shaft with a loose fit on the inner ring and a circumferential load.
  • the rotational speed corresponds to the freely rotating ring or the freely rotating half of the backup bearing 215 does not correspond to the rotational speed of the rotor 12, 149, but deviates slightly from this, since the shifting to one another causes an additional transmission ratio.
  • the backup bearing 215 Since the backup bearing 215 is not designed for permanent operation and the service life of a backup bearing 215 is usually only a few minutes to a few hours during backup camp operation, the backup camp operation should be kept as short as possible. Each backup bearing operation leads to wear of the backup bearing 215, both between the contact surfaces and within the backup bearing 215 between the individual elements, i.e. the rolling elements and inner and outer rings. In the extreme case, a vacuum pump 10, 111 is no longer ready for operation after a serious disruption event with backup bearing operation and must be repaired before it is next put into operation.
  • a schematic block diagram of a method according to the invention is shown, which is used to operate a vacuum pump 10, 111 (cf. Figures 1 to 6 ) is provided, which is an actively controlled magnetic bearing 20, 22 for supporting the rotor 12, 149 and a corresponding safety bearing 215.
  • the method can also be used with other vacuum pumps that have an actively controlled magnetic bearing and a safety bearing.
  • the method can be used in a vacuum pump with Siegbahn pump stages.
  • the method 300 begins at 310 by detecting a disturbance event in which the rotor 12, 149 leaves a spatial region in relation to the stator that is provided for the rotor 12, 149 in normal operation.
  • the disturbance event is detected, for example, by means of the magnetic bearing position sensors 26, 28, which detect the radial and axial position of the rotor 12, 149.
  • a wear increment 315-1 associated with the detected fault event is estimated.
  • the estimated wear increment 315 can be estimated, for example, based on the measurement data from the magnetic bearing position sensors 26, 28, which indicate how far the rotor 12, 149 has moved from the position intended for this normal operation.
  • the wear increment 315 - 1 is estimated using this measurement data and using empirical values that are assigned to these measurement values.
  • the wear increment 315 - 1 is then transferred to a memory 320 which includes a variable for the total wear of the backup bearing 215 and is therefore provided for documenting the wear of the backup bearing 215 .
  • the accumulator 320 therefore belongs to the vacuum pump 10, 111 and can be arranged in the vicinity of the backup bearing 215 (cf. 3 ).
  • the wear increment 315 - 1 is added to the variable 325 for the total wear of the backup bearing 215 .
  • the wear increment 315-1 and the variable 325 for the total wear of the backup bearing 215 are each represented as a percentage that relates to the maximum permissible wear of the backup bearing 215, at which maintenance of the vacuum pump 10, 111 with replacement of the backup bearing 215 is required.
  • the wear increment 315-1 and the variable 325 for the total wear of the backup bearing 215 each relate to a percentage of the total service life of the backup bearing 215.
  • a set 330 of operating specifications for the vacuum pump 10, 111 is also provided.
  • the set 330 of operating targets includes operating states of the vacuum pump 10, 111 that are to be achieved upon the occurrence of the disturbance event detected at 310.
  • the operating states to be achieved are, for example, "maintain a vacuum at all costs” and “bring the rotor of the turbomolecular pump to a standstill as quickly as possible”.
  • the set 330 of operating specifications for the vacuum pump 10, 111 can include other operating states of the vacuum pump 10, 111 to be achieved, which are to be classified between the "extreme states", i.e. between "maintain vacuum” and "standstill of the rotor".
  • a control device detects the vacuum pump 10, 111, which is located in the electronics housing 123 (cf. Figures 1 to 3 ) is housed, the information from step 310 that a fault event for the rotor 12, 149 of the vacuum pump 10, 111 was detected.
  • the control device records the variable 325 for the total wear of the backup bearing 215 from the memory 320 and the set 330 of the operating specifications for the vacuum pump 10, 111.
  • the variable 325 for the total wear of the backup bearing 215 and the set 330 the operating specifications for the vacuum pump 10, 111 "conveyed".
  • a measure to stabilize the rotor 12, 149 is being carried out. Such a measure includes the rotor 12, 149 being returned to a predetermined spatial position for normal operation of the vacuum pump 10, 111 by means of the active magnetic bearing.
