EP2631488B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2631488B1
EP2631488B1 EP12188584.2A EP12188584A EP2631488B1 EP 2631488 B1 EP2631488 B1 EP 2631488B1 EP 12188584 A EP12188584 A EP 12188584A EP 2631488 B1 EP2631488 B1 EP 2631488B1
Authority
EP
European Patent Office
Prior art keywords
rotor
pumping stage
pump
side channel
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12188584.2A
Other languages
German (de)
English (en)
Other versions
EP2631488A3 (fr
EP2631488A2 (fr
Inventor
Aleksandr Dr. Ing. Shirinov
Tobias Dipl. Ing. Stoll
Michael Dipl. Ing. Schweighöfer
Jan Dipl. Phys. Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2013022216A priority Critical patent/JP6027455B2/ja
Priority to US13/766,918 priority patent/US9422937B2/en
Publication of EP2631488A2 publication Critical patent/EP2631488A2/fr
Publication of EP2631488A3 publication Critical patent/EP2631488A3/fr
Application granted granted Critical
Publication of EP2631488B1 publication Critical patent/EP2631488B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D3/00—Axial-flow pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the present invention relates to a vacuum pump having at least one molecular pumping stage, in particular a Holweck stage, and having at least one downstream of the molecular pumping stage arranged side channel pumping stage.
  • Vacuum pumps having an additional side-channel pumping stage downstream of a molecular pumping stage are known in principle.
  • the side channel pumping stage serves to improve the pumping action of the vacuum pump, in particular in the working areas of the vacuum pump, in which particular high prevacuum pressures, high inlet pressures or high gas loads occur, and to reduce the power consumption of the vacuum pump in these work areas.
  • the side channel pumping stage realizes a pumping principle which is optimized for use with higher gas pressures and, in particular, also enables an energy-efficient pumping operation in the laminar flow range, ie in the pressure range above the molecular flow range. Therefore, the achievable discharge pressure and the achievable suction capacity of the vacuum pump are increased by the side channel pumping stage arranged downstream of the molecular pumping stage and at the same time the power consumption of the vacuum pump is kept low.
  • a vacuum pump in which a pumping stage, which is similar to a side channel pumping stage, including its rotor elements and its stator within a Holweckhülse a molecular pumping stage is arranged.
  • the Holweckhülse and the rotor elements of the inner pumping stage are arranged on a common rotor hub, wherein the rotor elements of the inner pumping stage are arranged offset from the Holweckhülse radially inwardly.
  • the rotor elements of the internal pumping stage and the associated stator are nested due to their arrangement within the Holweckhülse with Holweckhülse and the associated Holweckstator and difficult to access from the outside, whereby the required for the production of the pump manufacturing and assembly costs is increased and, for example Realization of a cooling device for effective cooling of the corresponding components in the operation of the vacuum pump is difficult.
  • the WO 2006/048602 A2 describes a similar vacuum pump.
  • the object of the invention is to provide a vacuum pump having an increased discharge pressure and increased suction power, which can be operated under any operating conditions with low energy consumption and can be realized at the same time in a small space and with low manufacturing and assembly costs.
  • the vacuum pump comprises at least one Holweck stage, which comprises a rotor member which forms the pump-active surface of the molecular pumping stage. Furthermore, the vacuum pump comprises at least one side channel pumping stage arranged downstream of the molecular pumping stage and comprising a plurality of rotor elements. The rotor elements of the side channel pumping stage are carried by the rotor member of the molecular pumping stage.
  • the rotor elements do not have to be arranged at a radial distance from the rotor element of the molecular pumping stage, so that the installation space available within the rotor element of the molecular pumping stage is available for other components of the vacuum pump, for example for driving the vacuum pump.
  • the rotor elements are at a relatively large radial distance from the axis of rotation of the vacuum pump, which may approximately correspond to the radius of the rotor member, so that a side channel pumping stage is provided with a large radius of rotation and a correspondingly high pumping power.
  • a side channel pumping stage is provided with a large radius of rotation and a correspondingly high pumping power.
  • the accessibility of the rotor elements is improved because of their arrangement on the rotor member, which reduces the complexity of the pump structure, e.g. also the establishment of a cooling device for the side channel pumping stage is facilitated.
  • the rotor member is supported by a rotor hub.
  • the rotor elements of the side channel pumping stage are thus carried by the rotor member, which in turn is supported by the rotor hub.
  • the rotor hub is preferably flat and in particular disk-shaped and preferably extends in a radial plane relative to the axis of rotation of the rotor.
  • the rotor member is preferably in the axial direction of the rotor hub.
  • the rotor hub is in turn preferably connected to a rotor shaft.
  • the rotor hub and the rotor member may in principle be formed as different, interconnected parts or integrally connected to each other.
  • the rotor elements are arranged on a, in particular free, end of the rotor element.
  • the particular free end of the rotor member may for example be formed by an axial end and is inventively formed by an end remote from the rotor hub end of the rotor member, for example, facing away from the rotor hub axial end of the rotor member.
  • the rotor elements which are preferably designed as rotor blades, can project in the axial direction from the rotor element or in a direction which has at least one direction component parallel to the axis of rotation of the vacuum pump and is preferably parallel to the axis of rotation of the vacuum pump.
  • the rotor elements can also have an orientation which is inclined radially inwards or radially outwards by, for example, up to 45 ° with respect to the axis of rotation of the vacuum pump, and in this direction of the Protrude rotor organ.
  • the stator of the side channel pumping stage can be arranged in the region of the free end of the rotor element or an opposite static region of the vacuum pump. This results in a particularly favorable structure, since in particular no nesting of the rotor member with the stator of the Sokanalpumptreatment is required, so that a total of a particularly easy to assemble and compact design of the vacuum pump is achieved.
  • the vacuum pump may comprise a carrier of the rotor element as described below or a carrier part of the rotor element, on which the rotor elements are arranged and by which the rotor elements are carried.
  • the carrier or the carrier part can also be regarded as part of the side channel pumping stage instead of the rotor element.
  • the carrier or the carrier part is not arranged according to an embodiment at an axial end of a Holweckrotors, with which the carrier or the carrier part is connected.
  • the Holweckrotor may comprise the rotor member and may additionally comprise a hub of the vacuum pump carrying the rotor member. Instead of at one axial end of the Holweckrotors the carrier or the support member may be arranged at a spaced from one or each axial end of the Holweckrotors portion of the Holweckrotors.
  • the rotor elements are arranged outside a region enclosed by the rotor element, which is designed, for example, as a Holweck sleeve.
  • a particularly good accessibility and a particularly low complexity of the pump structure can be achieved with a simultaneously large radius of rotation of the side channel pumping stage.
  • the rotor elements may be arranged wholly or partially outside the area which is enveloped by the pump active surface of the rotor member or by the rotor member as a whole.
  • the rotor elements may extend in the axial direction beyond the pump-active surface of the rotor element and preferably via the rotor element as a whole. This allows a structurally particularly favorable arrangement of the stator and the stator channels of the Sokanalpumprise in a rotor elements in the axial direction opposite static region of the pump without a complex nesting of rotor and stator elements of the various pumping stages is necessary. Furthermore, the accessibility of the side channel pumping stage is increased.
  • the stator channel or side channel, in which the rotor elements rotate can e.g. be open in the axial direction, e.g. to allow the inclusion of projecting in the axial direction rotor elements.
  • the rotor elements which are formed for example as rotor blades, are preferably arranged directly on the rotor member and supported by this.
  • the rotor element may comprise a carrier, which is preferably arranged at one, in particular free, axial end of the rotor element, on which the rotor elements are arranged.
