EP3653884B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3653884B1
EP3653884B1 EP19202987.4A EP19202987A EP3653884B1 EP 3653884 B1 EP3653884 B1 EP 3653884B1 EP 19202987 A EP19202987 A EP 19202987A EP 3653884 B1 EP3653884 B1 EP 3653884B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
damping
damping device
rotor
primary structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19202987.4A
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German (de)
English (en)
Other versions
EP3653884A1 (fr
Inventor
Daniel Sieben
Jürgen Wissner
Florian Bader
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Publication date
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Priority to EP19202987.4A priority Critical patent/EP3653884B1/fr
Publication of EP3653884A1 publication Critical patent/EP3653884A1/fr
Application granted granted Critical
Publication of EP3653884B1 publication Critical patent/EP3653884B1/fr
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the present invention relates to a vacuum pump, in particular a turbo-molecular pump, comprising a primary structure which vibrates when the pump is in operation.
  • the invention relates to a vacuum pump according to the preamble of claim 1.
  • a vacuum pump according to the preamble of claim 1.
  • Such is in US Pat EP 1 619 400 A1 disclosed.
  • the vibration excitation of a turbo molecular pump housing is primarily caused by the imbalance of the rotor, for example.
  • the balancing quality is limited by the necessary transfer of the rotor from the balancing machine to the housing after the balancing process has been completed. It is therefore opportune to look for methods of reducing vibration other than a further improvement in the balance quality.
  • Another approach is active systems that use high-resolution sensors to determine the vibration state of the vacuum pump in order to generate an out-of-phase vibration using suitable actuators and thus reduce the vibration of the housing.
  • Active systems offer a strong reduction in vibration over a broader frequency band, but are technically very complex and expensive.
  • a vacuum pump with the features mentioned in claim 1, and in particular by a damping device which has a damping mass that is connected to the primary structure, preferably freely oscillating, by means of a spring element.
  • the damping device can be designed particularly easily for the vacuum pump with regard to its natural frequency and its effective damping frequency band, namely in particular by simply selecting the spring constant of the spring element and the mass of the damping mass.
  • spring element does not refer to an ideal spring element without any damping, but to a real component that has an elasticity that allows a, in particular free, Swinging of the damping mass allows relative to the primary structure.
  • a real component has a certain amount of damping.
  • the spring element, the damping mass and the primary structure can be designed as separate parts, for example. Alternatively, at least two of these elements can be connected in one piece. In principle, for example, all three parts can also be connected in one piece.
  • the damping device can be of passive design, i.e. the damping device does not have any actively driven oscillating bodies.
  • the damping device can be designed in such a way that it withdraws vibration energy from the primary structure by resonance and / or vibrates out of phase with it.
  • a natural frequency of the damping device is greater than an operating speed of a rotor of the vacuum pump.
  • the natural frequency of the damping device can be slightly greater than the operating speed of the rotor.
  • the ratio of the operating speed of the rotor to the natural frequency of the damping device can preferably be at least 0.99, in particular at least 0.995.
  • the natural frequency can be dimensioned as a function of the operating speed. Alternatively or additionally, it is possible to set the operating speed as a function of the natural frequency and / or to adapt the operating speed to the natural frequency.
  • the mass ratio of the damping mass to the primary structure is between 5% and 10%. This ratio offers a particularly advantageous compromise between the damping effect and the required installation space.
  • the pump can comprise a sensor for detecting the vibration of the primary structure.
  • a control device of the vacuum pump can be designed to set an operating speed of a rotor of the pump as a function of a detected vibration. In this way, extremely effective damping can be achieved in a particularly simple manner.
  • various types of vacuum pumps in particular in the case of turbo-molecular pumps, at least a small change in the operating speed has a small, in particular negligible, effect on the pumping power. This stands in the way of a considerable improvement in the vibration damping, i.e. a slight reduction in the operating speed, for example, practically does not reduce the pumping power, but the damping is significantly improved.
  • the necessary change in the operating speed is also small if the natural frequency of the damping device is selected appropriately.
  • the natural frequency cannot, in principle, be dimensioned with an arbitrarily high degree of accuracy. Certain deviations from a desired natural frequency after production are therefore possible.
  • the operating speed can be adjusted slightly, but the pump output in particular is only marginally influenced.
