EP2855313A1 - Bobinage de films de traitement - Google Patents

Bobinage de films de traitement

Info

Publication number
EP2855313A1
EP2855313A1 EP12877854.5A EP12877854A EP2855313A1 EP 2855313 A1 EP2855313 A1 EP 2855313A1 EP 12877854 A EP12877854 A EP 12877854A EP 2855313 A1 EP2855313 A1 EP 2855313A1
Authority
EP
European Patent Office
Prior art keywords
film
interposer
spacer
spacers
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12877854.5A
Other languages
German (de)
English (en)
Other versions
EP2855313A4 (fr
Inventor
John C RUDIN
Alejandro De La Fuente Vornbrock
Richard Hall
Stuart WILFORD
Anthony G BIRD
Steven SPRUCE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Development Co LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co LP filed Critical Hewlett Packard Development Co LP
Publication of EP2855313A1 publication Critical patent/EP2855313A1/fr
Publication of EP2855313A4 publication Critical patent/EP2855313A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H18/00—Winding webs
    • B65H18/28—Wound package of webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H18/00—Winding webs
    • B65H18/08—Web-winding mechanisms
    • B65H18/10—Mechanisms in which power is applied to web-roll spindle
    • B65H18/103—Reel-to-reel type web winding and unwinding mechanisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/40—Type of handling process
    • B65H2301/41—Winding, unwinding
    • B65H2301/419—Winding, unwinding from or to storage, i.e. the storage integrating winding or unwinding means
    • B65H2301/4193—Winding, unwinding from or to storage, i.e. the storage integrating winding or unwinding means for handling continuous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2407/00—Means not provided for in groups B65H2220/00 – B65H2406/00 specially adapted for particular purposes
    • B65H2407/30—Means for preventing damage of handled material, e.g. by controlling atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/10—Size; Dimensions
    • B65H2511/16—Irregularities, e.g. protuberances
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2601/00—Problem to be solved or advantage achieved
    • B65H2601/20—Avoiding or preventing undesirable effects
    • B65H2601/25—Damages to handled material
    • B65H2601/253—Damages to handled material to particular parts of material
    • B65H2601/2532—Surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/12—Surface aspects
    • B65H2701/122—Projecting portions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/13—Parts concerned of the handled material
    • B65H2701/131—Edges
    • B65H2701/1315—Edges side edges, i.e. regarded in context of transport
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/18—Form of handled article or web
    • B65H2701/184—Wound packages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/18—Form of handled article or web
    • B65H2701/186—Several articles or webs processed together
    • B65H2701/1864—Superposed webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/19—Specific article or web
    • B65H2701/1942—Web supporting regularly spaced non-adhesive articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/61—Display device manufacture, e.g. liquid crystal displays