  • the support is preferably of annular design and preferably comprises a support surface extending annularly around the axis of rotation of the vacuum pump, on which the rotor elements are arranged.
  • the support surface may, for example, be flat and face in the axial direction of the vacuum pump, or it may be configured substantially truncated cone-shaped and have a surface normal which is opposite to the axis of rotation of the vacuum pump, e.g. is inclined by up to 45 ° radially inward or radially outward.
  • the free end of the rotor member may be wholly or partially formed by the carrier of the rotor member.
  • the support surface of the carrier may be formed for example by an axial end face of the rotor member.
  • the carrier for the rotor elements may form a projecting in the radial direction shoulder or projection of the rotor member.
  • a radial outer surface of the rotor member forms the pump-active surface of the rotor member, as may be the case, for example, in a Holweckhülse as a rotor member, the carrier may form a projecting in the radial direction inwardly projecting shoulder or projection. In principle, however, the carrier can also protrude outward in the radial direction and form such a shoulder or projection.
  • the rotor member may be designed substantially L-shaped viewed in longitudinal section, wherein the short leg of the L-shape may be formed by the shoulder or projection of the rotor member.
  • the carrier may also be formed by a region of the rotor element which is aligned with an adjacent region of the rotor element in the axial direction, that is to say without forming a noteworthy radial shoulder or projection.
  • the rotor elements can be arranged directly on the axial end face of a rotor member, wherein the rotor member has over its entire longitudinal extent an at least approximately constant inner and / or outer cross-section.
  • the rotor member is formed substantially as a sleeve and in particular forms a Holweckhülse or a Holweckzylinder.
  • the rotor member may be sleeve-shaped around the axis of rotation of the vacuum pump around and be formed substantially rotationally symmetrical to the axis of rotation, wherein a longitudinal axis of the sleeve is preferably substantially coincident with the axis of rotation of the vacuum pump.
  • the sleeve-shaped rotor member may be disposed at one of its axial ends on a rotor hub as described above or supported by this or fixed thereto, while at the other axial end, the rotor elements of the side channel pumping stage are arranged.
  • the rotor member comprises a base, which in particular is substantially formed as a sleeve and which preferably has an annularly closed about the rotation axis and preferably substantially rotationally symmetrical shape.
  • the base preferably extends from a rotor hub supporting the rotor element to a carrier of the rotor element as described above on which the rotor elements are arranged.
  • the pump active surface of the molecular pumping stage is preferably at least partially or substantially completely formed by the base.
  • the carrier of the rotor member may be formed substantially as a sleeve, which preferably has an annularly closed about the rotation axis and preferably substantially rotationally symmetrical shape.
  • At least one of the components base and carrier is connected directly to the rotor hub in one or more parts and carried by this.
  • the respective other component may be carried by the component directly connected to the rotor hub, in particular without itself being directly connected to the rotor hub and supported by it.
  • both components ie both the base and the carrier, can be connected directly to the rotor hub in one piece or in several parts and supported by it.
  • the base and the carrier are preferably connected to one another in one piece or in several parts independently of the rotor hub.
  • the base and the carrier may overlap one another in the radial direction and be connected to one another in the overlapping region.
  • base and carrier in the radial direction spaced apart and independently of the rotor hub connected or held together.
  • the rotor member may in principle be made in several parts, e.g. a base as described above, which is supported by a rotor hub, and a carrier as described above, on which the rotor elements are arranged, each forming a part of the rotor member, i.
  • the rotor element may comprise a base part or component forming the base and a carrier part or component forming the carrier, which are preferably connected to one another, wherein the carrier part may be carried by the base part.
  • the base part may be formed by a base sleeve and the carrier part by a carrier sleeve.
  • the rotor member may also be formed in one piece or comprise at least one base and a carrier, which are integrally formed with each other.
  • connection between the base part and the carrier part may comprise, for example, a clamping connection, which may in particular be produced by a shrinking process.
  • a screw connection and / or an adhesive connection can be provided between the base part and the carrier part.
  • the base part and the support part may overlap each other in the region of their connection in the radial direction.
  • the carrier part may have a sleeve-shaped connecting portion whose outer diameter corresponds at least approximately to the inner diameter of the preferably sleeve-shaped base part, the outer surface of the connecting portion of the carrier part and the inner surface of the base part abutting each other flatly.
  • the rotor elements can be arranged on a carrier section which adjoins the connecting section of the carrier part, preferably in the axial direction, wherein the carrier section can project radially inwards or outwards relative to the connecting section.
  • One or more rotor elements may be formed as separate parts and be connected in several parts with a carrier and in particular with a carrier part as described above.
  • the base part and the carrier part of the rotor element can in principle be formed from different or identical materials.
  • the base member may include or may be comprised of a carbonaceous or metallic material, such as a carbon fiber reinforced composite (CFRP) material.
  • the support member may also comprise or consist of a carbonaceous material, for example a carbon fiber reinforced composite (CFRP) material and / or a metallic material such as e.g. Aluminum.
  • CFRP carbon fiber reinforced composite
  • the carrier part may be a CFKarmieri metal sleeve.
  • the rotor member may also be formed integrally and comprise or consist of a carbon fiber reinforced composite (CFRP) material or a metallic material.
  • CFRP carbon fiber reinforced composite
  • the rotor member or a base part of the rotor member and a rotor hub supporting the rotor member may also be configured as parts connected to each other or in one piece with each other. It is preferred if the base part of the rotor member is formed as an independent part and preferably as a cylinder jacket-shaped sleeve, which consists for example of CFRP material.
  • the rotor element, the base and / or the carrier or the base part and / or the carrier part are each preferably substantially sleeve-shaped or sleeve-shaped as described above.
  • the respective component is preferably substantially cylinder-jacket-shaped at least in one longitudinal section formed, wherein the longitudinal axis of the cylinder jacket preferably coincides with the axis of rotation of the pump substantially.
  • the rotor element preferably has at least one longitudinal section in which the rotor element is delimited by a substantially cylinder jacket-shaped radial inner surface and / or a substantially cylinder jacket-shaped radial outer surface, wherein the cylinder respectively defined by the inner or outer surface is preferably substantially straight and oriented at least approximately parallel to the axis of rotation of the pump.
  • the rotor member may have a longitudinal portion as described above with an at least approximately cylinder jacket-shaped radial outer surface, which may be e.g. over at least 50% or 75%, and preferably at least approximately the entire axial length of the rotor member extends.
  • the cylinder jacket-shaped radial outer surface of the rotor member may be formed by the radial outer surface of a base or a base part of the rotor member, wherein the base part is formed for example as a rotating Holweckhülse and over a part of its axial length and preferably at least approximately its entire axial length the shape of an in Having axially oriented straight cylinder jacket with preferably substantially constant wall thickness.
  • the radial outer surface of the rotor element can form at least part of the pump-active surface of the molecular pumping stage.
  • the pump-active surface is preferably formed as a smooth surface and can, for example, the radial inside of a stator sleeve face, on which a Holweckgewinde can be arranged.
  • the pump-active surface of the Holweck sleeve may have a Holweck thread, in which case preferably the opposite surface of the stator sleeve is smooth.
  • the rotor organ can have a constant, preferably rotationally symmetrical outer cross-section over substantially its entire length.
  • the radial inner surface of the rotor member may, at least in a longitudinal portion of the rotor member having the shape of a oriented in the direction of rotation axis straight cylinder jacket, wherein in this longitudinal section, the radial inner surface and the radial outer surface of the rotor member preferably form a cylinder jacket with a substantially constant wall thickness.
