EP2655684B1 - Procede de fabrication d'un alliage renforce par nitruration plasma - Google Patents

Procede de fabrication d'un alliage renforce par nitruration plasma Download PDF

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Publication number
EP2655684B1
EP2655684B1 EP11815535.7A EP11815535A EP2655684B1 EP 2655684 B1 EP2655684 B1 EP 2655684B1 EP 11815535 A EP11815535 A EP 11815535A EP 2655684 B1 EP2655684 B1 EP 2655684B1
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EP
European Patent Office
Prior art keywords
manufacturing
temperature
nitride
alloy
ppm
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Not-in-force
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EP11815535.7A
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German (de)
English (en)
French (fr)
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EP2655684A1 (fr
Inventor
Yann De Carlan
Mathieu Ratti
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/0047—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents
    • C22C32/0068—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents only nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24—Nitriding
    • C23C8/26—Nitriding of ferrous surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12—Both compacting and sintering
    • B22F3/14—Both compacting and sintering simultaneously
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/16—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on nitrides
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C33/00—Making ferrous alloys
    • C22C33/02—Making ferrous alloys by powder metallurgy
    • C22C33/0207—Using a mixture of prealloyed powders or a master alloy
    • C22C33/0228—Using a mixture of prealloyed powders or a master alloy comprising other non-metallic compounds or more than 5% of graphite
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24—Nitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C23C8/38—Treatment of ferrous surfaces

