EP3431769B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3431769B1
EP3431769B1 EP17182580.5A EP17182580A EP3431769B1 EP 3431769 B1 EP3431769 B1 EP 3431769B1 EP 17182580 A EP17182580 A EP 17182580A EP 3431769 B1 EP3431769 B1 EP 3431769B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
motor
accordance
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP17182580.5A
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German (de)
English (en)
Other versions
EP3431769A1 (fr
Inventor
Miriam Schmitz
Hans-Jürgen Jung
Jürgen Wissner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP17182580.5A priority Critical patent/EP3431769B1/fr
Priority to JP2018133906A priority patent/JP6655133B2/ja
Publication of EP3431769A1 publication Critical patent/EP3431769A1/fr
Application granted granted Critical
Publication of EP3431769B1 publication Critical patent/EP3431769B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring

Definitions

  • the present invention relates to a vacuum pump, in particular a turbomolecular pump, comprising a vacuum chamber, a motor rotor arranged in the vacuum chamber and a motor stator surrounding the motor rotor.
  • Such a vacuum pump is known in principle.
  • To supply electrical energy to the motor stator three supply conductors are provided, one for each phase, which connect the motor stator to a motor control board. Since the supply conductors run in an area of the vacuum pump in which there is a vacuum during operation of the vacuum pump, the supply conductors must be soldered to the motor control circuit board and the soldering points on the motor control circuit board must be cast in a dielectric casting compound so that under certain gas atmospheres, in particular under argon, no electrical flashovers occur.
  • Potting the solder joints on the motor control board is disadvantageous in that it takes time to cure the potting compound. Depending on the type of casting compound used, curing can take up to two days. If a subsequent test reveals that the encapsulation is not tight, the supply conductors must be severed and the motor control circuit board must be disposed of. This is costly and time consuming as a new motor control board is required and the potting again takes two days.
  • the EP 1 843 043 A2 discloses a vacuum pump with a separating element, which separates an interior space in which there is negative pressure and the environment from one another, wherein the separator comprises a printed circuit board for carrying electrical currents and voltages.
  • the US2010/0303650 A1 discloses a vacuum pump with a vacuum cover that also includes a circuit board for conducting power.
  • the EP 2 060 793 A2 relates to a vacuum pump which provides an annular channel in a housing section which can accommodate an electrical supply line.
  • One object of the invention is to provide a vacuum pump of the type mentioned at the outset, which is characterized by more economical manufacture.
  • the vacuum pump according to the invention comprises, in particular, a motor mount which accommodates the motor stator, the outside of which partially adjoins a pressure chamber which has a connection opening which faces the pressure chamber and which is closed in a vacuum-tight manner by means of a connection circuit board, and which contains a casting compound which partially encloses the motor stator, at least one electrical connection conductor, which extends through the casting compound, one end of which is connected to the motor stator and the other end of which is connected to a side of the circuit board facing the casting compound, and at least one electrical supply conductor which runs through the pressure chamber and one end of which is connected to the pressure chamber facing side of the circuit board is connected.
  • the invention is based on the general idea of not connecting the motor stator directly to the motor controller by means of a continuous supply line, but rather indirectly, namely via the connecting conductors, the connecting circuit board and the supply conductors.
  • This has the advantage that the motor stator after Connecting to the connection board and potting in the motor mount can be tested before it is installed in the vacuum pump. If the encapsulation proves to be leaking in this pre-assembly state and electrical flashovers occur, this faulty assembly can be easily replaced by a fault-free assembly without delaying the assembly of the vacuum pump overall.
  • connection board acts as a vacuum bushing
  • the supply conductors can also run through the pressure chamber, in which atmospheric pressure can prevail, for example, which makes it possible to detachably connect the supply conductors to a motor control, in particular a motor control board, without the risk of electrical flashovers.
  • the motor control board can therefore be easily connected to the motor stator and does not have to be disposed of if the assembly comprising the motor mount and the motor stator potted therein is replaced and/or the motor stator has to be re-potted, which ultimately leads to increased flexibility in the Assembling the vacuum pump and contributing to a more economical manufacture of the vacuum pump.
  • the at least one connection conductor and/or the at least one supply conductor is permanently connected to the connection board, in particular soldered to the connection board.
  • the at least one connection conductor and/or the at least one supply conductor can also be detachably connected to the connection board, in particular by means of a plug connection.