  • the radial inner surface can be formed in this longitudinal section by the radial inner surface of a base or a base part of the rotor element as described above.
  • This length section can, for example, cover at least 40% or 75% and in particular at least approximately the entire axial length of the rotor element.
  • the radial extent of the rotor member can be kept as small as necessary, so that a compact design of the vacuum pump is achieved.
  • the defined by the radial inner surface, preferably cylindrical clearance in the interior of the rotor member is suitable for example to accommodate a drive of the vacuum pump.
  • the rotor member may also include first and second lengths in which the radially inner surface of the rotor member is in the form of a straight cylinder barrel oriented in the rotational axis direction and taken together is preferably at least 40% or 75% and more preferably at least approximately the entire axial length of the rotor member cover.
  • the radial inner surface may, for example, be formed by a base or a base part of the rotor element in the first longitudinal section of the rotor element, while in the second longitudinal section it is formed by the radial inner surface of a carrier or carrier part of the rotor element.
  • the diameter of the cylinder jacket respectively defined by the radial inner surface may be different for the first and second longitudinal section. Accordingly, the wall thickness of a respective cylinder jacket defined by the radially inner surface and the radial outer surface of the rotor member in the first and second longitudinal sections may be different.
  • the carrier or the carrier part can thereby define a smaller inner diameter of the rotor element in the second longitudinal section than the base or the base part of the rotor element in the first longitudinal section.
  • the transition between the first and the second longitudinal section of the rotor element may comprise a radial projection or projection of the rotor element formed by the carrier or the carrier part as described above.
  • the carrier or the carrier part is preferably arranged within the base or the base part, so that the carrier or the carrier part and the base or the base part overlap in the radial direction.
  • the carrier part may be formed by a carrier sleeve with a sleeve-shaped connecting portion as described above, which is inserted at one axial end of the base part in the base part and preferably connected to the base part.
  • the molecular pumping stage is designed as a Holweck stage, wherein the rotor member forms a Holweckhülse and the Holweckhülse is preferably associated with a corresponding stator sleeve.
  • the Holweck stage comprises a Holweck thread with at least one and preferably a plurality of spiral or helical in the direction of rotation axis extending and open in the radial direction grooves and a Holweckgewinde opposite arranged, with respect to the Holweckgewinde moving and with the Holweckgewinde a narrow gap defining substantially smooth surface.
  • the grooves each form a flow channel of Holweckcutcut.
  • the Holweck thread can in principle be arranged either on the rotor member of the Holweck stage or on a stator or a stator sleeve of the Holweck stage. It is preferred if the Holweck thread is arranged on the stator sleeve and the rotor member forms a substantially smooth, with respect to the stator sleeve rotating pump active surface, in particular in the form of a cylinder jacket-shaped radial outer surface of the rotor member.
  • the molecular pump stage comprises an upstream first section and a downstream, leading to the side channel pumping second section, wherein in the second section a smaller number of flow channels is formed as in the first section.
  • the flow channels of the second section may form one or more supply channels leading into the side channel pumping stage.
  • the first and second sections preferably follow one another in the axial direction.
  • the number of supply channels may correspond, for example, to the number of gas inlets of the side channel pumping stage.
  • the feed channels serve for bundling the gas conveyed through the first section of the molecular pumping stage, wherein between the first and the second section a collecting channel which preferably circulates around the rotation axis in the circumferential direction can be formed, which connects the flow channels of the first section to one another.
  • the flow channels of the first and / or second section are preferably part of a Holweck thread of a Holwecklace and are preferably arranged on the static part of the molecular pumping stage such. on a stator sleeve of the Holweck stage.
  • the vacuum pump may comprise a plurality of Holweckmen successively connected in the flow direction, which are preferably flowed through by the gas in sequence.
  • the Holweckmatn can be arranged in the radial direction and nested together, whereby an optimal use of space is ensured.
  • the gas can go over the several Holweck stages from radially inward to radially outward or from radially outward to radially inward flow.
  • the rotor element, on which the rotor elements of the side channel pumping stage are carried, preferably forms a Holweck stage, which is arranged downstream of one or more further Holweck stages.
  • the further Holweckmen may be assigned a further rotor member, which is preferably designed as a substantially cylinder jacket Holweckhülse.
  • both the radial outer surface and the radial inner surface of the further rotor member can form a pump-active surface each of a Holweckcut.
  • the rotor element carrying the rotor elements in particular only the radial outer surface can form a pump-active surface of the Holweck stage.
  • the rotor elements of the side channel pumping stage can be configured in a manner known per se as blades or rotor blades, which are preferably arranged in a plane perpendicular to the axis of rotation extending along a plane about the axis of rotation circular ring, the blade surfaces of the rotor elements preferably at least partially in the direction of rotation , The blade surfaces may have a slightly inclined in the axial direction and / or in the radial direction against the direction of rotation back shape.
  • the vanes may be part of a ring of side-channel vanes comprising the side channel pumping stage.
  • the side channel pumping stage preferably comprises at least one stator channel or side channel in which the rotor elements revolve and which, according to the ring-shaped arrangement of the rotor elements, is preferably designed annularly around the axis of rotation.
  • the side channel preferably has, in a manner known per se, over at least part of its length an enlarged cross-section relative to the rotor elements.
  • the side channel preferably has the enlarged cross-section over approximately its entire length, wherein at a the outlet of the side channel associated end preferably a Abstreif Scheme is provided with a scraper, in which the channel narrows to a cross-section which substantially corresponds to the outline of the rotor elements , so that the rotor elements can just pass through the restricted area and the stripper strips off the gas delivered by the side channel and introduces the gas flow into the gas outlet of the side channel pumping stage.
  • a gas inlet of the side channel pumping stage which is preferably in communication with a feed channel of the molecular pumping stage as described above.
  • the side channel may also consist of a plurality of sub-channels, each having an inlet, an outlet and a wiping area between them, wherein preferably each sub-channel is associated with the inlet inlet channel associated with the molecular pumping stage.
  • a further, second side channel pumping stage is provided, the configuration of which may correspond to the side channel pumping stage described above.
  • the second side-channel pumping stage is preferably arranged immediately downstream of the above-described side-channel pumping stage, wherein the two side-channel pumping stages are preferably arranged nested one inside the other in the radial direction.
  • the rotor elements of the second side-channel pumping stage are preferably also carried by the rotor element of the molecular pumping stage and in particular by a support of the rotor element carrying the rotor elements of the above-described side-channel pumping stage.
  • the rotor elements of the second side channel pumping stage can be arranged with the rotor elements of the above-described side channel pumping stage essentially in a common plane extending perpendicular to the axis of rotation.
  • the rotor elements of the second side channel pumping stage may be disposed along a circular annulus circumscribing the axis of rotation which is concentric with the axis of rotation and the circular ring formed by the rotor elements of the above-described side channel pumping stage and which has a radius smaller or greater than that annulus.
  • the outlet of the one side channel pumping stage is connected by a flow channel to an inlet of the other side channel pumping stage.
  • a balancing plane arranged in the region of a support of the rotor element carrying the rotor elements is provided.
  • the balancing plane may have a plurality of devices distributed over the circumference of the carrier for the attachment of balancing masses.
  • Such a device may for example comprise an opening such as a balancing bore, for example a threaded bore and / or a blind bore with a preferably metric thread, which may be formed, for example, of the type M2 or M3.
  • the openings or balancing bores are arranged in a support surface of the support on which the rotor elements are arranged, preferably in the regions of the support surface arranged between the rotor elements.