  • the senor does not have to measure the vibration of the primary structure directly, even if this is advantageous with regard to the measurement accuracy. Rather, the sensor can also detect the vibration indirectly, for example, by attaching the sensor to a component that is not rigidly connected to the primary structure, but to which the vibration of the primary structure is transmitted in some way.
  • control device is designed to control the vibration during an acceleration process of the rotor to be observed. For example, a certain increase in vibration can be assessed as reaching and / or exceeding the natural frequency of the damping device. In this way, conclusions can be drawn in particular about the natural frequency.
  • the operating speed can then be set lower than the natural frequency of the damping device. In principle, independently of a specific determination of the natural frequency, the operating speed can also be set to a determined vibration minimum.
  • a spring constant of the spring element is fixedly defined and / or not adjustable.
  • the natural frequency of the damping device can be permanently defined and / or not adjustable.
  • the damping device can be made particularly simple, taking advantage of the fact that many types of vacuum pumps, in particular turbo-molecular pumps, are mostly operated at an essentially fixed operating speed or that the operating speed is not significantly changed during operation.
  • the spring constant and natural frequency can be dimensioned in advance, the damping device being of particularly simple construction from a technical point of view. In principle, however, the natural frequency and / or the spring constant can also be changed.
  • the damping device can be arranged, for example, within a housing of the pump and / or integrated in the pump. This enables a compact structure.
  • the primary structure is decoupled from the housing of the pump, for example by at least one spring element, such as an elastomer element.
  • a spring element such as an elastomer element.
  • so-called oscillating rings can be used for decoupling.
  • the housing usually has a fairly large mass.
  • the damping mass can be selected to be small with regard to an advantageous mass ratio to the primary structure, since the mass of the housing does not count towards the mass of the primary structure.
  • the damping device can be designed to be particularly compact, but effective damping is still possible.
  • the damping device can be attached to a static part of a bearing element for a rotor of the pump or to a component which is rigidly connected to a static part of a bearing element for a rotor of the pump.
  • the bearing element can be a roller bearing, in particular a ball bearing.
  • the static part can, for example, be an outer ring of the roller bearing.
  • a component connected to the static part of the bearing element can, for example, be a bearing mount. The outer ring and / or the bearing mount can be decoupled from the housing of the pump, for example.
  • the primary structure is additionally decoupled from the rotor, that is to say from the housing and rotor.
  • the primary structure can be decoupled from a static bearing part.
  • the primary structure can in particular be or comprise an intermediate piece which is, for example, elastically suspended, for example between a static bearing part or a component rigidly connected to it on the one hand and the housing or a component rigidly connected to it on the other hand. The decoupling from the rotor and / or the use of an intermediate piece prevents the damping device from influencing the rotor dynamics.
  • the damping device can preferably be arranged in a vacuum or negative pressure area of the pump. As a result, vibrations of the damping device are not transmitted to the environment as sound.
  • the spring element and / or the damping mass can be made of metal, for example.
  • metal has a relatively low damping constant.
  • the damping device according to the invention because the effect of the vibration reduction is essentially brought about by an at least partially antiphase vibration of the damping mass. So that this can take place advantageously, a low damping constant in the spring element or in the damping device is advantageous.
  • the spring element and / or damping mass can also be made from other materials, such as plastic, in particular a polymer. This can have a positive effect on material costs, for example.
  • the spring element is designed as a lever arm and / or as a bending arm.
  • the arm can extend radially, axially or circumferentially, each with respect to the rotor.
  • the spring element can generally, for example, be attached directly to the primary structure, in particular screwed on.
  • the spring element can generally comprise, for example, a flat material such as sheet metal.
  • the spring element is designed to be resilient in one direction and rigid in two directions perpendicular to this and to one another. This allows vibrations of the primary structure to be dampened in a targeted manner in the corresponding direction.
  • the spring element can, for example, also be designed to be resilient in two mutually perpendicular directions, in particular with the spring element being rigid in the third direction.
  • the spring element is not in one spatial direction resilient, not rigid, but essentially freely movable or at least designed with an extremely low spring constant.
  • one or more damping devices each with at least one spring element and a damping mass, can be provided.
  • the spring element is designed to be resilient in only one first direction, a second damping device being provided, the spring element of which is designed to be resilient in another direction, which is in particular perpendicular to the first direction.
