EP3686432B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3686432B1
EP3686432B1 EP20166248.3A EP20166248A EP3686432B1 EP 3686432 B1 EP3686432 B1 EP 3686432B1 EP 20166248 A EP20166248 A EP 20166248A EP 3686432 B1 EP3686432 B1 EP 3686432B1
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EP
European Patent Office
Prior art keywords
vacuum pump
pump
evaluation unit
vibration data
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP20166248.3A
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German (de)
English (en)
Other versions
EP3686432A1 (fr
Inventor
Kevin Schneider
Daniel Schuh
Pascal Wielsch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP20166248.3A priority Critical patent/EP3686432B1/fr
Publication of EP3686432A1 publication Critical patent/EP3686432A1/fr
Priority to EP21161837.6A priority patent/EP3808988B1/fr
Priority to JP2021040051A priority patent/JP7160978B2/ja
Priority to CN202110336661.1A priority patent/CN113446243A/zh
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Publication of EP3686432B1 publication Critical patent/EP3686432B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/12—Vibration
    • F04C2270/125—Controlled or regulated

Definitions

  • the invention relates to a vacuum pump, which is in particular a Roots pump or a screw pump.
  • the vacuum pump has active pumping elements which can be driven to perform a working movement and which transport a gas to be pumped from an inlet to an outlet of the vacuum pump.
  • Vacuum systems typically include one or more vacuum pumps, for example at least one vacuum pump for the rough vacuum range and at least one vacuum pump for the high vacuum range, and are usually designed for continuous operation. In many applications, the vacuum system's vacuum pumps are in continuous operation for several months or even years. Furthermore, downtimes between operating phases of the vacuum system should be minimized as far as possible, and the maintenance of the vacuum pumps should be carried out within these relatively short downtimes.
  • vibrations of vacuum pumps there is a connection between vibrations of vacuum pumps and their operating state or state of wear. For example, a sudden failure of a vacuum pump can be announced by excessive vibrations or even noise. Such vibrations can be caused, for example, by an imbalance in a rotor of the vacuum pump and an increase in unbalance can cause an increase in vibration of the vacuum pump.
  • a monitoring of vibrations of a vacuum pump has not been provided in conventional vacuum systems and is therefore only carried out sporadically.
  • vibrations of a vacuum pump are monitored in such cases with comparatively expensive external devices.
  • the WO 2017/140471 A1 also describes a similar vacuum pump.
  • One object of the invention is to create a vacuum pump in which a possibly impending failure can be detected at an early stage.
  • the vacuum pump which is in particular a Roots pump or a screw pump, comprises active pumping elements which can be driven to perform a working movement and thereby transport a gas to be pumped from an inlet to an outlet of the vacuum pump. Furthermore, the vacuum pump includes a vibration sensor, which records vibration data of the vacuum pump based on the working movement of the pump-active elements, and an evaluation unit, which is designed to evaluate the vibration data.
  • the vibration sensor is also integrated into a circuit board of the vacuum pump, with the circuit board being arranged in an interior space of the vacuum pump.
  • the vibration sensor is therefore just another component of an already existing circuit board of the vacuum pump, so that the vibration sensor can be integrated into the vacuum pump in a simple and cost-effective manner. Since the circuit board is arranged in the interior of the vacuum pump, the circuit board can also represent a vacuum feedthrough at the same time.
  • the vacuum pump according to the invention is characterized in that the vibration sensor and the evaluation unit for the vibration data that the vibration sensor detects are essential components of the vacuum pump itself. Consequently, no expensive external equipment is required to record and evaluate the vibration data of the vacuum pump.
  • the evaluation unit can either form a common unit with the vibration sensor, for example in the form of a single electronic device that contains both the vibration sensor as well as the evaluation unit, or be arranged externally.
  • the evaluation unit like a control unit of the entire vacuum pump, can be arranged outside a housing of the vacuum pump and yet, like the control unit, form an essential part of the vacuum pump itself.
  • the vibration sensor and the evaluation unit, together with a control unit are to be regarded as integral components of the vacuum pump, regardless of whether the evaluation unit is arranged inside or outside the housing of the vacuum pump.
  • the internal or external arrangement of a control unit for the vacuum pump and the evaluation unit for the vibration data can depend, for example, on the space available for the vacuum pump.