  • a balancing weight in each case can be screwed, which is preferably arranged at least approximately completely submerged in the balancing bore and, for. flush with the support surface of the carrier. Any unbalance of the rotor element caused by the carrier for the rotor elements can be eliminated by such a balancing plane and the running properties of the pump can be improved.
  • a vacuum pump having a Holweckpumpabêt comprising a Holweckrotor, and a pre-pressure stage following in the gas flow, which comprises a rotor component, wherein the rotor component connected to the Holweckrotor and at one axial end of the Holweckrotors is arranged.
  • the embodiment according to which the Holweckrotor is connected at a second axial end with a shaft increases the cost advantage and reduces the construction volume of the vacuum pump, since the drive motor can be arranged within the interior of Holweckpumpabêt and / or Vordruckcut.
  • the prepressing stage has an annular component or rotor component which comprises a pump structure and is connected to a sleeve of the Holweck rotor.
  • a particularly simple embodiment provides an annular component of the pre-printing stage, which is provided at the axial end of a sleeve of the Holweckrotors.
  • the pre-pressure stage improves the discharge pressure of the pump in the range above 10 hectopascals.
  • Particularly effective and inexpensive is the design of the pre-printing stage according to the side channel principle.
  • the pre-pressure stage may comprise a ring of blades on the side channel principle.
  • the pre-printing stage can be executed in several stages.
  • the pre-printing stage may comprise an annular component, which is designed in one piece with a hub of the Holweckrotors.
  • the annular member may be made metallic and reinforced with a reinforcement of fiber reinforced material.
  • the Holweckpumpabêt may include several pumping stages.
  • the Holweckpumpabites can stator include a channel through which gas enters the pre-compression stage, and a channel associated with the part of the stator can form a seal stator of the dynamic seal.
  • An additional advantage can be achieved if a component of the pre-printing stage is provided with a balancing means, for example a balancing bore.
  • a balancing means for example a balancing bore.
  • the smoothness increases, so that gaps can be reduced. This in turn increases the Performance of the pumping stages, so that the cost-related performance increases.
  • An additional intermediate inlet through which gas can be sucked into the pre-pressure stage, makes it possible, for example, to simplify pump systems with a plurality of vacuum pumps.
  • a further molecular pump can be connected, with the example, a second chamber is evacuated.
  • the pre-pressure stage then acts as a pumping stage for the vacuum pump and the molecular pump.
  • a vacuum pump having a molecular pumping stage, in particular a Holweck stage, and at least one side-channel pumping stage located downstream of the molecular pumping stage comprising a plurality of rotor elements, the side-channel pumping stage being disposed between a pump inlet and the molecular pumping stage.
  • its rotor elements can be arranged outside a rotor element of the molecular pumping stage, for example a Holweck sleeve or a Holweck cylinder, and the diameter of the sokanalpumptreatment can accordingly be relatively large and in particular at least approximately as large or even larger than the diameter the rotor organ of the molecular pumping stage. In this way, a particularly powerful vacuum pump is created.
  • a gas flow path leads from the pump inlet past the pump active structure of the side channel pumping stage into the molecular pumping stage.
  • a bypass path may, for example, lead radially inward and / or radially outward past the pump-active structure into the molecular pumping stage.
  • the pump-active structure of the side channel pumping stage, at which the gas is passed over in principle may have a configuration as described above with respect to the vacuum pump according to claim 1, and may in particular comprise rotor elements formed as rotor blades and at least one stator side channel.
  • the gas flow path provided for bypassing the side channel pumping stage leads through one or more openings of a rotor element carrying the side channel pumping stage, in particular disc-shaped, rotor hub through.
  • the openings may be formed by axially extending through the rotor hub through openings of the rotor hub.
  • the rotor hub of the side channel pumping stage in this embodiment forms a gas inlet into the molecular pumping stage.
  • a gas flow path extending through the rotor hub of the side channel pumping stage as described above may expediently pass radially inward past the pump-active structure of the side channel pumping stage. It is also possible that a gas flow path leads radially outward on the side channel pumping stage into the molecular pumping stage.
  • a gas flow path may comprise, for example, a channel arranged in the stator or housing of the vacuum pump and leading past the pump-active structure.
  • the molecular pumping stage preferably effects a reversal of the gas flow direction, so that the gas flow, after passing through the molecular pumping stage, can pass without costly diversion into the side channel pumping stage arranged on the inlet side of the molecular pumping stage.
  • a reversal of direction can be accomplished in a simple manner in that the molecular pump stage comprises a plurality of Holweckmen, wherein an identical number of axially away from the gas inlet and in the axial direction to the gas inlet pumping Holweckcutitn is provided.
  • a gas flow path leading from the molecular pumping stage into the side channel pumping stage passes through one or more openings of a rotor hub carrying a rotor element of the molecular pumping stage, in particular disc-shaped.
  • the gas may pass into the side channel pump stage located on the inlet side so that the rotor hub supporting the rotor member forms a gas inlet for the side channel pumping stage.
  • the gas flow can also pass the side of the rotor hub into the inlet-side side channel pumping stage.
  • the rotor elements of the side channel pumping stage with the rotor member of the molecular pumping stage on the same hub in which case the gas flow from the molecular pumping stage directly and without complete crossing or bypassing the rotor hub from the molecular pumping stage in the Side channel pumping stage can get.
  • a rotor hub of the side channel pumping stage and / or a rotor member of the molecular pumping stage bearing rotor hub may be formed as a gas inlet, which either leads to the molecular pumping stage or leads from the molecular pumping stage in the side channel pumping stage.
  • the respective rotor hub can for this purpose preferably have one or more apertures which extend in the axial direction through the rotor hub and form flow channels for the gas.
  • the respective rotor hub can in principle be formed by a rotor disk, which is preferably disk-shaped and oriented in the radial direction, as described above in relation to the vacuum pump according to claim 1.
  • the rotor elements of the side channel pumping stage are arranged in the region of a radial outer side of a preferably disc-shaped rotor hub.
  • the rotor elements can protrude from an edge of the rotor hub.
  • the rotor elements are in the radial direction from the edge or in a direction which has at least one radial component and is preferably at least approximately parallel to the radial direction. This allows a particularly large radial distance of the rotor elements from the axis of rotation and thus achieve a large radius of rotation and a correspondingly high performance of the Sokanalpumplay.
  • stator side channels as in the radial Direction open channels are formed and / or arranged in the region of a radial outer wall of the vacuum pump, whereby an extremely compact and in particular without elaborate interleaving of rotor and stator emanating auschezde design of the vacuum pump is made possible.
  • the rotor member of the molecular pumping stage and the rotor elements of the side channel pumping stage are supported by a common, preferably disc-shaped, rotor hub.
  • the rotor elements can project from an edge of the rotor hub, while one or more rotor elements of the molecular pumping stage preferably extend in the axial direction starting from a flat side of the rotor hub.
  • the gas can pass directly from the molecular pumping stage into the side channel pumping stage without traversing or completely bypassing the rotor hub, thereby reducing the complexity of the pumping structure and increasing the pumping efficiency, since overall tightness of the gas flow path is ensured.
  • the molecular pumping stage is preferably a Holweck stage which, in principle, can be designed as described above in relation to the vacuum pump according to claim 1.
  • the Holweck stage preferably comprises at least one rotor element which forms a pump-active surface of the Holweck stage and is preferably designed as a Holweck sleeve, and a stator sleeve corresponding to the rotor members.