Definitions

  • the present invention relates to a method of manufacturing a reinforced alloy. It relates more particularly to a process for manufacturing an alloy reinforced with nanoparticles of metal nitride.
  • NDS nitride Dispersion Strenghtened
  • the additional heat treatment of this nitriding process nevertheless has the disadvantage of producing dispersions with an average size of up to 300 nm. This large size of the dispersions tends to degrade the mechanical properties of the reinforced alloy.
  • NDS alloy Another type of process used to make an NDS alloy involves powder metallurgy.
  • a powder of a nitrogen donor compound such as Cr 2 N
  • a powder for forming the metal matrix of a reinforced alloy is co-milled with a powder for forming the metal matrix of a reinforced alloy.
  • the resulting powder mixture is subjected to a heat treatment to decompose the nitrogen donor so that the dinitrogen thus available forms a nitride with one of the elements of the metal matrix.
  • an alloy reinforced by nitride dispersions is obtained.
  • the heat treatment for producing nitrogen by decomposition of the nitrogen donor results in this powder metallurgy process being similar to a nitriding process.
  • US 2007/295427 discloses a treated austenitic steel and the associated treatment method comprises an austenitic steel and a nonmetallic chemical element incorporated in a surface of the steel.
  • the surface has a bilayer structure with a layer of compound above and an underlying diffusion layer, which protects the surface against embrittlement by hydrogen.
  • One of the aims of the invention is therefore to provide a process for manufacturing an "NDS" alloy comprising nanoparticles of which at least 80% have an average size of less than 50 nm, such a method that may allow better control of the composition. and the amount of these nanoparticles within the alloy.
  • the present invention thus relates to a method for manufacturing a reinforced alloy comprising a metal matrix in the volume of which nanoparticles are dispersed, of which at least 80% have an average size of 1 nm to 50 nm, the nanoparticles comprising at least one nitride selected from nitrides of at least one metal element M belonging to the group consisting of Ti, Zr, Hf, and Ta.
  • the process of the invention does not involve the use of an intermediate nitride intended to form the metal nitride constituting all or part of the dispersed nanoparticles.
  • the nitrogen intended to form the nitride is introduced into the base alloy in interstitial form, namely as nitrogen in solid solution. in the base alloy, and not in molecular form N 2 .
  • the interstitial nitrogen then combines directly with all or part of this element, under the influence of the diffusion and / or precipitation temperature (generally under the influence of a temperature of between 500 ° C and 650 ° C) to form the nitride.
  • the diffusion and precipitation step may therefore be totally or partially overlapping.
  • step c) the nitride is precipitated by a germination-growth phenomenon in order to form the nanoparticles dispersed in the reinforced alloy.
  • the passage through an intermediate nitride is therefore not necessary, unlike the processes of the state of the art that require a complementary heat treatment generally performed at a temperature of about 1200 ° C in order to dissociate a nitride such as Cr 2 N.
  • Another advantage of the manufacturing method of the invention is that the temperature applied during its different stages can be chosen with great freedom.
  • the plasma nitriding step a) is carried out at a temperature of 200 ° C. to 700 ° C., preferably 200 ° C. to 600 ° C., even more preferentially from 350 ° C. to 450 ° C.
  • Step b) of diffusion of the interstitial nitrogen is carried out at a temperature of 350 ° C to 650 ° C, preferably 350 ° C to 500 ° C. Its duration is generally from 5 hours to 500 hours, preferably from 10 hours to 200 hours. It is generally inversely proportional to the temperature of the interstitial nitrogen diffusion step.
  • the precipitation temperature can advantageously be chosen to control the size of the nitride of the metal element M at the expense of the precipitation of a metal element M 'such that Cr whose dissolution of the associated nitride Cr 2 N can only occur at a temperature of 1100 ° C.
  • the nitride precipitation step c) is carried out at a temperature which is from 600 ° C. to 900 ° C., preferentially from 600 ° C to 800 ° C, even more preferably from 600 ° C to 700 ° C. Its duration is 10 minutes to 10 hours, preferably 30 minutes to 2 hours. It is generally inversely proportional to the temperature of the nitride precipitation step.
  • this method makes it possible to obtain a reinforced alloy whose matrix comprises dispersed nanoparticles of smaller average size than those obtained by the processes of the state of the art mentioned above.
  • the verb "to understand”, “to include”, “to incorporate”, “to include” and its conjugate forms are open terms and thus do not exclude the presence of element (s) and / or step (s). ) additional to the element (s) and / or initial stage (s) set out after these terms.
  • these open terms also include a particular embodiment in which only the element (s) and / or initial stage (s), to the exclusion of all others, are targeted; in which case the term open also refers to the closed term “consist of", “constitute of” and its conjugated forms.
  • the chemical composition of the base alloy, the reinforced alloy or the metal matrix and the nanoparticles it contains is expressed in the present description as a percentage by weight relative to the weight of the alloy considered. .
  • Step a) of the manufacturing method of the invention consists of a plasma nitriding as known to those skilled in the art, described for example in the document “Techniques de l' Reference M 1227,” Nitriding, nitrocarburizing and derivatives ", Chapter 4".
  • the reactive species can comprise neutral (atomic N) species, or even ionized or excited (such as for example N + or N 2 vibrationnally excited), the nitriding then being called ionic in the latter case.
  • these species diffuse interstitial form in the base alloy to then form a nitride with the constituent atoms of this alloy.
  • the plasma nitriding is performed on a base alloy incorporating 0.1% to 1% by weight of at least one metal element M selected from Ti, Zr, Hf, or Ta, preferably 0.5 % to 1% by weight of this element.
  • the metal element M is titanium.
  • the base alloy can be in the form of powder or part.
  • It is selected from an austenitic, ferritic, ferritic-martensitic or nickel-based alloy.
  • Plasma nitriding can be carried out using a gaseous medium comprising nitrogen (in the form of molecular nitrogen (N 2 ) and / or as a gaseous nitrogen compound such as, for example, NH 3 and / or N 2 H 2 ).
  • the nitrogen is diluted in a chemically inert gas (vis-à-vis the other constituents of the gaseous medium), such as, for example, H 2 .
  • the gaseous medium may further comprise a carbon species, such as for example CH 4 .
  • the gaseous medium may for example comprise 20% to 30% by volume of N 2 and / or of gaseous nitrogen compound, optionally supplemented with 5% to 20% by volume of the carbon species (for example CH 4 ), the rest being constituted by the chemically inert gas (for example H 2 ).
  • the pressure of the gaseous medium is generally less than atmospheric pressure, for example from 1 mbar to 100 mbar, preferably from 1 mbar to 10 mbar, still more preferably from 1.5 mbar to 5 mbar.
  • Plasma nitriding is generally carried out for a period of 5 hours to 300 hours, preferably from 10 hours to 200 hours, even more preferably from 24 hours to 100 hours.
  • the base alloy comprises 1000 ppm to 2000 ppm by weight of nitrogen in interstitial form, which allows the preferential formation of a nitride of the metal element M at the expense of other nitrides such as Cr 2 N.
  • the reinforced alloy obtained comprises a metal matrix in which nanoparticles composed entirely or partially of at least one metal nitride are dispersed.
  • the metal matrix of the reinforced alloy has the chemical composition of the base alloy.
  • the manufacturing method of the invention also makes it possible to preserve the structure of the base alloy (austenitic, ferritic or ferritic-martensitic structure) in the reinforced alloy.
  • the nanoparticles are dispersed in all or part of the volume of the reinforced alloy. They represent most often 0.5% to 2% (typically 1%) of the volume of the reinforced alloy.
  • the nanoparticles are dispersed in the reinforced alloy to a depth that may be between 30 ⁇ m and 1 mm, preferably between 50 ⁇ m and 500 ⁇ m, more preferably between 50 ⁇ m and 100 ⁇ m.
  • At least 80% of the nanoparticles have an average size of 1 nm to 50 nm, preferably at least 90% a average size of 1 nm to 10 nm, even more preferably at least 95% an average size of 0.5 nm to 5 nm.
  • the average size of the nanoparticles can be modulated by varying parameters such as the plasma nitriding temperature, the diffusion temperature, and / or the pressure of the gaseous medium.
  • the term "average size" means the mean value of the diameter of the nanoparticles when they are substantially spherical, or the average value of their main dimensions when they are not substantially spherical.
  • the quantity of nanoparticles (at least 80%) having a determined average size can be easily counted using a technique known to those skilled in the art such as Transmission Electron Microscopy (TEM).
  • TEM Transmission Electron Microscopy
  • the nanoparticles generally have a composition such that they comprise in atomic percentage of 30% to 70% of nitrogen, combined in the form of nitride with at least one metal element M. This quantity is conditioned by the quantity of interstitial nitrogen introduced into the base alloy, knowing that generally all of the interstitial nitrogen combines with the metal element M.
  • the carbon element When the carbon element is additionally present in the gaseous medium in the form of carbon species, all or part of this element can be combined directly with the metal element M and optionally with nitrogen during the plasma nitriding. We then obtain nanoparticles in which the nitride is wholly or partly in the form of carbonitride of the metal element M.
  • the nitride or carbonitride of the metal element M formed does not necessarily have a defined stoichiometry.
  • These species are most often represented by the formula M (N) or M (C, N), or alternatively the formula M x C y N z in which the indices "x", "y” and “z” indicate respectively the relative atomic proportion of the elements M, C and N within the nitride or carbonitride formed.
  • the nitride of a metal element M may, however, comprise one or more nitrides of defined stoichiometry which may optionally coexist within the nanoparticles.
  • titanium nitride may be present in a nanoparticle in the form TiN and / or Ti 3 N 4 .
  • the nitride present in the nanoparticles thus belongs to the group consisting of TiN, Ti 3 N 4 , ZrN, HfN and TaN.
  • nanoparticles may also include other species that were initially present in the powders or that formed during the manufacturing process of the invention.
  • the manufacturing method of the invention may comprise a consolidation step by hot spinning carried out during (optionally instead) or after step c) precipitation of the nitride, preferably at a temperature of less than or equal to 850 ° C, preferably at a temperature of 600 ° C to 850 ° C.
  • This hot-spinning step is preferably carried out when the base alloy is in the form of a powder.
  • the Figure 1 represents a MET plate of a reinforced alloy obtained by the manufacturing method of the invention.
  • a ferritic powder composed of Fe-18Cr-1W-0.8Ti base alloy is nitrided using the manufacturing method of the invention.
  • This powder has a particle size such that the average size of its grains is 100 microns.
  • Consolidation is then carried out by hot spinning at 850 ° C for 1 hour, during which the titanium nitride precipitates.
  • a sample taken from the core of the obtained reinforced alloy is examined by TEM.
  • the picture obtained represented on the Figure 1 shows the presence of numerous particles comprising titanium nitride of average size between 2 nm and 8 nm.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
EP11815535.7A 2010-12-24 2011-12-22 Procede de fabrication d'un alliage renforce par nitruration plasma Not-in-force EP2655684B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1061243A FR2969662B1 (fr) 2010-12-24 2010-12-24 Procede de fabrication d'un alliage renforce par nitruration plasma.
PCT/FR2011/053175 WO2012085489A1 (fr) 2010-12-24 2011-12-22 Procede de fabrication d'un alliage renforce par nitruration plasma