  • the evaluation unit can be integrated into the control unit of the vacuum pump. Irrespective of whether the evaluation unit forms a common electronic device with the vibration sensor or is arranged externally, there is an electronic communication link between the evaluation unit and the vibration sensor for transmitting the vibration data as signals from the vibration sensor to the evaluation unit.
  • a possibly imminent failure of the vacuum pump can be detected at an early stage on the basis of the evaluation of the vibration data, which is carried out by means of the evaluation unit. If, for example, the intensity of the vibrations measured by the vibration sensor exceeds a specific threshold value due to an increased amplitude of the vibrations of the vacuum pump, this can be an indicator of a possibly imminent failure of the vacuum pump due to a malfunction of the pump-active elements. In such a case, i.e. if a possibly impending failure of the vacuum pump can be detected by the evaluation unit based on the vibration data, the evaluation unit can generate an information signal which can be perceptible to a user of the vacuum system, for example by means of a warning light or an audible signal.
  • the evaluation unit of the vacuum pump is also designed to use the vibration data to determine a state of wear of the vacuum pump.
  • the evaluation unit can indicate, for example, that the vacuum pump is in a certain state of wear when the intensity of the vibrations detected by the vibration sensor exceeds a predetermined threshold value due to an increased amplitude of the vibrations of the vacuum pump.
  • a predefined threshold value can, for example, be assigned directly to a specific state of wear of the vacuum pump.
  • the predetermined threshold value can be calibrated and based on empirical values, for example on the basis of vibration data that were recorded when the vacuum pump actually failed. If the absolute value of the vibration data is above the predetermined threshold value, the evaluation unit can in turn output an information signal that can be perceptible to a user of the vacuum system.
  • the vibration data for determining the state of wear of the vacuum chamber can be recorded and stored periodically at predetermined time intervals, and the evaluation unit can compare the vibration data recorded last with the vibration data recorded and stored earlier.
  • the evaluation unit can turn output a warning signal that indicates a predefined, undesirable state of wear of the vacuum pump.
  • the notification signal can be output if, for example, the average deviation between the vibration data recorded last and the stored vibration data recorded earlier exceeds a further, predetermined threshold value.
  • the evaluation unit can alternatively or additionally access vibration data that has been recorded and stored for a large number of identical or similar vacuum pumps and is available, for example, in the form of a database.
  • the evaluation unit can correlate current vibration data of the vacuum pump, which are momentarily detected with the vibration sensor, with the stored vibration data from the database.
  • the evaluation unit can include a neural network that is capable of learning using the previously stored data from the database in order to use the vibration data currently recorded by the vibration sensor to detect an undesired state of wear on the vacuum pump at an early stage.
  • the vibration sensor can include an acceleration sensor, which is in particular an acceleration sensor of a micro-electromechanical system (MEMS sensor).
  • MEMS sensor micro-electromechanical system
  • the acceleration sensor preferably detects the acceleration in at least two directions.
  • one of the directions in which the acceleration sensor detects the acceleration is aligned with an axis of rotation of the pump-active elements of the vacuum pump.
  • the accelerometer senses acceleration in two or even three directions can, this improves the reliability of the vibration sensor, since the detection of the vibration data is thus not only limited to one spatial direction.
  • the detection of the acceleration in two or three spatial directions reduces the probability that vibrations of the vacuum pump will occur that cannot be detected by the vibration sensor.
  • By aligning one of the directions in which the acceleration sensor detects the acceleration with the axis of rotation of the pump-active elements a change in the vibration data can be detected, which is caused specifically by the pump-active elements. For example, with such an alignment of the acceleration sensor, an imbalance in the active pumping elements can be detected early, since the vibration data recorded by the acceleration sensor aligned with the axis of rotation of the active pumping elements is specific to the active pumping elements.
  • the vibration sensor is arranged within a housing of the vacuum pump.
  • the vibration sensor is thus fully integrated into the vacuum pump and is protected from external influences within the housing.
  • the distance between the vibration sensor and the pump-active elements inside the housing can also be chosen to be as small as possible, so that the detection of the vibration data due to the working movement of the pump-active elements is improved.
  • the vibration sensor can be coupled directly to the housing of the vacuum pump. If the pump-active elements produce undesirable vibrations, these are usually transmitted to the vacuum pump housing. With a direct coupling of the vibration sensor to the housing of the vacuum pump, the vibration data of the vacuum pump can be measured in a particularly simple and reliable manner due to the working movement of the pump-active elements way to be recorded. Further, in this embodiment, the vibration sensor may be attached to and directly coupled to an inner wall of the vacuum pump housing, so that the vibration sensor may be simultaneously disposed within and directly coupled to the vacuum pump housing.