  • the vacuum pump can also, as described above with respect to the vacuum pump according to claim 1, a plurality of gas flow direction in series, and preferably arranged in the radial direction and interleaved with each other molecular pump stages or Holweckmen, via a gas flow path eg from radially inward to radially outward or from radially outward to radially inward.
  • a gas inlet for the molecular pumping stages preferably comprises one or more openings in a rotor hub, on which one or more rotor elements of the molecular pumping stages are arranged.
  • the gas can be fed to the molecular pumping stages at a radially inward position.
  • the gas can be supplied to the molecular pumping stage via a gas flow path which bypasses the side channel pumping stage radially on the outside.
  • the gas inlet to the side channel pumping stage may then include one or more apertures of a rotor hub supporting the one or more rotor members of the molecular pumping stage to supply the gas from the radially inward end of the molecular pumping stage to the side channel pumping stage.
  • At least one further pumping stage arranged upstream of the molecular pumping stage is provided.
  • This may in particular be a turbomolecular pumping stage.
  • the side channel pumping stage is preferably arranged between the further pumping stage and the molecular pumping stage.
  • the further pumping stage, the side-channel pumping stage and the molecular pumping stage can accordingly be arranged one behind the other starting from the pump inlet along the axial direction of the vacuum pump in this order and succeed each other.
  • the gas flow path of the vacuum pump preferably leads from the pump inlet into the further, for example, turbomolecular pumping stage and from there past the side-channel pumping stage into the molecular pumping stage and from there into the side-channel pumping stage.
  • the molecular pumping stage and the further pumping stage can be arranged on different sides of a rotor hub carrying a rotor element of the molecular pumping stage.
  • a turbomolecular pumping stage as described above may also be provided in a vacuum pump as described above in relation to claim 1.
  • a turbomolecular pumping stage may generally comprise, in a manner known per se, one or more rotor and stator disks, which run in a radial plane and are arranged one behind the other in the axial direction, with gas and gas ducts running obliquely to the axial direction.
  • An upstream end of the further pumping stage can be arranged directly in the region of a pump inlet whose diameter can correspond, for example, at least approximately to the diameter of a rotor disk of the turbomolecular pumping stage.
  • the pump inlet is in principle preferably surrounded by a flange which can extend in a ring around the axis of rotation of the vacuum pump.
  • a vacuum pump according to the invention also preferably has a pump outlet, which may be surrounded, for example, by a small flange.
  • the pump outlet is preferably connected to a gas outlet of the side channel pumping stage and, viewed in the direction of rotation axis, is preferably arranged at least approximately at the level of the side channel pumping stage.
  • a pump of the invention may include one or more taps disposed at a location along the gas flow path leading from a pump inlet to a pump outlet between the pump inlet and the pump outlet can and can form a junction in the gas flow path at the respective location.
  • Fig. 1 shows a schematic representation of a vacuum pump according to an embodiment of the invention in axial section. For better clarity, parts of the vacuum pump are in Fig. 1 not shown.
  • the vacuum pump comprises a turbomolecular pumping stage 10, a plurality of molecular pumping stages 12, 14, 16 and a side channel pumping stage 18, which follow one another in the gas flow or in the flow direction of the gas.
  • the vacuum pump comprises a rotor shaft 22, which can be driven in rotation about a rotation axis 20 and on which, below, individually explained rotating elements of the pump stages 10 to 16 are arranged.
  • the rotating elements and the associated, in Fig. 1 only partly shown stator elements of the pump stages 10 to 16 are formed substantially rotationally symmetrical to the axis of rotation 20.
  • stator elements of the pump stages 10 to 16 are formed substantially rotationally symmetrical to the axis of rotation 20.
  • Fig. 1 in each case only the left-hand component of the corresponding elements is shown and the mirror-symmetrical part 20 to the axis of rotation is not shown.
  • the arranged in the region of the pump inlet 24 turbomolecular pumping stage 10 comprises a plurality of arranged on the rotor shaft 22 rotor disks 28, wherein in Fig. 1 only one rotor disk 28 is shown, and a plurality of corresponding with the rotor disks 28 and in Fig. 1 not shown stator discs.
  • a disc-shaped and extending in a radial plane rotor hub 30 is further attached, to which a molecular pumping stages 12 and 14 associated outer rotor member 32 and the molecular pumping stage 16 associated inner rotor member 34 are arranged, from the hub 30th be worn.
  • the molecular pumping stages 12, 14, 16 are Holweck stages educated.
  • the rotor member 34 is disposed within the rotor member 32 and the rotor members 32, 34 are nested.
  • the outer rotor member 32 is formed by a Holweckhülse which has the shape of a oriented in the direction of the rotation axis 20 straight cylinder jacket with a substantially constant wall thickness and with a straight cylinder jacket-shaped outer radial surface 36 and a straight cylinder jacket-shaped inner radial surface 38.
  • the outer surface 36 and the inner surface 38 in each case form the pump-active surface of one of the pumping stages 12 and 14 and act in a pump-active manner with corresponding rotationally symmetrical and cylinder jacket-shaped Holweck stator sleeves 40, 42.
  • the outer surface 36 of the rotor member 32 cooperates with an outer Holweckstatorhülse 40 which forms a narrow Holweckspalt 39 with the rotor member 32 and on which a Holweckgewinde 41 is provided.
  • the Holweck thread 41 has spirally extending in the direction of the axis of rotation 20 grooves forming flow channels for the gas.
  • Such a Holweck thread 43 is also arranged on the outside of the inner Holweckstatorhülse 42 and interacts with the radially inner surface 38 of the outer rotor member 32 pumping active, with which it forms a Holweckspalt 39.
  • the radial outer surface 36 and inner surface 38 of the rotor member 32 are each formed as smooth surfaces and, together with the respective oppositely arranged Holweckgewinden 41 and 43 of the stator sleeves 40, 42, the pumping action of the respective pumping stage.
  • the same applies to the Holweckhand 16, ie their Holweckgewinde 57 can be arranged as explained below on the stator sleeve 42 or on the rotor member 34.
  • the inner rotor member 34 has a base member 44 attached to the rotor hub 30 and a support member 46 connected to the base member 44 at the free axial end of the base member 44 on which the rotor members 48 of the side channel pumping stage 18 are disposed.
  • the base part 44 has, in accordance with the outer rotor member 32, the shape of a straight cylindrical wall with a constant wall thickness oriented parallel to the axis of rotation 20 and with a radially outer surface 50 and radial inner surface 52 respectively having the shape of a straight cylinder jacket.
  • the radial outer surface 50 of the rotor member 34 forms the pump-active surface of the rotor member 34 and cooperates with the radial inner surface 55 of the Holweckstatorhülse 42.
  • the inner surface 55 of the Holweckstatorhülse 42 has a reference to below Fig. 2 Holweck thread 57 explained in more detail with flow channels through which the gas flows during operation of the pump in the direction of the side channel pumping stage 18.
  • the carrier part 46 is likewise embodied sleeve-shaped and essentially has the shape of a straight cylinder jacket oriented parallel to the axis of rotation 20 with a straight cylinder jacket-shaped radial outer surface 54 and radial inner surface 56.
  • the carrier part 46 is inserted into the base part 44 in such a way that the radial outer surface 54 of the carrier part 46 rests flat against the radial inner surface 52 of the base part 44.
  • the base part 44 and the carrier part 46 may be held together, for example, by a clamping effect present in the region of their mutual contact, for example caused by a shrinkage process.