Definitions

  • Process films find many applications in high-technology device manufacture.
  • a process " film typically has an active surface and a passive surface.
  • the passive surface can be handled and manipulated with ease, but functional devices, layered coatings, and components may be formed or placed on the active surface, and as a result the active surface may easily be contaminated or damaged by any physical contact during processing.
  • various kirids of cassettes arid track systems have been developed for handling process films in ways that do not risk contaminating their active surfaces.
  • the front-opening unified pod (FOUP) style of standardized wafer cassette handing is widely used to hold silicon wafers; a wafer can be removed from such a pod for proccssing or measurement as needed by special tools.
  • Similar processes are used for handling thin-film transistor (TFT) glass substrates.
  • TFT thin-film transistor
  • plastic patterning industry disposable interleaves are sometimes used for handling such process films as touch-screen and membrane switch constituents.
  • Figure 1 A is a perspective view of an example of spooling apparatus.
  • Fig. IB is a perspective view of another example of spooling apparatus.
  • Fig. 1 C is a perspective view of another example of spooling apparatus.
  • Fig. 2A is a sectional view of an interposer film and a process-film rolled up around a core with the process filrn adjacent a back surface of the interposer film according to an example.
  • Fig. 2B is a sectional view of an interposer film and a process film rolled up around a core with the process film adjacent a spacer surface of the interposer film according to an example.
  • FIG. 3 is a sectional view of an interposer film and a process film rolled up around a core according to another example.
  • Fig. 4 is a perspective view of an example of an blinkerposer film with spacers formed as parallelepipeds:
  • FIG. 5 is a perspective view ofan example of an ⁇ 05 ⁇ film with frusto-conical spacers.
  • FIG. 6 is a perspective view of an example of a gas-pe meable ⁇ 3 ⁇ film with gas-permeable: spacers formed/as continuous strips.
  • Fig. 7 is a perspecti ve vie ⁇ y of an example of an ⁇ film formed as a mesh.
  • FIG. 8 is a perspective view of an example of an interpdser film having a textured surface.
  • Fig. 9 is a perspective, partially cut away ⁇ of layers of process film separated by layers of interposer film.
  • Fig. 10 is a perspective of two strips of process film side-by-side between each layer of according to an example.
  • FIG. V IA is a perspective view of an example of ah interpdser film carrying a plurality of supports on a spacer surface.
  • Fig. 1 1 B is similar to Fig. 1 1 A and with a process film on the supports.
  • Fig. 12A is a perspective view of an example of an interposer film carrying a plurality of supports on a back surface.
  • Fig. 12B is similar to Fig. 12A and with a process film on the supports:
  • FIG. 13 A is a front-side, schematic of an example of passive-surface process film spooling apparatus showing process film beginning to move from a full spool toward an empty spool.
  • Fig. 13B is a back-side schematic of the spooling apparatus shown in Fig. 13A.
  • Fig. 14 is a flowchart illustrating a method of processing process films according to an example.
  • Fig. 15 is a flowchart illustrating a method of processing process films according to another example.
  • Fig. 16 is a flowchart illustrating a method of processing process films according to another example.
  • interleaves can introduce static electric charges that not only can damage components on the active surface but also can attract dust and other forms of small particulate contamination. There has been a need for a way to roll up a process film at various fabrication stages without inflicting damage.
  • an exarnple of spooling apparatus includes an interposer film generally 100 having a spacer surface 102 and a back surface 104.
  • a first spacer 106 is carried by the interposer film 100 ori its spacer surface 102 adjacent a first edge 108 of the interposer film.
  • a second spacer 1 10 is carried by the ' interposer film 100 on the spacer surface 102 adjacent a second edge 112 of the interposer film 100.
  • a process-film protective space 1 14 is defined between the first and second spacers.
  • a rbtatable core 116 is oriented to roll up the interposer film as indicated by an arrow 1 18 together with a process film (not shown) in the process-film protective space 114 with a passive surface of the process film adjacent a surface of the interposer film.
  • the interposer film 100 wraps around the core 1 16 with the spacer surface 102 facing the core, as indicated by an arrow 120 showing the core rotating about its axis 122 in an anticlockwise direction when viewed from a near end 124 of the core 1 16.
  • the protective space 1 14, defined between the spacers 106 and 1 10, extends from the; space surface 102 to a back surface of an adjacent layer (or wrap) of the interposer film when the film is rolled up.
  • the interposer film 100 wraps around the core 1 16 with the back surface 104 facing the core as indicated by an arrow 126.
  • FIG. 1 A the core is shown in the form of a solid shaft, but the core may take other forms.