  • the circuit board is preferably integrated in drive electronics of a drive motor of the vacuum pump.
  • the circuit board can be arranged in particular in a so-called terminal box of the drive motor of the vacuum pump.
  • the evaluation unit can be integrated into the circuit board of the vacuum pump.
  • unused installation space within the vacuum pump for example in the terminal box of the drive motor, can be used to integrate the vibration sensor and/or the evaluation unit. If both the vibration sensor and the evaluation unit are arranged on the circuit board of the vacuum pump or integrated into it, the vibration sensor and the evaluation unit form a particularly compact unit that outputs vibration data that has already been evaluated, for example by means of a signal that indicates the state of wear of the vacuum pump.
  • the evaluation unit can also have an integrated processor which is designed to assign the vibration data to a state of wear of the vacuum pump.
  • the evaluation of the vibration data is therefore already carried out completely in the integrated processor of the evaluation unit, which is also integrated in the circuit board of the vacuum pump.
  • the evaluation unit can in turn form a compact unit together with the vibration sensor, even if this is attached to a section of the housing of the vacuum pump outside the circuit board.
  • the vacuum pump includes an interface for outputting the vibration data.
  • the evaluation unit is preferably arranged outside a housing of the vacuum pump in order to receive the vibration data via the interface.
  • This embodiment thus represents an alternative to the integration of the evaluation unit in the circuit board of the vacuum pump.
  • the arrangement of the evaluation unit outside the housing of the vacuum pump allows a flexible arrangement of the vibration sensor, for example on or in the housing of the vacuum pump, so that the vibration data recorded by this only has to be provided via the interface for the evaluation unit.
  • the vibration sensor and the evaluation unit with an integrated processor can be integrated into a circuit board of the vacuum pump, which is arranged, for example, in a terminal box of a drive motor within a housing of the vacuum pump, and at the same time an interface of the vacuum pump can be provided.
  • the interface can be used to output the vibration data and also to output data that are evaluated by the evaluation unit and indicate a state of wear of the vacuum pump.
  • the additional output of the original vibration data, which is recorded by means of the vibration sensor can additionally enable an external, redundant evaluation of the vibration data.
  • the reliability of the evaluation unit can be checked and thus improved by a comparison with the output of the internal evaluation unit.
  • the vacuum pump 11 is a Roots pump that can be used, for example, for the low and medium vacuum range within a vacuum system. Furthermore, the vacuum pump 11 has a housing 13 which comprises a main section 15 and a motor section 17 . The main section 15 and the motor section 17 are connected to each other by means of screws 18 .
  • the main section 15 of the housing 13 of the vacuum pump 11 has a suction flange 19, which serves as an inlet for a gas to be pumped, which is sucked in from a recipient, not shown.
  • At least one further vacuum pump for example a turbomolecular pump (not shown), is usually arranged between the recipient and the vacuum pump 11 within a vacuum system.
  • the vacuum pump 11 designed as a roots pump requires a backing pump which is connected to the outlet 23 of the vacuum pump 11 and discharges against atmospheric pressure.
  • the vacuum pump 11 in a vacuum system is usually located between a pump for the high-vacuum range, for example a turbomolecular pump, and the backing pump, which discharges against atmospheric pressure.
  • the vacuum pump 11 also has active pumping elements (not shown) in the form of Roots pistons, which are located in an interior space 21 (cf. 2 ) of the housing 13 are arranged.
  • the active pumping elements are intended to transport the gas to be pumped from the inlet 19 to an outlet 23 of the vacuum pump 11 .
  • the pump-active elements are in 2 can be seen within the intake flange 19.
  • an electric motor not shown, which is arranged within the motor section 17, the pump-active elements are driven to a working movement. Due to this working movement of the pump-active elements, the entire vacuum pump 11 is set in motion, which the pump-active elements transmit to the housing 13 of the vacuum pump 11 .
  • FIG 3A shows a perspective detailed view of the motor section 17 of the vacuum pump 11.
  • the motor section 17 has cooling ribs 25 on its outer circumference, which are provided for cooling the electric motor, which is located in an interior of the motor section 17.
  • the motor section 17 comprises, in an end section which is in Figures 3A and 3B is shown on the right, a terminal box 27, which is in Figure 3A is closed by means of a cover 29, while the cover 29 in Figure 3B is removed.