  • several damping devices can also be provided for the same spatial direction.
  • a damping module with several damping devices can also be provided.
  • the damping module can comprise a, in particular disk-shaped, base element to which the damping devices are attached.
  • a damping device with at least one damping mass and at least one spring element is provided, the damping device having a damping effect in two mutually perpendicular spatial directions.
  • a spring element can be provided which acts resiliently in the two spatial directions.
  • the damping device can also comprise at least two spring elements, each of which has a resilient effect in different spatial directions.
  • the spring elements are not resilient, not rigid, but essentially freely movable or at least have an extremely low spring constant in the resilient spatial direction of the respective other spring element. This ensures that the respective spring element reliably springs in its resilient spatial direction without being disturbed by the other spring element.
  • more than two spring elements can be provided, in particular four or eight, in particular half of the Spring elements are designed to be resilient in one spatial direction and the other half of the spring elements are designed to be resilient in another spatial direction.
  • the damping mass can preferably be designed in the form of a ring and / or surround the primary structure. Such a damping mass can, for example, be connected to the primary structure by one or more spring elements.
  • a spring element can in principle be designed in the shape of a ring and / or surround the primary structure.
  • the spring element can preferably be designed for suspension in at least two perpendicular spatial directions and / or in several, in particular essentially all, radial spatial directions.
  • a method for operating a vacuum pump and / or for damping vibrations of a primary structure of a vacuum pump is contemplated, but not claimed, in which a damping device is provided for damping the vibration of the primary structure, the damping device having a damping mass which is provided with a spring element the primary structure, in particular freely oscillating, is connected. Developments of the method correspond to the developments of the vacuum pump described herein.
  • a method for operating a vacuum pump is also conceivable which comprises the measures described in claim 4 and carried out by the control device, preferably also the measures according to claim 5.
  • the turbo-molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 (see e.g. Fig. 3 ) can be brought into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • two coolant connections 139 are arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be passed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be put into operation when it is oriented in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which is rotatable about an axis of rotation 151.
  • the turbo-molecular pump 111 comprises several turbo-molecular pump stages connected in series with one another with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one Pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-jacket-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested one inside the other.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies on the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 opposite and with this forms the first Holweck pump stage following the turbo molecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.
  • a conical injection molded nut 185 with an outer diameter that increases towards the roller bearing 181 is provided on the rotor shaft 153.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, e.g. with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, which each comprise a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the ring magnets 195 on the rotor side are parallel to the axis of rotation 151 by means of a cover element 207 coupled to the carrier section 203 set.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or backup bearing 215 is provided within the magnetic bearing, which runs idle during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough so that a collision of the structures on the rotor side with the structures on the stator side under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, e.g. from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.
  • a so-called labyrinth seal 223, known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular in order to achieve better sealing of the motor compartment 217 from the radially outside Holweck pump stages.
  • the vacuum pumps described below can advantageously by the described individual features of the pump Figs. 1 to 5 be trained.
  • Fig. 6 shows a mechanical circuit diagram of a system with a primary structure 20 and a damping device comprising a spring element 22 and a damping mass 24.
  • the primary structure 20 is assumed to be rigid, that is, no natural frequency below or near the operating speed of the rotor and thus below or near an oscillation frequency ⁇ of the primary structure 20 is in operation.
  • the spring element 22 is indicated by a spring symbol and a damping symbol in order to make it clear that the real spring element 22 also has a damping. In particular, no additional damping element is provided.
  • the damping device withdraws oscillation energy from the primary structure 20 by means of resonance. For example, in accordance with an active vibration damping system, the damping device vibrates, in particular, in phase opposition to the primary structure 20. In contrast to the active system, however, this does not occur through active control, but passively through resonance.
  • the vibration reduction occurs only in a narrow frequency band. If the center point of the frequency band and / or the natural frequency of the damping device are matched to the oscillation frequency of the primary structure 20, here the rotor speed of the vacuum pump, the oscillation is effectively damped.
  • Such a damping device generally requires particularly little installation space, but is distinguished by a particularly strong reduction in the vibration of the primary structure.
  • Fig. 7 shows a plot of achieved vibration reductions D for exemplary damping devices.
  • a ratio of the oscillation frequency ⁇ of the primary structure to the natural frequency ⁇ D of the damping device is plotted on the abscissa.