  • the vacuum pump 10, 111 is shut down at 360, with the rotor 12, 149 fully coasting down to a standstill.
  • a further wear increment 315-2 is determined at 360, which depends on the rotational speed of the rotor at the start of full run-out and on empirical values for wear during full run-out.
  • the full coastdown wear increment 315-2 is transferred to the memory 320 and added to the total wear increment of the back-up bearing 215 variable 325 in place of the estimated wear increment 315-1.
  • the estimated wear increment 315-1 is thus updated using the wear increment 315-2 determined for full run-out, with a difference between the wear increments 315-2 and 315-1 being added to the variable 325 for the total wear of the backup bearing 215, for example.
  • an updated wear increment 315-3 associated with the failed attempt to stabilize the rotor 12, 149 is determined at 390. Similar to the wear increment 315-2, the updated wear increment 315-3 is added to the variable 325 for the total wear of the vacuum pump 10, 111 instead of the estimated wear increment 315-1. Again, only a difference between the wear increments 315-3 and 315-1 can subsequently be added to the variable 325 for the total wear of the vacuum pump 10, 111, i.e. after the estimated wear increment 315-1 has already been added to the variable 325 for the total wear of the vacuum pump 10, 111 was added.
  • steps 340 to 380 are repeated, i.e. it is first determined at 340 whether another attempt to stabilize the rotor 12, 149 should be made.
  • steps 340 to 380 are carried out again, it is additionally checked whether the disruption event detected at 310 is still present. If this is not the case, the probability that stabilization of the rotor 12, 149 will be successful increases significantly. Accordingly, in this case it is determined at 350 that stabilization of the rotor 12, 149 is to be carried out.
  • steps 390, 340, 350 and 370 may be iteratively repeated, with the waiting time at 390 being increased for each failed attempt to stabilize the rotor 12, 149 .
  • the set 330 of operating specifications for the turbomolecular pump is influenced, as indicated by the arrow 395.
  • a prioritization between the operating states of the vacuum pump 10, 111 to be achieved in the event of a fault event can be changed using the value of the variable 325 for the overall wear of the vacuum pump 10, 111.
  • the set 330 of operating specifications for the vacuum pump 10, 111 includes not only the operating states to be achieved, but also values for prioritizing between these operating states, which can be used at 340 and 350 to decide whether a measure for Stabilization of the rotor 12, 149 is to be performed.
  • the documentation of the wear for the backup bearing 215 is explained in detail below using numerical examples for the wear increment 315-1 and the variable 325 for the total wear.
  • the numerical values are representative of a vacuum pump 10, 111 which is a turbomolecular pump. However, depending on the type of vacuum pump, they can vary and assume values other than those specified.
  • the wear increment 315-1 and the variable 325 for the total wear of the backup bearing 215 each relate to a percentage of the total service life of the backup bearing 215.
  • the wear is documented in such a way that the variable 325 for the total wear of the backup bearing 215 initially initialized with zero and then for each detected fault event (cf. step 310 in 8 ) is increased with a wear increment 315-1. If variable 325 for the total wear of backup bearing 215 reaches the value of 100%, an error message is output. The value of 100% for the total wear thus corresponds to the expected service life of the safety bearing 215.
  • variable 325 for the total wear of the retainer bearing 215 reaches this value of 100%, for example while the vacuum pump 10, 111 is running down, the variable 325 for the total wear of the retainer bearing 215 will continue with wear increments 315- 1 increased in order to document the wear of the safety bearing 215 as completely as possible. This makes it possible for the variable 325 to have a value greater than 100%, for example 130%, when the vacuum pump 10, 111 is at a standstill.
  • variable 325 for the total wear of backup bearing 215 can be initialized with a value of 100%.
  • the variable 325 is decreased by a respective wear increment 315-1 for each disturbance event. With this "negative counting" of the wear increments, an error message is output when variable 325 reaches the value of 0%.
  • the variable 325 can assume a negative value, for example -30%, in accordance with the example above until the vacuum pump 10, 111 has come to a standstill.
  • step 360 a full deceleration from the operating speed of the vacuum pump 10, 111, ie from its achievable final speed, to standstill while maintaining the vacuum causes a wear increment 315-2 of 41%.