  • Fig. 1C gives an example of spooling apparatus that is; similar to that shown in Fig. 1 A except that a first flanged i wheei T28 adjacent the firs ⁇ 108 of the int ⁇ oser film 100 and a second flanged wheel 130 adjacent the second edge 1 12 of the interposer film 100 are used as a core rather than a solid shaft.
  • a length of ⁇ 05 ⁇ film 200 with spacers on either edge is shown rolled up around a core 202.
  • a first portion 204 of the interposer film 200 is closest to the, core 202 and carries a first portion 206 of a spacer along one edge and a first portion 208 of a spacer along an opposite edge;
  • portion refers to one layer (or wrap) of film or spacer extending all the way around the core.
  • a first portion (layer or wrap) is adjacent the core and successive layers or wraps are wound one on top of the previous one as the film and spacers are wound up.
  • the first portions 206 and 208 of the spacers are adjacent to, and in some examples rest on, the core 202.
  • a second portion 212 of the interposer film 200 carries second portions 214 and 216 of spacers that rest on the first portion 204 of the interposer film.
  • a third portion 218 of the ⁇ ⁇ film 200 carries third portions 220 and 222 of spacers that rest oh the second portion 212 of the interposer film.
  • a length of process film 224 is also rolled up arouffd the core.
  • a first portion 226 of the process film 224 is located in a portion 228 of protective space formed between the spacers. As with the interposer- film, the first portion 226 of the process film may be considered as a first layer (first wrap). around the core.
  • a first portion 230 of an active surface of the process film 224 carries various items such as. features,, coatings, functionalisations, patterns, or components 232A, 232B 232C, and 232D. These items are installed on, formed in, or otherwise placed on the active surface of the process film.
  • a first portion 234 of a passive surface of the process film 2.24 is adjacent a first portion 236 of a back surface of the interposer film 200.
  • the first portion 234 of the passive surface of the process film 224 is supported by the first portion 236 of the back surface of the interposer film 200.
  • the process film is tensioned sufficiently to maintain contact between it and the back surface of the interposer film.
  • the first portion 228 of the protective space extends between the first portion 236 of the back surface of the interposer film and a second portion 238 of the spacer surface of the interposer film.
  • the spacers are sized such that the protective space fully contains the process film without any contact between the spacer surface of the interposer film and the active surface of the process film.
  • a second portion 240 of the process film 224 is located in a second portion 242 of the protective space between the spacers.
  • a second portion 244 of the passive surface of the process film is adjacent a second portion 246 of the back surface of the interposer film.
  • a spool thus formed may comprise fewer or more, in some examples many more, wraps than the three wraps of interposer film and two wrap ' s of process film shown in Fig. 2A.
  • Fig. 2B is generally similar to Fig. 2A except that a process film is shown interleaved with an interposer film around a core with a passive surface of the process film adjacent a spacer surface of the interposer film. More particularly, a length of interposer film 248 with spacers on either edge is shown rolled up around a core 250.
  • a first portion 252 of the interposer film is closest to the core and carries a first portion 254 of a spacer along one edge and a first portion 256 of a spacer along an opposite edge.
  • a second portion 258 of the interposer film carries second portions 260 and 262 of spacers that rest on the first portion 252 of the interposer film.
  • a third portion 264 of the interposer film carries third portions 266 and 268 of spacers that rest on the second portion 258 of the interposer film.
  • a length of process film 270 is also rolled up around the core.
  • a first portion 272 of the process film 270 is located in a portion 274 of protective space formed between the spacers.
  • a first portion 276 of an active surface of the process film carries various items such as features, coatings, functional isations, patterns* or components 278A, 278B, 278G, and 278D. These items are installed oh, formed in, or otherwise placed on the active surface of the process film.
  • a first portion 280 of a passive surface of the process film lies adjacent a first portion 282 of a spacer surface of the interposer film. The first portion 280 of the passive surface of the process film is supported by the first portion 282 of the back surface of the interposer film.
  • a second portion 284 of the process film is located in a second portion 286 of the protective space between the spacers: A second portion 288 of the passive surface of the process film is adjacent a second portion 290 of the spacer surface of the interposer film. Similarly, a third portion 292 of the process film is located in a third portion 294 of the protective space between the spacers with a third portion 296 of the passive surface of the process film adjacent a third portion 298 of the spacer surface of the interposer film.