  • the motor section 17 has no cooling fins 25, since the terminal box 27 is provided for the electrical connections of the electric motor of the vacuum pump 11 and therefore does not require cooling.
  • the electric motor of the vacuum pump 11 can also be water-cooled. In such an embodiment, the motor section 17 has cast-in water lines and does not require cooling fins 25.
  • connection elements 31 are arranged in the terminal box 27 of the motor section, which are provided for supplying the electric motor with electrical currents and voltages. Furthermore, the terminal box 27 includes a ground 33 which is attached to a housing wall 35 within the terminal box 27, on which the connection elements 31 are also located.
  • a circuit board 37 is also arranged in the terminal box 27 and is also attached to the housing wall or inner wall 35 of the terminal box 27 .
  • the circuit board 37 has a vibration sensor 39 that acts as an acceleration sensor a micro-electromechanical system (MEMS sensor) is formed.
  • MEMS sensor micro-electromechanical system
  • the vibration sensor 39 is directly connected to the housing wall 35, ie there are no further elements between the vibration sensor 39 and the housing wall 35 in order to transmit vibrations of the housing 13 of the vacuum pump 11 to the vibration sensor 39 as directly as possible.
  • the circuit board 37 also has an evaluation unit 41 for the vibration sensor 39 .
  • the evaluation unit 41 includes an integrated processor, with which the evaluation of vibration data that is detected by the vibration sensor 39 takes place.
  • the vibration sensor 39 and the evaluation unit 41 including the processor are thus in an electronic communication connection within the circuit board 37.
  • the motor section 17 has an electrical connection 43 on its outside, to which a plug (not shown) can be attached.
  • the electrical connection 43 is electrically connected both to the connection elements 31 for the electric motor of the vacuum pump 11 and to the evaluation unit 41 on the circuit board 37 in order to ensure the power supply of the electric motor and the circuit board 37 on the one hand and to establish a connection for signals from are provided to the evaluation unit 41 and represent an indicator of a state of wear of the vacuum pump 11 .
  • the vibration sensor 39 which is designed as a MEMS sensor, is able to measure an acceleration in all three spatial directions.
  • the vibration sensor 39 thus detects vibrations in all three spatial directions.
  • one of these spatial directions or axes is aligned with an axis of rotation of the active pumping elements of the vacuum pump 11 (cf. 2 ) aligned.
  • vibrations can be detected particularly well which occur because the movement of the pump-active elements differs from an expected movement during normal operation of the vacuum pump 11 deviates. This can be caused, for example, by an imbalance in the active pumping elements.
  • the vibration data recorded by the vibration sensor 39 is evaluated by the evaluation unit 41 or by its processor by comparing this vibration data, for example, with vibration data that was recorded at an earlier point in time and is stored in the evaluation unit 41 .
  • the amplitude of the current and earlier vibration data, averaged over a predetermined period of time is compared.
  • the amplitude of the detected vibration data can also be compared to a predetermined threshold value based on empirical values.
  • evaluation unit 41 emits an information signal, which is transmitted via electrical connection 43 to a control unit (not shown) of the Vacuum pump 11 is transmitted to generate a noticeable indication for a user of the vacuum system, for example by means of a warning light.
  • the vibration sensor 39 is arranged on the circuit board 37, while the evaluation unit 41 is located outside the terminal box 27 and is integrated into the control unit (not shown) of the vacuum pump 11. In this case, however, the vibration sensor 39 and the evaluation unit 41 are also in an electronic communication connection, which takes place via the electrical connection 43 .
  • suitable cable connections are provided between the electrical connection 43 and the connection elements 31 and the circuit board 37, which for the sake of clarity are shown in FIG 4 are not shown. Since, in all of the embodiments, a signal that corresponds to a state of wear of the vacuum pump 11 is ultimately generated on the basis of the vibration data that is detected by means of the vibration sensor 39, a possibly impending failure of the vacuum pump 11 can be detected at an early stage. If this is the case, planned maintenance of the vacuum pump 11 can be carried out at a suitable point in time, so that an undesired and unforeseen failure of the vacuum pump 11 can be prevented.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Claims (11)

  1. Pompe à vide (11), en particulier pompe Roots ou pompe à vis, comprenant des éléments actifs en pompage susceptibles d'être entraînés pour effectuer un mouvement de travail, qui transportent un gaz à pomper depuis une entrée (19) jusqu'à une sortie (23) de la pompe à vide (11),
    un capteur de vibrations (39) qui enregistre les données de vibration de la pompe à vide (11) en se basant sur le mouvement de travail des éléments actifs en pompage, et
    une unité d'évaluation (41) qui est réalisée pour évaluer les données de vibration,
    caractérisée en ce que
    le capteur de vibrations (39) est intégré dans une platine (37) de la pompe à vide (11), la platine (37) étant disposée dans un espace intérieur de la pompe à vide (11).