  • the other end of the at least one electrical supply conductor is advantageously connected to a motor controller, in particular to a motor controller circuit board.
  • the other end of the at least one electrical supply conductor can be permanently connected to the motor control circuit board, in particular soldered on.
  • the other end of the at least one electrical supply conductor can also be detachably connected to the motor control circuit board, in particular by means of a plug connection.
  • connection board is attached to the outside of the motor mount.
  • the terminal board can be attached to an axially extending wall section of the motor mount or to a radially extending wall section of the motor mount.
  • the "axial” orientation is defined by the axis of rotation of the engine rotor.
  • the "radial” orientation is correspondingly aligned at right angles to the axis of rotation of the motor rotor.
  • connection board can be screwed onto the wall section for particularly simple assembly.
  • a sealing element is preferably arranged between the connection board and the wall section, in particular which completely encloses the connection opening. This contributes to a particularly reliable separation of the vacuum space from the pressure space.
  • the motor mount comprises an axially extending, in particular hollow-cylindrical, casing wall and a radially extending end wall, in which a through-opening is formed, which is part of the vacuum chamber.
  • the motor stator is ideally completely surrounded by the casting compound, with the exception of an inner side that delimits the vacuum space.
  • An intermediate space defined by the motor stator and walls of the motor mount is preferably completely filled with the casting compound. This enables a particularly simple production of the motor mount and the motor stator Assembly, since the motor mount only has to be filled with the casting compound after the motor stator has been inserted.
  • a further contribution to even greater flexibility when assembling the vacuum pump is if the motor mount and a labyrinth sealing element assigned to the motor mount are designed as separate components. In particular, this enables an alignment of the labyrinth sealing element within the vacuum pump that is independent of the motor mount and is therefore more precise.
  • the motor mount in particular an end wall of the motor mount, can be inserted into the labyrinth sealing element.
  • a recess is formed in the labyrinth sealing element, which recess communicates with the pressure chamber.
  • This cutout can be delimited by the connection board, in particular if the connection board is attached to the end wall of the motor mount. This makes it possible to connect the supply conductors axially to a certain extent to the connection board.
  • a contribution to better separation of the vacuum space from the pressure space is provided if at least one sealing element running around the vacuum space is arranged in the region of the recess between the labyrinth sealing element and the motor mount.
  • At least one sealing element running around the vacuum chamber is also advantageously arranged between the motor mount and a lower part of the vacuum pump.
  • the vacuum pump 10 shown comprises a housing 16 with a pump inlet 14 surrounded by an inlet flange 12 and several pump stages in the housing 16 for conveying a gas present at the pump inlet 14 to a pump outlet 74 provided on the lower part 90 of the housing 16. Between the lower part 90 and the housing 16 a seal 81 is arranged.
  • the vacuum pump 10 comprises a motor stator 92 and a motor rotor 93 with a rotor shaft 20 mounted so as to be rotatable about an axis of rotation 18.
  • the vacuum pump 10 is embodied as a turbomolecular pump and comprises a plurality of turbomolecular pump stages connected in series with one another for pumping purposes, with a plurality of turbomolecular rotor disks 22 connected to the rotor shaft 20 and a plurality of turbomolecular stator disks 24 arranged in the axial direction between the rotor disks 22 and fixed in the housing 16, which are secured by spacer rings 26 are held at a desired axial distance from one another.
  • the active pumping system implemented by means of the turbomolecular pumping stages therefore builds up in the regular alternation of rotor disks 22 and stator disks 24 . These are just a few of the components shown marked with numbers for legibility.
  • the rotor disks 22 and stator disks 24 provide an axial pumping action directed in the direction of the arrow 30 .
  • the vacuum pump 10 can optionally have one or more known Holweck pump stages, which are not shown, downstream of the turbomolecular pump stages.
  • three Holweck pump stages arranged one inside the other in the radial direction and connected in series with one another for pumping purposes can be provided.
  • the part of the Holweck pump stages on the rotor side can have a rotor hub connected to the rotor shaft 20 and two Holweck rotor sleeves in the shape of a cylinder jacket that are fastened to the rotor hub and carried by it, which are oriented coaxially to the rotor axis 18 and are nested in one another in the radial direction.
  • one, two or three cylinder jacket-shaped Holweck stator sleeves can be provided, which are also oriented coaxially to the axis of rotation 18 and are nested in one another in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces of a Holweck rotor sleeve and a Holweck stator sleeve, which face one another and form a narrow radial Holweck gap.