  • Fig. 3 is generally similar to Fig. 2A except that in this example an interposer film 300 is wound up around a core 302 with a first portion 304 of a back surface of the interposer film adjacent to; and in some examples supported by, the core 302.
  • a first portion (or wrap, or layer) 306 of the interposer film 300 carries a.first portion 308 of a first spacer and a first portion 310'of a second spacer.
  • a second portion 312 of the interposer film lies on the first portions 308 and 310 of the spacers and in turn carries second portions 314 and 316 of the spacers.
  • a third portion 318 of the interposer film lies on the second portions 314 and 316 of the spacers and in turn carries third portions 320 and 322 of the spacers.
  • a length of process film 324 is also rolled up around the core 302.
  • a first portion 326 of the process film 324 is located in a first portion 328 of a protective space formed between the spacers.
  • Various features, coatings, functionalisations, patterns or components 330 ⁇ , 330B, 330C, and 330D are installed or formed on a first portion 332 of an active surface of the process film.
  • a first portion 334 of a passive surface of the process film is adjacent a first portion 336 of a spacer- surface of the interposer fi lm.
  • the first portion 328 of the protective space is bounded by the first portion 336 of the spacer surface and a second portion 338 of the back surface of the interposer film.
  • the process film is tensioned sufficiently to hold its passive surface against the spacer surface of the interposcr film such that the active surface of the process film does not contact the back surface of the interposer film.
  • a second portion 340 of the process film 324 is located in a portion 342 of the protective space between the spacers.
  • a second portion 344 of the passive surface of the process film lies on a second portion 346 of the spacer surface of the interposer film.
  • a third portion 348 of the process film 324 is located in a third portion 350 of the protective space.
  • a third portion 35.2 of the passive surface of the process film lies on a third portion 354 of the spacer surface of the interposer film.
  • the third portion 350 of the protective space lies between the back and spacer surfaces of the interposer film; in this instance, the third portion 350 of the protective space lies between the third portion 354 of the spacer surface of the interposer film and a portion of the back surface of a fourth portion (not shown) of the interposer film.
  • the first spacer 106 is shown asja segmented strip.
  • the second spacer 110 is also shown as a segmented strip.
  • the interposer film and the spacers are made of materials that are sufficiently compliant to roll up around the core 1 16.
  • the spacers 106, and 1 10 are adjacent to, and in some examples are in contact with, the core as the rolling up begins.
  • the elements in this and the other figures are not drawn to scale, and the core may actually be larger or smaller relative to the spacers than as depicted in the drawings.
  • Fig. 4 shows an example of an interposer film 400, a plurality of individual spacer elements 402 located at intervals along a first edge 404 of the interposer, and a plurality of individual spacer elements.406 located at intervals along a second edge 408 of the interposer.
  • the spacer elements are shaped as parallelepipeds, but the shape is not critical and spacer elements having other shapes may be used.
  • Fig. 5 shows an interposcr 500 with frusto-conical spacers 502.
  • the example of Fig. 4 also includes a transverse stiffener 410 ' embedded in the interposer 400.
  • This stiffener extends from the first edge 404 to the second edge 408, but in other examples the stiffener may not extend this far.
  • a plurality of similar stiffeners may be disposed at intervals along the interposer.
  • the stiffener 410 is shown at right angles to the edges, and therefore it does not interfere with rolling up the interposer onto a core. In other examples the stiffeners may be disposed across the ihterposer at other angles so long as the stiffeners do not interfere with rolling up the interposer.
  • the ihterposer may also be formed of a material with anisotropic compliance, retaining transverse stiffness whilst capable of forming a longitudinal rolL
  • Fig, 6 is an example of an interposer film 600 with first and second spacers 602 and 604 each formed as a continuous strip of material.
  • the spacer material must be sufficiently compliant as to permit rolling up onto a core.
  • the interposer film and the spacers have been made gas-permeable by a plurality of openings such as openings 606 in the interposer film, openings 608 in the first spacer, and openings 10 in the second spacer.
  • Making one or more of the interposer film and the spacers gas-permeable facilitates escape of gases that may be emitted by a proccss film adjacent the interposer film 600 and ingress and flow of reactive gaseous materials to allow in-spool process changes to the process film.
  • the openings may be formed by any convenient method.
  • the interposer film and spacer materials may lack special openings but may be sufficiently porous as to be gas permeable.
  • Fig. 7 gives an example of an interposer film 700 formed of mesh material. As with the example of Fig. 6, the mesh facilitates movement of gases.
  • the interposer 700 carries first and second spacers 702 and 704 formed as segmented strips, and in other examples a mesh interposer, film may carry any other suitable spacers.