  • this wear increment 315-2 is made up of two components. The first component results from the initial acceleration of the freely rotating part of the safety bearing 215 and is 1% in the present example, while the second component results from the actual rundown of the rotor 12, 149 in the safety bearing operation to a standstill and is 40% in the present example.
  • the wear increment 315-2 is also halved to a value of approximately 20%.
  • the full run-out of the rotor 12, 149 leads to a wear increment 315-2 of 21% after both components have been added together.
  • a disturbance event, which occurs at step 310 (cf. 8 ) leads to the operation of the safety camp can either have a short-term or permanent effect. If the disruption event disappears after a short time, the rotor 12, 149 is not fully run down because a directly executed attempt to restabilize the active magnetic bearing and the rotor 12, 149 can succeed immediately.
  • the wear increment 315-3 is typically made up of three components. The first component in turn results from the initial acceleration of the backup bearing 215 and is 1%, while the second component results from the actual process of restabilization and contributes about 1.5% to the wear increment 315-3.
  • the third component relates to the free run-out of the safety bearing 215 until it comes to a standstill, with a contribution to the wear increment 315-3 of approximately 0.5%.
  • a singularly occurring, short-term disturbance with brief safety bearing operation in a period of a few seconds consequently leads to a total wear increment 315-3 of 3% in the optimal case, in which the restabilization of the rotor 12, 149 by means of the active magnetic bearing is immediately successful.
  • the wear increment 315-2 for a longer-lasting disturbance is made up of the following components: i) 1% due to the acceleration of the backup bearing 215, ii) 1.5% due to the restabilization attempt and iii) 20% due to the rapid full stop with flooding of the vacuum pump 10, 111.
  • the wear increment 315-2 is 22.5% for the present example. .
  • the amount of the wear increments 315-1, 315-2, 315-3 depends on the operating parameters of the vacuum pump 10, 111, for example the current speed of the rotor 12, 149 of the vacuum pump 10, 111, the installation position of the vacuum pump 10, 111 and the Condition of the backup bearing 215.
  • the contribution of a restabilization attempt to the wear increment 315-3 at the operating speed of the vacuum pump 10, 111 is approximately 1.5%, while a corresponding contribution at half the operating speed is only approximately 0.9%.
  • the contribution of the initial acceleration upon entry into backup bearing operation is approximately 1.0% at the operating speed of the vacuum pump 10, 111 and 0.4% at half the operating speed.
  • a contribution of about 0.5% at the operating speed of the vacuum pump 10, 111 and of 0.2% at half the operating speed results for the free run-out of the safety bearing 215.
  • the form of movement of the rotor 12, 149 and the stator is fixed to one another, which triggers the contact of the halves of the safety bearing 215 and thus the safety bearing operation.
  • the type of disruption event influences the contribution to the wear increment 315-1, 315-2, 315-3 that occurs during the initial acceleration of the backup bearing, as well as the probability of carrying out a successful restabilization. If the form of movement is slowly growing or at least continuous, steady and possibly even persistent, then a first safety bearing contact is rather slow. As a result, the safety bearing 215 has more time to complete the initial acceleration with the bearing load still being low perform.
  • the reaction of the active magnetic bearing is also complex and corresponds to the chaotic overall picture.
  • the first safety bearing contact occurs more or less randomly during a strong impulse and accordingly leads to fast safety bearing contact with high loads. This causes an increased wear increment 315-1, 315-2, 315-3 compared to a disturbance with subsequent slow, non-chaotic form of movement of the rotor 12, 149 and the stator relative to one another.
  • wear increments 315-1, 315-2, 315-3 depend linearly on the rotational energy of the rotor 12, 149 and are therefore quadratically dependent on its speed.
  • contributions to the wear increment 315-1, 315-2, 315-3 can be made by various processes depending on the respective speed of the rotor 2, 149 and/or directly depending on the currently available rotational energy or on the arising over a period of time
  • Loss of rotational energy can be determined by the backup bearing operation. It is also possible to take into account amounts of energy which are removed from or supplied to the rotor 12, 149 in a manner other than through the backup bearing operation.
  • Such amounts of energy are, for example, drive and/or braking energy in or from the drive of the rotor 12, 149 or fictitious deductions due to occurring gas friction of the rotor 12, 149 at the respective known vacuum pressures and/or gas quantities flowing through.