  • the support member 46 forms, as in Fig. 1
  • the radially inner surface of the rotor element 34 consisting of the base part 44 and the carrier part 46 as a whole is thus formed by two longitudinal sections in the direction of the rotor axis 20, each of which taken in the form of a straight, parallel to the axis of rotation 20 cylinder jacket with a constant diameter.
  • the radial inner surface of the rotor organ 34 in a first length portion is formed by the radially inner surface 52 of the base member 44 and defines a larger cylinder diameter and the radially inner surface of the rotor member 34 in a second length portion is formed by the radial inner surface 56 of the support member 46 and defines a smaller cylinder diameter.
  • the radial inner surface of the rotor member 34 defines a free space 58 in which, for example, a in Fig. 1 not shown drive unit of the vacuum pump can be arranged.
  • the radial inner surface 56 of the support member 46 forms a dynamic seal or a dynamic sealing gap with an opposite, such as in Fig. 3 shown static pump component.
  • This seal or this sealing gap may contain any type of seal, for example a pumping seal which is particularly similar to a Holweck stage and / or which has a direction of conveyance directed out of the space 58 sealed by the seal.
  • the carrier part 46 has a support surface 60 pointing in the axial direction, on which the rotor elements 48 are arranged and from which the rotor elements 48 protrude in the axial direction.
  • the rotor elements 48 are formed by blades, each having a blade surface pointing in the direction of rotation, and are arranged one behind the other in a plane oriented perpendicular to the rotation axis 20 along a circular ring that surrounds the rotation axis 20.
  • the side channel pumping stage 18 further comprises a side channel stator 62, in which an axially open in the present embodiment side channel 64 with an annular arrangement of the rotor elements 48 corresponding annular course is formed, in which the rotor elements 48 rotate.
  • the side channel 64 is over the majority of its longitudinal extent as in Fig. 1 shown enlarged relative to the rotor elements 48.
  • the gas may pass longitudinally through the rotor blades 48 of the annular side channel 64 and at the same time are rotationally driven about the longitudinal axis of the side channel 64 so as to provide a helical flight with multiple spiral turns along one revolution in the side channel 64, thereby ensuring a high pressure differential between the inlet and outlet of the side channel pumping stage 18.
  • the pumping principle of the side channel pumping stage 18 ensures a high and efficient pumping action even in the high pressure range and in particular in the laminar flow range.
  • a so-called scraper of the sokanalstators 62 is provided which causes a narrowing of the side channel 64 such that the cross section of the side channel 64 in the narrowed region at least approximately corresponds to the cross section of the rotor elements 48 and on the other hand is only slightly expanded ,
  • the gas delivered by the rotor elements 48 is thereby stripped off the stripper and forced into the outlet of the side channel pumping stage 18.
  • the outlet of the side channel pumping stage 18 may be connected to a pump outlet of the vacuum pump, which may include, for example, a small flange.
  • Fig. 2 shows the radially inner surface 55 of the inner Holweckstatorhülse 42 in a rolled or projected in a plane view.
  • the Holweckstatorhülse 42 has a Holweckgewinde 57, which could be arranged in principle but also on the smoothly formed in the present embodiment radial outer surface 50 of the rotor member 34.
  • the radial inner surface 55 of the Holweckstatorhülse 42 could then be formed substantially smooth.
  • the Holweck thread 57 comprises two successive sections 66 and 68 in the axial direction.
  • the section 66 are a plurality of obliquely oriented to the rotation axis 20 threaded projections 70 with interposed threaded channels 72 formed, which form flow channels (Holwecknuten) for the gas.
  • the threaded channels 72 open into a circumferentially around the rotation axis 20 encircling recessed collecting region 74, in which the conveyed through the threaded channels 72 gas is collected.
  • the collecting region 74 opens into a supply channel 76 of the section 68, which is delimited by two flat, raised projections 78 and which leads to an inlet of the side channel pumping stage 18.
  • the substantially uniformly-expanded gas in the upper portion 66 can thus be bundled in the feed channel 76 and selectively directed to an inlet of the side channel pumping stage 18, thereby optimizing the pumping efficiency in the side channel pumping stage 18.
  • the above-described projections 70 and 78 are also in the illustration of Fig. 1 to see, with the sectional plane of the representation of the Fig. 1 the dashed line 80 in Fig. 2 equivalent.
  • the portion 68 or channel 76 may also have a smaller axial extent than the collecting region 74 and / or as the portion 66.
  • the raised projections 78 of the region 68 have a greater overall height in the radial direction than the projections 70 of the section 66. In the region of these projections 78, which delimit the channel 76, a particularly good sealing effect can be achieved by means of a particularly small gap between them Holweckstator 42 and the rotor member 34 reaches and gas losses are minimized at the transition between the Holwecklace 16 and the side channel pumping stage 18.
  • a Holweckspalt 39 is formed between the projections 70, 78 and the radial outer surface 50 of the rotor member 34, which, like the Holweckspalte 39 of the pumping stages 12 and 14 in relation exaggerated in size and is chosen in reality so narrow that a height Sealing effect between the projections 70, 78 and the opposite smooth surfaces of the rotor members 32, 34 is achieved.
  • the gas flows almost completely through the channels, which are defined by the grooves of Holweckgewinde 41, 43, 57.
  • FIG. 1 The rough course of the gas flow through the in Fig. 1 shown vacuum pump in the sectional plane of Fig. 1 is illustrated by a dashed arrow 84.
  • the gas passes first through the turbomolecular pumping stage 10 and subsequently through the hollows stages 12, 14 and 16 in that order before the gas enters the side channel pumping stage 18 and after passing through the side channel pumping stage 18 to the one in FIG Fig. 1 Not shown pump outlet is conveyed.
  • an optimal pumping action and high pumping efficiency of the vacuum pump is achieved under all operating conditions and in particular even at high discharge pressures and gas loads, wherein the vacuum pump can be realized simultaneously in a very small space.
  • Fig. 3 shows a vacuum pump according to another embodiment of the invention in axial section, which substantially the in Fig. 1 and 2 corresponds shown vacuum pump.
  • Unillustrated components of the vacuum pump can be seen, such as a plurality of rotor disks 28 and an interposed stator disk 86 of the turbomolecular pumping stage 10.
  • a drive 88 of the vacuum pump is shown, which is disposed within the rotor member 34, and one between the drive 88 and the Rotor hub 30 formed non-contact seal 90 and a rotary bearing 92 of the vacuum pump.
  • a pump outlet 94 which is connected to a gas outlet 95 of the side channel pumping stage 18, as well as an upstream of the Holweck stage 12 and downstream of the turbomolecular stage 10 arranged tap 96 through which gas from outside the vacuum pump can flow directly into the Holweckcut 12.
  • the projections (webs) of Holweckgewinde 41, 43, 57 are in Fig. 3 shown so that their spiral shape is visible, as well as the Holweckcut matter 12, 14, 16 to Holweck matter 12, 14, 16 alternating direction of rotation of Holweckgewinde 43, 43, 57, which of the alternating axial conveying direction in Fig. 3 from top to bottom or from bottom to top.
  • Fig. 3 assumes the number of Holweckkanäle Holweckgewinde 41, 43, 57 in the gas flow direction of Holwecklace to Holweck note and the axial extent of Holweckkanäle is correspondingly lower. This optimizes the pumping behavior of the Holweck stages 12, 14, 16.
  • the Holweck thread 57 of the innermost Holweckcut 16 is in the in Fig. 3 illustrated embodiment, in contrast to the in Fig. 2 form homogeneously formed with extending over the entire axial length of Holweckstatorhülse 42 Holweckkanälen.