  • Fig. 8 is an example of an interposer film 800 having a textured spacer surface 802.
  • the texturing may be in any suitable pattern to avoid or mitigate stiction between the textured surface and a process film that may contact the surface, or to facilitate access of gases or reactive gaseous : materials to the process film.
  • a back surface 804 of the interposer film 800 may be textured. 1ft this example the interposer film 800 carries first and second spacers 806 and 808 formed as segmented strips, but the spacers may take other forms, for example as described above;
  • FIG. shows wraps of process film separated from each other by wraps of interposer film.
  • a first portion (layer or wrap) 900 of an interposer film carries first spacers 902 and second spacers 904.
  • a second portion 906 . of the nterposer film carries first spacers 908 and second spacers 910 defining therebetween a protective space 912.
  • a third portion 914 of the interposer film carries first spacers 916 and second spacers 918 defining therebetween a protective space 920.
  • a passive surface 922 of a first portion 924 ofa process film is disposed adjacent a back surface 926 of the first portion 900 of the interposer film.
  • An active surface 928 of the first portion 924 of the prbcess filnr carries components, layers or features 930A and 930B.
  • the active surface 928 resides in the protective space 912 and makes no contact with any other portion of the process film or any portion of the interposer film.
  • a passive surface 932 of a second portion 934 of the process film is disposed adjacent a back surface.936 of the second portion 906 of the interposer film.
  • An active surface 938 of the second portion 934 of the process film resides ih the protective space 92p and makes ho contact with any other portion of the; process film or any portion of the interposer.
  • the active surface .938 may carry components,, layers or features (not shown).
  • a passive surface 940 of a third portion 942 of the process film is disposed adjacent a back surface 944 of the third portion 914 of the interposer film.
  • More than one process film strip may be disposed adjacent a single interposer film.
  • a first portion 1000 of an interposer film carries a spacer 1002 adjacent a first edge of its spacer surface 1004, a spacer 1006 adjacent a second edge, and a spacer 1008 in the middle.
  • a second portion 1010 of the interposer film disposed beneath a back surface 1012 of the first portiohlOOO of the interposer film, carries a spacer 1014 adjacent a first edge of its spacer surface 1016, a spacer 1018 adjacent a second edge, and a spacer 1020 in the middle.
  • a first portion 1022 of a first process film 1024 is disposed in a protective space between the spacers 1014 and 1020.
  • a second portion 1026 of the first process film 1024 is disposed in a protective space between spacers (not shown) carried by a third portion (not shown) of the interposer film.
  • a passive surface 1028 of the first portion 1022 of the first process film 1024 is adjacent the back surface 1012 of the first portion 1000 of the interposer film.
  • a passive surface 1030 of the second portion 1026 of the first process film 1024 is adjacent a back surface.1032 of the second portion 1010 of the interposer film.
  • a first portion 1034 of a second process film 1036 is disposed in a protective space between the spacers 1018 and 1020.
  • a second portion 1038 of the second process film 1036 is disposed in a protective space between spacers, (not shown) carried by the third portion (not shown) of the interposer film.
  • a passive surface 040 of the first portion.1034 of the second process film 1036 is adjacent the back surface 1012 of the first portion 1000 of the interposer film.
  • a passive surface 1042 of the second portion 1038 of the second process film 1036 is adjacent the back surface 1032 of the second portion 1010 of the interposer film.
  • An active surface 1044 of the first portion 1022 of the first process film 1024 may carry, components,- layers or features (not shown) and is not touched by the interposer film or byany other portions of process film.
  • an active surface 1046 of the second portion 1026 of the first process film 1024, an active surface 1048 of the first portion 1034 of the second process film 1036, and.an active surface 1050 of the second portion 1038 ⁇ of the second process film 1036 arc untouched by the interposer fijrn or any other portions of process film.
  • a component 1052 is disposed oh the active surface 1046
  • a component 1054 is disposed on the active surface.1048, and
  • a component 1056 is disposed on the active surface 1050.
  • a plurality of supports 1100, 1 102, 1 104, and 1106 may be carried b an interposer film 1 108.
  • the supports are carried on a spacer surface 1 1 10 of the interposer film 1 108, as are spacers 1 1 12 along one edge of the interposer 1 108 and spacers 1 1.14 along another edge of the interposer 1 108.
  • Fig. 1 IB is similar to Fig. 1 1A except that a process film 1 116 is shown in a protective space between the spacers 1 1 12 and 1 1 14.
  • An active surface 1 1 18 of the process film 1 1 16 is in Contact with the supports and has a component 1 120.