  • the ordinate shows the vibration reduction D in dB.
  • the plot comprises three frequency responses 26, 28, 30 with different damping coefficients c or for differently damped damping devices.
  • the frequency responses are qualitatively the same. A slight reduction in the oscillation amplitude of the primary structure occurs relatively long before the natural frequency ⁇ D of the damping device is reached. The maximum vibration reduction D occurs shortly before reaching the natural frequency. If the oscillation frequency ⁇ of the primary structure is above the natural frequency ⁇ D , the oscillation or vibration is amplified.
  • the damping coefficient of the damping device can therefore preferably be as low as possible, although in particular the natural frequency of the damping device must be precisely matched to the operating speed.
  • Another important parameter of the damping device is the ratio of the mass m D of the damping mass to the mass m P of the primary structure.
  • the relationship is for an exemplary system in Fig. 8 applied.
  • a high mass ratio enables a higher vibration reduction. In contrast to the damping coefficient, however, it has no influence on the bandwidth.
  • a mass ratio of 5% to 10% is preferably used.
  • the natural frequency ⁇ D of the damping device can differ by a few Hz from the desired natural frequency.
  • Fig. 7 shows that the half-width of the damping maximum is only a few Hz, an unfavorable pairing of the aforementioned parameters can shift the natural frequency ⁇ D of the damping device so far from the operating speed of the pump that only a slight reduction in vibration D occurs or it even increases the Oscillations at ⁇ / ⁇ D > 1 occur.
  • the Figures 9 to 11 show various vacuum pumps 31, each of which is embodied here by way of example as turbo-molecular pumps and in which the damping devices 22, 24 are each arranged on the outside of the primary structure 20 or on the outside of the housing.
  • the damping devices 22, 24 are arranged on a lower part of a Pumoenaephaseuses.
  • the damping devices 22, 24 can be screwed into threads that are structurally already present, for example.
  • Fig. 10 shows the attachment radially on the housing.
  • an intermediate element or intermediate flange is provided, which is identified as the primary structure 20 and is arranged between the vacuum pump 31 and a vacuum chamber (not shown).
  • the damping devices 20, 24 are attached to the intermediate element.
  • the attachment of the damping device on the outside of the housing is associated with a particularly low structural effort, since the pump itself does not have to be modified.
  • bores on the underside of the housing or bores with radial alignment can be used.
  • the bores can, for example, be provided anyway, for example for a different purpose, or for the damping devices, to be precise either when the pump is manufactured or also afterwards.
  • the use of an intermediate element such as a short pipe section and / or intermediate flange between the pump and the recipient or chamber with a damping device can also enable a simple retrofitting of a vacuum system.
  • FIG. 12 and 13 Another possibility is the Figures 12 and 13
  • the damping module 34 can be attached to a lower part of the pump 31.
  • the damping device 22, 24 is arranged integrated in the pump 31 or in the housing. Two such embodiments are shown in FIGS Figures 14 and 15 shown.
  • a ball bearing outer ring 36 is shown therein, which forms a static part of a bearing element for the rotor of the pump. This is indicated by its axis of rotation 38.
  • the ball bearing outer ring 36 is rigidly connected to a bearing mount 40 which is supported by two axial oscillating rings 42 and a radial oscillating ring 44 against a housing 46 of the pump or a component 45 rigidly connected to the housing 46 and decoupled from them.
  • the damping device 22, 24 is attached to the bearing mount 40.
  • the bearing mount 40 is decoupled from the housing 46 via the oscillating rings 42 and 44.
  • the mass of the housing 46 is therefore not part of the mass of the primary structure 20 with regard to a desired mass ratio between the damping mass 24 and the primary structure 20.
  • the embodiment of the Fig. 15 is characterized, inter alia, in that the damping device 22, 24 is fastened to an intermediate piece 47, which is coupled both from the housing 46 and from the one coupled to the rotor Structure 36, 40 is decoupled, which is implemented here by radial oscillating rings 44.
  • the housing 46 is not part of the mass of the primary structure.
  • Fig. 15 by decoupling from the rotor or the structure 36, 40 coupled therewith, an influencing of the rotor dynamics is avoided.
  • a respective damping device By decoupling it from the housing 46, a respective damping device can be designed, for example, with an approximately 80% lower mass than when it is attached, in particular externally, to the pump housing.