  2. Pompe à vide (11) selon la revendication 1,
    dans laquelle l'unité d'évaluation (41) est en outre réalisée pour déterminer un état d'usure de la pompe à vide (11) en se basant sur les données de vibration.
  3. Pompe à vide (11) selon la revendication 1 ou 2,
    dans laquelle le capteur de vibrations (39) comprend un capteur d'accélération.
  4. Pompe à vide (11) selon la revendication 3,
    dans laquelle le capteur d'accélération est un capteur d'accélération d'un système micro-électromécanique (capteur MEMS).
  5. Pompe à vide (11) selon la revendication 3 ou 4,
    dans laquelle le capteur d'accélération détecte l'accélération dans au moins deux directions.
  6. Pompe à vide (11) selon la revendication 5,
    dans laquelle l'une des directions dans lesquelles le capteur d'accélération détecte l'accélération est alignée avec un axe de rotation des éléments actifs en pompage de la pompe à vide (11).
  7. Pompe à vide (11) selon l'une des revendications précédentes, dans laquelle le capteur de vibrations (39) est directement couplé à un boîtier (13) de la pompe à vide (11).
  8. Pompe à vide (11) selon l'une des revendications précédentes, dans laquelle l'unité d'évaluation (41) est intégrée dans la platine (37) de la pompe à vide (11).
  9. Pompe à vide (11) selon la revendication 8,
    dans laquelle l'unité d'évaluation (41) comporte un processeur intégré qui est réalisé pour associer les données de vibration à un état d'usure de la pompe à vide (11).
  10. Pompe à vide (11) selon l'une des revendications 1 à 7, comprenant en outre une interface pour la sortie des données de vibration.
  11. Pompe à vide (11) selon la revendication 10,
    dans laquelle l'unité d'évaluation (41) est disposée à l'extérieur d'un boîtier (13) de la pompe à vide et reçoit les données de vibration au moyen de l'interface.
EP20166248.3A 2020-03-27 2020-03-27 Pompe à vide Active EP3686432B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP20166248.3A EP3686432B1 (fr) 2020-03-27 2020-03-27 Pompe à vide
EP21161837.6A EP3808988B1 (fr) 2020-03-27 2021-03-10 Pompe à vide et procédé de surveillance d'une pompe à vide
JP2021040051A JP7160978B2 (ja) 2020-03-27 2021-03-12 真空ポンプ及び真空ポンプを監視する方法
CN202110336661.1A CN113446243A (zh) 2020-03-27 2021-03-29 真空泵和用于监控真空泵的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20166248.3A EP3686432B1 (fr) 2020-03-27 2020-03-27 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3686432A1 EP3686432A1 (fr) 2020-07-29
EP3686432B1 true EP3686432B1 (fr) 2022-06-08

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EP20166248.3A Active EP3686432B1 (fr) 2020-03-27 2020-03-27 Pompe à vide

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3808988B1 (fr) * 2020-03-27 2024-01-10 Pfeiffer Vacuum Technology AG Pompe à vide et procédé de surveillance d'une pompe à vide
EP3736447A1 (fr) * 2020-04-17 2020-11-11 Pfeiffer Vacuum Technology AG Pompe à vide et procédé de surveillance d'une pompe à vide

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DE202015003927U1 (de) 2015-05-29 2015-07-13 Oerlikon Leybold Vacuum Gmbh Steuerungselektronik für eine Vakuumpumpe sowie Vakuumpumpe
GB2551337A (en) 2016-06-13 2017-12-20 Edwards Ltd Pump assembly, method and computer program
US20190383296A1 (en) 2018-06-14 2019-12-19 Shimadzu Corporation Vacuum pump and diagnosis system

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DE102016102954A1 (de) * 2016-02-19 2017-08-24 Multivac Sepp Haggenmüller Se & Co. Kg Vakuumpumpe
DE202018003585U1 (de) * 2018-08-01 2019-11-06 Leybold Gmbh Vakuumpumpe

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