  • the contribution to the wear increment 315-1, 315-2, 315-3 which is caused by the initial acceleration of the safety bearing at the beginning of a disturbance with safety bearing operation, can be viewed as a singular event with the speed and/or the rotational energy of the rotor 12, 149 estimate parameters.
  • this period of time and the rotor speed at the beginning and at the end of the period of time and, if applicable, the profile of the rotor speed over the period of time Calculation components for contributions to the wear increment 315-1, 315-2, 315-3.
  • an adapted, reduced wear increment 315-1, 315-2, 315-3 can be determined by taking into account the necessary acceleration and thus the speed difference between the safety bearing and the opposite side.
  • Contributions to the wear increment 315-1, 315-2, 315-3 which are caused by processes with a sufficiently long duration of several seconds or even minutes, can be determined more precisely using the speed and/or the rotational energy of the rotor 12, 149 as parameters , if there is a time- and/or speed-dependent calculation formula for the wear increment 315-1, 315-2, 315-3 and this is integrated over the period of time and/or the speed range of the respective process.
  • the processes that contribute to the wear increment 315-1, 315-2, 315-3 depend in different ways on the speed and/or the rotational energy of the rotor 12, 149 and the components of the backup bearing 215 and/or momentarily occurring bearing loads.
  • the processes depend, for example, on the start and end speeds or the course of the speed of the respective component and the bearing loads acting during this time and/or the rotational energy present, as well as the continuous course of these parameters during the respective process.
  • the bearing loads present are once again linearly dependent on the rotational energy and are therefore quadratically dependent on the speed.
  • the rotor 12, 149 in a cantilevered manner with its center of gravity outside of all bearing points, in all installation orientations of the vacuum pump 10, 111, but above all when the axis of rotation of the rotor 12, 149 is predominantly horizontal in space, i.e. perpendicular to the force of gravity bearing forces acting in opposite directions are caused at at least two bearing points which are remote from one another in the direction of the axis of rotation of the rotor 12, 149.
  • the geometry parameters of the rotor 12, 149 and the stator of the vacuum pump 10, 111 are known, for example the distances between bearing points, the centers of gravity, the mass moments of inertia or also the natural frequencies and/or the bending-critical modes, it is possible to determine the ratios of the wear increments 315 -1, 315-2, 315-3 per storage location. Furthermore, if the orientation of the vacuum pump 10, 111 in space is known, i.e. the direction of gravity acting on the components of the vacuum pump 10, 111, the wear increments 315-1, 315-2, 315-3 can be adjusted accordingly, since e.g In certain alignments, there may be higher or lower loads on individual bearing points than in a standard alignment.
  • the safety bearing wear is alternatively not determined and documented using a single variable 325 for the total wear, but individually for each bearing point, for each bearing point effective direction or even for each bearing point sub-segment .
  • a fixed bearing point can, for example, experience high radial loads and associated wear during backup bearing operation with a rotation axis arranged horizontally in space, while the axial loads and the associated wear are minimal, since the rotor weight in this spatial orientation of the vacuum pump 10, 111 does not axial loads generated.
  • Such storage of the wear increments 315 and the resulting total wear per safety bearing 215 related to the bearing point and/or bearing axes can be communicated directly to the user or calculated using a formula-based calculation to form a total wear amount or several partial wear amounts. For example, with a pure maximum or minimum consideration, only the highest or lowest of all wear values per backup bearing, i.e. the worst or best of all partial values, can be defined and communicated as total wear. Furthermore, the total wear can be calculated and communicated in a more balanced way by weighting the various partial values.
  • an error message and/or safe shutdown of the vacuum pump when limit values for wear are exceeded can not only be based on the amount of total wear, but also or exclusively on the basis of individual values or one of the partial values.
  • Internal storage of the various partial values generally makes it possible, in the event of a later inspection of the vacuum pump 10, 111, for a service technician to only replace the elements that are actually worn and/or the elements that are most severely affected by wear and adjacent or commonly affected components are subjected to more in-depth inspections in order to optimize the quality and efficiency of the overhaul or maintenance.