  • one of the active pump surfaces is smooth, in particular that of the Holweck rotor sleeve, and the opposite active pump surface, in particular of the Holweck stator sleeve, has a structure with grooves running helically around the axis of rotation 18 in the axial direction, in which through the Rotation of the rotor drives the gas and thereby pumps it.
  • the Holweck pump stages are not provided in the vacuum pump 10 shown.
  • a sealing area 34 is formed by a special, in this case asymmetrically shaped stator disk 24, which keeps the remaining gaps to the rotor disks 22 to a minimum in order to achieve better sealing against undesired backflow between the first and second pump stages.
  • a prestressing and sealing ring 32 is arranged between the inner wall of the housing 16 and the turbomolecular pumping stages, in particular between two spacer rings 26 .
  • the prestressing and sealing ring 32 ensures that the stack of spacer rings 26 , which is subject to tolerances, is reliably prestressed axially between the housing 16 and the lower part 90 . Furthermore, it additionally seals the gap between the stack of spacer rings 26 and the wall of the housing 16 against undesired backflow from the pre-vacuum/ejection area into the high-vacuum/intake area.
  • a flood gas inlet 36 is arranged on the housing 16, via which the vacuum pump 10 can be flooded with flood gas.
  • the flood gas inlet 36 is advantageously located downstream of the pump or below the prestressing and sealing ring 32.
  • the spacer ring 26 located at the level of the connection is preferably provided with a channel or a recess on its lateral surface over the entire circumference, so that the flood gas first flows over the entire Distributed annular channel with good conductance and then penetrates the gap or the recesses in the stator stack with a lower conductance as evenly as possible over the circumference and reaches the pump stages close to the fore-vacuum, which are mechanically more stable against flooding.
  • a coolant inlet 38 and a coolant outlet 40 are arranged on the lower part 90 , between which a coolant line formed by at least one coolant tube 76 runs, which is routed in turns around the lower part 90 .
  • a coolant pump can be connected to the coolant inlet 38 and the coolant outlet 40 , by means of which coolant can be pumped through the coolant line in order to cool the vacuum pump 10 .
  • the coolant tube 76 can be in preformed recesses of the lower part 90, for example according to EP 3 070 335 A1 , to be pressed.
  • the pipe ends can be cut out of the contour of the pump 10 as a respective pipe section at any desired angle protrude to be connected to the inlet 38 or outlet 40, for example, with insulation displacement fittings or special connectors.
  • connection blocks which form the inlet 38 and the outlet 40 and which in turn are fixed to the lower part 90 .
  • the tight connection between tube 76 and connection block 38, 40 can be produced in various ways, e.g. by soldering, welding, clamping/pressing/stretching or with separate sealing elements, e.g. (cutting) sealing rings or strips or with special connectors with an integrated sealing system.
  • a coolant line is shown which, starting from the inlet 38 , has three complete, spirally arranged loops around the lower part 90 and then ends at the outlet 40 .
  • any number or parts of wraps can cross one or more times at different radius and/or at different axial heights of the axis of rotation 18 or reverse their direction of rotation once or several times, e.g. by means of U-shaped bends or arranged deflection blocks, the two Pick up pipe section ends similar to the terminal blocks and make a connection between them.
  • Such port and diverter blocks may also include a valve that regulates the flow of coolant or can shut it off if necessary.
  • any block can also have another connection, to which e.g. an additional, in particular parallel, coolant line or one or more valves for redirecting or distributing the coolant flow into different branches of the coolant pipe system, which can also be used as a bypass or Diversion can serve, is present or are present.
  • the rotatable mounting of the rotor shaft 20 is brought about by a roller bearing 42 in the area of the pump outlet 74 and a permanent magnet bearing 44 in the area of the pump inlet 14 .
  • the permanent magnet bearing 44 comprises a rotor-side bearing half 46 and a stator-side bearing half 48, each of which comprises a ring stack of a plurality of permanent-magnetic rings 50, 52 stacked on top of one another in the axial direction, with the magnet rings 50, 52 lying opposite one another, forming a radial bearing gap 54.
  • An emergency or safety bearing 56 is provided within the permanent magnet bearing 44, which is designed as an unlubricated roller bearing and runs idle without contact during normal operation of the vacuum pump and only engages in the event of an excessive radial deflection of the rotor relative to the stator in order to create a radial stop for to form the rotor that prevents collision of the rotor-side structures with the stator-side structures.