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EP2655684A1 EP2655684A1 (fr) 2013-10-30
EP2655684B1 true EP2655684B1 (fr) 2016-03-02

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EP11815535.7A Not-in-force EP2655684B1 (fr) 2010-12-24 2011-12-22 Procede de fabrication d'un alliage renforce par nitruration plasma

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US (1) US8999228B2 (ko)
EP (1) EP2655684B1 (ko)
JP (1) JP5878932B2 (ko)
KR (1) KR101506103B1 (ko)
CN (1) CN103282537B (ko)
ES (1) ES2572642T3 (ko)
FR (1) FR2969662B1 (ko)
RU (1) RU2569438C2 (ko)
WO (1) WO2012085489A1 (ko)

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KR101673695B1 (ko) * 2014-11-12 2016-11-08 국민대학교산학협력단 오스테나이트 강 기지-나노 입자 복합체 및 이의 제조방법
CN107737932B (zh) * 2017-10-26 2019-08-06 西北工业大学 一种钛或钛合金选区强化的一体化激光增材制造方法
CN108103432B (zh) * 2017-12-25 2020-01-17 哈尔滨汽轮机厂有限责任公司 一种镍基高温合金的氮化方法
TWI675938B (zh) * 2019-01-25 2019-11-01 友鋮股份有限公司 三階段表面改質不鏽鋼材料及其製造方法
WO2020176616A1 (en) * 2019-02-26 2020-09-03 Somnio Global Holdings, Llc High nitrogen steel powder and methods of making the same
CN111304483B (zh) * 2020-03-18 2021-07-06 深圳市联合蓝海科技开发有限公司 千足金及其制备方法和应用

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EP2655684A1 (fr) 2013-10-30
ES2572642T3 (es) 2016-06-01
KR101506103B1 (ko) 2015-03-25
US20140086783A1 (en) 2014-03-27
FR2969662A1 (fr) 2012-06-29
CN103282537B (zh) 2015-06-03
RU2013132869A (ru) 2015-01-27
WO2012085489A1 (fr) 2012-06-28
FR2969662B1 (fr) 2013-06-28
RU2569438C2 (ru) 2015-11-27
CN103282537A (zh) 2013-09-04
US8999228B2 (en) 2015-04-07
KR20140005213A (ko) 2014-01-14
JP5878932B2 (ja) 2016-03-08
JP2014507557A (ja) 2014-03-27

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