  • the emergency supply described above can ensure the continued operation of the active magnetic bearing, at least for a limited period of time. If the supply voltage fails, the storage of the respective wear increment 315-1, 315-2, 315-3 in the memory 320 may be disrupted or prevented. However, an imminent failure of the supply voltage can be detected in good time, e.g. by observing the beginning drop in the supply voltage in front of an intermediate storage device, e.g. a capacitor, which is protected against energy reverse flow with a diode. If an emergency supply can be activated, for example by means of a generator feed, this can take place immediately after the supply voltage fails. In this case, a safety camp operation does not occur.
  • an intermediate storage device e.g. a capacitor
  • the remaining speed of the rotor 12, 149 or other operating parameters may no longer be sufficient for an emergency supply and maintenance of the active magnetic bearing.
  • electrical consumers that are not required for the active magnetic bearing can be partially switched off at any time during the failure, depending on the operating parameters such as the remaining speed or the current regenerative feedback voltage.
  • the electrical consumers that come into question for the partial shutdown are, for example, interface modules or accessory components. The order and therefore importance of each item can be pre-determined or dynamic based be determined by operating parameters. For example, an interface module can later be powered down if it has an active data link.
  • the active magnetic bearing can be switched off in an orderly manner before the emergency supply collapses, for example a controlled, slow and gentle lowering of the rotor 12, 149 into the safety bearing 215 and/or a final storage of the Wear increments 315-1, 315-2, 315-3.
  • a predetermined wear increment or one that is dynamically adapted on the basis of known operating parameters is stored before the actual end of the rundown, or at least stored in a non-volatile buffer memory, so that the final storage can take place when it becomes available again or recovery of the supply voltage can take place later.
  • the control device of the vacuum pump 10, 111 or the active magnetic bearing can also check each time the supply voltage returns whether the active magnetic bearing was previously switched off when the rotor 12, 149 was stationary.
  • a data identifier can be provided in a non-volatile memory, to which a first value for the event of standstill in normal operation is assigned when the rotor 12, 149 runs down in normal operation of the active magnetic bearing. The data identifier is reset to a second value each time the rotor begins rotating. If the data identifier does not have the first value when the supply voltage returns, it is obvious that the last shutdown cannot have taken place during normal operation.
  • the operating parameters of the vacuum pump 10, 111 are stored continuously or at least regularly at certain time intervals in a non-volatile manner, it is possible to subsequently calculate wear increments 315-1, 315-2 315-3 after a failure of the supply voltage and store them in the memory 320 to the variable 325 for the total wear.
  • this procedure places high demands on the memory 320, which on the one hand has to store data in a non-volatile manner and on the other hand continuously or at least very frequently.
  • the expected service life of accumulator 320 must therefore be sufficiently long so that it does not limit the entire service life of vacuum pump 10, 111 more than safety bearing wear or the aging of other components of vacuum pump 10, 111.
  • the iterative execution of method steps 340, 350, 370 and 390 of 8 explained in detail with an example.
  • the iterative execution of these method steps corresponds to a repeated execution of restabilization attempts between which the waiting time occurring at step 390 increases with each iteration.
  • the control device of the vacuum pump 10, 111 also includes two counters that are used to control the iterative execution of the restabilization tests.
  • the first counter defines the waiting time 390 between two attempts at restabilization, while the second counter contains a numerical value which indicates the number of attempts at restabilization after the detection of a disturbance event (step 310 of 8 ) reflects.
  • the first and second counters are initially initialized with 0.
  • a first pump-specific value is assigned to the first counter.
  • the first pump-specific value is multiplied by the current value of the second counter and assigned to the first counter. Since the second counter reflects the number of re-establishment attempts, this successively increases the time duration or delay between the re-establishment attempts, as will be explained in more detail below.
  • the first pump-specific value is in the range from 10 to 99, for example, and should be 10 in the present numerical example.
  • the waiting time between attempts at restabilization is successively increased by a multiple of 10 s from the second attempt at restabilization.
  • the first counter After an increment, the first counter is reduced by 1 per second, and a restabilization attempt is only made if the first counter is equal to 0. As a result, the first counter controls the delay or waiting time 390 between attempts at re-establishment.
  • the control device attempts to carry out a restabilization attempt after a respective short period of time, for example every second.
  • a respective short period of time for example every second.
  • the respective restabilization attempt can be delayed by means of the first counter.