  • the emergency or safety bearing 56 is held separately via an insert and can therefore be changed independently of the permanent magnet bearing 44 .
  • roller bearing 42 is held by a ring holder, which in turn is accommodated in a roller bearing holder or roller bearing suspension 84 , which is decoupled both axially and radially, by elastomeric elements and is securely fixed on the lower part 90 .
  • Mechanical stops limit the possible relative movements between the ring holder and the roller bearing suspension 84.
  • a conical injection screw 58 is provided on the rotor shaft 20 with an outer diameter increasing towards the roller bearing 42, which can receive operating fluid, in particular lubricant, by means of a lubricant channel 60 and feed it to the roller bearing.
  • the spray screw 58 can preferably according to EP 2 740 956 A2 be designed.
  • the operating medium is circulated by a lubricant pump 78 .
  • the lubricant pump 78 is preferably according to FIG EP 2 060 794 A2 built up. she can in particular supply a lubricant supply channel, which according to at least one segment EP 2 801 725 A2 constructed as an O-ring sealed round channel.
  • the lubricant pump 78 allows an active, regulated supply of operating resources to be implemented.
  • the vacuum pump 10 To drive the rotor shaft 20 in rotation, the vacuum pump 10 includes an electric drive motor 62 with a motor stator 92 and a motor rotor 93 formed on the rotor shaft 20 .
  • a control unit 64 controls the drive motor 62 .
  • the vacuum pump 10 and in particular the control unit 64 and the drive motor 62 can be supplied with electrical power via an electrical connection 66 .
  • the control unit 64 forms the lower area of the housing 16 and is covered by a cover 80 . Control unit 64 and cover 80 close lower part 90.
  • one or more seals 77 can be inserted circumferentially between control unit 64, cover 80 and/or lower part 90, or the corresponding transitions can be made with other sealants, such as liquid sealants, adhesives or, in particular, molded seals that can be applied be closed to gain security against the ingress of media and / or contamination.
  • sealants such as liquid sealants, adhesives or, in particular, molded seals that can be applied be closed to gain security against the ingress of media and / or contamination.
  • the current can be fed through the cover 80 into the housing and, in particular, fed to the drive motor 62.
  • the vacuum bushing 86 can according to EP 1 843 043 A2 be designed, wherein in the example described here, a circuit board leads different voltage potentials and signals separately from the inside of the pump, i.e. from the vacuum area, to the outside, i.e. to the "atmosphere" and in particular to the control unit 64.
  • the coolant such as water, advantageously flows from the inlet 38 to the outlet 40 since the control unit 64 is to be kept coolest.
  • a cover 88 can be arranged on the radially outer side of the lower part 90 .
  • the cover 88 which can be embodied in the form of a jacket as a sheet metal sleeve slotted along the axis of rotation 18 of the pump 10, is advantageously not shown in the external view of the pump 10 in order to obtain a better view of the solutions underneath.
  • the cover 88 can have one or more viewing windows or cut-outs in order to pass through any connections of the lower part 90, e.g are attached.
  • the sealing gas inlet 68 is also referred to as the flushing gas connection. Flushing gas to protect the engine 62 can be introduced into the engine compartment in which the engine 62 is housed via the sealing gas inlet 68 .
  • the gas admitted via the sealing gas inlet 68 in the area of the motor protects the components located in the lower part 90 from corrosive and/or depositing media which can occur in the pump system depending on the application.
  • a seal 83 is arranged between the motor support 82 and the lower part 90, so that a labyrinth seal 72, as the only remaining passage, on the one hand with its low conductance represents a barrier against media flowing into the motor and roller bearing area and on the other hand an increased saturation of the roller bearing and motor area with the barrier -/inert gas secures.
  • the labyrinth seal 72 is provided between a motor support 82 delimiting the motor compartment at the top and the lower rotor disk 22 .
  • Motor stator 92 of drive motor 62 is advantageously protected against corrosion by a casting compound.
  • motor stator 92 is cast in motor mount 82, so that the unit consisting of motor stator 92, motor mount 82 and the stator side of labyrinth seal 72, which is designed in one piece with the motor mount, can be aligned or centered with lower part 90 in one step.
  • the fore-vacuum area is located radially outside of the labyrinth seal 72 and below the turbomolecular pumping stages, in which in particular a chamber 70 is formed which runs annularly around the axis of rotation 18 and which, as shown in FIG 2 is seen to have a substantially rectangular cross-section.