  • the support 1 100 contacts the active surface 1 1 18 of the process film 1 1 16 only along a first edge 1 122 where it will not do any damage to components or other active elements in any active region ofthe process fi
  • the support 1 102 contacts the active surface 11 18 only along a second edge 1 124, remote from any. acti ve region of the process film.
  • the supports are carried on the spacer surface of the interposer.
  • supports 1200 and 1202 may be carried on a back surface 1204 of an interposer film 1206.
  • Spacers 1208 are carried along one edge of a spacer surface 1210 of the interposer 1206 and spacers 1212 along another edge of the interposer 1206.
  • a portion 1214 of a process film 1216 is supported by the supports 1200 and 1202 in a protective space between spacers (not shown) of another portion (not shown) ofthe interposer film.
  • Figs. 12A and 12B supports 1200 and 1202 may be carried on a back surface 1204 of an interposer film 1206.
  • Spacers 1208 are carried along one edge of a spacer surface 1210 of the interposer 1206 and spacers 1212 along another edge of the interposer 1206.
  • a portion 1214 of a process film 1216 is supported by the supports 1200 and 1202 in a protective space between spacers (not shown) of another portion (not shown
  • an active surface 1218 of the process film 1216 is supported by the supports 1200 and 1202 along edges that are remote from any components such as a component 1220 or any active ; region of the active surface 1218 ofthe process film 1216.
  • the supports comprise spaced-apart parallelepipeds, but in other examples the supports may take the form of segmented strips, continuous strips, or other suitable shapes as desired.
  • FIG. 13A and 13B An example of passive-surface process film spooling apparatus generally 1300 is shown in Figs. 13A and 13B.
  • a first cassette 1302 contains a spool 1304 of a process film 1306 wound up in layers on a.core 1308.
  • each layer of the process film 1306 occupies a protected space formed by one or more layers of a first interposer film 1310 in a manner as described above.
  • the process film 1306 unwinds from the spool 1304, exits the first cassette 1302 through an. opening 1312, and passes through a process station 1314. Any suitable process may be carried out on the process film 1306 in the process station 1314.
  • the process film 1306 enters a second cassette 1316 through an opening 1318.
  • the process film 1306 is interleaved with a second interposer film 1320 and both films are wound up on a core 1322 to form a spool 1324 with the process film 1306 occupying protective spaces formed by layers of the second interposer film 1320 in a manner as described above.
  • the process film 1306 may be guided from the first cassette 1302 through the process station 1314 to the second cassette 1316, for example by a first tension roller 1326 between the first cassette 1302 and the process station 1314 and a second tension roller 1328 between the process station 1314 and the second cassette 1316.
  • the first and second tension rollers contact the process film 1306 only on a passive side 1330.
  • Other guides may also be used, such as a draw roller 1332 and a nip wheel 1334 between the tension roller 1326 and the process station 1314, and a draw roller 1336 and a nip wheel 1338 between the process station 1314 and the: tension roller 1328.
  • the first interposer film 1310 also unwinds and exits the first cassette through the opening 1312.
  • the first interposer film may be wound up to form a spool 1340 on a core 1342.
  • the first interposer film may pass over one or more guides such as a tension roller 1344 as it is unwound from the spool 1304 in the first cassette 1302 and is wound onto the spool 1340.
  • the spool 1340 of interposer film may be removed from the apparatus 1300 and reused later, left in situ, or wound back into the cassette without process film for storage.
  • the second interposer film 1320 may be obtained by unwinding from a spool 1346 on a core 1348.
  • the second interposer film 1320 may pass over one or more guides such as a tension roller 1350 and enters the second cassette 1316 through the opening 1318.
  • the opening 1312 may be sealed with a cover 1352 except when the films are being unwound from the spool 1304.
  • the opening 1318 may be sealed with a cover 1354 except when the,films are being wound up oh the spool 1324.
  • the process film As the process film is wound onto the spool 1324, it may be'tensioned by a servo motor 1356 that drives the core 1322. In some examples the process film is also tensioned by one or more of the tension roller 1328, the tension roller 1326, or any other components. In some examples a servo motor (not shown) may be mechanically coupled to the core 1308 and may be used to tension the process film as it is unwound. In some examples a friction brake 1358 applied to a> drum 1360 coupled: to the core 308 may be used to tension the process film as it is unwound. Instead of the servo motor 1356, some other kind of motor or a hand crank may be used to provide torque to wind the process and interposer films onto the core 1322.
  • a servo motor 1362 or other suitable motive device may be used to wind the first interposer film 1310 onto the core 1342 as the process film 1306 and the first interposer film 1310 unwind from the spool 1304.