  • the damping device 22, 24 also does not contribute to the sound emission when it is arranged in a vacuum or negative pressure area.
  • a damping device generally comprises a spring element with rigidity or spring constant and damping as well as a damping mass attached to it.
  • Different materials can be used for the spring element and the damping mass.
  • metals and / or plastics, in particular polymers, can be used.
  • a metallic design of the spring element and damping mass is advantageous, particularly with regard to the space required.
  • the spring element 22 can be designed as a lever arm 48.
  • a damping mass 24 is attached to a first end of this lever arm 48, in the example shown by means of a screw 50 Provided through-hole for a screw 50 so that the spring element 22, 48 or the damping device can be screwed to a primary structure.
  • the lever arm 48 is designed to oscillate or elastic in only one first direction, namely in the direction shown in FIG Fig. 17 horizontal direction.
  • the lever arm 48 In the in Fig. 16 In the second direction running horizontally and perpendicular to the first direction, the lever arm 48 is essentially rigid due to its significantly greater width compared to the first direction. Also in its longitudinal direction, which in the Figures 16 and 17 extends perpendicularly, the lever arm 48 is essentially rigid.
  • the damping device shown here damps a primary structure only in one spatial direction. For damping in several spatial directions, several such damping devices can be used in different orientations, for example.
  • the Fig. 18 and 19th show a ball bearing with a ball bearing outer ring 36.
  • a damping mass 24 is connected to the ball bearing outer ring 36 via several spring elements 22, in this embodiment via eight spring elements 22.
  • the damping mass 24 is designed in the form of a ring here and is arranged concentrically to the ball bearing outer ring 36.
  • the spring elements 22 can in principle have different shapes and numbers.
  • a respective spring element 22 is formed by a flat material, in particular sheet metal, with four 90 ° bends. The spring elements 22 thus form a kind of oscillatory rectangle.
  • the damping device 22, 24 of the Fig. 18 and 19th allows damping in two mutually perpendicular directions, namely in Fig. 18 the vertical and the horizontal direction of the image plane. How out Fig. 19 results, the spring elements 22 have a certain extent along the direction perpendicular to these two directions or perpendicular to the image plane of the Fig. 18 on. As a result, the damping mass 24 is essentially not able to oscillate in it Direction. This enables particularly reliable and defined damping in the two possible damping directions.
  • FIG. 11 shows a spring element 22 for connecting a damping mass to a primary structure, in particular an annular damping mass, as is shown, for example, in FIG Fig. 18 and 19th is shown.
  • the spring element 22 of Fig. 20 is ring-shaped. It is essentially wave-shaped along its circular path. As a result of the wave-like design, a spring action is brought about in essentially all radial spatial directions.
  • Such a spring element 22 can also be referred to as a radial spring.
  • the functional principle of the damping device 22, 24 is based in particular not on internal damping, but on the antiphase of the vibrations of the primary structure and the damping mass. This effect occurs in particular only in a narrow frequency band that is matched to the frequency of the primary structure to be suppressed.
  • the damping device is designed, in particular, in such a way that its first natural frequency corresponds to the excitation frequency of the primary structure, in particular the operating speed. If the excitation frequency is significantly lower than the natural frequency of the damping device, only a slight or no reduction in vibration occurs. If, on the other hand, it is larger, the vibrations of the primary structure are amplified.
  • the natural frequency of the damping device and / or the spring constant of the spring element can be adjustable.
  • a damping device with a fixed natural frequency or spring constant is particularly advantageous, namely particularly simple. Tests with two damping devices on a lower part of a turbo molecular pump showed a reduction in the measured housing vibrations of 90%.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (11)

  1. Pompe à vide (31), en particulier pompe turbomoléculaire, comprenant :
    un carter (46),
    une structure primaire (20) qui vibre pendant le fonctionnement de la pompe, et
    un dispositif d'amortissement (22, 24) pour amortir la vibration de la structure primaire (20),
    le dispositif d'amortissement comprenant une masse d'amortissement (24) reliée à la structure primaire (20) au moyen d'un élément de ressort (22), et
    la structure primaire (20) étant découplée du carter (46) de la pompe à vide (31),
    caractérisée en ce que
    l'élément de ressort (22) est à effet élastique dans une seule direction,
    au moins un autre dispositif d'amortissement (22, 24) étant prévu dont l'élément de ressort (22) est à effet élastique dans une autre direction, et/ou il est prévu un dispositif d'amortissement (22, 24) ayant au moins une masse d'amortissement (24) et au moins un élément de ressort (22), le dispositif d'amortissement (22, 24) ayant un effet amortisseur dans deux directions spatiales perpendiculaires l'une à l'autre.