  • this cross-sectional shape is only to be seen as an example, so that another cross-sectional shape, for example a square or circular cross-section, can also be implemented.
  • the chamber 70 can also be accommodated elsewhere in the housing 16 or in the lower part 90 .
  • Chamber 70 is preferably located where most deposits occur, ie typically in the fore-vacuum area.
  • the chamber 70 is therefore particularly preferably located between the last pump stage and the pump outlet 74.
  • the chamber 70 opens into the pump outlet 74.
  • the chamber 70 therefore forms an ejection area for the gas conveyed by the vacuum pump 10 from the inlet 14, which can reach a backing pump (not shown) connected thereto via the pump outlet 74.
  • the backing pump can then pump the gas further, for example into a line for exhaust gas that is under normal pressure.
  • This lower pump part also includes a lower part 90 which accommodates a drive motor 62 which has a motor stator 92 which is ring-shaped and surrounds a motor rotor 93 which is not shown here and is formed on the rotor shaft 20 .
  • the motor stator 92 is arranged in a motor support 82, which has an axially extending casing wall 94, which in the exemplary embodiment shown is hollow-cylindrical, surrounding the motor stator 92 on the outside, and a radially extending end wall 96 adjoining the upper end of the casing wall 94.
  • a through opening 98 for the rotor shaft 20 is formed in the end wall 96, the diameter of which corresponds to the inner diameter of the motor stator 92 in the exemplary embodiment shown.
  • a collar section 100 of the end wall 96 protrudes radially outward beyond the jacket wall 94 and rests on an upper side of the lower part 90 .
  • the end wall 96 is embedded in a labyrinth sealing element 102 embodied as a separate component, which bears against an upper side of the end wall 96 and has a circumferential collar 104 which surrounds the end wall 96 radially on the outside and which is screwed to the lower part 90 .
  • a peripheral extension 106 is provided on an underside of the collar 104 facing the lower part 90 and engages in a peripheral groove 108 of the lower part 90 for correct alignment and centering of the labyrinth sealing element 102 relative to the lower part 90 .
  • a through opening 110 for the rotor shaft 20 is also formed in the labyrinth sealing element 102 .
  • the through opening 110 of the labyrinth sealing element 102 is aligned with the through opening 98 of the end wall 96 of the motor mount 82, and their diameters are at least approximately identical.
  • a plurality of radially spaced circumferential sealing webs 112 are arranged concentrically with the passage opening 110 and are part of a labyrinth seal 72 .
  • connection opening 114 is formed in the casing wall 94 of the motor mount 82 and is closed in a vacuum-tight manner by a connection circuit board 116 arranged on the outside of the casing wall 94 .
  • the connection circuit board 116 is screwed to the casing wall 94 and a first sealing ring 118 enclosing the connection opening 114 is arranged between the connection circuit board 116 and the casing wall 94 .
  • connection circuit board 116 serves to make electrical contact with the motor stator 92 , with three connection conductors 120 emanating from the motor stator 92 being soldered to the connection circuit board 116 in the present exemplary embodiment. In principle, however, it would also be conceivable to connect the connection conductors 120 in a non-detachable manner to the connection circuit board 116 or even to detachably connect them to the connection circuit board 116, for example with the aid of plug-in contacts.
  • the motor stator 92 is embedded in a casting compound 122 which at least approximately completely fills the interior of the motor mount 82 that is not occupied by the motor stator 92 and thus also surrounds the connection conductors 120 and their connection points on the connection circuit board 116 .
  • Casting compound 122 is cast into motor mount 82 with the aid of a cylindrical cast core, which protrudes through through-opening 98 in end wall 96 of motor mount 82 and through motor stator 92 during the casting process, and whose diameter matches the inside diameter of motor stator 92 and the diameter of through-opening 98 is adjusted.
  • the potting compound 122, the motor stator 82 and the through-opening 98 of the motor mount 82 limit a channel for the rotor shaft 20 in which, during operation, the Vacuum pump vacuum and which is accordingly part of a vacuum space 124.
  • connection board 116 The outside of the connection board 116 facing away from the motor mount 82 delimits a pressure chamber 126 which extends axially through the lower part 90 and in which atmospheric pressure prevails during operation of the vacuum pump.
  • connection board 116 forms a vacuum feedthrough, in this case radial, between vacuum space 124 and pressure space 126.