  • Another servo motor (not shown) or a friction brake 1364 applied to a drum 1366 carried by or coupled to the core 1348 may be used to tension the second interposer film 1320 as it unwinds from the spool 1346.
  • Fig. 14 gives an example of a method of processing process films.
  • the method includes providing an interposer film having a spacer surface and a back surface, the spacer surface having a first spacer adjacent a first edge 'of the interposer film and a second spacer adjacent a second edge of the interposer film, and at least one protective space defined between the first and second spacers (1400); and winding a process film and the interposer film onto a core with the process film disposed in the protective space between the first and second spacers and a passive surface of the process film adjacent a surface of the interposer film (1402).
  • Fig. 15 gives another example of a method of processing process films. As in the previous example* a.
  • first interposer film having a spacer surface and.a back surface is provided, the spacer surface having a first spacer adjacent a first edge of the ' ⁇ film and a second spacer adjacent a. second edge of the interposer film with least.onc protective space defined between 4 the first and second spacers (1500).
  • Theiirst interposer film is tensioned (1502).
  • a process film is tensioned at.Iess tension than the first interposer film ( 1504).
  • the films are wound onto a core with the process film disposed in the protective space between the first and second spacers and with a passive surface of the process film adjacent a surface of the interposer film (1506). Tension in the ⁇ film, not tension in the process film, forms the spool.
  • a process is carried out on the process film as the film is being wound up (1508). This procedure has been discussed previously in connection with Figs. 13A and 1 B, where the process film is fed through a. process station and then wound up.
  • the process is carried out after the films have been wound up (1510).
  • the spooled-up film may be placed into a process station and the process performed on the entire spool at once.
  • An interposer film that is porous or perforated as described previously may be used in this instance.
  • Fig. 16 gives another example of a method of processing process films.
  • An unprocessed process film spooled with a first interposer film is provided with a passive surface of the process film adjacent a surface ofthe interposer film (1600).
  • the films are unwound ( 1602).
  • the process film is fed through;a process station (1604) and the first interposer film is spooled up ( 1606).
  • the method continues with providing a second ⁇ ⁇ 8 ⁇ film (1608).
  • the process film is spooled with the second i r ⁇ oser filni, a passive surface of the process film adjacent a surface of the second int ⁇ bser film (1610).
  • the process film may be tensioned at a lesser tension than at least one ofthe first and second ⁇ 05 ⁇ films ( 1612).
  • the process film is fed back to the first inte ⁇ oser film and is again spooled up with the first interposer film (1614), and no second i rite ⁇ oser fi 1 m s ne8ded.
  • a spool of process film disposed in the protective spaces provided by the interposer film and its spacers, and with an active surface of the process film thereby protected, from any contact with either the interposer film or other layers of the process film, may be enclosed in a cassette, A . cassette; containing such a spool can easily be transported without damaging the process film.
  • the interposer film may be fabricated of any thin compliant material, such as plastic, paper, metal, glass, composite, or the like.
  • the interposer film can be tensipned to form the spool, and very little tension need be applied to the process film, further protecting it.
  • the core may be rotated by a servo motor (for example, as shown in Fig. 13B) for precise control of speed and torque, by a hand crank (not shown) which also may offer good control of speed and torque, or some other suitable device.
  • Apparatus and methods as described make it possible to handle process films in such a way that active surfaces of the films are not touched during unwinding or winding up or while spooled.
  • Wound-up spools of process film can easily be protected from contamination by dust and other damaging debris during transport or any time the process film is not bein processed. This flexibility allows different processes to be run at different rates. Some processing, for example long-term low-temperature baking, may be done while the film is spooled up. If the spool of film is enclosed in a cassettcj the cassette can readily be transported between facilities iand processes outside of a clean environment.
  • Fabrication processes can be broken down into a smaller granularity, allowin for optimization and easy process development at pilot scale or customization at volume scale.
  • the same system can handle films of various widths, thicknesses, and moduli.
  • Films cart be spooled with independent tension between the spool formation and tension of the film, and films can be stored with low tension applied, leading to a reduction in mechanical deformation during storage.
  • Cassettes can carry tracking; content, and process data any of which can be read without reference to the actual film, facilitating efficient process management and quality control.