  • the Holweck thread 57 but also in the in Fig. 3 illustrated embodiment may be formed as shown in FIG Fig. 2 for the pump of Fig. 1 is shown.
  • FIG. 3 The pump shown in FIG Fig. 4 a carrier sleeve, which has a relative to the rotation axis 20 inclined by about 45 °, truncated cone-shaped support surface 60 on which the paddle-shaped rotor elements 48 are arranged and of which the rotor elements 48 substantially perpendicular, ie at an angle of also about 45 ° to the rotation axis 20, stand out.
  • a scraper 98 of the side channel pumping stage 18 is shown which serves to scrape the gas driven in the side channel 64 and to convey it to the pump outlet 94.
  • Fig. 3 Also in Fig. 3 is the coarse gas flow path from the pump inlet 24 to the pump outlet 94 in the sectional plane of FIG Fig. 3 illustrated by a dashed arrow 84.
  • FIG. 4 and FIG. 5 show in each case further details of the carrier sleeve 46, wherein Fig. 4 one opposite Fig. 3 enlarged, perspective view of the carrier sleeve 46 with the rotor elements 48 shows and Fig. 5 shows the support sleeve 46 in the mounted state on the base 44 in axial section.
  • the sleeve-shaped support part 46 comprises a cylinder jacket-shaped connecting portion 100, the radial outer surface 54 rests in the mounted state on the radially inner surface 52 of the base member 44 and is connected to the base member 44. Furthermore, the carrier sleeve 46 comprises a connecting portion 100, on which the rotor elements 48 are arranged and which protrudes outward relative to the connecting portion 100 in the radial direction, so that the connecting portion 100 and the support portion 102 have a as in Fig. 5 form shown substantially L-shaped cross-section. In the assembled state, the carrier section 102 is aligned with the radial outer surface 50 of the base part 44, as well as the radially outer outer edges of the rotor elements 48.
  • the rotor elements 48 are formed as blades, which in the axial direction and in the radial direction have a counter to the direction of rotation slightly inclined backwards shape.
  • a forwardly inclined shape of the blades 48 is conceivable, but not shown.
  • the carrier sleeve 46 preferably has a metallic material which contains, for example, aluminum or consists thereof, while the base part 44 designed as a Holweck sleeve can have, for example, a CFRP material.
  • the support surface 60 of the support portion 102 a plurality of distributed over the circumference of the support member 46 arranged balancing bores 104 with Threaded on, can be screwed into the corresponding balancing weights and that preferably such that the screwed balancing weights are arranged in the balancing bores 104 completely sunk and in particular complete flush with the support surface 60 substantially.
  • the balancing bores 104 form a balancing plane of the vacuum pump oriented perpendicular to the axis of rotation 20.
  • Fig. 6 shows a vacuum pump according to an unclaimed example in axial section.
  • the vacuum pump comprises a turbomolecular stage 10 with a plurality of rotor disks 28, as well as two molecular pumping stages 12, 14 designed as Holweck stages and a side channel pumping stage 18, which follow one another in the flow direction in this order.
  • the side channel pumping stage 18 is disposed between the molecular pumping stages 12, 14 and the pump inlet 24.
  • pump inlet 24, side channel pumping stage 18, and molecular pumping stages 12, 14 follow each other in this order, and side channel pumping stage 18 is located closer to pump inlet 24 than pool stages 12, 14, although with respect to gas flow the Holweckitn 12, 14 is connected downstream.
  • the rough gas flow through the pump in the cutting plane of Fig. 6 is in Fig. 6 illustrated by an arrow 84.
  • the gas passes through the pump inlet 24 into the turbomolecular stage 10, which is traversed by the gas substantially axially, that is parallel to the axis of rotation 20.
  • An in Fig. 6 schematically shown disposed in the static part of the vacuum pump gas flow passage 106 leads to the formed by the rotor elements 48 and the side channel 64 pump active structure of the side channel pumping stage 18 radially outward, so that the gas passes through the side channel pumping stage 18 in the Holweck note 12.
  • Holweck stages 12 and 14 are substantially the same as described above Fig. 1 illustrated Holwecktryn 12 and 14.
  • the Holweckitn 12 and 14 include a common rotor member 32, which is arranged on a disk-shaped and substantially radially oriented rotor hub 30 and is designed as a straight cylindrical cylinder-shaped Holweck sleeve oriented in the axial direction.
  • the rotor member 32 accordingly has a radially outer surface 36 and a radially inner surface 38, each having the shape of a straight, axial cylinder jacket and each forming the pump active surface of one of the Holweckitn 12, 14.
  • These pump-active surfaces 36, 38 act with as in Fig. 1 presented and in Fig. 6 not specifically shown Holweckstator sleeves 40, 42 (see. Fig. 1 ) together.
  • the Holweckstatorhülsen have at their respective pump active surface 36, 38 of the rotor member 32 facing cylindrical inner and outer sides each have a Holweckgewinde with helical or spiral Holweckkanälen through which the gas is driven pumping.
  • the gas first passes from the gas flow channel 106 into the hollows stage 12 and flows down through the hollows stage 12 in an axial direction away from the pump inlet 24 and then into the hollows stage 14, in the axial direction upward towards the pump inlet 24 is encouraged.
  • the two Holweckitn 12, 14 thus cause a reversal of the direction of flow of the gas and at the same time a transport of the gas from radially outside to radially inside.
  • the rotor hub 30 has an axial opening 108 which serves as a gas outlet of Holweck note 14 and gas inlet of the sokanalpumplay 18 and via which the gas into a side channel 64 leading flow channel 110 of the sokanalstators 62nd arrives.
  • Fig. 6 only the left part of the sokanalstators 62 is shown, which is preferably rotationally symmetrical to the axis of rotation 20 is formed.
  • a radially extending gap 112 is formed, which has a small axial extent to achieve a sealing effect between the rotor hub 30 and the sokanalstator 62 and to ensure that the gas at least approximately completely from the Opening 108 in the Flow channel 110 passes.
  • the rotor hub 30 includes distributed over its circumference several as in Fig. 6 apertures 108 shown.
  • the side channel stator 62 may have a plurality of corresponding flow channels 110.
  • the Holweck thread of Holweckcut 14 can in principle be formed homogeneously with over the entire axial length extending webs and Holweckkanälen.
  • the Holweck thread can also be like in Fig. 2 shown to achieve a targeted introduction of the gas into the inlet of the side channel pump.
  • This in Fig. 6 Not Holweckgewinde not shown here can be located on the, also not shown, Holweckstator or on the radially inner surface of the rotor member 32.
  • the pump-active structure of the side channel pumping stage 18 is in principle as above with respect to Fig. 1 described trained.
  • the side channel pumping stage 18 includes blade-shaped rotor elements 48 disposed on a rotor hub 114 which is axially spaced from the rotor hub 30 of the panweep stages 12, 14.
  • the rotor hub 114 is disc-shaped and extends in the radial direction.
  • the rotor elements 48 project from the edge of the rotor hub 114 in the radial direction and into the side channel 64 which is open in the radial direction.
  • a large diameter of the side channel pumping stage 18 and a correspondingly good pumping action is achieved while at the same time compact construction of the pump.
  • the pump shown can have at the axial height of the side channel pumping stage 18 connected to an outlet of the side channel pumping stage 18 and, for example, surrounded by a small flange pump outlet.
  • Fig. 7 show a vacuum pump according to another example not claimed in axial section, which substantially the in Fig. 6 corresponds shown vacuum pump.
  • the pump shown comprises a plurality of molecular pump stages 12, 14, 116, 118 designed as Holweck stages, which have two cylindrical shell-shaped rotor members 32 and corresponding in FIG Fig. 7 Holweckstator sleeves not shown include.