  • the second counter Since the second counter is initialized with 0 and the product of the first pump-specific value and the value of the second counter is assigned to the first counter the first counter is still 0 after the first restabilization attempt. A second restabilization attempt can therefore be made immediately after the first restabilization attempt.
  • the second counter is then incremented with a second pump-specific value, which is in the range from 1 to 9, for example, and should be 1 in the present numerical example.
  • the second counter counts the restabilization attempts after a disruption event and is therefore equal to 1 after the first restabilization attempt.
  • the vacuum pump 10, 111 switches to normal operation, with the first and second counters being set to 0 again. However, if the first attempt at restabilization fails, a second attempt at restabilization is made after one second, since the first counter is still equal to 0. At the beginning of the second restabilization attempt, the value 10 is assigned to the first counter in the present example, i.e. the current value 1 of the second counter is multiplied by the first pump-specific value of 10, and then the second counter is increased to 2.
  • the vacuum pump returns to normal operation, while the first and second counters are reset to 0.
  • the waiting time before the third recovery attempt is 10 seconds, since the value of 10 of the first counter is decremented by 1 every second, and the next recovery attempt occurs only when the first counter is equal to 0 again.
  • the waiting time 390 between two further attempts at restabilization is thus lengthened by a number of seconds, which corresponds to the first pump-specific value, with each failed attempt at restabilization. In other words, a renewed attempt at restabilization becomes "less attractive" with each failed attempt at restabilization.
  • a specific set 330 of operating specifications (cf. 8 ) for the vacuum pump 10, 111 which includes, for example, the operating specifications "maintain operation of the vacuum pump” and "successively delay attempts at restabilization". Accordingly, although the restabilization attempts are carried out iteratively in order to initially prevent the rotor 12, 149 from fully coasting down, the waiting time until the next restabilization attempt is lengthened with each failed restabilization attempt.
  • the set 330 of operational specifications can include a large number of dynamically adaptable operating specifications or sets of rules that react to operating conditions. These operating specifications can be fixed in advance and change depending on the operating state of the vacuum pump 10, 111 or prioritization by user specifications. Furthermore, the operating specifications can also be implemented and adjusted by adaptive or self-learning algorithms.
  • the control device of the vacuum pump 10, 111 or the control of the active magnetic bearing is unclear about the stopping and course of the disruption event.
  • wear increment 315-2 will occur in the worst case of the rotor 12, 149 running out completely.
  • additional wear increments 315-3 that arise as a result of restabilization attempts can be estimated, as explained above.
  • the type and severity of the disruption that triggered the operation of the safety camp can also be known from sensor data.
  • the set 330 of operating specifications can also include whether flooding and thus rapid external braking of the vacuum pump 10, 111 is possible, or whether energy can be fed back into the system voltage supply so that the regenerative braking of the Rotors 12, 149 can be done without or via an integrated load resistor.
  • Part of the set 330 of operating specifications can also be specified by the nature of the vacuum system in which the vacuum pump 10, 111 is located, or directly by the user.
  • the conflicting specifications “maintain operation of the vacuum pump at all costs” or “minimize safety bearing wear” can be included, which are prioritized by a user and/or according to the current operating state of the vacuum system or the vacuum pump 10, 111.
  • the operating requirement "shut down the vacuum pump as quickly as possible” means that no restabilization takes place. Instead, the backup bearing operation and the rotational energy that can be withdrawn from the rotor 12, 149 at the expense of the backup bearing wear represent a possibility to maximize the braking effect on the rotor 12, 149 and to shut down the vacuum pump 10, 111 in the shortest possible time.
  • a disruption event it is first checked whether the disruption event continues or has subsided again. If the disruption event is no longer recognizable, a restabilization attempt is made.
  • the rule applies here that the wear increment 315-3 of the restabilization attempt must be less than the wear increment 315-2 of a potential full run-out.
  • the full run-out of the rotor 12, 149 can be more favorable in terms of safety bearing wear.
  • a restabilization attempt can again lead to a further disruption event with backup bearing operation, which generates further wear increments 315-1, 315-2, 315-3.
  • the end of a fault is actively detected, for example, using the sensors described above. Furthermore, the reduction in the speed and thus in the rotational energy can be awaited, for example by a predetermined value or a value determined proportionately from the operating speed. In addition, the waiting time 390 between attempts at restabilization can be specified or determined as a function of the operating speed.