  • the pressure chamber 126 is delimited on the upper side of the lower part 90 by the collar section 100 of the end wall 96 of the motor mount 82 .
  • the pressure chamber 126 is delimited by a motor control circuit board 128, which can be screwed onto the lower part 90, for example.
  • the motor control board 128 is electrically connected to the connection board 116 by means of three supply conductors 130 which extend through the pressure chamber 126 .
  • the connection of the supply conductor 130 to the connection circuit board 116 or the motor control circuit board 128 can in each case be undetachable.
  • at least one plug-in connection 132 is preferably provided, which enables the supply conductor 130 to be easily detached from the connection circuit board 116 or from the motor control circuit board 128 .
  • comparatively shorter first supply conductor sections are soldered to motor control board 128 and provided with a first plug contact
  • comparatively longer second supply conductor sections are soldered to connection board 116 and provided with a complementary second plug contact.
  • a second sealing ring 134 extends around the motor mount 82 between a shoulder of the skirt wall 94 of the motor mount 82 and a complementary one formed shoulder of the lower part 90.
  • a third sealing ring 136 runs radially outside of the pressure chamber 126 along the outer circumference of the end wall 96 between the collar section 100 and the lower part 90.
  • a fourth sealing ring 138 runs parallel thereto between the collar section 100 and the labyrinth sealing element 102 in order to To prevent process gases from entering the area of the motor rotor 93 .
  • a fifth sealing ring 140 enclosing the through-openings 98,110 between the end wall 96 and the labyrinth sealing element 102, which, however, is redundant in this embodiment.
  • connection opening 114 and the connection circuit board 116 are not arranged on the jacket wall 94 of the motor mount 82, but on the end wall 96 of the motor mount 82.
  • the connection board 116 thus forms an axial vacuum feedthrough here.
  • the underside of the labyrinth sealing element 102 facing the motor mount 82 forms a recess 142 which accommodates the connection circuit board 116 and which is connected via a bore 144 in the collar section 100 to the Pressure chamber 126 communicates. Atmospheric pressure also prevails in recess 142 during operation of the vacuum pump, and all five sealing rings 118, 134, 136, 138 and 140 perform a sealing function between pressure chamber 126 and vacuum chamber 124.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)

Claims (15)

  1. Pompe à vide (10), en particulier pompe turbomoléculaire, comprenant
    une chambre à vide (124),
    un rotor de moteur (93) disposé dans la chambre à vide (124), et
    un stator de moteur (92) entourant le rotor de moteur (93),
    caractérisée par
    un support de moteur (82) abritant le stator de moteur (92), dont la face extérieure est partiellement adjacente à une chambre de pression (126), qui présente une ouverture de raccordement (114) tournée vers la chambre de pression et fermée de manière étanche au vide au moyen d'une platine de raccordement (116), et qui contient une masse de scellement (122) enfermant partiellement le stator de moteur (92),
    au moins un conducteur de raccordement électrique (120) qui s'étend à travers la masse de scellement (122), dont une extrémité est raccordée au stator de moteur (92) et dont l'autre extrémité est raccordée à une face de la platine de raccordement (116) tournée vers la masse de scellement (122), et
    au moins un conducteur d'alimentation électrique (130) qui s'étend à travers la chambre de pression (126) et dont une extrémité est raccordée à une face de la platine de raccordement (116) tournée vers la chambre de pression (126).
  2. Pompe à vide (10) selon la revendication 1,
    caractérisée en ce que
    l'autre extrémité dudit au moins un conducteur d'alimentation électrique (130) est connectée à une commande de moteur.
  3. Pompe à vide (10) selon la revendication 1 ou 2,
    caractérisée en ce que
    la platine de raccordement (116) est montée sur la face extérieure du support de moteur (82).
  4. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la platine de raccordement (116) est montée sur une portion de paroi du support de moteur (82), laquelle s'étend axialement.
  5. Pompe à vide (10) selon l'une au moins des revendications 1 à 3,
    caractérisée en ce que
    la platine de raccordement (116) est montée sur une portion de paroi du support de moteur (82), laquelle s'étend radialement.
  6. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    un élément d'étanchéité (118) est disposé entre la platine de raccordement (116) et la portion de paroi, en particulier qui entoure complètement l'ouverture de raccordement (114).