  2. Pompe à vide (31) selon la revendication 1,
    dans laquelle une fréquence propre du dispositif d'amortissement (22, 24) est supérieure à une vitesse de fonctionnement d'un rotor de la pompe à vide (31).
  3. Pompe à vide (31) selon la revendication 1 ou 2,
    dans laquelle le rapport de masse de la masse d'amortissement sur la structure primaire est compris entre 5 % et 10 %.
  4. Pompe à vide (31) selon l'une des revendications précédentes,
    dans laquelle la pompe à vide (31) comprend un capteur pour détecter une vibration de la structure primaire (20), et un dispositif de commande de la pompe à vide (31) est réalisé pour ajuster une vitesse de fonctionnement d'un rotor de la pompe à vide (31) en fonction d'une vibration détectée.
  5. Pompe à vide (31) selon la revendication 4,
    dans laquelle le dispositif de commande est réalisé pour observer la vibration pendant une opération d'accélération du rotor dans laquelle une certaine augmentation de la vibration est évaluée comme atteignant et/ou dépassant la fréquence propre du dispositif d'amortissement, et la vitesse de fonctionnement du rotor est réglée pour être inférieure à la fréquence propre du dispositif d'amortissement et/ou à un minimum de vibration déterminé.
  6. Pompe à vide (31) selon l'une des revendications précédentes,
    dans laquelle la structure primaire (20) et le dispositif d'amortissement (22, 24) sont disposés à l'intérieur d'un carter de la pompe à vide (31).
  7. Pompe à vide (31) selon l'une des revendications précédentes,
    dans laquelle le dispositif d'amortissement (22, 24) est fixé à une partie statique (36) d'un élément formant palier pour un rotor de la pompe à vide (31) ou à un composant (40) qui est relié de manière rigide à celui-ci.
  8. Pompe à vide (31) selon l'une des revendications précédentes,
    dans laquelle la structure primaire (20) est découplée du carter (46) de la pompe à vide (31) et d'un rotor de la pompe à vide (31).
  9. Pompe à vide (31) selon l'une des revendications précédentes,
    dans laquelle l'élément de ressort (22) et/ou la masse d'amortissement (24) sont réalisés en métal.
  10. Pompe à vide (31) selon l'une des revendications précédentes,
    dans laquelle l'élément de ressort (22) est configuré comme un bras de levier (48).
  11. Pompe à vide (31) selon l'une des revendications précédentes,
    dans laquelle l'élément de ressort (22) est à effet élastique dans une direction et est rigide dans deux directions perpendiculaires à celle-ci.
EP19202987.4A 2019-10-14 2019-10-14 Pompe à vide Active EP3653884B1 (fr)

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EP19202987.4A EP3653884B1 (fr) 2019-10-14 2019-10-14 Pompe à vide

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EP3653884A1 EP3653884A1 (fr) 2020-05-20
EP3653884B1 true EP3653884B1 (fr) 2021-12-08

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CN113153827B (zh) * 2021-04-12 2022-08-12 浙江理工大学 一种用于平衡深海提升混输泵自身及外源振动的装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020249431A1 (fr) * 2019-06-10 2020-12-17 Edwards Limited Support de rotor et pompe à vide dotée dudit support de rotor

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Publication number Priority date Publication date Assignee Title
JPS62184224A (ja) * 1986-02-06 1987-08-12 Ebara Res Co Ltd 磁気軸受装置
JPH0772556B2 (ja) * 1988-03-18 1995-08-02 株式会社荏原製作所 ターボ分子ポンプ
EP1619400B1 (fr) * 2004-07-20 2009-11-11 VARIAN S.p.A. Appui annulaire pour des éléments de roulement
DE102004048866A1 (de) * 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020249431A1 (fr) * 2019-06-10 2020-12-17 Edwards Limited Support de rotor et pompe à vide dotée dudit support de rotor

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