  • the Holweckchn 12, 14, 116, 118 are each formed as above with respect to Fig. 6 described.
  • the side channel pumping stage 18 between the pump inlet 24 and designed as Holweckchin molecular pumping stages 12, 14, 116, 118 is arranged.
  • the rotor elements 48 of the sokanalpumpch 18 and the rotor members 32 of the Holweckchn 12, 14, 116, 118 are arranged on a common rotor hub 30, wherein the rotor elements 48 protrude from the edge of the rotor hub 30 in the radial direction and beyond the radial extent of the rotor hub 30 addition , In this case, the rotor elements 48 extend into the side channel 64, which is open in the radial direction, and execute a circulating movement about the axis of rotation 20 therein.
  • the gas passes in the operation of the pump via the pump inlet 24 in the turbomolecular stage 10 and is conveyed there in the axial direction to the rotor hub 30.
  • the rotor hub 30 includes one or more axial apertures 120 that provide a gas flow path from the turbomolecular stage 10 to the pump active structure of the side channel pumping stage 18 radially inward past the hollow stage 12 and constitute a gas inlet for the pool wake 12.
  • the gas is through the Holweckitn 12, 14, 116, 118 in the axial direction in each case twice from top to bottom and from bottom to top promoted, so that a total of a reversal of direction of the gas flow direction is effected.
  • the Holweckitn 12, 14, 116, 118 flows through in the order from radially inward to radially outward, so that there is a gas flow direction from radially inward to outward.
  • the gas passes directly through a flow channel 122 of the sokanalstators 62, which is disposed opposite the edge of the rotor hub 30 in the radial direction in the side channel pumping stage 18.
  • the gas can reach a pump outlet, which is preferably arranged at the axial height of the side channel pumping stage 18.
  • Fig. 7 Due to the arrangement of Holweck sleeves 32 and the rotor elements 48 of the side channel pumping stage 18 on a common rotor hub 30 is in the in Fig. 7 shown embodiment achieved in the axial direction extremely compact design. But it could also be a separate from the rotor hub 30 rotor hub 114 (see Fig. 6 ) may be provided for the side channel pumping stage 18. This could then optionally have openings through which the gas can be conveyed radially inward past the pump-active structure of the side channel pumping stage. In principle, the side channel pumping stage 18 could also be flowed around radially on the outside, for example by means of a bypass channel 106 arranged in the housing of the vacuum pump (FIG. Fig. 6 ).

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Claims (8)

  1. Pompe à vide comportant au moins un étage Holweck (12) qui comprend un organe de rotor (34) qui constitue la surface active en pompage (50) de l'étage Holweck (12), et comportant au moins un étage de pompe à canal latéral (18) qui est disposé dans la direction axiale en aval de l'étage Holweck (12) et qui comprend plusieurs éléments de rotor (48),
    dans laquelle
    les éléments de rotor (48) de l'étage de pompe à canal latéral (18) sont supportés par l'organe de rotor (34) de l'étage Holweck (12), et
    l'organe de rotor (34) est supporté par un moyeu de rotor (30), caractérisée en ce que
    les éléments de rotor (48) sont disposés à une extrémité de l'organe de rotor (34) qui est constituée par une extrémité de l'organe de rotor (34) détournée du moyeu de rotor (30).
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    les éléments de rotor (48) sont disposés entièrement ou partiellement à l'extérieur de la zone qui est entourée par la surface active en pompage (50) de l'organe de rotor (34) ou par l'organe de rotor (34) dans son ensemble.
  3. Pompe à vide selon la revendication 1 ou 2,
    caractérisée en ce que
    les éléments de rotor (48) font saillie de l'organe de rotor (34) en direction axiale et/ou les éléments de rotor (48) s'étendent en direction axiale au-delà de la surface active en pompage (50) de l'organe de rotor (34) et de préférence au-delà de l'organe de rotor (34).
  4. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'organe de rotor (34) comprend un support (46) de préférence de forme annulaire sur lequel sont disposés les éléments de rotor (48), et en particulier le support (46) constitue l'extrémité axiale libre et/ou un talon ou un surplomb de l'organe de rotor (34) qui fait saillie en direction radiale.
  5. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'organe de rotor (34) et/ou un support (46) de l'organe de rotor (34) sur lequel sont disposés les éléments de rotor (48) est réalisé sensiblement sous forme de douille.
  6. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'organe de rotor (34) comprend une base (44) qui est réalisée sensiblement sous forme de douille et qui s'étend depuis un moyeu de rotor (30) supportant l'organe de rotor (34) jusqu'à un support (46) de l'organe de rotor (34) sur lequel sont disposés les éléments de rotor (48).
  7. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'organe de rotor (34) est réalisé en plusieurs parties, et une base (44) qui est supportée par un moyeu de rotor (30) et un support (46) sur lequel sont disposés les éléments de rotor (48) constituent chacun une partie de l'organe de rotor (34).
  8. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'étage Holweck (12) comprend une première portion (66) qui est disposée en amont et une seconde portion (68) qui est disposée en aval, qui mène vers l'étage de pompe à canal latéral (18) et dans laquelle est réalisé un nombre de canaux d'écoulement (72, 76) inférieur à celui dans la première portion (66), et/ou en ce que
    il est prévu un plan d'équilibrage disposé dans la zone d'un support (46) de l'organe de rotor (34) supportant les éléments de rotor (48).
EP12188584.2A 2012-02-23 2012-10-15 Pompe à vide Active EP2631488B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013022216A JP6027455B2 (ja) 2012-02-23 2013-02-07 真空ポンプ
US13/766,918 US9422937B2 (en) 2012-02-23 2013-02-14 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012003680A DE102012003680A1 (de) 2012-02-23 2012-02-23 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2631488A2 EP2631488A2 (fr) 2013-08-28
EP2631488A3 EP2631488A3 (fr) 2016-08-17
EP2631488B1 true EP2631488B1 (fr) 2019-12-11

Family

ID=47049045

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12188584.2A Active EP2631488B1 (fr) 2012-02-23 2012-10-15 Pompe à vide

Country Status (4)

Country Link
US (1) US9422937B2 (fr)
EP (1) EP2631488B1 (fr)
JP (1) JP6027455B2 (fr)
DE (1) DE102012003680A1 (fr)

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DE202013005458U1 (de) 2013-06-15 2014-09-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE202013006436U1 (de) * 2013-07-17 2014-10-22 Oerlikon Leybold Vacuum Gmbh Rotorelement für eine Vakuumpumpe
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014118881A1 (de) * 2014-12-17 2016-06-23 Pfeiffer Vacuum Gmbh Vakuumpumpe
WO2016198260A1 (fr) * 2015-06-08 2016-12-15 Leybold Gmbh Rotor à pompe à vide
EP3267040B1 (fr) 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Pompe turbomoléculaire
JP7108377B2 (ja) 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
CN107143506B (zh) * 2017-07-12 2019-05-24 东北大学 一种多级高真空干泵
EP3623634B1 (fr) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral

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JP3961273B2 (ja) 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
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Also Published As

Publication number Publication date
EP2631488A3 (fr) 2016-08-17
JP2013174238A (ja) 2013-09-05
EP2631488A2 (fr) 2013-08-28
US20130224001A1 (en) 2013-08-29
US9422937B2 (en) 2016-08-23
DE102012003680A1 (de) 2013-08-29
JP6027455B2 (ja) 2016-11-16

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