  7. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le support de moteur (82) comprend une paroi enveloppe (94) s'étendant axialement, en particulier cylindrique creuse, et une paroi frontale (96) s'étendant radialement, dans laquelle est formée une ouverture traversante (110) qui fait partie de la chambre à vide (124).
  8. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le stator de moteur (92) est entièrement entouré par la masse de scellement (122), à l'exception d'une face intérieure délimitant la chambre à vide (124).
  9. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    un espace intermédiaire défini par le stator de moteur (92) et par les parois du support de moteur (82) est entièrement rempli de la masse de scellement (122).
  10. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le support de moteur (82) et un élément d'étanchéité à labyrinthe (102) associé au support de moteur (82) sont réalisés sous forme de composants séparés.
  11. Pompe à vide (10) selon la revendication 10,
    caractérisée en ce que
    le support de moteur (82), en particulier une paroi frontale (96) du support de moteur (82), est inséré(e) dans l'élément d'étanchéité à labyrinthe (102).
  12. Pompe à vide (10) selon la revendication 10 ou 11,
    caractérisée en ce que
    un évidement (142) est formé dans l'élément d'étanchéité à labyrinthe (102), lequel communique avec la chambre de pression (126).
  13. Pompe à vide (10) selon la revendication 12,
    caractérisée en ce que
    l'évidement (142) est délimité par la platine de raccordement (116).
  14. Pompe à vide (10) selon la revendication 12 ou 13,
    caractérisée en ce que
    au moins un élément d'étanchéité (138) s'étendant autour de la chambre à vide (124) est disposé dans la zone de l'évidement entre l'élément d'étanchéité à labyrinthe (102) et le support de moteur (82).
  15. Pompe à vide (10) selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    au moins un élément d'étanchéité (134) s'étendant autour de la chambre à vide (124) est disposé entre le support de moteur (82) et une partie inférieure (90) de la pompe à vide (10).
EP17182580.5A 2017-07-21 2017-07-21 Pompe à vide Active EP3431769B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17182580.5A EP3431769B1 (fr) 2017-07-21 2017-07-21 Pompe à vide
JP2018133906A JP6655133B2 (ja) 2017-07-21 2018-07-17 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17182580.5A EP3431769B1 (fr) 2017-07-21 2017-07-21 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3431769A1 EP3431769A1 (fr) 2019-01-23
EP3431769B1 true EP3431769B1 (fr) 2022-05-04

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Application Number Title Priority Date Filing Date
EP17182580.5A Active EP3431769B1 (fr) 2017-07-21 2017-07-21 Pompe à vide

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Country Link
EP (1) EP3431769B1 (fr)
JP (1) JP6655133B2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3626971B1 (fr) * 2019-08-30 2022-05-11 Pfeiffer Vacuum Gmbh Pompe à vide
JP2022145039A (ja) * 2021-03-19 2022-10-03 エドワーズ株式会社 真空ポンプおよび排気システム

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7121095U (de) * 1971-05-29 1972-11-23 Leybold-Heraeus Gmbh & Co Kg Einrichtung zur oelversorgung der lagerstellen einer etwa vertikal angeordneten welle, vorzugsweise der welle einer turbomolekularpumpe
DE102006016405B4 (de) 2006-04-07 2024-08-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
DE202007012070U1 (de) * 2007-08-30 2009-01-08 Oerlikon Leybold Vacuum Gmbh Stromdurchführung einer Vakuumpumpe
DE102007053980A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102007053979A1 (de) 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Schmiermittelpumpe
DE102012023727B4 (de) 2012-12-05 2020-03-19 Pfeiffer Vacuum Gmbh Schmiermitteleinrichtung für ein Wälzlager
DE102013208614A1 (de) 2013-05-10 2014-11-13 Pfeiffer Vacuum Gmbh Vorrichtung mit mindestens einem Kanal zum Führen eines gasförmigen oder flüssigen Betriebsmittels
EP3070335B1 (fr) 2015-03-20 2019-07-31 Pfeiffer Vacuum GmbH Boîtier pour une pompe à vide et/ou pour une partie d'une pompe à vide
EP3112687B1 (fr) * 2015-06-29 2020-04-22 Pfeiffer Vacuum Gmbh Détection de la circulation d'un gaz auxiliaire qui est injecté dans une pompe à vide

Also Published As

Publication number Publication date
JP6655133B2 (ja) 2020-02-26
JP2019023469A (ja) 2019-02-14
EP3431769A1 (fr) 2019-01-23

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