  • One or a combination of the above events triggers another attempt at restabilization, which in turn can only take place if its wear increment 315-3 to be expected at this moment is less than the wear increment 315-2 for the remaining run-down of the rotor 12, 149.
  • a restabilization attempt is triggered immediately if a corresponding request is made by the operating situation of the vacuum system or by the user.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (15)

  1. Procédé de fonctionnement d'une pompe à vide (10, 111) comprenant un rotor (12, 149), un stator, un palier magnétique à régulation active (20, 22) pour supporter le rotor (12, 149), et un palier de secours (215) pour le rotor (12, 149),
    le procédé consistant à :
    fournir un ensemble (330) de consignes de fonctionnement pour la pompe à vide (10, 111), incluant au moins un état de fonctionnement de la pompe à vide (10, 111) à atteindre lors d'un événement de perturbation,
    détecter un événement de perturbation lors duquel le rotor (12, 149) quitte, par rapport au stator, une zone d'espace prévue pour le rotor (12, 149) de telle sorte qu'une usure se produit au niveau du palier de secours (215),
    en se basant sur l'événement de perturbation détecté, estimer un incrément d'usure (315-1) pour le palier de secours (215),
    ajouter l'incrément d'usure (315-1) à une variable (325) pour l'usure totale du palier de secours (215), et
    en se basant sur l'ensemble (330) de consignes de fonctionnement de la pompe à vide (10, 111) et sur la variable (325) pour l'usure totale du palier de secours (215), déterminer si une action de stabilisation du rotor (12, 149) est mise en œuvre.
  2. Procédé selon la revendication 1,
    dans lequel, si l'on détermine que l'action de stabilisation du rotor (12, 149) n'est pas mise en œuvre, la pompe à vide (10, 111) est mise à l'arrêt.
  3. Procédé selon la revendication 1 ou 2,
    dans lequel on vérifie si l'action de stabilisation du rotor (12, 149) est réussie, puis, si l'action échoue, on détermine, après un temps d'attente prédéterminé (390), si l'action de stabilisation du rotor (12, 149) est à nouveau mise en œuvre, en déterminant un autre incrément d'usure (315-2, 315-3) qui est ajouté à la variable (325) pour l'usure totale du palier de secours (215).
  4. Procédé selon l'une des revendications précédentes,
    dans lequel la pompe à vide (10, 111) est mise à l'arrêt et/ou un message d'erreur est émis si la variable (325) pour l'usure totale du palier de secours (215) dépasse une valeur seuil prédéterminée.
  5. Procédé selon l'une des revendications précédentes,
    dans lequel la taille de l'incrément d'usure (315-1, 315-2, 315-3) est estimée en se basant sur des données expérimentales et/ou sur des valeurs empiriques.
  6. Procédé selon la revendication 5,
    dans lequel la taille de l'incrément d'usure (315-1, 315-2, 315-3) est estimée en se basant sur des valeurs de mesure d'au moins un capteur (26, 28), qui sont déterminées pendant l'événement de perturbation.
  7. Procédé selon l'une des revendications précédentes,
    dans lequel la taille de l'incrément d'usure (315-1, 315-2, 315-3) est estimée en fonction d'une vitesse de rotation du rotor (12, 149) lors de l'apparition de l'événement de perturbation, et/ou en fonction d'une position de montage de la pompe à vide (10, 111).
  8. Procédé selon l'une des revendications précédentes,
    dans lequel l'incrément d'usure (315-1, 315-2, 315-3) comprend au moins deux parts, dont une première part est basée sur une accélération initiale du palier de secours (215) lors de l'apparition de l'événement de perturbation, et une deuxième part est basée sur une usure à attendre du palier de secours (215) pendant la stabilisation du rotor (12, 149) ou pendant un ralentissement du rotor (12, 149) jusqu'à l'arrêt de celui-ci.
  9. Procédé selon l'une des revendications précédentes,
    dans lequel l'ensemble (330) de consignes de fonctionnement de la pompe à vide (10, 111) comprend au moins deux états de fonctionnement de la pompe à vide (10, 111) à atteindre lors d'un événement de perturbation, qui incluent le maintien du vide à l'intérieur de la pompe à vide (10, 111) et la mise à l'arrêt de la pompe à vide (10, 111).