Landscapes

  • Winding Of Webs (AREA)
  • Laminated Bodies (AREA)

Abstract

L'invention concerne un appareil de bobinage. L'appareil comprend un film intercalaire comprenant une surface d'espacement et une surface arrière ; un premier élément d'espacement supporté par le film intercalaire sur la surface d'espacement adjacente à un premier bord du film intercalaire ; un second élément d'espacement supporté par le film intercalaire sur la surface d'espacement adjacente à un second bord du film intercalaire, les éléments d'espacement définissant un espace de protection de film de traitement ; et un noyau rotatif orienté de manière à recevoir une extrémité initiale du film intercalaire et à enrouler le film intercalaire avec un film de traitement dans l'espace de protection de film de traitement, une surface passive du film de traitement étant adjacente à une surface du film intercalaire.
EP12877854.5A 2012-05-31 2012-05-31 Bobinage de films de traitement Withdrawn EP2855313A4 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2012/040269 WO2013180722A1 (fr) 2012-05-31 2012-05-31 Bobinage de films de traitement

Publications (2)

Publication Number Publication Date
EP2855313A1 true EP2855313A1 (fr) 2015-04-08
EP2855313A4 EP2855313A4 (fr) 2016-04-27

Family

ID=49673769

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12877854.5A Withdrawn EP2855313A4 (fr) 2012-05-31 2012-05-31 Bobinage de films de traitement

Country Status (4)

Country Link
US (1) US20150076273A1 (fr)
EP (1) EP2855313A4 (fr)
CN (1) CN104245552A (fr)
WO (1) WO2013180722A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9246068B2 (en) * 2012-08-24 2016-01-26 Tsmc Solid State Lighting Ltd. Method and apparatus for fabricating phosphor-coated LED dies
GB2528476A (en) 2014-07-23 2016-01-27 Eight19 Ltd Roll-to-roll processing of a coated web
JP7066998B2 (ja) * 2017-08-23 2022-05-16 デクセリアルズ株式会社 スペーサ含有テープ
JP7260829B2 (ja) * 2017-08-23 2023-04-19 デクセリアルズ株式会社 スペーサ含有テープ
WO2020067321A1 (fr) * 2018-09-28 2020-04-02 富士フイルム株式会社 Rouleau de film

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2336754A (en) * 1941-02-06 1943-12-14 American Hard Rubber Co Apparatus for preparing permeable hard rubber strips for vulcanization
US3420365A (en) * 1966-03-21 1969-01-07 Peter R Bailey Method of packing pile fabric and package resulting therefrom
FR2623015B1 (fr) * 1987-11-10 1990-03-30 Axon Cable Sa Bande de support intercalaire pour circuits integres
EP0409391A3 (en) * 1989-06-01 1991-12-11 Somar Corporation Spacer tape for ic package
US6755370B2 (en) * 1999-10-27 2004-06-29 Pirelli Pneumatici Spa Support belt for strips of deformable material, apparatus for using the belt, and related methods
BR0007260A (pt) * 1999-10-27 2001-10-30 Pirelli Correia para suportar tiras de materialdeformável, aparelho para usar a correia,processos para suprir uma tira de materialdeformável a um usuário, e para armazenar umatira de material deformável sobre uma bobina dearmazenamento
US6416013B1 (en) * 2000-09-15 2002-07-09 The Goodyear Tire & Rubber Company Self-aligning spool and method for storing strip components
JP3794627B2 (ja) * 2002-01-24 2006-07-05 ゴールド工業株式会社 スペーサテープ及びその製造方法
JP3936263B2 (ja) * 2002-08-05 2007-06-27 ゴールド工業株式会社 スペーサテープ
CN100533700C (zh) * 2005-03-28 2009-08-26 芝浦机械电子株式会社 电子部件的安装装置及安装方法
JP2006310476A (ja) * 2005-04-27 2006-11-09 Kawamura Sangyo Kk 半導体実装回路テープ用ラミネートスペーサーテープ
JP4460015B2 (ja) * 2007-11-09 2010-05-12 シャープ株式会社 半導体装置の梱包構造、および半導体装置の梱包方法

Also Published As

Publication number Publication date
EP2855313A4 (fr) 2016-04-27
WO2013180722A1 (fr) 2013-12-05
US20150076273A1 (en) 2015-03-19
CN104245552A (zh) 2014-12-24

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