  10. Procédé selon la revendication 9,
    dans lequel les états de fonctionnement à atteindre lors d'un événement de perturbation sont priorisés par un utilisateur de la pompe à vide (10, 111) et/ou par un algorithme d'apprentissage.
  11. Procédé selon l'une des revendications précédentes,
    dans lequel l'incrément d'usure (315-1) pour le palier de secours (215), estimé sur la base de l'événement de perturbation détecté, est mis à jour pendant l'action de stabilisation du rotor (12, 149) ou pendant la mise à l'arrêt de la pompe à vide (10, 111), et l'incrément d'usure mis à jour (315-2, 315-3) est ajouté à la variable (325) pour l'usure totale du palier de secours (325), à la place de l'incrément d'usure (315-1) estimé précédemment.
  12. Procédé selon l'une des revendications précédentes,
    dans lequel le palier de secours (215) comprend plusieurs emplacements de support, le procédé consistant en outre à déterminer un incrément d'usure respectif (315-1, 315-2, 315-3) pour chaque emplacement de support et à l'ajouter à une variable respective (325) pour l'usure totale à l'emplacement de support respectif.
  13. Pompe à vide (10, 111), comprenant
    un rotor (12, 149),
    un stator,
    un palier magnétique à régulation active (20, 22) pour supporter le rotor (12, 149),
    un palier de secours (215) pour le rotor (12, 149),
    au moins un moyen de détection d'un événement de perturbation, lors duquel le rotor (12, 149) quitte, par rapport au stator, une zone d'espace prévue pour le rotor (12, 149), de telle sorte qu'une usure se produit au niveau du palier de secours (215),
    un dispositif de commande, et
    une mémoire (320) qui inclut une variable (325) pour l'usure totale du palier de secours (215),
    le dispositif de commande étant réalisé pour mettre en œuvre un procédé selon l'une des revendications précédentes.
  14. Pompe à vide (10, 111) selon la revendication 13,
    dans laquelle la mémoire (320) est réalisée pour permettre uniquement d'ajouter des incréments d'usure pour le palier de secours (215) à la variable (325) pour l'usure totale du palier de secours (215), et pour, par ailleurs, maintenir inchangée la variable (325) pour l'usure totale du palier de secours (215) pendant toute la durée de vie du palier de secours (215).
  15. Pompe à vide (10, 111) selon la revendication 13 ou 14,
    dans laquelle ledit au moins un moyen de détection de l'événement de perturbation comprend un capteur (26, 28) réalisé pour détecter la position dans l'espace du rotor (12, 149), et/ou un capteur de vibration et/ou d'accélération monté au niveau du stator.
EP20205911.9A 2020-11-05 2020-11-05 Procédé de fonctionnement d'une pompe à vide Active EP3832141B1 (fr)

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JP2021127232A JP7209054B2 (ja) 2020-11-05 2021-08-03 真空ポンプを運転する方法

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EP4137699A1 (fr) * 2022-12-15 2023-02-22 Pfeiffer Vacuum Technology AG Appareil à vide et procédé de fonctionnement d'un tel appareil à vide

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DE4022523A1 (de) * 1990-07-16 1992-01-23 Pfeiffer Vakuumtechnik Einrichtung zum fluten von schnell rotierenden vakuumpumpen
US5575630A (en) * 1995-08-08 1996-11-19 Kyocera Corporation Blood pump having magnetic attraction
JP2002295398A (ja) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法
DE102008033758B3 (de) * 2008-07-18 2009-12-10 Siemens Aktiengesellschaft Lageranordnung und Lagerbock mit einem magnetischen Radiallager und einem Fanglager für eine rotierende Maschine
WO2011011573A1 (fr) * 2009-07-22 2011-01-27 Johnson Controls Technology Company Appareil et procédé pour déterminer le jeu dans des paliers mécaniques de secours de turbomachines employant des paliers électromagnétiques
EP3473858B1 (fr) * 2017-10-17 2020-07-01 Pfeiffer Vacuum Gmbh Procédé d'optimisation de durée de vie des paliers à rouleaux d'une pompe à vide
EP3653885B1 (fr) * 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh Procédé de détermination d'une information d'état dans un appareil sous vide

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